CN103212823A - Focus seeking method for photoelectric focus seeking device - Google Patents

Focus seeking method for photoelectric focus seeking device Download PDF

Info

Publication number
CN103212823A
CN103212823A CN2012100165819A CN201210016581A CN103212823A CN 103212823 A CN103212823 A CN 103212823A CN 2012100165819 A CN2012100165819 A CN 2012100165819A CN 201210016581 A CN201210016581 A CN 201210016581A CN 103212823 A CN103212823 A CN 103212823A
Authority
CN
China
Prior art keywords
photoelectricity
focus
burnt device
photoelectric sensor
control system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012100165819A
Other languages
Chinese (zh)
Other versions
CN103212823B (en
Inventor
魏志凌
宁军
周强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Theta Micro Co Ltd
Original Assignee
Kunshan Theta Micro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunshan Theta Micro Co Ltd filed Critical Kunshan Theta Micro Co Ltd
Priority to CN201210016581.9A priority Critical patent/CN103212823B/en
Publication of CN103212823A publication Critical patent/CN103212823A/en
Application granted granted Critical
Publication of CN103212823B publication Critical patent/CN103212823B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Laser Beam Processing (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

The invention relates to a focus seeking method for a photoelectric focus seeking device, and mainly solves the problem that a focal position is difficult to find during laser cutting operation in the prior art. The invention adopts the technical scheme that the photoelectric focus seeking device consists of a photoelectric sensor, an automatic lifting seat and a computer control system. When the focal position is arranged in an ideal position below a cutting nozzle in need of adjusting the upward and downward movement of a focusing mirror, the photoelectric focus seeking device is placed below the cutting nozzle, guiding light is emitted by laser light, the photoelectric focus seeking device is started, the automatic lifting platform of the photoelectric focus seeking device upwards moves, the guiding light falls onto the photoelectric sensor, the sensor senses the light and is used for sending out a signal, a computer is used for starting algorithm and control, and when the lifting platform rises to a certain height and a light spot changes to the smallest point, the control system is used for automatically stopping the working of the lifting seat. According to the invention, the problem is better solved, and the focus seeking method can be applied to the detection of the working focal position of the focusing mirror.

