CN108569844A - The manufacturing method and manufacturing device of glass granules stacked body - Google Patents
The manufacturing method and manufacturing device of glass granules stacked body Download PDFInfo
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- CN108569844A CN108569844A CN201810190475.XA CN201810190475A CN108569844A CN 108569844 A CN108569844 A CN 108569844A CN 201810190475 A CN201810190475 A CN 201810190475A CN 108569844 A CN108569844 A CN 108569844A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/70—Control measures
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
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- Geochemistry & Mineralogy (AREA)
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- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
A kind of manufacturing method and manufacturing device of glass granules stacked body are provided, effective portion of manufactured glass granules stacked body can be inhibited to shorten, inhibits damaged when making the dehydration of glass granules stacked body and sintering and transparence.A kind of manufacturing method of glass granules stacked body, it is supplied while being controlled the flow of glass raw material gas by flow control mechanism (16) to the burner (8) of glass granules generation, the stack layer of glass granules is formed on the initial glass bar for moving back and forth and rotating in an axial direction, in the manufacturing method of the glass granules stacked body, the flow of the glass raw material gas controlled by flow control mechanism (16) is not changed, the flow of the glass raw material gas supplied to burner (8) when forming the both ends of stack layer is set to be less than the flow of the glass raw material gas supplied to burner (8) when forming the part in addition to both ends.
Description
Technical field
The present invention relates to a kind of manufacturing methods and manufacturing device of glass granules stacked body.
Background technology
The manufacturing method and manufacturing device of a kind of known glass granules stacked body, in an axial direction move back and forth and rotate
The stack layer of glass granules is formed in starting piece by the burner of glass granules generation (for example, referring to patent document 1).
Patent document 1：Japanese Unexamined Patent Publication 2003-212554 bulletins
Invention content
In the manufacture of glass granules stacked body, since stacking amount is non-constant near the both ends of stack layer, nothing
Method is used eventually as product.Accordingly, it is considered to formed stack layer both ends when to stop glass raw material to burner
The flow of glass raw material is adjusted in the mode of supply.
For example, passing through flow control mechanism pair in the manufacturing method of disclosed glass granules stacked body in patent document 1
The flow of the glass raw material supplied to the burner of glass granules generation is controlled.In the control of the flow control mechanism
In, when starting piece moves back and forth, make confession of the glass raw material to burner when forming the both ends of stack layer of glass granules
To becoming zero, the supply of glass raw material is gradually increased when being formed from the both ends to central portion and becomes defined flow.
Until the glass raw material supplied to burner becomes defined flow, glass granules stack layer becomes non-effective portion, as rule
Glass granules stack layer is formed by the state of fixed flow becomes effective portion.But in above-mentioned flow control mechanism
In control, from changing flow until reaching constant flow rate, flow changes, it is therefore desirable to until the flow changes convergence and sets
The time is spent until for stable regulation flow, the stack layer of the glass granules of this period becomes non-effective portion.Therefore, glass is micro-
Effective portion of grain stacked body shortens.In addition, at the unstabilized position of flow of the glass raw material supplied to burner, glass is micro-
The stacked state of grain is unstable, which is possible to damaged when making the dehydration of glass granules stacked body and sintering and transparence.
The object of the present invention is to provide a kind of manufacturing methods and manufacturing device of glass granules stacked body, can press down
Effective portion of the manufactured glass granules stacked body of system shortens, inhibit make glass granules stacked body be dehydrated and sintering and it is transparent
It is damaged when change.
The manufacturing method of glass granules stacked body involved by one embodiment of the present invention,
To the combustion of glass granules generation while being controlled the flow of glass raw material by flow control mechanism
Burner supplies, and the stack layer of glass granules is formed in the starting piece for moving back and forth and rotating in an axial direction,
In the manufacturing method of the glass granules stacked body
The flow for not changing the glass raw material controlled by the flow control mechanism makes forming the heap
The flow of the glass raw material supplied to the burner when both ends of lamination, which is less than, to be formed in addition to the both ends
Part when to the burner supply the glass raw material flow.
In addition, the manufacturing device of the glass granules stacked body involved by one embodiment of the present invention,
With glass raw material feedway, which works as is moving back and forth and is rotating initial in an axial direction
It is former to the burner supply glass when forming the stack layer of glass granules by the burner of glass granules generation on part
Material,
In the manufacturing device of the glass granules stacked body,
The glass raw material feedway has：
The flow control mechanism of glass raw material；
Supplying tubing line makes the glass raw material from the flow control mechanism to the combustor flow；
Pipeline is matched in exhaust, and the glass raw material is made to be flowed from the flow control mechanism to device of removing the evil；And
Pressure control mechanism,
The exhaust has with pipeline：
Degree adjustment valve；
Second gas matches pipeline, and the second gas different from the glass raw material is made to be set to the aperture
Converge the confluence in the downstream of regulating valve；And
Pressure gauge is measured the exhaust with the pressure in pipeline near the confluence,
The pressure control mechanism is in a manner of the pressure to make to be measured by the pressure gauge becomes defined pressure
The mechanism that the flow with pipeline of the second gas is controlled.
The effect of invention
According to foregoing invention, effective portion of manufactured glass granules stacked body can be inhibited to shorten, inhibition makes glass
Particle stacked body be dehydrated and sintering and it is damaged when transparence.
Description of the drawings
Fig. 1 is the figure of the outline structure for the manufacturing device for indicating the glass granules stacked body involved by present embodiment.
Fig. 2 is the block diagram for the outline structure for indicating glass raw material feedway.
Fig. 3 is aperture and the glass raw material of the degree adjustment valve for indicating the stacked position based on glass granules to device of removing the evil
And the figure of the relationship between the flow of reaction vessel.
The explanation of label
The manufacturing device of 1 glass granules stacked body
2 initial glass bars
6 reaction vessels
8 burners
10 glass raw material feedways
11 remove the evil device
12 unstrpped gas supply units
13 purge gas supply units
16 flow control mechanisms
17 degree adjustment valves
18 pressure control mechanisms
19 confluences
20 pressure gauges
L4 supplying tubing lines
L5 exhausts are with pipeline (example of pipeline is matched by branch)
L6 second gas matches pipeline
M stack layers
The lower ends Ma
The upper ends Mb
Specific implementation mode
(explanations of embodiments of the present invention)
First, embodiments of the present invention are enumerated and illustrated.
The manufacturing method of glass granules stacked body involved by one embodiment of the present invention,
(1) to glass granules generation while being controlled the flow of glass raw material by flow control mechanism
Burner supplies, and the stack layer of glass granules is formed in the starting piece for moving back and forth and rotating in an axial direction,
In the manufacturing method of the glass granules stacked body,
The flow for not changing the glass raw material controlled by the flow control mechanism makes forming the heap
The flow of the glass raw material supplied to the burner when both ends of lamination, which is less than, to be formed in addition to the both ends
Part when to the burner supply the glass raw material flow.
The above method will not change when forming the both ends of stack layer to be controlled by flow control mechanism
Glass raw material flow, thus, there is no from changing flow until reaching constant flow rate flow variation.As a result, can
Enough generations for inhibiting non-effective portion caused by being changed by flow, inhibit effective portion of manufactured glass granules stacked body to shorten.
In addition, when forming both ends, the flow of the glass raw material supplied to burner is set to reduce, therefore, it is possible to manufactured glass
Glass particle stacked body is dehydrated and is sintered and inhibited when transparence the generation of bubble, inhibits the glass granules caused by bubble
The breakage of stacked body.
(2) glass raw material includes germanium tetrachloride.
It is contained in the glass supplied to burner in the germanium tetrachloride as additive of the refractive index for adjusting glass
In the case of raw material, it is suppressed that the flow of the germanium tetrachloride supplied to burner becomes unstable, manufactured therefore, it is possible to make
The index distribution of glass granules stacked body stabilizes.
(3) it is equipped with：Supplying tubing line makes the glass raw material from the flow control mechanism to the combustor flow
It is dynamic；Pipeline is matched by branch, and branch is carried out from the supplying tubing line in the midway of the supplying tubing line；And aperture regulation
Valve is configured at the midway that pipeline is matched by the branch,
The aperture of the degree adjustment valve is adjusted, is made when forming the both ends of the stack layer to the burning
The flow of the glass raw material of device supply, which is less than, to be supplied when forming the part in addition to the both ends to the burner
The glass raw material flow.
By making glass raw material be flowed to branch with pipeline, the glass controlled by flow control mechanism can not be changed
The flow of glass raw material, and reduce the flow of the glass raw material supplied to burner.In addition, by the aperture to degree adjustment valve into
Row adjust and flow can be made to gradually decrease gradual recovery, reduce supplied to burner glass raw material flow when flow not
It can sharp change, therefore, can inhibit to cause to be deformed in non-effective portion since glass raw material can not quickly enter.
(4) it is equipped with device of removing the evil in outlet of the branch with pipeline,
When forming the both ends of the stack layer, make the glass raw material to the device flowing of removing the evil, and by institute
It states branch and is adjusted to defined pressure with the pressure in pipeline.
In the case where branch is equipped with the outlet in pipeline and removes the evil device, matches in pipeline to branch and apply negative pressure, because
This, matches in pipeline in branch and generates pressure difference in supplying tubing line.By the way that branch is adjusted to provide with the pressure in pipeline
Pressure, can eliminate and the pressure difference in supplying tubing line.As a result, when forming the both ends of stack layer, such as make aperture
Regulating valve standard-sized sheet, the flow that can be easy to make to flow to the glass raw material of supplying tubing line side meet the flow for being set as target.
In addition, the manufacturing device of the glass granules stacked body involved by one embodiment of the present invention,
(5) have glass raw material feedway, the glass raw material feedway when in an axial direction move back and forth and rotate
When forming the stack layer of glass granules by the burner of glass granules generation in starting piece, glass is supplied to the burner
Raw material,
In the manufacturing device of the glass granules stacked body,
The glass raw material feedway has：
The flow control mechanism of glass raw material；
Supplying tubing line makes the glass raw material from the flow control mechanism to the combustor flow；
Pipeline is matched in exhaust, and the glass raw material is made to be flowed from the flow control mechanism to device of removing the evil；And
Pressure control mechanism,
The exhaust has with pipeline：
Degree adjustment valve；
Second gas matches pipeline, and the second gas different from the glass raw material is made to be set to the aperture
Converge the confluence in the downstream of regulating valve；And
Pressure gauge is measured the exhaust with the pressure in pipeline near the confluence,
The pressure control mechanism is in such a way that the pressure that makes to measure by the pressure gauge becomes defined pressure pair
The mechanism that the flow with pipeline of the second gas is controlled.
According to above structure, which will not change the stream of the glass raw material controlled by flow control mechanism
Amount can be such that the flow of the glass raw material supplied to burner when forming the both ends of stack layer is less than and formed except both ends
The flow of the glass raw material supplied to burner when part in addition.Thereby, it is possible to inhibit manufactured glass granules stacked body
Effective portion shorten, inhibit make glass granules stacked body be dehydrated and sintering and when transparence it is damaged.
Apply negative pressure from device of removing the evil in addition, matching in pipeline to exhaust, match in pipeline in exhaust and is produced in supplying tubing line
Raw pressure difference.Exhaust is set as defined pressure with the pressure in pipeline by pressure control mechanism, so as to eliminate and supply
To with the pressure difference in pipeline.As a result, when forming the both ends of stack layer, such as make degree adjustment valve standard-sized sheet, can be easy
The flow for flowing to the glass raw material of supplying tubing line side is set to meet the flow for being set as target.
(detailed contents of embodiments of the present invention)
In the following, with reference to attached drawing, manufacturing method to the glass granules stacked body involved by embodiments of the present invention and
The concrete example of manufacturing device illustrates.
In addition, the present invention is not limited to these illustrations, but it is shown in the claims, including with claims etc.
Whole changes in same meaning and range.
Fig. 1 is the figure of an example of the manufacturing device for indicating glass granules stacked body.
As shown in Figure 1, the manufacturing device 1 of glass granules stacked body has the initial glass for stacking glass granules in peripheral surface
Bar 2.Assembly stick 3 is connected with by welding at the both ends of initial glass bar 2, one of assembly stick (upper side) 3 is fixed on
Support stick 4 and hang.Support stick 4 is rotated by lift rotating equipment 5 and is moved back and forth along the vertical direction.That is, passing through liter
It drops rotating device 5 and drive control is carried out to initial glass bar 2.
In addition, the manufacturing device 1 of glass granules stacked body has：Reaction vessel 6, reaction vessel 6 top install
The upper chimney 7a and lower stack 7b installed in the lower section of reaction vessel 6.Being equipped on the top of upper chimney 7a can be by initial glass
The upper cover (illustration omitted) that glass bar 2 picks and places.Upper chimney 7a and lower stack 7b is formed to accommodate the stacking of glass granules simultaneously
The length of the both ends Ma and Mb of layer M, upper and lower in reaction vessel 6 are set as seal shape and are combined with integration.It is set in reaction vessel 6
It is useful for generating the burner 8 of more (this example is 3) glass granules generations of glass granules and will suspend in container
The discharges such as glass granules exhaust pipe 9.
In addition, there is the manufacturing device 1 of glass granules stacked body the glass raw material for supplying glass raw material etc. to burner 8 to supply
To device 10.Be connected with device 11 of removing the evil in glass raw material feedway 10, this remove the evil device 11 in the synthesis of glass not
Glass raw material used etc. carries out cleaning processing.
The manufacturing device 1 of glass granules stacked body for example carries out the circle of optical fiber by OVD methods (outside vapor deposition)
The glass of column base glass material etc. synthesizes.
OVD rules make initial glass bar 2 move back and forth in the axial direction in reaction vessel 6 and make its rotation on one side in this way,
On one side to its periphery by silicon tetrachloride (SiCl4), germanium tetrachloride (GeCl4), glass raw material gas and the H such as siloxanes2Equal fuel gas
Body and O2Equal combustion-supporting gases are sprayed from burner 8 together.Moreover, generating glass granules by flame hydrolysis by making its heap
It is folded, synthesize cylindric base glass material as glass granules stacked body.
Specifically, first, one in the assembly stick 3 that the both ends of initial glass bar 2 are installed is installed on lifting rotation
The support stick 4 of rotary device 5 makes it in downward direction move by lift rotating equipment 5 while so that initial glass bar 2 is rotated.
The initiating terminal (lower end Ma) of the stacking of glass granules enters in reaction vessel 6, using including the glass ejected from burner 8
The oxyhydrogen flame of glass unstrpped gas starts generation and the stacking of glass granules by flame hydrolysis.In the outer of initial glass bar 2
Circumferential surface sequentially forms the stack layer M (hereinafter referred to as first layer stack layer M) of first layer glass granules in an axial direction.
Later, so that initial glass bar 2 is moved back and forth in an axial direction in reaction vessel 6 by stack layer M laminated multi-layers, formed
The glass granules stacked body of defined outer diameter.For being formed by glass granules stacked body, the both sides in central effective portion
As the non-effective portion of cone-shaped.
Glass granules stacked body is formed by sintering furnace (illustration omitted) by dehydrothermal treatment and by transparent glass
Glass.
Fig. 2 is the block diagram for the structure for indicating glass raw material feedway 10.
Glass raw material feedway 10 has：Unstrpped gas supply line L1, as the flow path of supply gas, from unstripped gas
Body supply unit 12 supplies glass raw material gas towards burner 8 is equal；And purge gas supply line L2, it is supplied from purge gas
Portion 13 supplies inert purge gas (for example, N towards burner 8 is equal2).In addition, glass raw material feedway 10 has：Confluence
Line L3 is made of unstrpped gas supply line L1 and purge gas supply line L2 confluences；Supplying tubing line L4, from bus bar
L3 branches and towards burner 8；And exhaust is with pipeline L5 one example of pipeline (branch match), from bus bar L3 branches
Towards device 11 of removing the evil.Also, glass raw material feedway 10 have from purge gas supply line L2 branches and with above-mentioned exhaust
Second gas with pipeline L5 confluences matches pipeline L6.
The air type operation valve 15a operated by solenoid valve 14a is equipped in unstrpped gas supply line L1, in purge gass
Body supply line L2 is equipped with the air type operation valve 15b operated by solenoid valve 14b.Moreover, unstrpped gas supply line L1
The downstream side of air type operation valve 15a and the downstream side of the air type operation valve 15b of purge gas supply line L2 are converged and are become
Bus bar L3.
The flow control that can be controlled the flow of the gas by bus bar L3 is equipped in the midway of bus bar L3
Mechanism 16 (for example, MFC (Mass Flow Controller)) processed.Moreover, under the flow control mechanism 16 of bus bar L3
Side is swum, bus bar L3 is branched off into supplying tubing line L4 and pipeline L5 is matched in exhaust.
It is equipped with the air type operation valve 15c operated by solenoid valve 14c in supplying tubing line L4, matches pipeline in exhaust
L5 is equipped with the air type operation valve 15d operated by solenoid valve 14d.In addition, being operated in air type of the exhaust with pipeline L5
The downstream side of valve 15d is equipped with can be to degree adjustment valve 17 that the flow of the gas of process is controlled.In supplying tubing line L4
The downstream side of air type operation valve 15c be connected with burner 8, in the downstream side of degree adjustment valve 17 of the exhaust with pipeline L5
(outlet) is connected with device 11 of removing the evil.
Being equipped in midway of the second gas with pipeline L6 can be to by inert gas (example of the second gas with pipeline L6
Such as, N2) the pressure control mechanism 18 (for example, MFC) that is controlled of flow.Second gas is with pipeline L6 in pressure control mechanism
18 downstream side is converged with the downstream side (for example, referred to as confluence 19) of degree adjustment valve 17 of the above-mentioned exhaust with pipeline L5.Pressure
Power control mechanism 18 controls the flow by gas of the second gas with pipeline L6, i.e., to matching pipeline L6 from second gas
The flow of gas of the flow direction exhaust with pipeline L5 is controlled, so as to make exhaust with the pressure change in pipeline L5.
The pressure being measured with the pressure in pipeline L5 to the exhaust near confluence 19 is equipped with pipeline L5 in exhaust
Meter 20.In this example, also include under the ratio confluence 19 that exhaust is matched in pipeline L5 to " near confluence " that pressure is measured
The region of side is swum, but preferably refers to the region between confluence 19 and degree adjustment valve 17.In particular it is preferred that closely following degree adjustment valve
Region after 17.Pressure control mechanism 18 with the pressure in pipeline L5 by the exhaust that pressure gauge 20 measures so as to become regulation
Pressure mode, to being controlled from flow of the second gas with gas of the pipeline L6 flow direction exhaust with pipeline L5.Above-mentioned
Defined pressure is preferably pressure (for example, atmospheric pressure) identical with the pressure in the reaction vessel 6 of 8 side of burner.
In the following, with reference to the stacked position based on glass granules of Fig. 3 degree adjustment valve aperture and glass raw material to except
Relationship between evil device and the flow of reaction vessel, to Fig. 2 shows the action of glass raw material feedway 10 say
It is bright.
In the traversal (traverse) of primary (this) shown in Fig. 3, (initial glass bar 2 is relative to burner 8 to one
The relative movement in a direction) in, it is carried out and the glass granules of one layer of corresponding amount from the lower end Ma to upper end Mb of stack layer M
It stacks.
In previous traversal (from upper end Mb to lower end Ma), in the stacking position for the glass granules that effective portion terminates
S1 is set, the control signal that degree adjustment valve 17 opens is made to be exported from control unit (illustration omitted).Based on the control signal, aperture tune
Save valve 17 by driving and the aperture of degree adjustment valve 17 becomes larger from 0%.As a result, from the flow control mechanism 16 of bus bar L3
The glass raw material gas of the constant flow rate F1 of supply begins to flow to exhaust and matches pipeline L5, the aperture of the flow and degree adjustment valve 17
Accordingly gradually increased from 0.On the contrary, the flow for flowing to the glass raw material gas of supplying tubing line L4 is gradually decreased from F1.Flow direction
Glass raw material gas of the exhaust with pipeline L5 is discharged to device 11 of removing the evil, and flows to the glass raw material gas of supplying tubing line L4 to combustion
Burner 8 supplies.
In the stacked position of glass granules to terminating previous traversal, degree adjustment valve 17 at the time of reaching lower end Ma
Aperture become 100%.At this point, flow of the exhaust with pipeline L5 becomes F2, the flow of supplying tubing line L4 becomes less than F1.It wears
Cheng Fangxiang is inverted, and the aperture of this traversal since the Ma of lower end, degree adjustment valve 17 is gradually reduced from 100%.It flows as a result,
It is gradually decreased to the flow of glass raw material gas of the exhaust with pipeline L5 from F2.On the contrary, the glass for flowing to supplying tubing line L4 is former
The flow of material gas gradually increases.Glass raw material gas of the flow direction exhaust with pipeline L5 is discharged to device 11 of removing the evil, flow direction supply
Glass raw material gas with pipeline L4 is supplied to burner 8.
Next, the aperture in degree adjustment valve 17 locates non-effective portion knot as the stacked position S1 of 0% glass granules
Beam exports exhaust with the control signal that pipeline L5 is closed from control unit.Based on the control signal, air type operation valve 15d from
Opening state becomes closed state.As a result, at the moment, the flow of glass raw material gas of the flow direction exhaust with pipeline L5 becomes 0.
In addition, flowing to the flow of the glass raw material gas of supplying tubing line L4 becomes F1.Flow becomes the glass raw material of constant flow rate F1
Gas is supplied to burner 8, to form effective portion.
Next, the stacked position in glass granules becomes close to the S2's (starting position in non-effective portion) of upper end Mb
Moment, control signal are exported from control unit.Based on the control signal, air type operation valve 15d becomes open shape from closed state
State, by make the aperture of degree adjustment valve 17 from 0% it is gradually increased in a manner of driven.As a result, from the flow control of bus bar L3
Mechanism 16 processed begins to flow to exhaust with the constant flow rate F1 glass raw material gas supplied and matches pipeline L5.Then, match pipeline to exhaust
The flow of L5 and the aperture of degree adjustment valve 17 accordingly gradually increase.On the contrary, flowing to the glass raw material gas of supplying tubing line L4
The flow of body gradually decreases.
At the time of the stacked position of glass granules becomes upper end Mb, the aperture of degree adjustment valve 17 becomes 100%, stream
Become maximum F2 to the flow of gas of the exhaust with pipeline L5.In addition, flowing to the flow of the gas of supplying tubing line L4 becomes
The stacking of minimum, the glass granules of this traversal (from the lower end Ma to upper end Mb of stack layer M) terminates.
Next, traversal direction inverts, into traversal (from the upper end Mb to lower end Ma of stack layer M) next time,
By controlling by signal drives degree adjustment valve 17, the aperture of degree adjustment valve is tapered into from 100%.Flow direction exhaust as a result,
The flow of glass raw material gas with pipeline L5 is gradually decreased from F2.On the contrary, flowing to the glass raw material gas of supplying tubing line L4
Flow gradually increase.At the time of the stacked position of glass granules becomes S2, the aperture of degree adjustment valve 17 becomes 0%, court
The stacking of the sides downward end Ma is carried out by each stage same as described above.
As described above, by stack layer M laminated multi-layers, formed after the glass granules stacked body of defined outer diameter, by glass
The stacking of particle terminates.At this point, the air type operation valve 15a of unstrpped gas supply line L1 is closed, by purge gas supply line
The air type operation valve 15b of L2 is opened.As a result, purge gas from purge gas supply unit 13 by purge gas supply line L2,
Bus bar L3 (flow control mechanism 16), supplying tubing line L4 supply to reaction vessel 6 via burner 8, remain in above-mentioned warp
Glass raw material gas in road is discharged.
