CN103234635B - Photoelastic-modulation Fourier transform interference imaging spectrometer - Google Patents

Photoelastic-modulation Fourier transform interference imaging spectrometer Download PDF

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Publication number
CN103234635B
CN103234635B CN201310096076.4A CN201310096076A CN103234635B CN 103234635 B CN103234635 B CN 103234635B CN 201310096076 A CN201310096076 A CN 201310096076A CN 103234635 B CN103234635 B CN 103234635B
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light
mirror
bullet
fourier transform
imaging spectrometer
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CN103234635A (en
Inventor
陈友华
陈媛媛
王召巴
王志斌
王立福
张瑞
王艳超
魏海潮
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North University of China
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North University of China
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Abstract

The invention discloses a photoelastic-modulation Fourier transform interference imaging spectrometer allowing for high-speed scanning. The photoelastic-modulation Fourier transform interference imaging spectrometer comprises a scanning mirror, an entrance pupil, an off-axis three-mirror telescope composed of a spherical mirror, an aspherical mirror and a field diaphragm, and a photoelastic-modulation interferometer. Incident light from a target is reflected by the scanning mirror, enters the off-axis three-mirror telescope through the entrance pupil, is reflected, focused, demagnified and collimated by the off-axis three-mirror telescope, then enters the photoelastic-modulation interferometer for double-refraction interference modulation, and is finally subjected to spectral imaging by point scanning. The photoelastic-modulation Fourier transform interference imaging spectrometer has such advantages that imaging scanning is fast, vibration resistance is high, the spectrometer is impervious to detector picture elements, and spectral resolution and luminous flux are high.