Description

Photoelectricity is sought the focus searching method of burnt device
 
Technical field
The present invention relates to a kind of detection means that is used for focus lamp job spotlight position, especially for determining of laser cutting device focus lamp job spotlight position.
Background technology
Laser cutting device is by focus lamp approximately parallel laser beam to be pooled a minimum high-energy point to carry out high-accuracy cutting production, general focal position cut quality the best during the 200um left and right sides below the cutting head light-emitting window, as shown in Figure 1, but owing in same lens barrel, needing to place the focus lamp of different focal because of the cutting demand, perhaps each lens barrel manufacturing tolerance is not quite similar, therefore the position of focus generally can be at ideal position, as shown in Figure 2, so just need move up and down and regulate the focal position focus lamp, be below cutting head, to draw near by perusal with steel disc in the past, the breakdown critical localisation of steel disc judges how many focus lamps moves up and down, complex operation, certain danger is arranged, and miss by a mile.
Chinese patent CN101169602 discloses a kind of focusing leveling measuring method and device, relates to the new method of the focusing and leveling sensor-based system that is applied to wafer in the projection lithography system, belongs to the optical measurement field.The present invention includes three parts: light source collimating module, focusing subsystem and leveling subsystem.Laser instrument of the present invention sends laser through the single-mode fiber collimation, after passing through the drift compensation device again, seeing through polarizing beam splitter and λ/4 wave plates incides on the tested silicon chip, make light repeatedly pass through tested silicon chip through plane mirror and right-angle reflecting prism, utilize set of lenses before position sensor, to amplify again, obtain silicon chip surface out of focus information.Utilize the plane optical splitter that light is returned along the road, see through lens and incide on the Position-Sensitive Detector, thereby obtain the two-dimentional inclination information of silicon chip surface.
Chinese patent CN1811519 discloses a kind of laser guiding focusing device for telescope, and it mainly connects pawl, right connection pawl, cross bar, montant and semiconductor laser etc. by a left side and forms.Described semiconductor laser is placed on the telescope ocular front end, the laser beam that the adjusting semiconductor laser sends passes telescope directive level crossing back reflection at a distance to scale, regulate hot spot again and become a fleck on scale, this has just realized telescope laser guide and focusing function.
The present invention is that the photoelectricity of a kind of focus lamp job spotlight position is sought burnt device, and this part is placed under the cutting head, and opening program will be sought the focal position automatically.
Summary of the invention
Technical problem to be solved by this invention is the problem that the laser cutting device focus lamp job spotlight that exists in the prior art is difficult to seek, the invention provides a kind of new photoelectricity and seek the focus searching method of burnt device, the used photoelectricity of this focus searching method is sought burnt utensil the advantage of seeking Jiao easily.
For solving the problems of the technologies described above, the technical solution used in the present invention is as follows: a kind of photoelectricity is sought the focus searching method of burnt device, comprises following several steps:
A) when needs adjusting focus lamp moves up and down, photoelectricity is sought the below that burnt device is placed on the laser cutting machine cutting head;
B) laser is left guiding light, starts photoelectricity and seeks burnt device, and the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, the signal input computer control system of photoelectric sensor, and computer begins s operation control;
C) be raised to certain altitude when lifting platform, hot spot becomes minimum when some again, and control system stops elevating bracket work automatically;
D) measure the cutting head light-emitting window and seek burnt device upper surface distance, cut cutting constant L again, be the position of focus lamp focus apart from photoelectricity.
Described photoelectricity is sought burnt device, comprise photoelectric sensor, motor, elevating bracket, elevating lever, computer control system, described elevating bracket has groove in two ends up and down, motor be positioned at elevating bracket lower end inside grooves, elevating lever below, the motor upper end links to each other with the elevating lever bottom, and elevating lever is arranged in the upper grooves of elevating bracket, and elevating lever can move up and down with respect to elevating bracket, photoelectric sensor is positioned at the center of top groove of elevating lever, the signal input computer control system of photoelectric sensor.
In the technique scheme, when laser is penetrated on photoelectric sensor, photoelectric sensor produces signal, and signal is imported described computer control system.
In the technique scheme, described cutting constant L is relevant with the performance of laser cutting machine, and the numerical value of L is generally 200um.
It is an independently detection means that photoelectricity of the present invention is sought burnt device, is made up of photoelectric sensor, automatic lifting seat, computer control system.Regulating focus lamp at needs moves up and down when the focal position being occupy below the cutting head ideal position, photoelectricity is sought the below that burnt device is placed on cutting head, laser is left guiding light, start photoelectricity and seek burnt device, the self-raising platform that photoelectricity is sought burnt device moves up, and guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, computer begins s operation control, becomes minimumly when some again when lifting platform is raised to the certain altitude hot spot, and control system stops elevating bracket work automatically.Measure the cutting head light-emitting window and seek burnt device upper surface distance apart from photoelectricity and cutting about the ideal position that 200um is the focus lamp focus, according to cutting effect vernier focusing mirror position to satisfy the cutting demand.
The present invention is that the photoelectricity of a kind of focus lamp job spotlight position is sought burnt device, has solved the problem that laser cutting device focus lamp job spotlight is difficult to seek, and has improved debugging efficiency, and is simple to operate, safe and reliable, obtained better technical effect.
Description of drawings
Fig. 1 is a laser cutting ideal operation view.
Fig. 2 is that focus is not at desirable position view.
Fig. 3 seeks burnt device schematic diagram for photoelectricity.
Fig. 4 seeks burnt device for photoelectricity and seeks burnt process schematic diagram.
Fig. 5 seeks burnt device for photoelectricity and seeks burnt process schematic diagram.
Among Fig. 1,1 is focus lamp; 2 for converging light; 3 is the cutting head light-emitting window; 4 is that band is cut steel plate.
Among Fig. 2,1 is focus lamp; 2 for converging light; 3 is the cutting head light-emitting window; 4 is that band is cut steel plate; 5 move down for focus.
Among Fig. 3,1 is elevating lever; 2 is photoelectric sensor; 3 is motor; 4 is elevating bracket.
Among Fig. 4,1 is focus lamp; 2 for converging light; 3 seek burnt device for photoelectricity captures hot spot; 4 is elevating bracket.
Among Fig. 5,1 is focus lamp; 2 for converging light; 3 for being elevated to the focal position; 4 is elevating bracket.
 
