CN103213172B - Device for water electrode atmospheric plasma processing large-caliber aspheric optical part - Google Patents
Device for water electrode atmospheric plasma processing large-caliber aspheric optical part Download PDFInfo
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- CN103213172B CN103213172B CN201310177066.3A CN201310177066A CN103213172B CN 103213172 B CN103213172 B CN 103213172B CN 201310177066 A CN201310177066 A CN 201310177066A CN 103213172 B CN103213172 B CN 103213172B
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Abstract
The invention relates to a device for water electrode atmospheric plasma processing a large-caliber aspheric optical part, belongs to the technical field of plasma processing large-caliber aspheric optical parts, and aims at solving the problems of processing efficiency and surface quality of high-precision large-caliber aspheric optical parts. The device is characterized in that the upper end face of a shaped electrode is connected to a work frame; water sprayed by all sprayers arranged below the part to be processed is ejected to the lower end face of the optical part to be processed; the shaped electrode is close to the to-be-processed surface of the optical part to be processed; an air outlet pipe is arranged close to a discharging gap; an air inlet port of the air outlet pipe is communicated with an air outlet port of a mixed plasma air source. According to the invention, water jet in lineal arrangement is used as the electrode for plasma processing, and the multiple flows of water jet can ensure that the discharge characteristic of each line is the same, thus avoiding the problem of non-uniform discharge.
Description
Technical field
The invention belongs to the technical field of plasma process aperture aspherical optical element.
Background technology
Along with the development of optical technology, more and more higher to the processing request of large-diameter optical part, not only require higher surface figure accuracy, lower surface roughness, damage without top layer and subsurface stratum, and require to improve working (machining) efficiency.At present, the method of small tool polishing of computerizeing control mainly is adopted in processing for large-diameter optical part, as air bag polishing, MRF etc., although these polishing technologies can obtain higher surface figure accuracy and lower surface roughness, but the process-cycle is long, efficiency is low, and top layer to a certain degree and subsurface stratum damage may be caused.And atmosphere plasma processing be based on particle between chemical reaction, non-contacting processing mode can avoid top layer and subsurface stratum damage generation.At present, the processing of the atmosphere plasma of the capacitance coupling type of large area shaped electrode is adopted can to realize higher working (machining) efficiency.But the electric discharge of large area shaped electrode produces the uneven phenomenon of electric discharge than being easier to, thus causes the correction of the flank shape effect of large-diameter optical part not satisfactory.In addition, the relative motion between large area shaped electrode is difficult to realize, and fix the range of work of workpiece, therefore process flexibility is poor.
Summary of the invention
The object of this invention is to provide the device of a kind of water electrode atmosphere plasma processing aperture aspherical optical element, in order to solve working (machining) efficiency and the surface quality problems of high-precision heavy-caliber aspheric surface optical accessory.
Described object is realized by following scheme: the device of described a kind of water electrode atmosphere plasma processing aperture aspherical optical element, and it is made up of shaped electrode, lowering or hoisting gear, radio-frequency power supply, hybrid plasma source of the gas, water pump;
The upper surface insulation of shaped electrode is connected on the vertical motion falsework of lowering or hoisting gear, makes shaped electrode be connected the anode as atmospheric pressure plasma with the output of radio-frequency power supply; Optical element to be processed is installed on fixture, row's shower nozzle arranged in a straight line is provided with in the below of part to be processed, all shower nozzles are all arranged on multifreedom motion workbench, the water inlet of all shower nozzles all connects the delivery port of water pump, make there is certain gap between the jet hole of the lower surface of optical element to be processed and all shower nozzles, the distance in gap is 1mm-50mm; According to the requirement of removing function halfwidth, the diameter of the jet hole of all shower nozzles can regulate within the scope of 0.5mm-50mm; The water of all shower nozzle ejections is all ejected on the lower surface of optical element to be processed, and the water of all shower nozzle ejections all passes through the negative electrode of shower nozzle ground connection as atmospheric pressure plasma; Shaped electrode near the work surface of optical element to be processed, and makes to keep certain discharging gap between them, and arcing distance scope is 2mm-5mm; Be provided with escape pipe near discharging gap, the air inlet port of escape pipe is communicated with the air outlet air guide of hybrid plasma source of the gas.
The present invention adopts the water jet of linear arrangement as electrode to carry out plasma process, and many water jets can ensure that the flash-over characteristic on every bar straight line is identical, avoids uneven problem of discharging.The processing bore of water jet easily regulates, and can realize the processing on different curvature radius optical element surface, and function is removed by the unit obtaining different halfwidth.The scope that can process as required selects the number of Water jet sprayer, and need to select multiple shower nozzle during large area correction of the flank shape, need to select single shower nozzle during local shape modifications, process flexibility is good.
