CN110736027A - Pressure linkage control system and method for multi-branch axial vapor deposition reaction - Google Patents

Pressure linkage control system and method for multi-branch axial vapor deposition reaction Download PDF

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Publication number
CN110736027A
CN110736027A CN201911131666.XA CN201911131666A CN110736027A CN 110736027 A CN110736027 A CN 110736027A CN 201911131666 A CN201911131666 A CN 201911131666A CN 110736027 A CN110736027 A CN 110736027A
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China
Prior art keywords
branch
bus
pressure
vapor deposition
air pipe
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CN201911131666.XA
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Chinese (zh)
Inventor
张文俊
范修远
赵莹莹
何斐逸
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Ganzhou Xun Fei Tang Conduction Technology Co Ltd
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Ganzhou Xun Fei Tang Conduction Technology Co Ltd
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Priority to CN201911131666.XA priority Critical patent/CN110736027A/en
Publication of CN110736027A publication Critical patent/CN110736027A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00Pipe-line systems
    • F17D1/02Pipe-line systems for gases or vapours
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00Arrangements for supervising or controlling working operations
    • F17D3/01Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/70Control measures

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention provides a pressure linkage control system for multi-branch axial vapor deposition reaction, which comprises a plurality of axial vapor deposition reaction cavities, a plurality of branch air pipes, a bus air pipe and a PLC (programmable logic controller), wherein the number of the reaction cavities is the same as that of the branch air pipes, ends of the branch air pipes are connected with the reaction cavities, the other ends of the branch air pipes are connected with the bus air pipe, a cavity pressure detector is arranged in the reaction cavities, the branch air pipes are provided with branch automatic valves and manual air supply valves, the bus air pipes are provided with fans, buffer tanks, buffer tank pressure detectors, bus automatic valves and bus air pipe pressure detectors, the cavity pressure detectors, the branch automatic valves of the branch air pipes, the fans, the buffer tank pressure detectors, the bus automatic valves and the bus air pipe pressure detectors are all connected with the PLC, the control system can rapidly and intelligently adjust the air draft amount of the bus air pipes, effectively control the cavity pressure and improve the deposition efficiency.