The invention will be further elaborated below by specific embodiment, but be not limited only to present embodiment.
Specific embodiment
 
[embodiment 1]
A kind of photoelectricity is sought the focus searching method of burnt device, comprises following several steps:
A) when needs adjusting focus lamp moves up and down, photoelectricity is sought the below that burnt device is placed on the laser cutting machine cutting head;
B) laser is left guiding light, starts photoelectricity and seeks burnt device, and the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, the signal input computer control system of photoelectric sensor, and computer begins s operation control;
C) be raised to certain altitude when lifting platform, hot spot becomes minimum when some again, and control system stops elevating bracket work automatically;
D) measure the cutting head light-emitting window and seek burnt device upper surface distance, cut cutting constant L again, be the position of focus lamp focus apart from photoelectricity.
Described photoelectricity is sought burnt device, as shown in Figure 3, comprise photoelectric sensor 2, motor 3, elevating bracket 4, elevating lever 1, computer control system, described elevating bracket has groove in two ends about in the of 4, motor 3 be positioned at elevating bracket 4 lower end inside grooves, elevating lever 1 below, motor 3 upper ends link to each other with elevating lever 1 bottom, elevating lever 1 is arranged in the upper grooves of elevating bracket 4, elevating lever 1 can move up and down with respect to elevating bracket 4, photoelectric sensor 2 is positioned at the center of top groove of elevating lever 1, the signal input computer control system of photoelectric sensor 2.
 
[embodiment 2]
A kind of photoelectricity is sought the focus searching method of burnt device, comprises following several steps:
A) when needs adjusting focus lamp moves up and down, photoelectricity is sought the below that burnt device is placed on the laser cutting machine cutting head;
B) laser is left guiding light, starts photoelectricity and seeks burnt device, and the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, the signal input computer control system of photoelectric sensor, and computer begins s operation control;
C) be raised to certain altitude when lifting platform, hot spot becomes minimum when some again, and control system stops elevating bracket work automatically;
D) measure the cutting head light-emitting window and seek burnt device upper surface distance, cut cutting constant L again, be the position of focus lamp focus apart from photoelectricity.
Described photoelectricity is sought burnt device, comprise photoelectric sensor, motor, elevating bracket, elevating lever, computer control system, described elevating bracket has groove in two ends up and down, motor be positioned at elevating bracket lower end inside grooves, elevating lever below, the motor upper end links to each other with the elevating lever bottom, and elevating lever is arranged in the upper grooves of elevating bracket, and elevating lever can move up and down with respect to elevating bracket, photoelectric sensor is positioned at the center of top groove of elevating lever, the signal input computer control system of photoelectric sensor.When laser is penetrated on photoelectric sensor, photoelectric sensor produces signal, and signal is imported described computer control system.
 
[embodiment 3]
A kind of photoelectricity is sought the focus searching method of burnt device, comprises following several steps:
A) when needs adjusting focus lamp moves up and down, photoelectricity is sought the below that burnt device is placed on the laser cutting machine cutting head;
B) laser is left guiding light, starts photoelectricity and seeks burnt device, and the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, the signal input computer control system of photoelectric sensor, and computer begins s operation control;
C) be raised to certain altitude when lifting platform, hot spot becomes minimum when some again, and control system stops elevating bracket work automatically;
D) measure the cutting head light-emitting window and seek burnt device upper surface distance, cut cutting constant L again, be the position of focus lamp focus apart from photoelectricity.Wherein, L is 200um.Photoelectricity is sought burnt process as shown in Figure 4 and Figure 5.
 
[embodiment 4]
A kind of photoelectricity is sought the focus searching method of burnt device, comprises following several steps:
A) when needs adjusting focus lamp moves up and down, photoelectricity is sought the below that burnt device is placed on the laser cutting machine cutting head;
B) laser is left guiding light, starts photoelectricity and seeks burnt device, and the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, the signal input computer control system of photoelectric sensor, and computer begins s operation control;
C) be raised to certain altitude when lifting platform, hot spot becomes minimum when some again, and control system stops elevating bracket work automatically;
D) measure the cutting head light-emitting window and seek burnt device upper surface distance, cut cutting constant L again, be the position of focus lamp focus apart from photoelectricity.Wherein, L is 250um.
 
[embodiment 5]
It is an independently detection means that photoelectricity is sought burnt device, is made up of photoelectric sensor, automatic lifting seat, computer control system.Regulating focus lamp at needs moves up and down when the focal position being occupy below the cutting head ideal position, photoelectricity is sought the below that burnt device is placed on cutting head, laser is left guiding light, start photoelectricity and seek burnt device, the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, computer begins s operation control, become minimum when some again when lifting platform is raised to the certain altitude hot spot, control system stops elevating bracket work automatically, measure the cutting head light-emitting window and seek burnt device upper surface distance apart from photoelectricity and cutting about the ideal position that 200um is the focus lamp focus, according to cutting effect vernier focusing mirror position to satisfy the cutting demand.
 
