CN103203683B - Float polishing head - Google Patents
Float polishing head Download PDFInfo
- Publication number
- CN103203683B CN103203683B CN201310080518.6A CN201310080518A CN103203683B CN 103203683 B CN103203683 B CN 103203683B CN 201310080518 A CN201310080518 A CN 201310080518A CN 103203683 B CN103203683 B CN 103203683B
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- transmission shaft
- cover
- ball
- power transmission
- workpiece
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention introduces a float polishing head with a double spherical rolling bearing structure replacing a common joint bearing structure. The float polishing head comprises a transmission shaft, an upper cover, a lower cover, an upper ball, a lower ball, an upper retainer, a lower retainer, pull rods, a rubber bellows, fastening screws, a clamping portion and the like, sphere centers are overlapped to form a swinging instant center of a joint after four spherical parts are assembled, the swinging instant center can be designed on a contact plane of a workpiece and a polishing pad, the moment arm of grinding resistance to the swinging instant center is zero, accordingly, overturning moment is thoroughly eliminated, and uniform contact pressure is applied to the machined surface of the workpiece. The polishing head transmits driving torque through the two pull rods, a swinging joint structure is protected from corrosion by the rubber bellows, and workpiece plane machining precision can be structurally improved.
Description
Technical field
The present invention relates to a kind of polishing machine parts, particularly a kind of floating rubbing head overcoming tilting moment in polishing, be conducive to improving workpiece accuracy and surface quality.
Background technology
Chemically mechanical polishing processing is accurate and conventional raising workpiece surface quality and the planarized method of surface of the work in Ultra-precision Turning.The horizontal polishing disk of carrying polishing pad rotates, workpiece is fixed on the notacoria of rubbing head clamping part, by stable vertical pressure, workpiece is pressed on the polishing pad of rotation, rotate simultaneously, polishing fluid containing abrasive particle is transported on polishing pad by polishing solution delivery device, composition in polishing fluid and workpiece generation chemical reaction, the reaction product formed at surface of the work is removed by the mechanism of abrasive particle and polishing pad, in the alternation procedure of chemical membrane and mechanical striping, realize ultraprecise plane machining.
In order to adapt to the surface topography of ultraprecise part, avoid the error of perpendicularity between machine tool chief axis and machined surface on the impact of crudy, connection between the main shaft of lathe and rubbing head is usually designed to floating structure, allows rubbing head baseplane its installation shaft relative to do small sway.Common floating structure has reed-type (see accompanying drawing 2a) and joint bearing type (see accompanying drawing 2b) two kinds, the swing of its rubbing head instantaneous all with the machined surface of absorption surface on, no matter be reed-type or joint bearing type syndeton, under the positive pressure of polishing, rubbing head workpiece produces frictional resistance relative to polishing pad motion.Tilting moment suffered by rubbing head is determined by frictional resistance and the instantaneous distance apart from machined surface of swing, tilting moment can cause the workpiece on the rubbing head of rotation to be obviously greater than contact when leaving surface of the work at the polishing pad contact entered suffered by the position of workpiece, add the linear velocity difference at workpiece centre and edge, thus cause the material removal amount at the edge of workpiece to be greater than the removal amount of the material of its central area, form the machined surface shape of evagination, reduce the plane precision of surface of the work.For addressing the aforementioned drawbacks, propose a kind of structure of novel low instantaneous floating rubbing head, the domestic report not finding similar rubbing head at present.
Summary of the invention
Too highly can produce tilting moment for this existing floating type rubbing head is instantaneous and affect this technical defect of workpiece surface quality, the present invention proposes a kind of novel low instantaneous floating rubbing head, its technical scheme is: replace common joints bearing arrangement with two spherical rolling bearing structure.The swing that arbitrarily can be reduced rubbing head by spherical radius reasonable in design is instantaneous.Eliminate because feeding resistance produces tilting moment, thus effectively improve the crudy of workpiece.
This rubbing head comprises power transmission shaft, upper cover, lower cover, upper ball, lower ball, holder, lower retainer, pull bar, rubber bellows, trip bolt and clamping part.Power transmission shaft is made up of the sphere portion of ball under the coupling part on top, middle part screw-threaded coupling part and bottom support, and coupling part is contained in machine tool chief axis end, with machine tool chief axis coaxial rotation.
What screw with the middle part screw-threaded coupling part of power transmission shaft is upper cover, and the bottom surface of upper cover is concave spherical surface, and there are two screws side, by holding screw latched position.Under be stamped inside and outside two spherical structures, the convex spherical of lower cover is relative with upper cover bottom surface concave spherical surface, the concave spherical surface of lower cover is relative with power transmission shaft lower spherical end face, one group of rolling steel ball and retainer thereof are installed between the convex spherical and the concave spherical surface of upper cover of lower cover, between the concave spherical surface and the spherical end surface of power transmission shaft bottom of lower cover, one group of rolling steel ball and retainer thereof are also installed, after above-mentioned four spheres assembling, the centre of sphere overlaps, thus forming two spherical bearing articulation structure, the swing in its joint is instantaneous is exactly the public centre of sphere of each sphere.
