CN103241938B - A kind of manufacture method of preform and producing apparatus thereof - Google Patents
A kind of manufacture method of preform and producing apparatus thereof Download PDFInfo
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- CN103241938B CN103241938B CN201310152085.0A CN201310152085A CN103241938B CN 103241938 B CN103241938 B CN 103241938B CN 201310152085 A CN201310152085 A CN 201310152085A CN 103241938 B CN103241938 B CN 103241938B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
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Abstract
What the manufacture method of a kind of preform of the present invention and producing apparatus thereof related to is that a kind of preform manufactures field, specifically, is utilize Infrared Thermography Technology to gather Powder Rod head surface temperature, and participates in a kind of method and apparatus controlling gas flow.Use the method can accomplish the real-time adjustment to gas flow, to realize the accurate control to Powder Rod density, prevents because density gradient is large and causes Powder Rod to ftracture, thus Improving The Quality of Products.Comprise tower body, prefabricated rods deposition chamber, motor one, motor two, chuck, screw mandrel, metal suspension rod, guide rail, quartzy cavity, quartzy target rod, quartzy blowtorch one, quartzy blowtorch two, SiCl
4head tank, GeCl
4head tank, liquid Ar storage tank, liquid O
2storage tank, H
2storage tank, gas control cabinet, magnetic valve one, magnetic valve two, central processing unit, thermal infrared imager, exhaust duct, pre-treatment tower, electric precipitation tower and washing tower.
Description
Technical field
The manufacture method of a kind of preform of the present invention and producing apparatus thereof relate to preform and manufacture field, specifically, are utilize Infrared Thermography Technology to gather Powder Rod head surface temperature, and participate in a kind of method and apparatus controlling gas flow.Use the method can accomplish the real-time adjustment to gas flow, to realize the accurate control to Powder Rod density, prevents because density gradient is large and causes Powder Rod to ftracture, thus Improving The Quality of Products.
Background technology
At present, the gas that axial vapor deposition method uses, its flow is mainly controlled by mass flow controller (being called for short MFC).It is by presetting several stages that MFC controls flow, and give constant flow to each stage, in the deposition process of Powder Rod, gas is supplied according to the flow preset.Carried out the control of gas flow by MFC, there is a drawback: gas flow can not be adjusted in real time, be unfavorable for the accurate control to Powder Rod density.
Have data to show, use the Powder Rod that axial vapor deposition legal system is standby, because layer torch flame temperature each when depositing is different, its density presents Gradient distribution.As Fig. 1, wherein, 1., 2. two places are intersections of flame.A host of facts show, this two places density is lower, and the probability that cracking occurs is larger.
Chinese invention patent 200610129070.2 describes a kind of by the temperature distribution on temperature measurement unit detection prefabricated rods vertical axis, and by adjustment gas flow, flame focal length and blowtorch angle, temperature is controlled the method in claimed range.But there are two drawbacks in the method.One, what the method caught is temperature on line, can not reflect the temperature distribution state of whole caput, insensitive to the change response of caput temperature.Its two, mention in the method and adjusting blowtorch angle, the adjustment of blowtorch angle can make prefabricated rods caput shape, size generation noticeable change, thus causes the sandwich layer diameter of prefabricated rods and the ratio of cladding diameter to change.In fact, in scale operation, require that the ratio of sandwich layer diameter and cladding diameter should be relatively stable.
Chinese invention patent 200610142065.5 describes a kind of by temperature measurement unit detection prefabricated rods terminal temperature and fibre core temperature of lower, and calculates its difference, controls the method for prefabricated rods axial motion accordingly.But there are two drawbacks equally in the method.One, what the method caught is temperature on line, can not reflect the temperature distribution state of whole caput, insensitive to the change response of caput temperature.Its two, the real-time speed change in prefabricated rods production process, may cause the considerable change of core refractive rate, and the axial parameter resistance to overturning of prefabricated rods is deteriorated.
Summary of the invention
The present invention seeks to for above-mentioned weak point, propose a kind of manufacture method and producing apparatus thereof of preform.The present invention can overcome the problem that current technique can not adjust in real time gas flow, Powder Rod density be carried out to accurately control, propose a kind of based on surface temperature acquisition technique, real-time adjustment gas flow, the method accurately controlling Powder Rod density and producing apparatus thereof, density gradient effectively can be prevented large and cause Powder Rod to ftracture, thus Improving The Quality of Products.
A kind of manufacture method of preform and producing apparatus thereof take following technical scheme to realize:
A kind of producing apparatus of preform comprises tower body, prefabricated rods deposition chamber, motor one, motor two, chuck, screw mandrel, metal suspension rod, guide rail, quartzy cavity, quartzy target rod, quartzy blowtorch one, quartzy blowtorch two, SiCl
4head tank, GeCl
4head tank, liquid Ar storage tank, liquid O
2storage tank, H
2storage tank, gas control cabinet, magnetic valve one, magnetic valve two, central processing unit, thermal infrared imager, exhaust duct, pre-treatment tower, electric precipitation tower and washing tower.
Above quartzy cavity, install prefabricated rods deposition chamber, at tower body upper mounting rail, chuck is connected with screw mandrel, and motor one controls screw mandrel and rotates, to make chuck rise and decline along guide rail, and motor two control card disc spins.Metal suspension rod clamping is on chuck, and quartzy target rod loads in metal suspension rod, for attaching powder in deposition process.
Quartz blowtorch one, quartzy blowtorch two are arranged on the right side of quartzy cavity respectively, and the blowtorch mouth of quartzy blowtorch one and quartzy blowtorch two is in quartzy inside cavity.
SiCl
4head tank, GeCl
4head tank, liquid Ar storage tank, liquid O
2storage tank, H
2gas in storage tank enters gas control cabinet inside respectively by pipeline, controls gas flow by mass flow controller MFC, and continues to enter quartzy blowtorch one, quartzy blowtorch two through pipeline respectively.
Be provided with thermal infrared imager on the left of quartz cavity, thermal infrared imager is connected with central processing unit by signal wire.The H be connected with quartzy blowtorch one, quartzy blowtorch two
2pipeline is equipped with respectively magnetic valve one, magnetic valve two, is connected with central processing unit by control line.
Described central controller receives the feedback signal of thermal infrared imager, accounting temperature deviation, and uses PlD control principle control H
2magnetic valve one on pipeline, magnetic valve two aperture, to regulate the H entering quartzy blowtorch one, quartzy blowtorch two
2airshed.Described central controller adopts the CP350/370 family computer manufactured by CHINO company, is provided with PID controller (proportional-integral derivative controller), is provided with sequence of control.
Quartz cavity upper left quarter is provided with exhaust duct, and exhaust duct is connected with pre-treatment tower, and pre-treatment tower is connected with electric precipitation tower by pipeline, and electric precipitation tower is connected with washing tower by pipeline, the tail gas produced for collecting, in processing reaction process.
Some mass flow controller MFC are installed, by its flow of time variable control be arranged on master control cabinet computer in described gas control cabinet.
A kind of manufacture method of preform is as follows:
1. gas supply
By SiCl
4head tank, GeCl
4head tank, liquid Ar storage tank, liquid O
2storage tank, H
2gas in storage tank enters gas control cabinet inside respectively by pipeline, controls gas flow by mass flow controller MFC, and continues to enter quartzy blowtorch one, quartzy blowtorch two through pipeline.Wherein, the mass flow controller MFC(such as AE FC-7800CD series mass flow director of the upper configuration of each gas pipeline (gas circuit)), for controlling the airshed of different steps.
SiCl
4flow can adjust between 0.1g/min ~ 20g/min, and flame hydrolysis generates SiO in the case of a high temperature
2, for the formation of covering and the sandwich layer of prefabricated rods; GeCl
4flow can adjust between 0.01g/min ~ 1.0g/min, and flame hydrolysis generates GeO in the case of a high temperature
2, be entrained in sandwich layer to improve core refractive rate.Conveying SiCl
4, GeCl
4pipe surface need to lay heating zone, temperature controls at 100 DEG C
H
2flow can adjust between 0.1L/min ~ 30L/min; O
2flow can adjust between 0.1L/min ~ 50L/min, wherein, and H
2play incendiary effect, O
2play combustion-supporting effect, in addition, in order to allow H
2complete reaction, when flow set, needs O
2flow set becomes more than needed.
Ar flow can adjust between 0.1L/min to 10L/min.Effect has two: one, as carrier gas, and delivery unstripped gas; Two, by H
2, O
2separate, prevent it from mixing in blowtorch, react.
2. deposited powder rod
First the quartzy target rod being used for piling up powder by loads metal suspension rod, opens motor one, after making metal suspension rod drop to specified location, opens motor two, metal suspension rod is rotated.Igniting, soon starts flame hydrolysis, and powder starts to be deposited on quartzy target rod surface.Open automatic control mode cashier's office in a shop in master control, after running sequence of control, metal suspension rod draws quartzy target rod and rotates and rise, and wherein sequence of control is formed, by signal wire and equipment connection by Visual Basic software editing.
In deposition process, need by pressure-controlled in quartzy cavity a metastable scope, metal suspension rod keeps certain speed of rotation and pulling speed.Wherein, in quartzy cavity, pressure-controlled is at 30 ± 5Pa, and speed of rotation controls at 10rpm, and pulling speed controls at 35mm/h.
3. the collection of thermal-induced imagery and feedback control
Pass through thermal infrared imager, gather Powder Rod head surface temperature, carry out A/D conversion, and by data line by the digital data transmission that converts to central processing unit, changed by central processing unit analysed for powder caput surface temperature, and send action command, the valve opening of Controlling solenoid valve, magnetic valve, thus reach the object of adjustment gas flow in real time, make preform.
4. exhaust collection, process
By vapor pipe, tail gas is transported to waste gas treatment equipment and processes.Waste gas treatment equipment comprises pre-treatment tower, electric precipitation tower and washing tower.Wherein, pre-treatment tower Main Function is, carries out cooling process to tail gas; Electric precipitation tower Main Function is, by electrion, makes dust charged and is adsorbed; Washing tower Main Function is, utilizes the sour gas such as HCl, HF in NaOH solution and tail gas to carry out neutralization reaction.By above a series for the treatment of measures, tail gas is made to reach emission standard.
Manufacture method and the producing apparatus thereof of preform of the present invention are reasonable in design, the present invention can overcome the problem that current technique can not adjust in real time gas flow, Powder Rod density be carried out to accurately control, propose a kind of based on surface temperature acquisition technique, real-time adjustment gas flow, the method accurately controlling Powder Rod density and producing apparatus thereof, density gradient effectively can be prevented large and cause Powder Rod to ftracture, thus Improving The Quality of Products.
Manufacture method and the producing apparatus advantage thereof of preform of the present invention are:
1. in whole deposition process, utilize the surface temperature acquisition technique of infrared thermal imagery, can the temperature variation of Real-time Obtaining Powder Rod head surface, and respond in time, adjustment gas flow, thus powder caput temperature is controlled in a metastable scope, prevent the noticeable change of the density brought because range of temperature is large, make the density of Powder Rod become real-time, tunable and controlled;
2. by this method, accurately can control the density of Powder Rod, avoid density gradient between layers
3. cause Powder Rod to ftracture greatly, thus Improving The Quality of Products.Meanwhile, whole prefabricated rods manufacturing processed is allowed to become automatization more, intellectuality.
Accompanying drawing explanation
Fig. 1 is Powder Rod density distribution schematic diagram, and wherein transverse axis represents the lateral radius of Powder Rod, and the longitudinal axis represents the density on Powder Rod cross section.
In Fig. 1, what 1., 2. mark is the intersection of several blowtorch respectively, and cracking easily occurs in herein.
Fig. 2 is equipment schematic diagram of the present invention.
Fig. 3 is the loop control theory figure that the present invention relates to.
Fig. 4 is PID control principle drawing, and wherein, R (t) is set-point, and Y (t) is the real output value of system.Deviate E (t)=Y (t)-R (t), deviate E (t) as the input of PID controller, the output of U (t) as PID controller and the input of controlled plant.In the present invention, ratio P, integration I, differential D can regulate respectively in 0.1% ~ 100%, 0.01 ~ 60,0.01 ~ 10 scope.
Fig. 5 is the Powder Rod density profile of embodiment one.
Fig. 6 is the Powder Rod density profile of embodiment two.
Embodiment
With reference to accompanying drawing 1 ~ 6, a kind of producing apparatus of preform comprises tower body 1, prefabricated rods deposition chamber 2, motor 1, motor 24, chuck 5, screw mandrel 6, metal suspension rod 7, guide rail 8, quartzy cavity 9, quartzy target rod 10, quartzy blowtorch 1, quartzy blowtorch 2 12, SiCl
4head tank 13, GeCl
4head tank 14, liquid Ar storage tank 15, liquid O
2storage tank 16, H
2storage tank 17, gas control cabinet 18, magnetic valve 1, magnetic valve 2 20, central processing unit 21, thermal infrared imager 22, exhaust duct 23, pre-treatment tower 24, electric precipitation tower 25 and washing tower 26.
Above quartzy cavity 9, install prefabricated rods deposition chamber 2, at tower body 1 upper mounting rail 8, chuck 5 is connected with screw mandrel 6, and motor 1 controls screw mandrel 6 and rotates, and to make chuck 5 rise along guide rail 8 and decline, motor 24 controls chuck 5 and rotates.Metal suspension rod 7 clamping is on chuck 5, and quartzy target rod 10 loads in metal suspension rod 7, for attaching powder in deposition process.
Quartz blowtorch 11, quartzy blowtorch 12 are arranged on the right side of quartzy cavity 9 respectively, and blowtorch mouth is inner at quartzy cavity 9.SiCl
4head tank 13, GeCl
4head tank 14, liquid Ar storage tank 15, liquid O
2storage tank 16, H
2it is inner that gas in storage tank 17 enters gas control cabinet 18 respectively by pipeline, controls gas flow by mass flow controller MFC28 ~ 36, and continue to enter quartzy blowtorch 1, quartzy blowtorch 2 12 through pipeline respectively.
Be provided with thermal infrared imager 22 on the left of quartz cavity 9, thermal infrared imager 22 is connected with central processing unit 21 by signal wire.The H be connected with quartzy blowtorch 1, quartzy blowtorch 2 12
2pipeline is equipped with respectively magnetic valve 1, magnetic valve 2 20, is connected with central processing unit 21 by control line.
Described central controller 21 receives the feedback signal of thermal infrared imager 22, accounting temperature deviation, and uses PlD control principle control H
2magnetic valve 1 on pipeline, magnetic valve 2 20 aperture, to regulate the H entering quartzy blowtorch 1, quartzy blowtorch 2 12
2airshed.Described central controller adopts the CP350/370 family computer manufactured by CHINO company, is provided with PID controller (proportional-integral derivative controller), is provided with sequence of control.
Quartz cavity 9 upper left quarter is provided with exhaust duct 23, exhaust duct 23 is connected with pre-treatment tower 24, pre-treatment tower 24 is connected with electric precipitation tower 25 by pipeline, and electric precipitation tower 25 is connected with washing tower 26 by pipeline, the tail gas produced for collecting, in processing reaction process.
In described gas control cabinet 18, mass flow controller MFC28, MFC29, MFC30, MFC31, MFC32, MFC33, MFC34, MFC35, MFC36 are installed, are controlled the flow of these 9 MFC by master control cabinet 37.
A kind of manufacture method of preform is as follows:
1, gas supply
As Fig. 2, by SiCl
4head tank 13, GeCl
4head tank 14, liquid Ar storage tank 15, liquid O
2storage tank 16, H
2it is inner that gas in storage tank 17 enters gas control cabinet 18 respectively by pipeline, controls gas flow by mass flow controller MFC28 ~ 36, and continue to enter quartzy blowtorch 1, quartzy blowtorch 2 12 through pipeline.Wherein, the mass flow controller MFC(such as AE FC-7800CD series mass flow director of the upper configuration of each gas pipeline (gas circuit)), for controlling the airshed of different steps.
SiCl
4flow can adjust between 0.1g/min ~ 20g/min), flame hydrolysis generates SiO in the case of a high temperature
2, for the formation of covering and the sandwich layer of prefabricated rods; GeCl
4flow can adjust between 0.01g/min ~ 1.0g/min, and flame hydrolysis generates GeO in the case of a high temperature
2, be entrained in sandwich layer to improve core refractive rate.Conveying SiCl
4, GeCl
4pipe surface need to lay heating zone, temperature controls at 100 DEG C
H
2flow can adjust between 0.1L/min ~ 30L/min; O
2flow can adjust between 0.1L/min ~ 50L/min, wherein, and H
2play incendiary effect, O
2play combustion-supporting effect, in addition, in order to allow H
2complete reaction, when flow set, needs O
2flow set becomes more than needed.
Ar flow can adjust between 0.1L/min to 10L/min.Effect has two: one, as carrier gas, and delivery unstripped gas; Two, by H
2, O
2separate, prevent it from mixing in blowtorch, react.
2, deposited powder rod
First the quartzy target rod 10 being used for piling up powder by loads metal suspension rod 7, opens motor 1, after making metal suspension rod 7 drop to specified location, opens motor 24, metal suspension rod 7 is rotated.Igniting, soon starts flame hydrolysis, and powder starts to be deposited on quartzy target rod 10 surface.Automatic control mode opened by master control cabinet 36, and after running sequence of control, metal suspension rod 7 draws quartzy target rod 10 and rotates and rise, and wherein, sequence of control is formed, by signal wire and equipment connection by Visual Basic software editing.
In deposition process, need in quartzy cavity 9 that pressure-controlled is a metastable scope, metal suspension rod 7 keeps certain speed of rotation and pulling speed.Wherein, in quartzy cavity 9, pressure-controlled is at 30 ± 5Pa, and speed of rotation controls at 10rpm, and pulling speed controls at 35mm/h.
3, the collection of thermal-induced imagery and feedback control
By thermal infrared imager 22, gather Powder Rod head surface temperature, carry out A/D conversion, and by data line by the digital data transmission that converts to central processing unit 21, changed by central processing unit 21 analysed for powder caput surface temperature, and send action command, the valve opening of Controlling solenoid valve 1, magnetic valve 2 20, thus reach the object of adjustment gas flow in real time, make preform.
4, exhaust collection, process
By vapor pipe 23, tail gas is transported to waste gas treatment equipment and processes.Waste gas treatment equipment comprises pre-treatment tower 24, electric precipitation tower 25, washing tower 26.Wherein, pre-treatment tower 24 Main Function is, carries out cooling process to tail gas; Electric precipitation tower 25 Main Function is, by electrion, makes dust charged and is adsorbed; Washing tower 26 Main Function is, utilizes the sour gas such as HCl, HF in NaOH solution and tail gas to carry out neutralization reaction.By above a series for the treatment of measures, tail gas is made to reach emission standard; Described pre-treatment tower 24, electric precipitation tower 25 and washing tower 26 adopt commercially available coordinative composition of equipments to use.
The raw material that the present invention relates to comprises: one, SiCl
4(flow can adjust between 0.1g/min ~ 20.0g/min), flame hydrolysis generates SiO in the case of a high temperature
2, for the formation of covering and the sandwich layer of prefabricated rods; Two, GeCl
4(flow can adjust between 0.01g/min ~ 1.00g/min), flame hydrolysis generates GeO in the case of a high temperature
2, be entrained in sandwich layer to improve core refractive rate.
Fuel comprises: H
2(flow can adjust between 0.1L/min ~ 30.0L/min), O
2(flow can adjust between 0.1L/min ~ 50.0L/min), wherein, H
2play incendiary effect, O
2play combustion-supporting effect.In addition, in order to allow H
2complete reaction, when flow set, needs O
2flow set becomes more than needed.
Auxiliary material comprises: Ar(flow can adjust between 0.1L/min to 10.0L/min).Effect has two: one, as carrier gas, and delivery unstripped gas; Two, by H
2, O
2separate, prevent it from mixing in blowtorch, react.
Raw material, fuel and auxiliary material, through piping, are delivered to blowtorch mouth and react, be constantly stacked on target rod, be shaped to Powder Rod, and continued propagation.Wherein, the pipeline of transferring raw material needs external application heating zone, and temperature controls at 100 DEG C.
Embodiment one:
Metal suspension rod 7 is installed the quartzy target rod 10 of a long 500mm, is the SiCl of 0.1g/min by initial flow
4, 0.01g/min GeCl
4, 1.0L/min the O of Ar, 5.0L/min
2with the H of 3.0L/min
2pass into quartzy blowtorch 2 12, generate SiO by flame hydrolysis
2, GeO
2, be attached to quartzy target rod 10 lower ends, form sandwich layer.The SiCl of initial flow 0.1g/min is passed in quartzy blowtorch 11
4, 1.0L/min the O of Ar, 15.0L/min
2with the H of 10.0L/min
2, generate SiO by flame hydrolysis
2, form the covering of prefabricated rods.Each stage flow set is as following table 1:
Table 1
As Fig. 2, control metal suspension rod 7 rotate by chuck 5, metal suspension rod 7 draws quartzy target rod 10 and rises along guide rail 8, and wherein speed of rotation controls at 10rpm, and pulling speed controls at 35mm/h.In quartz cavity 9, pressure-controlled is at 30 ± 5Pa.
At H
2on pipeline, install magnetic valve 1, magnetic valve 2 20, valve opening controls by central processing unit 21.Wherein, parameter P is set as 10%, and parameter I is set as 60, and parameter D is set as 3.Magnetic valve 1, magnetic valve 2 20, central processing unit 21, thermal infrared imager 22, Powder Rod 27 form a closed loop control system.As Fig. 3, by thermal infrared imager 22, the Powder Rod 27 caput surface temperature collected is fed back to central processing unit 21, calculate deviate, wherein, the medial temperature in infrared thermal imagery picture is set as 1050 DEG C, deviation standard is decided to be ± and 10 DEG C.When medial temperature is lower than 1040 DEG C, output bias signal, sends instruction by PID controller, increases magnetic valve 1, magnetic valve 2 20 valve opening to increase H
2flow, thus improve temperature, in like manner, when medial temperature is higher than 1060 DEG C, output bias signal, sends instruction by PID controller, reduces magnetic valve 1, magnetic valve 2 20 valve opening to reduce H
2flow, thus reduce temperature.When temperature is between 1040 ~ 1060 DEG C, magnetic valve 1, magnetic valve 2 20 valve opening remain unchanged.Wherein, data acquiring frequency is set as 1 time/min.
Accompanying drawing 4 is each layer density of the Powder Rod obtained according to the method described above.Result show: blowtorch intersection 1., 2. density reach 0.24g/cm3,0.27g/cm3 respectively.Intersection width is 1.5mm, 1.5mm.
Embodiment two:
Metal suspension rod 7 is installed the quartzy target rod 10 of a long 500mm, is the SiCl of 0.1g/min by initial flow
4, 0.01g/min GeCl
4, 1.0L/min the O of Ar, 6.0L/min
2with the H of 4.0L/min
2pass into quartzy blowtorch 2 12, generate SiO by flame hydrolysis
2, GeO
2, be attached to quartzy target rod 10 lower ends, form sandwich layer.The SiCl of initial flow 0.1g/min is passed in quartzy blowtorch 1
4, 1.0L/min the O of Ar, 20.0L/min
2with the H of 15.0L/min
2, generate SiO by flame hydrolysis
2, form the covering of prefabricated rods.Each stage flow set is as following table 2:
Table 2
As Fig. 2, control metal suspension rod 7 rotate by chuck 5, metal suspension rod 7 draws quartzy target rod 10 and rises along guide rail 8, and wherein speed of rotation controls at 10rpm, and pulling speed controls at 35mm/h.In quartz cavity 9, pressure-controlled is at 30 ± 5Pa.
At H
2on pipeline, install magnetic valve 1, magnetic valve 2 20, valve opening controls by central processing unit 21.Wherein, parameter P is set as 10%, and parameter I is set as 30, and parameter D is set as 3.Magnetic valve 1, magnetic valve 2 20, central processing unit 21, thermal infrared imager 22, Powder Rod 27 form a closed loop control system.As Fig. 3, by thermal infrared imager 22, the Powder Rod 27 caput surface temperature collected is fed back to central processing unit 21, calculate deviate, wherein, the medial temperature in infrared thermal imagery picture is set as 1080 DEG C, deviation standard is decided to be ± and 5 DEG C.When medial temperature is lower than 1075 DEG C, output bias signal, sends instruction by PID controller, increases magnetic valve 1, magnetic valve 2 20 valve opening to increase H
2flow, thus improve temperature, in like manner, when medial temperature is higher than 1085 DEG C, output bias signal, sends instruction by PID controller, reduces magnetic valve 1, magnetic valve 2 20 valve opening to reduce H
2flow, thus reduce temperature.When temperature is between 1075 ~ 1085 DEG C, magnetic valve 1, magnetic valve 2 20 valve opening remain unchanged.Wherein, data acquiring frequency is set as 2 times/min.
What accompanying drawing 5 showed is each layer density of Powder Rod of example two correspondence, and result shows: blowtorch intersection 1., 2. density reach 0.30g/cm3,0.34g/cm3 respectively.Intersection width is 0.5mm, 0.5mm.
Through comparing with example one, can find out, embodiment two is by increasing H
2, O
2flow, increases average design temperature, revises deviate, and improve data acquiring frequency series of measures, final: the density that one, improve each layer of Powder Rod; Two, blowtorch intersection powder density 1., 2. obviously becomes large, reduce, and thickness reduces to some extent with the density difference of Core and Clad simultaneously.
Claims (4)
1. a producing apparatus for preform, is characterized in that: comprise tower body, prefabricated rods deposition chamber, motor one, motor two, chuck, screw mandrel, metal suspension rod, guide rail, quartzy cavity, quartzy target rod, quartzy blowtorch one, quartzy blowtorch two, SiCl
4head tank, GeCl
4head tank, liquid Ar storage tank, liquid O
2storage tank, H
2storage tank, gas control cabinet, magnetic valve one, magnetic valve two, central processing unit, thermal infrared imager, exhaust duct, pre-treatment tower, electric precipitation tower and washing tower;
Above quartzy cavity, install prefabricated rods deposition chamber, at tower body upper mounting rail, chuck is connected with screw mandrel, and motor one controls screw mandrel and rotates, to make chuck rise and decline along guide rail, and motor two control card disc spins; Metal suspension rod clamping is on chuck, and quartzy target rod loads in metal suspension rod, for attaching powder in deposition process;
Quartz blowtorch one, quartzy blowtorch two are arranged on the right side of quartzy cavity respectively, and the blowtorch mouth of quartzy blowtorch one and quartzy blowtorch two is in quartzy inside cavity;
SiCl
4head tank, GeCl
4head tank, liquid Ar storage tank, liquid O
2storage tank, H
2gas in storage tank enters gas control cabinet inside respectively by pipeline, controls gas flow by mass flow controller MFC, and continues to enter quartzy blowtorch one, quartzy blowtorch two through pipeline respectively;
Be provided with thermal infrared imager on the left of quartz cavity, thermal infrared imager is connected with central processing unit by signal wire; The H be connected with quartzy blowtorch one, quartzy blowtorch two
2pipeline is equipped with respectively magnetic valve one, magnetic valve two, is connected with central processing unit by control line;
Quartz cavity upper left quarter is provided with exhaust duct, and exhaust duct is connected with pre-treatment tower, and pre-treatment tower is connected with electric precipitation tower by pipeline, and electric precipitation tower is connected with washing tower by pipeline, the tail gas produced for collecting, in processing reaction process.
2. the producing apparatus of a kind of preform according to claim 1, is characterized in that: be provided with some mass flow controller MFC in described gas control cabinet, by its flow of time variable control be arranged on master control cabinet computer.
3. the producing apparatus of a kind of preform according to claim 1, is characterized in that: described central controller receives the feedback signal of thermal infrared imager, accounting temperature deviation, and uses PlD control principle control H
2magnetic valve one on pipeline, magnetic valve two aperture, to regulate the H entering quartzy blowtorch one, quartzy blowtorch two
2airshed.
4. a manufacture method for preform, is characterized in that:
(1) gas supply
By SiCl
4head tank, GeCl
4head tank, liquid Ar storage tank, liquid O
2storage tank, H
2gas in storage tank enters gas control cabinet inside respectively by pipeline, gas flow is controlled by mass flow controller MFC, and continue to enter quartzy blowtorch one, quartzy blowtorch two through pipeline, wherein, the mass flow controller MFC that each gas pipeline configures, for controlling the airshed of different steps;
SiCl
4flow can adjust between 0.1g/min ~ 20g/min, and flame hydrolysis generates SiO in the case of a high temperature
2, for the formation of covering and the sandwich layer of prefabricated rods; GeCl
4flow can adjust between 0.01g/min ~ 1.0g/min, and flame hydrolysis generates GeO in the case of a high temperature
2, be entrained in sandwich layer to improve core refractive rate; Conveying SiCl
4, GeCl
4pipe surface need to lay heating zone, temperature controls at 100 DEG C;
H
2flow can adjust between 0.1L/min ~ 30L/min; O
2flow can adjust between 0.1L/min ~ 50L/min, wherein, and H
2play incendiary effect, O
2play combustion-supporting effect, in addition, in order to allow H
2complete reaction, when flow set, needs O
2flow set becomes more than needed;
Ar flow can adjust between 0.1L/min to 10L/min, and as carrier gas, delivery unstripped gas, by H
2, O
2separate, prevent it from mixing in blowtorch, react;
(2) deposited powder rod
First the quartzy target rod being used for piling up powder by loads metal suspension rod, opens motor one, after making metal suspension rod drop to specified location, opens motor two, metal suspension rod is rotated; Igniting, soon starts flame hydrolysis, and powder starts to be deposited on quartzy target rod surface; Open automatic control mode cashier's office in a shop in master control, after running sequence of control, metal suspension rod draws quartzy target rod and rotates and rise, and wherein, sequence of control is formed, by signal wire and equipment connection by Visual Basic software editing;
In deposition process, need by pressure-controlled in quartzy cavity a metastable scope, metal suspension rod keeps certain speed of rotation and pulling speed, wherein, in quartz cavity, pressure-controlled is at 30 ± 5Pa, and speed of rotation controls at 10rpm, and pulling speed controls at 35mm/h;
The collection of thermal-induced imagery and feedback control
Pass through thermal infrared imager, gather Powder Rod head surface temperature, carry out A/D conversion, and by data line by the digital data transmission that converts to central processing unit, changed by central processing unit analysed for powder caput surface temperature, and send action command, the valve opening of Controlling solenoid valve one, magnetic valve two, thus reach the object of adjustment gas flow in real time, make preform;
Exhaust collection, process
By vapor pipe, tail gas is transported to waste gas treatment equipment and processes, waste gas treatment equipment comprises pre-treatment tower, electric precipitation tower and washing tower, and wherein, Pretreatment is, carries out cooling process to tail gas; The effect of electric precipitation tower is, by electrion, makes dust charged and is adsorbed; Washing tower effect is, utilizes HCl, HF sour gas in NaOH solution and tail gas to carry out neutralization reaction, by above a series for the treatment of measures, makes tail gas reach emission standard.
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| CN105347665B (en) * | 2015-11-30 | 2017-11-24 | 中天科技精密材料有限公司 | A kind of air quantity controller and its method of the growth of stable fiber prefabricated rod mandrel |
| CN105330140B (en) * | 2015-11-30 | 2018-11-09 | 中天科技精密材料有限公司 | A kind of preparation method of large-scale optical fiber prefabricating stick high purity quartz casing |
| RU2723800C1 (en) * | 2016-12-02 | 2020-06-17 | Чжунтянь Текнолоджи Эдвансд Материалз Ко., Лтд. | Device and method of manufacturing workpiece for drawing optical fibre |
| CN107802187A (en) * | 2017-12-05 | 2018-03-16 | 禾川（泉州）生物科技有限责任公司 | A kind of bronze gong of intelligent thermal imaging combusts roasting machine |
| CN107986612B (en) * | 2017-12-19 | 2020-01-14 | 长飞光纤光缆股份有限公司 | Device for preparing optical fiber base material by VAD |
| CN108585470B (en) * | 2018-05-10 | 2021-08-20 | 成都富通光通信技术有限公司 | Device and method for preparing high germanium-doped core rod by VAD (vapor axial deposition) |
| CN109694185B (en) * | 2019-01-07 | 2021-10-19 | 武汉烽火锐拓科技有限公司 | Blowtorch suitable for VAD method deposit |
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| JPH09111462A (en) * | 1995-10-13 | 1997-04-28 | Sumitomo Electric Ind Ltd | Reaction vessel for producing optical fiber preform and coating method for this reaction vessel |
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Effective date of registration: 20160407 Address after: 226009 No. 3 Zhongtian Road, Nantong Economic Development Zone, Nantong, Jiangsu Patentee after: Jiangsu Zhongtian Technology Precision Material Co., Ltd. Patentee after: Zhongtian Science and Technology Co., Ltd., Jiangsu Patentee after: Zhongtian Technologies Fiber Optics Co., Ltd. Address before: 226009 No. 3 Zhongtian Road, Nantong Economic Development Zone, Nantong, Jiangsu Patentee before: Jiangsu Zhongtian Technology Precision Material Co., Ltd. |