[embodiment 6]
A kind of photoelectricity is sought burnt device, comprise photoelectric sensor, motor, elevating bracket, elevating lever, computer control system, described elevating bracket has groove in two ends up and down, motor be positioned at elevating bracket lower end inside grooves, elevating lever below, the motor upper end links to each other with the elevating lever bottom, and elevating lever is arranged in the upper grooves of elevating bracket, and elevating lever can move up and down with respect to elevating bracket, photoelectric sensor is positioned at the center of top groove of elevating lever, the signal input computer control system of photoelectric sensor.When laser is penetrated on photoelectric sensor, photoelectric sensor produces signal, and signal is imported described computer control system.
Above-mentioned photoelectricity is sought the focus searching method of burnt device, comprises following several steps:
A) when needs adjusting focus lamp moves up and down, photoelectricity is sought the below that burnt device is placed on the laser cutting machine cutting head;
B) laser is left guiding light, starts photoelectricity and seeks burnt device, and the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, the signal input computer control system of photoelectric sensor, and computer begins s operation control;
C) be raised to certain altitude when lifting platform, hot spot becomes minimum when some again, and control system stops elevating bracket work automatically;
D) measure the cutting head light-emitting window and seek burnt device upper surface distance, cut cutting constant L again, be the position of focus lamp focus apart from photoelectricity.Wherein, L is 200um.

Claims (3)

1. a photoelectricity is sought the focus searching method of burnt device, comprises following several steps:
A) when needs adjusting focus lamp moves up and down, photoelectricity is sought the below that burnt device is placed on the laser cutting machine cutting head;
B) laser is left guiding light, starts photoelectricity and seeks burnt device, and the self-raising platform that photoelectricity is sought burnt device moves up, guide lights drops on the photoelectric sensor, sensor photosensitive sends signal, the signal input computer control system of photoelectric sensor, and computer begins s operation control;
C) be raised to certain altitude when lifting platform, hot spot becomes minimum when some again, and control system stops elevating bracket work automatically;
D) measure the cutting head light-emitting window and seek burnt device upper surface distance, cut cutting constant L again, be the position of focus lamp focus apart from photoelectricity.
2. seek the focus searching method of burnt device according to the described photoelectricity of claim, it is characterized in that described photoelectricity seeks burnt device, comprise photoelectric sensor, motor, elevating bracket, elevating lever, computer control system, described elevating bracket has groove in two ends up and down, motor is positioned at elevating bracket lower end inside grooves, below the elevating lever, the motor upper end links to each other with the elevating lever bottom, elevating lever is arranged in the upper grooves of elevating bracket, elevating lever can move up and down with respect to elevating bracket, photoelectric sensor is positioned at the center of top groove of elevating lever, the signal input computer control system of photoelectric sensor.
3. photoelectricity according to claim 1 is sought the focus searching method of burnt device, it is characterized in that described cutting constant L is relevant with the performance of laser cutting machine, and the numerical value of L is 200um.
CN201210016581.9A 2012-01-19 2012-01-19 The focus searching method of Photoelectric Jiao's device Active CN103212823B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210016581.9A CN103212823B (en) 2012-01-19 2012-01-19 The focus searching method of Photoelectric Jiao's device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210016581.9A CN103212823B (en) 2012-01-19 2012-01-19 The focus searching method of Photoelectric Jiao's device

Publications (2)

Publication Number Publication Date
CN103212823A true CN103212823A (en) 2013-07-24
CN103212823B CN103212823B (en) 2016-08-31

Family

ID=48811155

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210016581.9A Active CN103212823B (en) 2012-01-19 2012-01-19 The focus searching method of Photoelectric Jiao's device

Country Status (1)

Country Link
CN (1) CN103212823B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107414286A (en) * 2017-04-26 2017-12-01 深圳市创鑫激光股份有限公司 A kind of laser marking machine focus adjustment method, device and laser marking machine
CN110238547A (en) * 2019-05-09 2019-09-17 西安理工大学 It is a kind of for measuring the system and measurement method of high power laser focal position
CN111207911A (en) * 2020-01-19 2020-05-29 中国科学院上海光学精密机械研究所 Method for measuring refractive index of parallel plane transparent solid material