For the manufacturing device and manufacturing method of the glass granules stacked body of present embodiment, i.e.,
Make that when forming both ends Ma, Mb of stack layer M the glass raw material controlled by flow control mechanism 16 will not be changed
The flow of gas, thus, there is no the flow variations from changing flow until reaching constant flow rate.Thereby, it is possible to inhibit
The generation in non-effective portion, can inhibit effective portion of manufactured glass granules stacked body to shorten caused by being changed by flow.
In addition, formed both ends Ma, Mb and its near when, for example, by making to supply from flow control mechanism 16
Pipeline L5 is matched in the part flow direction exhaust of glass raw material gas, thus by the flow of the glass raw material gas supplied to burner 8
It reduces.Manufactured glass granules stacked body is being dehydrated and is being sintered when transparence as a result, bubble can be inhibited
It generates, inhibits the breakage of the glass granules stacked body caused by bubble.
In addition, when the conduct for including the refractive index for adjusting glass in the glass raw material gas supplied to burner 8
In the case of the germanium tetrachloride of additive, the flow of the germanium tetrachloride supplied to burner 8 can be inhibited to become unstable.Cause
This, can be such that the index distribution of manufactured glass granules stacked body stabilizes.
In addition, by being adjusted in the aperture of degree adjustment valve 17 of the exhaust with pipeline L5 settings, can make to confession
Gradually increase and decrease to the flow of the glass raw material gas supplied with pipeline L4.Therefore, it is possible to inhibit the stream due to glass raw material gas
Measure the generation of the sharp deformation in non-effective portion caused by variation.
In addition, therefore, matching in pipeline L5 and supplying in exhaust with negative pressure is applied from device 11 of removing the evil in pipeline L5 to exhaust
With there may be pressure differences in pipeline L4.In contrast, it will be vented by the pressure by being carried out by pressure control mechanism 18 controls
It is adjusted to defined pressure with the pressure in pipeline L5, so as to eliminate and the pressure difference in supplying tubing line L4.Therefore, exist
When forming the non-effective portion of stack layer M, during making degree adjustment valve 17 be opened and closed, it can make to flow to the sides supplying tubing line L4
Glass raw material gas stability of flow change.As a result, for example when by 17 standard-sized sheet of degree adjustment valve, it can be easy to make flow direction
The flow of the glass raw material gas of the sides supplying tubing line L4 meets the flow for being set as target.
More than, in detail and the present invention is described with reference to specific embodiment, but for those skilled in the art
For member, it is clear that can make various changes, change under the premise without departing from the spirit and scope of the present invention.In addition, above-mentioned
Quantity, position, shape of the component parts of explanation etc. are not limited to the above embodiment, in order to implement the present invention, Neng Goubian
Quantity, position, shape for being more suitable for etc..
Claims (5)
1. a kind of manufacturing method of glass granules stacked body on one side carries out the flow of glass raw material by flow control mechanism
Control is supplied to the burner of glass granules generation on one side, and glass is formed in the starting piece for moving back and forth and rotating in an axial direction
The stack layer of particle,
In the manufacturing method of the glass granules stacked body,
The flow for not changing the glass raw material controlled by the flow control mechanism makes forming the stack layer
Both ends when the flow of the glass raw material that is supplied to the burner be less than and forming portion in addition to the both ends
The flow for the glass raw material that timesharing is supplied to the burner.
2. the manufacturing method of glass granules stacked body according to claim 1, wherein
The glass raw material includes germanium tetrachloride.
3. the manufacturing method of glass granules stacked body according to claim 1 or 2, wherein
It is equipped with：Supplying tubing line makes the glass raw material from the flow control mechanism to the combustor flow；Branch matches
Pipeline carries out branch in the midway of the supplying tubing line from the supplying tubing line；And degree adjustment valve, it is configured at
The midway of pipeline is matched by the branch,
The aperture of the degree adjustment valve is adjusted, makes to supply to the burner when forming the both ends of the stack layer
The flow for the glass raw material given is less than the institute supplied to the burner when forming the part in addition to the both ends
State the flow of glass raw material.