The advantage that the present invention also has is:
1. the present invention adopts atmosphere plasma to process, and avoids the problem such as surface residual stress and subsurface stratum damage that conventional contact polishing method causes;
2. water jet arranged in a straight line can ensure that the flash-over characteristic on every bar straight line is identical, avoids uneven problem of discharging;
3. the aperture of each shower nozzle of water jet electrode arranged in a straight line easily regulates, and function is removed by the Gaussian unit that can obtain different halfwidth;
4. the scope can processed as required selects the number of water jet electrode showerhead arranged in a straight line, need to select multiple shower nozzle during large area correction of the flank shape, need can select single shower nozzle during local shape modifications, discharge position can by the position control of water flow jet, and processing removal amount can be controlled accurately by the water flow jet time controlling relevant position;
5. water jet electrode arranged in a straight line not only can carry out the scanning motion of linear grating formula, and can carry out rotary scanning motion formation circle electrode;
6. water jet electrode arranged in a straight line plays cooling effect, effectively controls the fuel factor in atmosphere plasma process, reduces the impact of temperature on process.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention;
Fig. 2 is shaped electrode 1 in Fig. 1, position relationship structural representation between optical element to be processed 4 and all shower nozzle 2-3.
Detailed description of the invention
Detailed description of the invention one: shown in composition graphs 1, Fig. 2, it is made up of shaped electrode 1, lowering or hoisting gear 2, radio-frequency power supply 3, hybrid plasma source of the gas 5, water pump 6;
The upper surface insulation of shaped electrode 1 is connected on the vertical motion falsework 2-1 of lowering or hoisting gear 2, makes shaped electrode 1 be connected the anode as atmospheric pressure plasma with the output of radio-frequency power supply 3; Optical element 4 to be processed is installed on fixture 2-2, row's shower nozzle 2-3 arranged in a straight line is provided with in the below of part 4 to be processed, all shower nozzle 2-3 are arranged on multifreedom motion workbench 2-4, the water inlet of all shower nozzle 2-3 all connects the delivery port of water pump 6, make there is certain gap between the jet hole of the lower surface of optical element 4 to be processed and all shower nozzle 2-3, the distance in gap is 1mm-50mm; According to the requirement of removing function halfwidth, the diameter of the jet hole of all shower nozzle 2-3 can regulate within the scope of 0.5mm-50mm; The water that all shower nozzle 2-3 spray all is ejected on the lower surface of optical element 4 to be processed, and the water that all shower nozzle 2-3 spray all passes through the negative electrode of shower nozzle 2-3 ground connection as atmospheric pressure plasma; Shaped electrode 1 near the work surface of optical element 4 to be processed, and makes to keep certain discharging gap between them, and arcing distance scope is 2mm-5mm; Be provided with escape pipe 5-1 near discharging gap, the air inlet port of escape pipe 5-1 is communicated with the air outlet air guide of hybrid plasma source of the gas 5.
The described material turning shaped electrode 1 is aluminium.
The material of described shower nozzle 2-3 is aluminium.
The electrical conductivity of water that all shower nozzle 2-3 spray is 125 μ s/cm-1250 μ s/cm, and the pressure of water is 0.1MPa-0.5Mpa.
The frequency of described radio-frequency power supply 3 is 13.56MHz, and operating power is 200W-400W, and peak power is 2KW.
Described hybrid plasma source of the gas 5 is three road gas Flowrate Control Systems, and controllable gas range of flow is 0-40L/min.
Atmosphere plasma excited gas in described hybrid plasma source of the gas 5 can be the inert gas such as helium, argon gas; Reacting gas can be sulfur hexafluoride, carbon tetrafluoride, Nitrogen trifluoride etc.; Assist gas can be oxygen; The flow of plasma gas is 2 L/min-5 L/min, and reaction gas flow is 20 ml/min-90 ml/min, and the ratio of assist gas and reaction gas flow is 0%-50%.
The material of described optical element to be processed 4 is silicon-based optical material, as vitreous silica, carborundum, ultra-low expansion glass etc.
Operation principle: by the anode of radio-frequency power supply 3 output joint forming electrode 1 as atmospheric pressure plasma, all shower nozzle 2-3 be sprayed onto water on the lower surface of optical element 4 to be processed all ground connection as the ground electrode of atmospheric pressure plasma, thered is provided to excite by hybrid plasma source of the gas 5 and produce the gas of plasma and be full of gap between shaped electrode 1 and optical element to be processed 4 work surface, output electric energy is provided by radio-frequency power supply 3, plasma is produced at the discharging gap of shaped electrode 1 and optical element to be processed 4, simultaneous reactions gas is excited, there is chemical reaction in the surface producing the atom and optical element to be processed 4 with reactivity, and generate volatile product and leave piece surface, realize the not damaged rapid processing treating processing optical part 4 thus.