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2453411Y (en) * 2000-12-15 2001-10-10 中国科学院西安光学精密机械研究所 Laser minimum light spot measuring device
EP1146375A2 (en) * 2000-04-13 2001-10-17 STN ATLAS Elektronik GmbH Method and apparatus for focusing an image
CN101074868A (en) * 2007-06-18 2007-11-21 厦门大学 Method and apparatus for inspection automatically focusing non-spherical surface
US20080205871A1 (en) * 2007-02-27 2008-08-28 Nikon Corporation Focus detection device for image forming optical system, imaging apparatus, and focus detection method for image forming optical system
CN201231376Y (en) * 2008-08-04 2009-05-06 深圳市华德激光技术有限公司 Laser template cutting machine focal position adjustment mechanism
JP2009180778A (en) * 2008-01-29 2009-08-13 Canon Inc Focal point detecting device and imaging device
CN102305988A (en) * 2011-09-13 2012-01-04 江苏森莱浦光电科技有限公司 Automatic focusing device for projective bulb based on light spot detection and use method thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1146375A2 (en) * 2000-04-13 2001-10-17 STN ATLAS Elektronik GmbH Method and apparatus for focusing an image
CN2453411Y (en) * 2000-12-15 2001-10-10 中国科学院西安光学精密机械研究所 Laser minimum light spot measuring device
US20080205871A1 (en) * 2007-02-27 2008-08-28 Nikon Corporation Focus detection device for image forming optical system, imaging apparatus, and focus detection method for image forming optical system
CN101074868A (en) * 2007-06-18 2007-11-21 厦门大学 Method and apparatus for inspection automatically focusing non-spherical surface
JP2009180778A (en) * 2008-01-29 2009-08-13 Canon Inc Focal point detecting device and imaging device
CN201231376Y (en) * 2008-08-04 2009-05-06 深圳市华德激光技术有限公司 Laser template cutting machine focal position adjustment mechanism
CN102305988A (en) * 2011-09-13 2012-01-04 江苏森莱浦光电科技有限公司 Automatic focusing device for projective bulb based on light spot detection and use method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107414286A (en) * 2017-04-26 2017-12-01 深圳市创鑫激光股份有限公司 A kind of laser marking machine focus adjustment method, device and laser marking machine
CN110238547A (en) * 2019-05-09 2019-09-17 西安理工大学 It is a kind of for measuring the system and measurement method of high power laser focal position
CN110238547B (en) * 2019-05-09 2020-12-18 西安理工大学 System and method for measuring position of high-power laser focus
CN111207911A (en) * 2020-01-19 2020-05-29 中国科学院上海光学精密机械研究所 Method for measuring refractive index of parallel plane transparent solid material

Also Published As

Publication number Publication date
CN103212823B (en) 2016-08-31

Similar Documents

Publication Publication Date Title
CN104979749A (en) High-power semiconductor fiber-coupled laser and coupling method thereof
CN101983420B (en) Autofocus method and apparatus for wafer scribing
CN103969769A (en) Method for assembling transmitter optical subassembly
CN204760745U (en) High power semiconductor optic fibre coupled laser
CN102735190B (en) Detection device and detection method used for laser-beam deflection angle
CN104122072A (en) Lens module detection apparatus
CN104749901A (en) Focusing and leveling device
CN103212823B (en) The focus searching method of Photoelectric Jiao's device
CN111006854A (en) Device and method for testing diffraction efficiency of micro-nano structure lens
JP2003232989A (en) Automatic focusing module for system of microscopic base, microscopic system having automatic focusing module and automatic focusing method for system of microscopic base
KR20090104326A (en) Distance measuring optical system
CN108701679B (en) Mark position correcting device and method
CN202511756U (en) Photoelectric focus searching device
JP2012194085A (en) Edge detection apparatus
CN103217099A (en) Photovoltaic focus following device
CN103212815B (en) The burnt device of multispectral Photoelectric
US20210010803A1 (en) Distance measurement unit and light irradiation device
CN102207694A (en) Imaging adjustment unit and focusing and leveling control system using the unit
KR101043202B1 (en) method for controlling position of eye examining apparatus using mire ring light and focus light and eye examining apparatus using the same
JP5172011B2 (en) Displacement measuring device and displacement measuring method
CN103217098A (en) Focus finding method for multi-spectral photoelectrical focus finding device
CN202836507U (en) Multi-spectral photoelectric focus searching device
TWI658289B (en) Focusing and leveling device
CN114346473B (en) Laser cutting method for optical filter
CN211477573U (en) Pyramid auto-collimation scanning device for collimator focus detection

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant