CN103203683A - Float polishing head - Google Patents
Float polishing head Download PDFInfo
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- CN103203683A CN103203683A CN2013100805186A CN201310080518A CN103203683A CN 103203683 A CN103203683 A CN 103203683A CN 2013100805186 A CN2013100805186 A CN 2013100805186A CN 201310080518 A CN201310080518 A CN 201310080518A CN 103203683 A CN103203683 A CN 103203683A
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- rubbing head
- loam cake
- lower cover
- transmission shaft
- sphere
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to a float polishing head with a double spherical rolling bearing structure replacing a common joint bearing structure. The float polishing head comprises a transmission shaft, an upper cover, a lower cover, an upper ball, a lower ball, an upper retainer, a lower retainer, pull rods, a rubber bellows, fastening screws, a clamping portion and the like, sphere centers are overlapped to form a swinging instant center of a joint after four spherical parts are assembled, the swinging instant center can be designed on a contact plane of a workpiece and a polishing pad, the moment arm of grinding resistance to the swinging instant center is zero, accordingly, overturning moment is thoroughly eliminated, and uniform contact pressure is applied to the machined surface of the workpiece. The polishing head transmits driving torque through the two pull rods, a swinging joint structure is protected from corrosion by the rubber bellows, and workpiece plane machining precision can be structurally improved.
Description
Technical field
The present invention relates to a kind of polishing machine parts, particularly a kind of unsteady rubbing head that overcomes tilting moment in the polishing is conducive to improve workpiece accuracy and surface quality.
Background technology
Chemically mechanical polishing processing is raising workpiece surface quality commonly used in precision and the ultraprecise processing and the method for surface of the work planarization.The horizontal polishing disk of carrying polishing pad rotates, workpiece is fixed on the notacoria of rubbing head clamping part, workpiece is pressed on the polishing pad of rotation by vertical pressure stably, rotate simultaneously, the polishing fluid that the polishing fluid conveying device will contain abrasive particle is transported on the polishing pad, composition in the polishing fluid and workpiece generation chemical reaction, removed by the mechanism of abrasive particle and polishing pad at the reaction product that surface of the work forms, in the alternation procedure of chemical membrane and mechanical striping, realize the processing of ultraprecise plane.
In order to adapt to the surface topography of ultraprecise part, avoid the error of perpendicularity between machine tool chief axis and the machined surface to the influence of crudy, being connected between the main shaft of lathe and the rubbing head is usually designed to floating structure, allow the rubbing head baseplane relatively its installation shaft do small sway.Common floating structure has two kinds of reed-type (seeing accompanying drawing 2a) and joint bearing types (seeing accompanying drawing 2b), the swing of its rubbing head instantaneous all with machined surface that workpiece contacts on, no matter be reed-type or joint bearing type syndeton, under the positive pressure of polishing processing, the rubbing head workpiece produces frictional resistance with respect to the polishing pad motion.The suffered tilting moment of rubbing head is determined by frictional resistance and the instantaneous distance apart from machined surface of swing, tilting moment can cause the workpiece on the rubbing head of rotation to enter the obviously contact pressure when leaving surface of the work of the suffered contact pressure in the position of workpiece at polishing pad, add the linear velocity difference at workpiece centre and edge, thereby cause the material removal amount at edge of workpiece greater than the removal amount of the material of its central area, form the machined surface shape of evagination, reduced the plane precision of surface of the work.For addressing the aforementioned drawbacks, a kind of structure of novel low instantaneous unsteady rubbing head has been proposed, at present the domestic report of not finding similar rubbing head.
Summary of the invention
Instantaneous too high meeting produces tilting moment and influences this technical defective of workpiece surface quality at this existing floating type rubbing head, the present invention proposes a kind of novel low instantaneous unsteady rubbing head, its technical scheme is: replace common oscillating bearing structure with two spherical rolling bearing structures.The swing that can arbitrarily reduce rubbing head by spherical radius reasonable in design is instantaneous.Eliminate because the feeding resistance produces tilting moment, thereby effectively improved the crudy of workpiece.
This rubbing head comprises power transmission shaft, loam cake, lower cover, last ball, following ball, holder, following retainer, pull bar, rubber bellows, trip bolt and clamping part.Power transmission shaft is made of the sphere portion of ball under the coupling part on top, middle part screw-threaded coupling part and the bottom support, and the coupling part is contained in the machine tool chief axis end, with the machine tool chief axis coaxial rotation.
What partly screw with the middle part screw-threaded coupling of power transmission shaft is loam cake, and the bottom surface of loam cake is concave spherical surface, and there are two screws the side, by the holding screw latched position.Under be stamped inside and outside two spherical structures, the protruding sphere of lower cover is relative with loam cake bottom surface concave spherical surface, the concave spherical surface of lower cover is relative with power transmission shaft bottom spherical end surface, one group of rolling steel ball and retainer thereof are installed between the concave spherical surface of the protruding sphere of lower cover and loam cake, between the spherical end surface of the concave spherical surface of lower cover and power transmission shaft bottom, one group of rolling steel ball and retainer thereof are installed also, above-mentioned four spheres assembling back centre of sphere overlaps, thereby constitute two spherical bearing articulation structures, the swing in its joint is instantaneous to be exactly the public centre of sphere of each sphere.
What cooperate with the lower cover connecting thread is the clamping part of rubbing head, and the notacoria bonding work pieces below the clamping part contacts with polishing pad and to polish.Because the public centre of sphere of rubbing head swing can design as requested on the contact plane of workpiece and polishing pad, making grinding resistance is zero to swinging the instantaneous arm of force, thereby reach the effect of thorough elimination tilting moment, make workpiece machining surface be subjected to contacting uniformly pressure like this, improved the processing plane degree.
For the rotation with machine tool chief axis is delivered on the workpiece, the pull bar pulling lower cover that two symmetrical distributions are set rotates, each pull bar two ends with two screws be connected loam cake with under cover.Pull bar makes the rubbing head clamping part still can freely swing relative to power transmission shaft with the matched in clearance of screw and rotates synchronously with machine tool chief axis simultaneously, adapted to processing request.Be with rubber bellows and can prevent that polishing fluid from flowing into etch polishing head internal structure between loam cake and rubbing head, its pliability can not influence freely swinging of rubbing head.
Description of drawings
Fig. 1 is the rubbing head outside drawing that floats.
Fig. 2 (a) is reed-type rubbing head structure chart.
Fig. 2 (b) is joint bearing type rubbing head structure chart.
Fig. 3 is low instantaneous unsteady rubbing head structure chart.
Among the figure: 1 power transmission shaft, 2 elastic leaf springs, 3 screws, 4 clamping parts, 5 notacorias, 6 workpiece,
7 power transmission shafts, 8 shift forks, 9 fingers, 10 oscillating bearings, 11 clamping parts, 12 notacorias, 13 workpiece, holding screw on 14, ball on 15,16 times balls, 17 times retainers, 18 times holding screws,
19 power transmission shafts, 20 loam cakes, 21 holders, 22 screws, 23 rubber bellows, 24 pull bars, 25 lower covers, 26 clamping parts, 27 workpiece.
The specific embodiment
Combination technology scheme and accompanying drawing describe the specific embodiment of the present invention in detail: for low instantaneous unsteady rubbing head shown in Figure 3, by power transmission shaft 19, loam cake 20, lower cover 25, go up ball 15, down ball 16, holder 21, down retainer 17, pull bar 24, rubber bellows 23, go up holding screw 14, following holding screw 18 and clamping part 26 etc. and form.The bottom of power transmission shaft 19 is the spherical structure that contacts with following ball 16, and its top is used for being connected to the machine tool chief axis end.What partly screw with the middle part screw-threaded coupling of power transmission shaft 19 is loam cake 20, and the bottom surface of loam cake 20 is concave spherical surface, and there are two screws the side, by last holding screw 14 latched positions.Lower cover 25 has inside and outside two spherical structures, the protruding sphere of lower cover 25 is relative with loam cake 20 bottom surface concave spherical surfaces, the concave spherical surface of lower cover 25 is relative with power transmission shaft 19 bottom spherical end surfaces, ball 15 and holder 21 on installing one group between the concave spherical surface of the protruding sphere of lower cover 25 and loam cake 20, ball 16 and retainer 17 down also are installed between the spherical end surface of the concave spherical surface of lower cover 25 and power transmission shaft 19 bottoms under one group, above-mentioned four Spherical Surface S R1, SR2, SR3 and the SR4 assembling back centre of sphere overlap, thereby constitute two spherical bearing articulation structures, the swing in its joint is instantaneous to be exactly the public centre of sphere of each sphere.
The clamping part 26 of lower cover 24 by being threaded onto rubbing head, but bonding work pieces 27 below the clamping part 26, the bottom surface of workpiece 27 contacts with polishing pad during polishing.Because the public centre of sphere of rubbing head swing can design as requested on the contact plane of workpiece 27 and polishing pad, making grinding resistance is zero to swinging the instantaneous arm of force, thereby reaches the effect of thorough elimination tilting moment.Make workpiece 27 finished surfaces be subjected to more uniform contact pressure like this, improved the processing plane degree of workpiece 27.
For the rotation with power transmission shaft is delivered on the workpiece 27, the pull bar 23 of two symmetrical distributions is set, each pull bar 23 two ends is connected on loam cake 20 and the lower cover 25 with screw 22.Pull bar 24 makes the rubbing head clamping part still can freely swing relative to power transmission shaft with the matched in clearance of screw 22 and rotates synchronously with power transmission shaft simultaneously.
Be enclosed within that rubber bellows 23 mainly seals between loam cake and the rubbing head, prevent that polishing fluid from corroding inner spherical structure, its pliability can make rubbing head keep floatability.
Claims (3)
1. a unsteady rubbing head is characterized in that, this rubbing head comprises power transmission shaft, loam cake, lower cover, last ball, following ball, holder, following retainer, pull bar, rubber bellows, trip bolt and clamping part; The top of power transmission shaft is used for connecting machine tool chief axis, and the middle part is threaded with loam cake, and by the holding screw latched position, the sphere portion of bottom contacts with following ball; The bottom surface of loam cake is concave spherical surface, is stamped inside and outside two spherical structures down, and the protruding sphere of lower cover is relative with loam cake bottom surface concave spherical surface, and the concave spherical surface of lower cover is relative with power transmission shaft bottom spherical end surface; One group of rolling steel ball and retainer are installed between the concave spherical surface of the protruding sphere of lower cover and loam cake, between the spherical end surface of the concave spherical surface of lower cover and power transmission shaft bottom, one group of rolling steel ball and retainer are installed also, above-mentioned four spheres assembling back centre of sphere overlaps, constitute two spherical bearing structures, its swing is instantaneous to be the public centre of sphere of each sphere.
2. unsteady rubbing head according to claim 1, it is characterized in that, the pull bar pulling lower cover that two symmetrical distributions are set rotates, each pull bar two ends with two screws be connected loam cake and under cover, pull bar freely swings the relative power transmission shaft of rubbing head clamping part with the matched in clearance of screw, rotates synchronously with machine tool chief axis simultaneously.
3. unsteady rubbing head according to claim 1 and 2 is characterized in that, is with rubber bellows between loam cake and rubbing head, prevents that polishing fluid from flowing into etch polishing head internal structure, and its pliability makes rubbing head keep floatability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310080518.6A CN103203683B (en) | 2013-03-13 | 2013-03-13 | Float polishing head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310080518.6A CN103203683B (en) | 2013-03-13 | 2013-03-13 | Float polishing head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103203683A true CN103203683A (en) | 2013-07-17 |
| CN103203683B CN103203683B (en) | 2015-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310080518.6A Expired - Fee Related CN103203683B (en) | 2013-03-13 | 2013-03-13 | Float polishing head |
Country Status (1)
| Country | Link |
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| CN (1) | CN103203683B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106272123A (en) * | 2016-10-20 | 2017-01-04 | 天津华海清科机电科技有限公司 | Rubbing head and there is its buffing machine |
| CN106334997A (en) * | 2016-10-20 | 2017-01-18 | 天津华海清科机电科技有限公司 | Polishing head and polisher with same |
| CN106949803A (en) * | 2017-04-19 | 2017-07-14 | 苏州普费勒精密量仪有限公司 | A kind of flexible floating measurement apparatus |
| CN109129105A (en) * | 2018-08-22 | 2019-01-04 | 中国科学院上海光学精密机械研究所 | Floating polishing disk driving mechanism |
| CN116394090A (en) * | 2023-03-22 | 2023-07-07 | 广东工科机电有限公司 | Grinding and polishing device, grinding and polishing system, grinding and polishing process and application of grinding and polishing device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5081795A (en) * | 1988-10-06 | 1992-01-21 | Shin-Etsu Handotai Company, Ltd. | Polishing apparatus |
| WO1999002304A1 (en) * | 1997-07-11 | 1999-01-21 | Applied Materials, Inc. | A carrier head with a flexible membrane for a chemical mechanical polishing system |
| US6514129B1 (en) * | 1999-10-27 | 2003-02-04 | Strasbaugh | Multi-action chemical mechanical planarization device and method |
| CN1461251A (en) * | 2000-11-21 | 2003-12-10 | Memc电子材料有限公司 | Semiconductor wafer, polishing apparatus and method |
| US6716093B2 (en) * | 2001-12-07 | 2004-04-06 | Lam Research Corporation | Low friction gimbaled substrate holder for CMP apparatus |
| WO2004097899A2 (en) * | 2003-04-28 | 2004-11-11 | Strasbaugh | Wafer carrier pivot mechanism |
| CN101342681A (en) * | 2008-08-28 | 2009-01-14 | 中国电子科技集团公司第四十五研究所 | Polishing head |
-
2013
- 2013-03-13 CN CN201310080518.6A patent/CN103203683B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5081795A (en) * | 1988-10-06 | 1992-01-21 | Shin-Etsu Handotai Company, Ltd. | Polishing apparatus |
| WO1999002304A1 (en) * | 1997-07-11 | 1999-01-21 | Applied Materials, Inc. | A carrier head with a flexible membrane for a chemical mechanical polishing system |
| US6514129B1 (en) * | 1999-10-27 | 2003-02-04 | Strasbaugh | Multi-action chemical mechanical planarization device and method |
| CN1461251A (en) * | 2000-11-21 | 2003-12-10 | Memc电子材料有限公司 | Semiconductor wafer, polishing apparatus and method |
| US6716093B2 (en) * | 2001-12-07 | 2004-04-06 | Lam Research Corporation | Low friction gimbaled substrate holder for CMP apparatus |
| WO2004097899A2 (en) * | 2003-04-28 | 2004-11-11 | Strasbaugh | Wafer carrier pivot mechanism |
| CN101342681A (en) * | 2008-08-28 | 2009-01-14 | 中国电子科技集团公司第四十五研究所 | Polishing head |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106272123A (en) * | 2016-10-20 | 2017-01-04 | 天津华海清科机电科技有限公司 | Rubbing head and there is its buffing machine |
| CN106334997A (en) * | 2016-10-20 | 2017-01-18 | 天津华海清科机电科技有限公司 | Polishing head and polisher with same |
| CN106949803A (en) * | 2017-04-19 | 2017-07-14 | 苏州普费勒精密量仪有限公司 | A kind of flexible floating measurement apparatus |
| CN106949803B (en) * | 2017-04-19 | 2023-09-22 | 苏州普费勒精密量仪有限公司 | Flexible floating measurement device |
| CN109129105A (en) * | 2018-08-22 | 2019-01-04 | 中国科学院上海光学精密机械研究所 | Floating polishing disk driving mechanism |
| CN109129105B (en) * | 2018-08-22 | 2020-12-04 | 中国科学院上海光学精密机械研究所 | Floating polishing disk driving mechanism |
| CN116394090A (en) * | 2023-03-22 | 2023-07-07 | 广东工科机电有限公司 | Grinding and polishing device, grinding and polishing system, grinding and polishing process and application of grinding and polishing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103203683B (en) | 2015-02-18 |
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Granted publication date: 20150218 Termination date: 20200313 |