Description

Pressure linkage control system and method for multi-branch axial vapor deposition reaction
Technical Field
The invention relates to the field of optical fiber preform manufacturing, in particular to a pressure linkage control system and method for multi-branch axial vapor deposition reactions.
Background
The axial vapor deposition technology is of the mainstream optical fiber preform manufacturing technology at present, and the production process comprises the steps of heating and vaporizing raw material liquid SiCl4 and GeCl4, leading the vaporized raw materials into a reaction cavity through a mass flow controller, carrying out flame hydrolysis reaction in oxyhydrogen flame, depositing the generated SiO2 and GeO2 micron-sized particles on a target rod in the cavity under the micro-negative pressure environment, wherein the lifting speed of the target rod is matched with the deposition speed of the micron-sized particles, and finally obtaining the loose preform with a uniform shape.
The control key of the pressure in the reaction cavity is the air draft of an exhaust system, the excessive air volume can directly influence the deposition efficiency, the insufficient air volume can influence the deposition quality, the abnormal fluctuation of the air draft can cause the uneven surface deposition of the prefabricated rod, the size of the sintered prefabricated rod is not , and the product is scrapped.
When a plurality of branch lines are started simultaneously, the total air draft of the air draft waste discharge system can be kept , but if branch lines are closed, the total air draft is adjusted manually, so that high hysteresis is easy to bring, the air draft of other branch lines is influenced, and further the internal pressure of the axial vapor deposition reaction cavity is influenced.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a pressure linkage control system and a pressure linkage control method for multi-branch axial vapor deposition reactions, which can quickly and intelligently adjust the pressure of a main air pipe and effectively improve the pressure stability of the main air pipe.
In order to achieve the purpose, the pressure linkage control system for the multi-branch axial vapor deposition reaction comprises a plurality of axial vapor deposition reaction cavities, a plurality of branch air pipes, a main air pipe and a PLC (programmable logic controller), wherein the number of the axial vapor deposition reaction cavities is the same as that of the branch air pipes, the axial vapor deposition reaction cavities correspond to , each axial vapor deposition reaction cavities are connected with branch air pipes to form branch air pipes, the end of each branch air pipe is connected with the axial vapor deposition reaction cavity, and the end of each branch air pipe is connected with the main air pipe;
the axial vapor deposition reaction cavity is provided with a cavity pressure detector;
the branch air pipe is provided with a branch automatic valve and a manual air supplement valve;
the bus air pipe is provided with a fan, a buffer tank pressure detector, a bus automatic valve and a bus air pipe pressure detector;
and a cavity pressure detector of the axial vapor deposition reaction cavity, a branch automatic valve of the branch air pipe, a fan of the bus air pipe, a buffer tank pressure detector, the bus automatic valve and the bus air pipe pressure detector are connected with the PLC.
And , arranging an air suction opening and an air supplement opening in the axial vapor deposition reaction cavity, and positioning a cavity pressure detector below the air suction opening.
, the end of the branch ductwork extends into the axial vapor deposition reaction chamber through the suction opening and is equipped with a hood.
, core layer blowtorch, cladding blowtorch, loose preform and target rod are set in the axial vapor deposition reaction cavity.
, the manual air supplement valve is closer to the axial vapor deposition reaction chamber than the branch automatic valve.
, the blower, the dust removing device, the buffer tank, the bus automatic valve and the bus air duct pressure detector are sequentially arranged on the bus air duct from the end of the bus air duct far away from the branch air duct.
The invention also provides pressure linkage control methods by using the pressure linkage control system of the multi-branch axial vapor deposition reaction, which comprises the following steps:
when a th branch consisting of axial vapor deposition reaction cavities and branch air pipes is started, a fan on a bus air pipe is started, a cavity pressure detector in the reaction cavity monitors a micro negative pressure value in the reaction cavity in real time and feeds a pressure signal back to a PLC (programmable logic controller), the PLC controls a branch automatic valve to make a corresponding opening according to the received pressure signal, so that the micro negative pressure value in the reaction cavity 1 reaches a set requirement, the bus air pipe pressure detector monitors the pressure in the bus air pipe in real time and feeds the pressure signal back to the PLC, the PLC controls the bus automatic valve to make a corresponding opening according to the pressure signal, and adjusts the working frequency of the fan, so that the pressure value in the bus air pipe is kept in a fixed range;
when a second branch line consisting of another axial vapor deposition reaction cavities and another branch air pipes is opened, the control method of the second branch line is the same as that of the branch line , namely, the PLC controls a branch line automatic valve of the second branch line to open correspondingly according to a pressure signal fed back by a cavity pressure detector of the second branch line, and simultaneously, the PLC calculates the relationship among the cavity pressure detector of the branch line, the cavity pressure detector 11' of the second branch line and a bus air pipe pressure detector, controls the bus automatic valve to open correspondingly according to the calculation result, and adjusts the working frequency of a fan, so that the pressure value in the bus air pipe is kept in a fixed range;
by analogy, when more branch lines are started, the control method of each branch line is the same as that of the th branch line and the th branch line, the control of the bus line considers the pressure of each branch line and the bus air pipe, namely the PLC calculates the relationship among the th branch line cavity pressure detector, the second branch line cavity pressure detector … … nth branch line cavity pressure detector and the bus air pipe pressure detector, controls the bus automatic valve to make corresponding opening according to the calculation result, and adjusts the working frequency of the fan.
, the PLC controls the branch automatic valve to open according to the pressure signal of the cavity detector, and the clean air flows into the branch air pipe from the automatic air supply port of the reaction cavity.
And , in the normal working process of the branch lines, if branch lines are suddenly closed, the PLC sends a signal to the branch line automatic valve of the branch line according to a pressure signal fed back by the cavity pressure detector of the branch line, the opening of the branch line automatic valve is adjusted, meanwhile, the relation between the pressure fed back by the cavity pressure detector of each branch line and the bus pressure is calculated, and the working frequency of the fan is adjusted according to the calculation result, so that the aim of adjusting the air suction volume of the bus air duct is fulfilled.
The pressure linkage control system of the multi-branch axial vapor deposition reaction carries out linkage control on a cavity pressure detector of an axial vapor deposition reaction cavity and a branch automatic valve of a branch air pipe through a PLC (programmable logic controller), carries out linkage control on a fan of a bus air pipe, a buffer tank pressure detector, a bus automatic valve and a bus air pipe pressure detector, then carries out linkage control on the branch air pipe and the bus, receives and calculates pressure signals of the branch air pipe and the bus, rapidly and intelligently controls the air draft of the bus air pipe according to the calculation result, effectively improves the stability of the air draft, well controls the pressure in the reaction cavity, improves the deposition efficiency and the deposition uniformity, solves the problems that when the branch air pipe changes, the delay problem caused by manually adjusting the air draft of the bus and the internal pressure of the axial vapor deposition reaction cavity is not well controlled due to the delay problem in the prior art, which in turn affects the deposition efficiency and deposition uniformity of the optical fiber preform.
Drawings
The present invention is further depicted and described at with reference to the drawings.
FIG. 1 is a schematic view of a pressure-coupled control system for a multi-manifold axial vapor deposition reaction in accordance with a preferred embodiment of the present invention.
Detailed Description
The technical solution of the present invention will be more clearly and completely explained by the description of the preferred embodiments of the present invention with reference to the accompanying drawings.
As shown in fig. 1, the pressure linkage control system for multi-branch axial vapor deposition reaction according to the preferred embodiment of the present invention includes a plurality of axial vapor deposition reaction chambers 1, a plurality of branch air pipes 2, a main air pipe 3 and a PLC controller 4, the number of the axial vapor deposition reaction chambers 1 is the same as that of the branch air pipes 2, the two reaction chambers are corresponding to each other, each axial vapor deposition reaction chambers 1 are connected with branch air pipes 2 to form branch air pipes, the end of each branch air pipe 2 is connected with the axial vapor deposition reaction chamber 1, and the end is connected with the main air pipe 3.
A cavity pressure detector 11, a core layer blast burner 12, a cladding layer blast burner 13, a loose body prefabricated rod 14 and a target rod 15 are arranged in the axial vapor deposition reaction cavity 1. When the reaction chamber 1 is opened, the core layer torch 12 and the cladding layer torch 13 are ignited and sprayed toward the target rod 15, and SiO2 and GeO2 generated after hydrolysis reaction start to be deposited on the target rod 15 to gradually form the loose preform 14.
An air suction opening 1a and an automatic air supplement opening 1b are formed in the reaction cavity 1, an end 2a of the branch vent pipe 2 extends into the reaction cavity 1 through the air suction opening 1a for air suction, an exhaust hood 20 is installed at the end 2a and used for guiding air in the reaction cavity 1 into the branch vent pipe 2, a cavity pressure detector 11 is located below the air suction opening 10 and used for monitoring a micro negative pressure value in the reaction cavity 1 in real time, and the cavity pressure detector 11 is connected with the PLC 4 and feeds a pressure signal back to the PLC 4.
The branch air duct 2 is provided with a branch automatic valve 21 and a manual air supplement valve 22. The branch automatic valve 21 is arranged close to the main air pipe 3; the manual air supplement valve 22 is arranged close to the reaction cavity 1 and is obliquely arranged on the branch air pipe 2, and the inclination angle is preferably 30-70 degrees. High-temperature waste gas in the reaction cavity 1 firstly enters the branch air duct 2 through the exhaust hood 20, room-temperature clean air flows into the branch air duct 2 from the manual air supply valve 22, so that the temperature of the waste gas in the branch air duct 2 is reduced,
the branch automatic valve 21 is connected with the PLC 4 and forms linkage control with the cavity pressure detector 11. The PLC controls the opening of the branch automatic valve 21 according to the cavity pressure fed back by the cavity pressure detector 11, so that the micro negative pressure value in the reaction cavity 1 reaches the set requirement.
Therefore, the invention carries out independent linkage control on the branch automatic valve 21 on the branch and the pressure in the axial vapor deposition reaction cavity 1 through the PLC, and intelligently regulates and controls the pressure in the cavity, so that the pressure in the cavity reaches the required micro negative pressure value.
The main air duct 3 is provided with a fan 31, a dust removal device 32, a buffer tank 33, a buffer tank pressure detector 34, a main automatic valve 35 and a main air duct pressure detector 36 which are sequentially arranged on the main air duct 3 from the end of the main air duct 3 far away from the branch air duct 2, wherein the main air duct pressure detector 36 is used for monitoring the pressure in the main air duct 3 in real time and feeding a pressure signal back to the PLC 4, the buffer tank 33 is cylindrical, waste discharge openings are formed below the buffer tank 33, the buffer tank 33 is made of carbon steel, glass fiber reinforced plastic or titanium alloy, the buffer tank pressure detector 34 is positioned above the buffer tank 33, air flow in the main air duct 3 is introduced into the buffer tank 33, the buffer tank pressure detector 34 serves an early warning function, and waste gas enters the fan 31 after passing through the dust removal device 32.
The fan 31, the buffer tank pressure detector 34, the bus automatic valve 35 and the bus air pipe pressure detector 36 are connected with the PLC 4 to form linkage control. The air flow of each branch air pipe 2 is converged into the main air pipe 3, and the opening degree of the automatic valve on each branch and the pressure in the reaction cavity form linkage control with the main air pipe. The PLC controller 4 controls the opening of the bus automatic valve 35 according to the pressure signal fed back by the bus air duct pressure detector 36 and the pressure signal fed back by the cavity pressure detector 11, and adjusts the operating frequency of the fan 31, thereby adjusting the air suction volume of the bus air duct 3.
The PLC fan 31 is preferably an auto-downer fan. The dust removal device 32 may be a cloth bag dust removal device or a wet dust removal device. The branch air pipes and the main air pipes are made of carbon steel, glass fiber reinforced plastics or titanium alloy.
The invention also provides a method for performing pressure linkage control by using the pressure linkage control system of the multi-branch axial vapor deposition reaction, which comprises the following steps:
(1) when a th branch line composed of axial vapor deposition reaction cavities 1 and branch air pipes 2 is opened, a fan 31 of the main air pipe 3 is started, a cavity pressure detector 11 in the reaction cavity 1 monitors a micro negative pressure value in the reaction cavity in real time and feeds a pressure signal back to the PLC controller 4, the PLC controller 4 controls the branch automatic valve 21 to make a corresponding opening according to the received pressure signal, and simultaneously, corresponding clean air flows from an automatic air supply port 1b of the reaction cavity 1, so that the micro negative pressure value in the reaction cavity 1 reaches a set requirement, and a micro negative pressure deposition environment in a single axial vapor deposition reaction cavity is ensured.
(2) When the second branch line is opened, the control method of the branch line is the same as that of the branch line , that is, the PLC controller 4 controls the branch line automatic valve 21 ' to make a corresponding opening according to the pressure signal fed back by the cavity pressure detector 11 ', meanwhile, the PLC controller 4 calculates the relationship among the cavity pressure detector 11 of the th branch line, the cavity pressure detector 11 ' of the second branch line, and the total air pipe pressure detector 36. the specific calculation method is as follows:
a. calculating the pressure value P2 of the second branch line according to the pressure value P1 of the th branch line
P2=(1+X%)P1
X represents the linkage control precision of the th branch line and the second branch line, and X is-20
b. Calculating the pressure value P of the bus according to the th branch pressure value P1 and the second branch pressure value P2
P=(P1+P2)(1+Y%),
Y represents the linkage control precision of the bus pressure and the branch lines, Y is 10-60, and the corresponding pressure line loss is determined based on the number of the branch lines
And under the condition of keeping the P1 unchanged, the PLC adjusts the opening degrees of the bus automatic valve 35 and the second branch automatic valve 21', controls the micro negative pressure of the second branch pressure P2 to be in a calculation interval, and adjusts the working frequency of the fan 1 to keep the pressure value in the bus air duct 3 in a fixed range of .
In this way, when more branch lines are started, the control method of each branch line is the same as that of the th branch line and the th branch line, and the control of the bus needs to consider the pressure of each branch line and the bus air pipe, that is, the PLC controller calculates the relationship between the cavity pressure detector of the th branch line, the cavity pressure detector of the … … th branch line of the second branch line, and the bus air pipe pressure detector 36, controls the bus automatic valve 35 to make a corresponding opening according to the calculation result, and adjusts the working frequency of the fan 1.
(3) In the normal working process of a plurality of branch lines, if branch lines are suddenly closed, the PLC sends a signal to the branch line automatic valve of the branch line according to a pressure signal fed back by the cavity pressure detector of the branch line, the opening of the branch line automatic valve is adjusted, meanwhile, the relation between the pressure fed back by the cavity pressure detector of each branch line and the bus pressure is calculated, the working frequency of the fan is adjusted according to the calculation result, the purpose of adjusting the air suction volume of the bus air pipe is achieved, and therefore the micro negative pressure deposition environment in the axial vapor deposition reaction cavity on each branch line is stabilized.
According to the invention, through intelligent linkage control of micro negative pressure in the axial vapor deposition reaction cavity, the deposition stability of the preform can be improved, and the product percent of pass is improved.
The above detailed description merely describes preferred embodiments of the present invention and does not limit the scope of the invention. Without departing from the spirit and scope of the present invention, it should be understood that various changes, substitutions and alterations can be made herein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents. The scope of the invention is defined by the claims.

Claims (9)

1. The pressure linkage control system for the multi-branch axial vapor deposition reaction is characterized by comprising a plurality of axial vapor deposition reaction cavities, a plurality of branch air pipes, a main air pipe and a PLC (programmable logic controller), wherein the number of the axial vapor deposition reaction cavities is the same as that of the branch air pipes, the axial vapor deposition reaction cavities correspond to , each axial vapor deposition reaction cavities are connected with branch air pipes to form branch air pipes, the end of each branch air pipe is connected with the axial vapor deposition reaction cavities, and the end of each branch air pipe is connected with the main air pipe;
the axial vapor deposition reaction cavity is provided with a cavity pressure detector;
the branch air pipe is provided with a branch automatic valve and a manual air supplement valve;
the bus air pipe is provided with a fan, a buffer tank pressure detector, a bus automatic valve and a bus air pipe pressure detector;
and the cavity pressure detector of the axial vapor deposition reaction cavity, the branch automatic valve of the branch air pipe, the fan of the bus air pipe, the buffer tank pressure detector, the bus automatic valve and the bus air pipe pressure detector are all connected with the PLC.
2. The system of claim 1, wherein the axial vapor deposition reaction chamber comprises an air extraction opening and an air supply opening, and the chamber pressure detector is located below the air extraction opening.
3. The system of claim 2, wherein said sub-manifolds have ends extending through said exhaust opening into said axial vapor deposition reaction chamber, said ends being equipped with exhaust hoods.
4. The system of claim 3, wherein the axial vapor deposition reaction chamber further comprises a core burner, a cladding burner, a bulk preform, and a target rod.
5. The system of claim 1, wherein the manual air supplement valve is closer to the axial vapor deposition reaction chamber than the branch automatic valve.
6. The system of claim 1, wherein the blower, the dust removing device, the buffer tank, the bus automatic valve, and the bus duct pressure detector are sequentially mounted on the bus duct from the end of the bus duct far away from the branch duct.
7. A method for performing pressure-linked control by using the pressure-linked control system for multi-branched axial vapor deposition reaction of any in claims 1-6, comprising:
when a th branch consisting of axial vapor deposition reaction cavities and branch air pipes is started, a fan on a bus air pipe is started, a cavity pressure detector in the reaction cavity monitors a micro negative pressure value in the reaction cavity in real time and feeds a pressure signal back to a PLC (programmable logic controller), the PLC controls a branch automatic valve to make a corresponding opening according to the received pressure signal, so that the micro negative pressure value in the reaction cavity 1 reaches a set requirement, the bus air pipe pressure detector monitors the pressure in the bus air pipe in real time and feeds the pressure signal back to the PLC, the PLC controls the bus automatic valve to make a corresponding opening according to the pressure signal, and adjusts the working frequency of the fan, so that the pressure value in the bus air pipe is kept in a fixed range;
when a second branch line consisting of another axial vapor deposition reaction cavities and another branch air pipes is opened, the control method of the second branch line is the same as that of the branch line , namely, the PLC controls a branch line automatic valve of the second branch line to open correspondingly according to a pressure signal fed back by a cavity pressure detector of the second branch line, and simultaneously, the PLC calculates the relationship among the cavity pressure detector of the branch line, the cavity pressure detector 11' of the second branch line and a bus air pipe pressure detector, controls the bus automatic valve to open correspondingly according to the calculation result, and adjusts the working frequency of a fan, so that the pressure value in the bus air pipe is kept in a fixed range;
by analogy, when more branch lines are started, the control method of each branch line is the same as that of the th branch line and the th branch line, the control of the bus line considers the pressure of each branch line and the bus air pipe, namely the PLC calculates the relationship among the th branch line cavity pressure detector, the second branch line cavity pressure detector … … nth branch line cavity pressure detector and the bus air pipe pressure detector, controls the bus automatic valve to make corresponding opening according to the calculation result, and adjusts the working frequency of the fan.
8. The pressure linkage control method according to claim 7, wherein the PLC controls the branch automatic valve to open correspondingly according to the pressure signal of the cavity detector, and simultaneously, indoor clean air flows into the branch air pipe from the automatic air supply port of the reaction cavity.
9. The pressure linkage control method according to claim 8, wherein in the normal working process of a plurality of branch lines, if branch lines are suddenly closed, the PLC sends a signal to the branch line automatic valve of the branch line according to the pressure signal fed back by the cavity pressure detector of the branch line, adjusts the opening of the branch line automatic valve, calculates the relationship between the pressure fed back by the cavity pressure detector of each branch line and the bus pressure, and adjusts the working frequency of the fan according to the calculation result, so as to achieve the purpose of adjusting the air suction volume of the bus air duct.
CN201911131666.XA 2019-11-19 2019-11-19 Pressure linkage control system and method for multi-branch axial vapor deposition reaction Pending CN110736027A (en)

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CN201911131666.XA CN110736027A (en) 2019-11-19 2019-11-19 Pressure linkage control system and method for multi-branch axial vapor deposition reaction

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111468473A (en) * 2020-03-27 2020-07-31 通鼎互联信息股份有限公司 VAD blowtorch cleaning device and cleaning method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111468473A (en) * 2020-03-27 2020-07-31 通鼎互联信息股份有限公司 VAD blowtorch cleaning device and cleaning method thereof

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