In processing unit (plant) of the present invention, optical element is fixedly clamped by cylinder and locating piece, water jet can carry out multifreedom motion (comprising the rectilinear motion in three directions and the rotary motion around vertical direction), and shaped electrode can move up and down to ensure arcing distance.In process, by the position regulating the position of water jet to carry out controlled discharge, by controlling the time controlled working removal amount that relevant position water sprays.In addition, water jet not only as sparking electrode, and can play cooling effect, effectively can control the fuel factor in atmosphere plasma process, reduce temperature to the impact of clearance, thus obtain stable removal function.Therefore, the present invention adopts the water jet of linear arrangement to carry out correction of the flank shape as the atmosphere plasma processing unit (plant) of electrode to large-diameter optical part surface.
Claims (4)
1. the device of water electrode atmosphere plasma processing aperture aspherical optical element, is characterized in that it is made up of shaped electrode (1), lowering or hoisting gear (2), radio-frequency power supply (3), hybrid plasma source of the gas (5), water pump (6);
The upper surface insulation of shaped electrode (1) is connected on the vertical motion falsework (2-1) of lowering or hoisting gear (2), makes shaped electrode (1) be connected the anode as atmospheric pressure plasma with the output of radio-frequency power supply (3); Optical element to be processed (4) is installed on fixture (2-2), row's shower nozzle (2-3) arranged in a straight line is provided with in the below of part to be processed (4), all shower nozzles (2-3) are all arranged on multifreedom motion workbench (2-4), the water inlet of all shower nozzles (2-3) all connects the delivery port of water pump (6), make there is certain gap between the jet hole of the lower surface of optical element to be processed (4) and all shower nozzles (2-3), the distance in gap is 1mm-50mm; According to the requirement of removing function halfwidth, the diameter of the jet hole of all shower nozzles (2-3) can regulate within the scope of 0.5mm-50mm; The water that all shower nozzles (2-3) spray all is ejected on the lower surface of optical element to be processed (4), and the water that all shower nozzles (2-3) spray is all by the negative electrode of shower nozzle (2-3) ground connection as atmospheric pressure plasma; Shaped electrode (1) near the work surface of optical element to be processed (4), and makes to keep certain discharging gap between them, and arcing distance scope is 2mm-5mm; Be provided with escape pipe (5-1) near discharging gap, the air inlet port of escape pipe (5-1) is communicated with the air outlet air guide of hybrid plasma source of the gas (5).
2. the device of water electrode atmosphere plasma processing aperture aspherical optical element according to claim 1, is characterized in that the material of described shaped electrode (1) is aluminium.
3. the device of water electrode atmosphere plasma processing aperture aspherical optical element according to claim 1, is characterized in that the atmosphere plasma excited gas in described hybrid plasma source of the gas (5) can be helium, argon inert gas; Reacting gas can be sulfur hexafluoride, carbon tetrafluoride, Nitrogen trifluoride; Assist gas can be oxygen.
4. the device of water electrode atmosphere plasma processing aperture aspherical optical element according to claim 1, it is characterized in that the electrical conductivity of water that all shower nozzles (2-3) spray is 125 μ s/cm-1250 μ s/cm, the pressure of water is 0.1MPa-0.5Mpa.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310177066.3A CN103213172B (en) | 2013-05-14 | 2013-05-14 | Device for water electrode atmospheric plasma processing large-caliber aspheric optical part |
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| CN201310177066.3A CN103213172B (en) | 2013-05-14 | 2013-05-14 | Device for water electrode atmospheric plasma processing large-caliber aspheric optical part |
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| CN103213172A CN103213172A (en) | 2013-07-24 |
| CN103213172B true CN103213172B (en) | 2015-01-07 |
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| KR100472410B1 (en) * | 2002-03-29 | 2005-03-10 | 삼성전자주식회사 | Electrode assembly for manufacturing a semiconductor substrate and manufacturing apparatus having the same |
| CN1864921A (en) * | 2006-06-14 | 2006-11-22 | 哈尔滨工业大学 | Capacitive coupling radio frequency normal pressure plasma torch for machining ultra-smooth surface |
| CN100406197C (en) * | 2006-07-17 | 2008-07-30 | 哈尔滨工业大学 | Normal atmosphere plasma burnishing device |
| CN201283534Y (en) * | 2008-09-03 | 2009-08-05 | 长春理工大学 | Numerical control polishing machine tool |
| CN102730945B (en) * | 2012-07-18 | 2014-08-06 | 哈尔滨工业大学 | Large-area contact type machining device for fused quartz by plasma discharge machining |
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