What coordinate with lower cover connecting thread is the clamping part of rubbing head, and the notacoria bonding work pieces below clamping part, contacts with polishing pad and carry out polishing.The public centre of sphere swung due to rubbing head can design as requested on the contact plane of workpiece and polishing pad, grinding resistance is made to be zero to the instantaneous arm of force of swing, thus reach the effect thoroughly eliminating tilting moment, make workpiece machining surface be subject to uniform contact like this, improve processing plane degree.
In order to the rotation of machine tool chief axis is delivered on workpiece, two symmetrical pull bars is set and pulls lower cover to rotate, each pull bar two ends with two screws be connected to upper cover and under cover.With machine tool chief axis synchronous axial system while that pull bar and the matched in clearance of screw making rubbing head clamping part still swingable relative to power transmission shaft, adapt to processing request.Between upper cover and rubbing head, cover has rubber bellows can prevent polishing fluid from flowing into etch polishing head internal structure, and its pliability can not affect freely swinging of rubbing head.
Accompanying drawing explanation
Fig. 1 is floating rubbing head outside drawing.
Fig. 2 (a) is reed-type polishing head structure figure.
Fig. 2 (b) is joint bearing type polishing head structure figure.
Fig. 3 is low instantaneous floating polishing head structure figure.
In figure: 1 power transmission shaft, 2 elastic leaf springs, 3 screws, 4 clamping parts, 5 notacorias, 6 workpiece,
7 power transmission shafts, 8 shift forks, 9 fingers, 10 oscillating bearings, 11 clamping parts, 12 notacorias, 13 workpiece, holding screw on 14, ball on 15,16 times balls, 17 times retainers, 18 times holding screws,
19 power transmission shafts, 20 upper covers, 21 holders, 22 screws, 23 rubber bellows, 24 pull bars, 25 lower covers, 26 clamping parts, 27 workpiece.
Detailed description of the invention
Combination technology scheme and accompanying drawing describe the specific embodiment of the present invention in detail: for the low instantaneous floating rubbing head shown in Fig. 3, be made up of power transmission shaft 19, upper cover 20, lower cover 25, upper ball 15, lower ball 16, holder 21, lower retainer 17, pull bar 24, rubber bellows 23, upper holding screw 14, lower holding screw 18 and clamping part 26 etc.The bottom of power transmission shaft 19 is the spherical structure contacted with lower ball 16, and its top is used for being connected to machine tool chief axis end.What screw with the middle part screw-threaded coupling part of power transmission shaft 19 is upper cover 20, and the bottom surface of upper cover 20 is concave spherical surface, and there are two screws side, by upper holding screw 14 latched position.Lower cover 25 has inside and outside two spherical structures, the convex spherical of lower cover 25 is relative with upper cover 20 bottom surface concave spherical surface, the concave spherical surface of lower cover 25 is relative with power transmission shaft 19 lower spherical end face, ball 15 and holder 21 on one group is installed between the convex spherical and the concave spherical surface of upper cover 20 of lower cover 25, also ball 16 and lower retainer 17 install one group between the concave spherical surface and the spherical end surface of power transmission shaft 19 bottom of lower cover 25 under, above-mentioned four Spherical Surface S R1, SR2, after SR3 and SR4 assembling, the centre of sphere overlaps, thus form two spherical bearing articulation structure, the swing in its joint is instantaneous is exactly the public centre of sphere of each sphere.
Lower cover 24 is threadedly attached to the clamping part 26 of rubbing head, and clamping part 26 below can bonding work pieces 27, and during polishing, the bottom surface of workpiece 27 contacts with polishing pad.The public centre of sphere swung due to rubbing head can design as requested on workpiece 27 contact plane with polishing pad, makes grinding resistance be zero to the instantaneous arm of force of swing, thus reaches the effect thoroughly eliminating tilting moment.Make workpiece 27 finished surface be subject to like this evenly contact, improve the processing plane degree of workpiece 27.
In order to the rotation of power transmission shaft be delivered on workpiece 27, arrange two symmetrical pull bars 23, each pull bar 23 two ends screw 22 is connected on upper cover 20 and lower cover 25.With power transmission shaft synchronous axial system while that pull bar 24 and the matched in clearance of screw 22 making rubbing head clamping part still swingable relative to power transmission shaft.
Be enclosed within rubber bellows 23 between upper cover and rubbing head mainly to seal, prevent polishing fluid from corroding inner spherical structure, its pliability can make rubbing head keep floatability.
Claims (2)
1. a floating rubbing head, is characterized in that, this rubbing head comprises power transmission shaft, upper cover, lower cover, upper ball, lower ball, holder, lower retainer, pull bar, rubber bellows, trip bolt and clamping part; The top of power transmission shaft is used for connecting machine tool main shaft, and middle part is threaded with upper cover, by holding screw latched position, and the sphere portion of bottom and lower ball contact; The bottom surface of upper cover is concave spherical surface, under be stamped inside and outside two spherical structures, the convex spherical of lower cover is relative with upper cover bottom surface concave spherical surface, and the concave spherical surface of lower cover is relative with power transmission shaft lower spherical end face; Ball and holder on one group is installed between the convex spherical and the concave spherical surface of upper cover of lower cover, also ball and lower retainer install one group between the concave spherical surface and the spherical end surface of power transmission shaft bottom of lower cover under, after above-mentioned four spheres assembling, the centre of sphere overlaps, form two spherical bearing structure, it swings instantaneous is the public centre of sphere of each sphere; The public centre of sphere, on the contact plane of workpiece and polishing pad, makes grinding resistance be zero to the instantaneous arm of force of swing.
2. floating rubbing head according to claim 1, it is characterized in that, arranging two symmetrical pull bars pulls lower cover to rotate, each pull bar two ends with two screws be connected to upper cover and under cover, pull bar and the matched in clearance of screw make the relative power transmission shaft of rubbing head clamping part freely swing, simultaneously with machine tool chief axis synchronous axial system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310080518.6A CN103203683B (en) | 2013-03-13 | 2013-03-13 | Float polishing head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310080518.6A CN103203683B (en) | 2013-03-13 | 2013-03-13 | Float polishing head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103203683A CN103203683A (en) | 2013-07-17 |
| CN103203683B true CN103203683B (en) | 2015-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310080518.6A Expired - Fee Related CN103203683B (en) | 2013-03-13 | 2013-03-13 | Float polishing head |
Country Status (1)
| Country | Link |
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| CN (1) | CN103203683B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106334997A (en) * | 2016-10-20 | 2017-01-18 | 天津华海清科机电科技有限公司 | Polishing head and polisher with same |
| CN106272123B (en) * | 2016-10-20 | 2018-09-04 | 天津华海清科机电科技有限公司 | Rubbing head and polishing machine with it |
| CN106949803B (en) * | 2017-04-19 | 2023-09-22 | 苏州普费勒精密量仪有限公司 | Flexible floating measurement device |
| CN109129105B (en) * | 2018-08-22 | 2020-12-04 | 中国科学院上海光学精密机械研究所 | Floating polishing disk driving mechanism |
| CN116394090B (en) * | 2023-03-22 | 2024-03-08 | 广东工科机电有限公司 | Grinding and polishing device, grinding and polishing system, grinding and polishing process and application of grinding and polishing device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5081795A (en) * | 1988-10-06 | 1992-01-21 | Shin-Etsu Handotai Company, Ltd. | Polishing apparatus |
| WO1999002304A1 (en) * | 1997-07-11 | 1999-01-21 | Applied Materials, Inc. | A carrier head with a flexible membrane for a chemical mechanical polishing system |
| US6514129B1 (en) * | 1999-10-27 | 2003-02-04 | Strasbaugh | Multi-action chemical mechanical planarization device and method |
| CN1461251A (en) * | 2000-11-21 | 2003-12-10 | Memc电子材料有限公司 | Semiconductor wafer, polishing apparatus and method |
| US6716093B2 (en) * | 2001-12-07 | 2004-04-06 | Lam Research Corporation | Low friction gimbaled substrate holder for CMP apparatus |
| WO2004097899A2 (en) * | 2003-04-28 | 2004-11-11 | Strasbaugh | Wafer carrier pivot mechanism |
| CN101342681A (en) * | 2008-08-28 | 2009-01-14 | 中国电子科技集团公司第四十五研究所 | Polishing head |
-
2013
- 2013-03-13 CN CN201310080518.6A patent/CN103203683B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5081795A (en) * | 1988-10-06 | 1992-01-21 | Shin-Etsu Handotai Company, Ltd. | Polishing apparatus |
| WO1999002304A1 (en) * | 1997-07-11 | 1999-01-21 | Applied Materials, Inc. | A carrier head with a flexible membrane for a chemical mechanical polishing system |
| US6514129B1 (en) * | 1999-10-27 | 2003-02-04 | Strasbaugh | Multi-action chemical mechanical planarization device and method |
| CN1461251A (en) * | 2000-11-21 | 2003-12-10 | Memc电子材料有限公司 | Semiconductor wafer, polishing apparatus and method |
| US6716093B2 (en) * | 2001-12-07 | 2004-04-06 | Lam Research Corporation | Low friction gimbaled substrate holder for CMP apparatus |
| WO2004097899A2 (en) * | 2003-04-28 | 2004-11-11 | Strasbaugh | Wafer carrier pivot mechanism |
| CN101342681A (en) * | 2008-08-28 | 2009-01-14 | 中国电子科技集团公司第四十五研究所 | Polishing head |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103203683A (en) | 2013-07-17 |
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