4. the manufacturing method of glass granules stacked body according to claim 3, wherein match the outlet of pipeline in the branch
Equipped with device of removing the evil,
When forming the both ends of the stack layer, make the glass raw material to the device flowing of removing the evil, and will be described point
The pressure dominated in pipeline is adjusted to defined pressure.
5. a kind of manufacturing device of glass granules stacked body, with glass raw material feedway, the glass raw material feedway
When the heap for forming glass granules by the burner of glass granules generation in the starting piece for moving back and forth and rotating in an axial direction
When lamination, glass raw material is supplied to the burner,
In the manufacturing device of the glass granules stacked body,
The glass raw material feedway has：
The flow control mechanism of glass raw material；
Supplying tubing line makes the glass raw material from the flow control mechanism to the combustor flow；
Pipeline is matched in exhaust, and the glass raw material is made to be flowed from the flow control mechanism to device of removing the evil；And
Pressure control mechanism,
The exhaust has with pipeline：
Degree adjustment valve；
Second gas matches pipeline, and the second gas different from the glass raw material is made to be set to the aperture regulation
Converge the confluence in the downstream of valve；And
Pressure gauge is measured the exhaust with the pressure in pipeline near the confluence,
The pressure control mechanism is in a manner of so that the pressure measured by the pressure gauge is become defined pressure to described
The mechanism that the flow with pipeline of second gas is controlled.
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| JP2017-043574 | 2017-03-08 | ||
| JP2017043574A JP6809302B2 (en) | 2017-03-08 | 2017-03-08 | Manufacturing method and manufacturing equipment for glass fine particle deposits |
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| CN112174496A (en) * | 2019-07-03 | 2021-01-05 | 住友电气工业株式会社 | Glass raw material supply device and filter replacement method for glass raw material supply device |
| CN113165932A (en) * | 2018-12-04 | 2021-07-23 | 住友电气工业株式会社 | Raw material supply device and raw material supply method for producing glass fine particle deposit |
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| JP7058627B2 (en) * | 2019-06-11 | 2022-04-22 | 信越化学工業株式会社 | Manufacturing equipment and manufacturing method for porous glass base material for optical fiber |
| JP7194301B2 (en) * | 2019-06-11 | 2022-12-21 | 信越化学工業株式会社 | Manufacturing method of porous glass base material for optical fiber |
| CN112939447A (en) * | 2021-03-22 | 2021-06-11 | 杭州金星通光纤科技有限公司 | Manufacturing method for reducing production cost of optical fiber preform |
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| JP3521415B2 (en) * | 1995-10-26 | 2004-04-19 | 住友電気工業株式会社 | Manufacturing method of optical fiber preform |
| JP3521681B2 (en) * | 1996-08-13 | 2004-04-19 | 住友電気工業株式会社 | Manufacturing method of optical fiber preform |
| JP2001048550A (en) * | 1999-07-30 | 2001-02-20 | Sumitomo Electric Ind Ltd | Apparatus and method for producing porous glass preform |
| JP4467197B2 (en) * | 2001-02-26 | 2010-05-26 | 信越化学工業株式会社 | Porous glass base material manufacturing apparatus and manufacturing method |
| JP2003212554A (en) * | 2002-01-24 | 2003-07-30 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing fine glass particle deposit |
| JP2009102207A (en) * | 2007-10-25 | 2009-05-14 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing fine glass particle deposit |
| JP2012176861A (en) * | 2011-02-25 | 2012-09-13 | Asahi Glass Co Ltd | Method and apparatus for producing porous glass fine particle deposit |
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| CN113165932A (en) * | 2018-12-04 | 2021-07-23 | 住友电气工业株式会社 | Raw material supply device and raw material supply method for producing glass fine particle deposit |
| CN112174496A (en) * | 2019-07-03 | 2021-01-05 | 住友电气工业株式会社 | Glass raw material supply device and filter replacement method for glass raw material supply device |
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| JP6809302B2 (en) | 2021-01-06 |
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Application publication date: 20180925 |