Description

Play light modulation type Fourier transform inteference imaging spectrometer
Technical field
The present invention relates to a kind of imaging spectrometer, particularly a kind of fast, the bullet light modulation type Fourier transform inteference imaging spectrometer of high flux, high spectral resolution and high stability.
Background technology
Spectral imaging technology comes across the eighties in 20th century, can perception target in the information of spatial domain and spectral domain, obtain the two-dimensional space of target and one dimension spectroscopic data, formation three-dimensional data cube (data cube).Due to the information obtaining ability of its brilliance, two obtain development at full speed during the last ten years, be obtained in astronautics and airborne remote sensing, industry, agricultural, biological medicine, astrosurveillance, atmospheric exploration, environment and disaster monitoring and military field and apply very widely, become another strong means of optical detector technology.
The detection of color dispersion-type imaging spectral technology is visible and infrared weak radiation is quite difficult, and as the forward position of Comprehensive Report on Imaging Spectroscopy Development, inteference imaging spectrometer has that luminous flux is large, passage is many, signal to noise ratio (S/N ratio) advantages of higher, thus has broad application prospects in remote sensing and other multiple fields; Time-modulation type Fourier transform imaging spectrometer mostly realizes based on Michelson interference technology, its outstanding feature is highly sensitive, mechanical motion is relied on to produce large optical path difference, and then have very high spectral resolution, but it is slow that this must bring scanner uni image taking speed, the problems such as anti-vibration scarce capacity, and the servo-drive system matched with it and temperature control system are also very complicated; Spatial modulation type inteference imaging spectrometer has that structure is simple, volume is little, to the insensitive advantage of vibrations, but spectral resolution is lower, and nearly all adopts linear array or planar array detector, limits its light spectrum image-forming wavelength band.
Based on the existing relevant report of interferometer development playing optical modulation principle, but its spectral resolution is extremely low, only has 1000cm -1, still can not meet the demand of modern spectral imaging technology, although Buican Tudor N is to which proposing Bettering id eas, the luminous flux of this imagination is less than 1%, and practical value is very low.
Summary of the invention
It is slow that the present invention is intended to overcome traditional Michelson interferometer image taking speed, the shortcomings such as anti-vibration scarce capacity, provide that a kind of mechanical is moved, spectral resolution is very high, modulating speed is high and have the bullet light modulation type Fourier transform inteference imaging spectrometer of quick, high flux, high spectral resolution and the high stability of enough luminous fluxes.
Technical solution of the present invention is:
Play light modulation type Fourier transform inteference imaging spectrometer, it is characterized in that: comprise scanning reflection mirror 1, entrance pupil 2, from the anti-telescope of axle three, field stop 5, play light modulation type interferometer, wherein: comprise spherical mirror 3 and a pair aspheric mirror 4,6 from the anti-telescope of axle three, play light modulation type interferometer to comprise the polarizer 7, static birefringent crystal 8, play photomodulator 9, analyzer 11, imaging mirror 12 and detector 13, wherein: play photomodulator and comprise again piezoelectric quartz driver, play luminescent crystal and high reflection film, from target incident ray through scanning reflection mirror reflection after, the light of certain visual angle scope is selected to enter from the anti-telescope of axle three through entrance pupil, light is through reflecting from the anti-telescope of axle three, focus on, contracting restraint and is entered bullet optical modulation interferometer after collimate and carries out birefringence interference modulation: the polarizer and the analyzer of bullet optical modulation interferometer are polarized incident light, then the static light path difference of specific size is produced by static birefringent crystal, by bullet photomodulator, synthetic birefringence interference modulations is carried out to the polarized light of incidence again, produce interference fringe, the photosurface place that interference light after modulation focuses to detector is completed light spectrum image-forming by last imaging mirror.
Through can be directional light, diverging light or converging light from the light beam after the anti-telescope of axle three.
Each optical element that composition plays light modulation type Fourier transform inteference imaging spectrometer all adopts total-reflection type optical element except entrance pupil and field stop, and all reflecting elements are all coated with high reflection film.
Described scanning reflection mirror is level crossing, carries out point by point scanning to target.
Described imaging mirror can be spherical reflector or off-axis parabolic mirror, also can be the imaging mirror group that aforementioned two kinds of arrangements of mirrors are formed.
The high reflection film that before and after described bullet luminescent crystal, logical optical surface is coated with is staggered symmetrical.
The optical direction of described static birefringent crystal is the optical axis direction of crystal, and its static light path difference produced is not less than bullet light modulator modulates optical path difference.
Described detector can be detector array can be also point probe, is positioned over the focus place of catoptric imaging mirror.
The described polarizer and the mutually orthogonal placement of analyzer, and become ± 45 ° of angles with bullet photomodulator respectively.
The sweep speed of described scanning reflection mirror is mated with the modulation rate playing optical modulation interferometer.
Compared with prior art, its outstanding substantive distinguishing features and remarkable result are in the present invention:
1) utilize bullet optical modulation interferometer to instead of traditional Michelson interferometer, the interference modulations time is tens of μ s, makes light spectrum image-forming sweep velocity improve 3 ~ 4 orders of magnitude than traditional Michelson;
2) except scanning mirror, systematic inorganic tool moving component, avoids a series of technical difficulty, the anti-vibration ability brought by precise direct line sweep index glass strong;
3) system is without the need to spectroscopic imaging, decreases whole optical aberration, is carried out the imaging way of point by point scanning by high-velocity scanning catoptron, avoids the imaging resolution restriction because detector array brings, greatly improves the imaging resolution of spectrometer;
4) the multiple reflections optical texture playing photomodulator has taken into account spectral resolution and the luminous flux of system;
5) system principle and structure simply, are convenient to processing, are easy to Installation and Debugging.
Accompanying drawing explanation
Fig. 1 is the structural principle schematic diagram that the present invention plays light modulation type Fourier transform inteference imaging spectrometer;
Fig. 2 is the structural drawing that the present invention plays photomodulator;
Fig. 3 is that the present invention plays optical modulation crystal multiple reflections principle schematic;
Fig. 4 is the structural principle schematic diagram of the embodiment of the present invention.
Embodiment
To develop simultaneously embodiment below in conjunction with accompanying drawing, introduce detailed technology scheme of the present invention, the present embodiment is only an example, and technology of the present invention is not limited to the present embodiment.
As shown in Figure 1, play light modulation type Fourier transform inteference imaging spectrometer to comprise: scanning reflection mirror 1, entrance pupil 2, from the anti-telescope of axle three, field stop 5 and play light modulation type interferometer, wherein: comprise spherical mirror 3, aspheric mirror 4,6 from the anti-telescope of axle three; Play light modulation type interferometer to comprise the polarizer 7, analyzer 11, static birefringent crystal 8, play photomodulator 9, imaging mirror 12 and detector 13.
Through field stop 2 after being reflected by scanning reflection mirror 1 from the incident light of target, restraint by reflecting from the anti-telescope of axle three, focusing on, contract and collimate again, then birefringence interference modulation is carried out via bullet optical modulation interferometer, finally by imaging on the photosurface being focused to detector 13 by imaging mirror 12.
Scanning reflection mirror 1 is plane mirror, and it carries out point by point scanning to target, and its sweep speed and system intervention match modulation period, and its instantaneous field of view angle is determined according to the demand of imaging resolution.Form spectrum-image datacube after scanning reflection mirror 1 pair of target carries out full-field scanning, the spectrum picture of whole target to be measured after carrying out rebuilding spectrum, can be obtained.
Entrance pupil 2 and field stop 5 limit respectively through the aperture of light beam and field angle, elimination parasitic light limit incident intensity.Use one or more levels diaphragm of axially symmetric structure, and after carrying out the process such as oxidizing blackening, the direction entering imaging spectrometer light beam can be controlled, eliminate the parasitic light outside field angle.
From the anti-telescope of axle three, major advantage comprises: there is not any aberration, can be used for wide spectrum imaging, is specially adapted to long-focus camera and light spectrum image-forming camera; Clear aperture is very large, and light is at free-space propagation, and optical system non-stop layer blocks, and need not pass through optical glass, is easy to solve the problem caused by material; And compact conformation, required optical element is few, is convenient to use catoptron folded optical path, and can adopt ultra-thin mirror base (as SiC) or Lightweight Technology, greatly reduces the quality of catoptron; Reflect and have more without the superiority of blocking, optical transfer function mtf value is high from axle system, whole telescope is insensitive to ghost image, and has more stable polarized performance.
As shown in Figure 2, play photomodulator 9 to comprise piezoelectric quartz driver 14, play luminescent crystal 15 and high reflection film 10.Wherein, piezoelectric quartz driver 14 profile is rectangular parallelepiped, the preferred xyt(-18.5 ° of its cut direction), this cut direction well ensure that the unicity of vibration frequency, ensures the long-time stable of work; Playing luminescent crystal 15 is octagon, its forward and backward logical optical surface interlaced be coated with high reflection film 10, after light enters crystals with specific incident angle, the total reflection (as shown in Figure 3) of tens of times can be realized, thus make light modulated path difference improve decades of times than traditional single incidence, and decrease the unnecessary reflected light loss of energy.For realizing systemic-function, entering the collimated beam diameter playing luminescent crystal 15 should be less than 4mm, and the depth of parallelism should be better than 10mrad.Due to the resonant operational characteristic of whole instrument, it is vibrated to external world insensitive, thus ensure that instrument has very high anti-vibration ability.
As shown in Figure 4, the be hit by a bullet design parameter of light modulation type Fourier transform inteference imaging spectrometer of the present embodiment is: wavelength band is 0.85 μm ~ 16 μm; Spectral resolution is better than 4cm -1; Sweep limit is within the scope of ± 60 °; Telescope relative aperture is f/6.5; Opening of the telescope is 0.71 °; The interference modulations time is 10 μ s; A full-field scanning imaging time <300ms; Efficiency of light energy utilization >25%.
In the present embodiment, the bullet luminescent crystal material playing photomodulator 9 is ZnSe, and profile is the octagon of wide 33.2mm, thick 32mm, 10mm chamfering; Piezoelectric quartz crystal is the rectangle of 50.8cm × 26.1cm × 6.4cm; The polarizer 7 is with analyzer 11 for extinction ratio is 200:1, and the holography that ZnSe is substrate etches polaroid; Imaging mirror 12 is the refocusing mirror group of 5 imaging mirror 12a-12e formations that curvature is different, and this mirror group can match with the field angle of infrared eye preferably, and can play the effect of certain anaberration; From the anti-telescopical field angle of axle three within the scope of ± 25 °; Entrance pupil diameter is 100 ~ 300mm preferably; Preferably 0.1 ° ~ 1.5 °, scanning instantaneous field of view angle; After the light of imaging mirror 12e reflection enters optical splitter 16 light splitting, project detector 13a and detector 12b respectively, be respectively used to receive visible ray and infrared light, detector 13a and detector 12b is HgCdTe point probe, it should be noted that, optical splitter 16 in the present embodiment is only set by the light of detection different wave length, is not necessity composition that the present invention plays light modulation type Fourier transform inteference imaging spectrometer; All catoptrons are all coated with gold and are all-trans film, and add protective seam; The resonant operational voltage >1000V of interferometer; Collimated light beam incident angle 7 °, order of reflection 25 times, after coordinating static birefringent crystal 8, its light modulated path difference >2.5mm.

Claims (10)

1. play light modulation type Fourier transform inteference imaging spectrometer, it is characterized in that: comprise scanning reflection mirror (1), entrance pupil (2), from the anti-telescope of axle three, field stop (5), play light modulation type interferometer, wherein: comprise spherical mirror (3) and a pair aspheric mirror (4,6) from the anti-telescope of axle three, play light modulation type interferometer to comprise the polarizer (7), static birefringent crystal (8), play photomodulator (9), analyzer (11), imaging mirror (12) and detector (13), wherein: play photomodulator (9) and comprise again piezoelectric quartz driver, play luminescent crystal and high reflection film, from target incident ray through scanning reflection mirror reflection after, the light of certain visual angle scope is selected to enter from the anti-telescope of axle three through entrance pupil, light is through reflecting from the anti-telescope of axle three, focus on, contracting restraint and is entered bullet optical modulation interferometer after collimate and carries out birefringence interference modulation: the polarizer and the analyzer of bullet optical modulation interferometer are polarized incident light, then the static light path difference of specific size is produced by static birefringent crystal, by bullet photomodulator, synthetic birefringence interference modulations is carried out to the polarized light of incidence again, produce interference fringe, the photosurface place that interference light after modulation focuses to detector is completed light spectrum image-forming by last imaging mirror.
2. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, is characterized in that: through from the light beam after the anti-telescope of axle three being directional light or for diverging light or for converging light.
3. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, it is characterized in that: in this bullet light modulation type Fourier transform inteference imaging spectrometer except entrance pupil and field stop, each optical element all adopts total-reflection type optical element, and is all coated with high reflection film.
4. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, is characterized in that: described scanning reflection mirror is level crossing, carries out point by point scanning to target.
5. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, is characterized in that: described imaging mirror is spherical reflector or off-axis parabolic mirror, or the imaging mirror group that aforementioned two kinds of arrangements of mirrors are formed.
6. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, is characterized in that: the high reflection film that before and after described bullet luminescent crystal, logical optical surface is coated with is staggered symmetrical.
7. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, it is characterized in that: the optical direction of described static birefringent crystal is the optical axis direction of crystal, its static light path difference produced is more than or equal to bullet light modulator modulates optical path difference.
8. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, is characterized in that: described detector is detector array, or point probe, is positioned over the focus place of imaging mirror.
9. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, is characterized in that: the described polarizer and the mutually orthogonal placement of analyzer, and becomes ± 45 ° of angles with bullet photomodulator respectively.
10. bullet light modulation type Fourier transform inteference imaging spectrometer according to claim 1, is characterized in that: the sweep speed of described scanning reflection mirror is mated with the modulation rate playing optical modulation interferometer.
CN201310096076.4A 2013-03-22 2013-03-22 Photoelastic-modulation Fourier transform interference imaging spectrometer Expired - Fee Related CN103234635B (en)

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CN103884425B (en) * 2014-03-21 2016-04-06 中北大学 Tool is interfered in the optical modulation of a kind of Herriott type multiple reflections bullet
CN105372820B (en) * 2015-12-22 2017-11-07 中国科学院合肥物质科学研究院 A kind of multi-wavelength couples the device of same light path
CN107290057B (en) * 2017-07-13 2018-08-31 中北大学 A kind of calibrating method playing light modulation Fourier trasform spectroscopy
CN107727249B (en) * 2017-09-04 2019-05-17 中国科学院上海光学精密机械研究所 The single-shot measuring device and measurement method of ultra-intense ultra-short laser pulse far field pulsewidth
CN110487134B (en) * 2019-08-07 2021-02-23 中北大学 Device and method for measuring combustion speed and temperature of explosion flame
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CN114199885A (en) * 2021-12-09 2022-03-18 合肥御微半导体技术有限公司 Wafer detection device and method thereof

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