CN103187229A - Sliding sealplate device used for extraction electrode - Google Patents
Sliding sealplate device used for extraction electrode Download PDFInfo
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- CN103187229A CN103187229A CN2011104524286A CN201110452428A CN103187229A CN 103187229 A CN103187229 A CN 103187229A CN 2011104524286 A CN2011104524286 A CN 2011104524286A CN 201110452428 A CN201110452428 A CN 201110452428A CN 103187229 A CN103187229 A CN 103187229A
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- extraction electrode
- sealplate
- sliding
- slipper seal
- panel assembly
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Abstract
The invention discloses a sliding sealplate device used for an extraction electrode in an ion implantation system. According to the device, when beam currents are extracted, due to the fact that four motors drive a screw rod to move through elastic couplers and accordingly indirectly drive a guide rod to carry out spatial displacement, a sliding sealplate can guarantee that requirements for the vacuum degree in the extraction electrode are met. The sliding sealplate device comprises a group of oval grooves (totally five), wherein the grooves at two sides and one groove in the middle are used for installation of O-type seal rings, inner sides of the other two grooves are respectively provided with a through hole connected with a connector directly communicated with a terminal of a clamping sleeve, and the through holes are used for connecting differential pumping when the extraction electrode works so that the fact that the requirements for the vacuum degree in the extraction electrode are met can be reliably guaranteed. An instruction book explains the working principle of the device in detail and lists specific implementation plans. The invention relates to an ion implantation device, and belongs to the field of semi-conductor manufacturing.
Description
Technical field
The present invention relates to the slipper seal panel assembly of extraction electrode in a kind of semiconductor manufacturing equipment ion implantor, it directly was directed to when extraction electrode was worked in the past owing to the influence to its internal vacuum that causes is moved in the space of guide rod, can reliably guarantee the requirement of extraction electrode internal vacuum, the application that has the requirement of certain vacuum degree for many-side provides convenience.
Technical background
Ion implantor is the exemplary apparatus that the semiconductor technology intermediate ion mixes, and ion source produces the ion beam that needs doping, and ion beam passes through quality analysis, correction, acceleration again, is transferred to the silicon chip surface that is in target chamber end process cavity.
1. in the ion implantation technology of wafer, the stability of line and purity requirement thereof are more and more high.And this requirement directly influences the implantation quality of semiconductor applications integral body, is mainly reflected in the following aspects:
2. in the injection of line, ion dose is injected on the wafer uniformly.The unsteadiness of injecting line can cause the failure of injection.
3. for injection technology, the ion implantor of low-yield big speed stream is the direction of development, and the uniformity requirement of line is also more and more higher.
4. inject at ion, when requiring beam homogeneity, also require to strengthen the control of line, intercept foreign ion, thereby prevent the failure because of the energy contamination initiation.
5. along with the more and more miniaturization of semiconductor integrated circuit manufacturing process, also just more and more higher to the performance requirement of semiconductor manufacturing facility, require to have higher beam purity this moment, thereby avoid the damage that when equipment is worked, parts caused.
Summary of the invention
The invention discloses a kind of slipper seal panel assembly for extraction electrode in the ion implant systems, when directly being directed to extraction electrode work in the past, it owing to the influence to its internal vacuum that causes is moved in the space of guide rod, can reliably guarantee the requirement of extraction electrode internal vacuum.The present invention realizes by following scheme:
1. slipper seal panel assembly that is applied to extraction electrode in the ion implant systems, comprise the oval-shaped groove of gang (totally 5), wherein both sides and three middle grooves are used for the O RunddichtringO is installed, and all use the rubber material, can make whole extraction electrode device positiver sealing.
2. slipper seal panel assembly that is applied to extraction electrode in the ion implant systems, two other groove inboard respectively arranges a through hole that links to each other with straight-through cutting ferrule terminal fitting (1), be used for when extraction electrode is worked, connecting difference and bleed, can guarantee the vacuum degree requirement that it is inner reliably.
The advantage that this slipper seal plate presents is embodied in:
I. sealing property is better, and can satisfy the vacuum degree requirement of extraction electrode inside in real time;
II. simple in structure, be convenient to processing and manufacturing.
The problem that its internal vacuum can not meet the demands when the invention solves extraction electrode work has realized the requirement of its internal vacuum when reliable assurance extraction electrode is worked.
Description of drawings
Fig. 1 is the slipper seal plate schematic diagram of extraction electrode
Fig. 2 is the slipper seal board assembly of extraction electrode
Embodiment
The present invention relates to the slipper seal panel assembly of extraction electrode in a kind of semiconductor manufacturing equipment ion implantor, as shown in Figure 1, this device be a kind of can be when line be drawn, because thereby driving guide rod indirectly by the motion of spring coupling drive screw mandrel, do in the process that moves in the space by four motors, guarantee the slipper seal plate that the extraction electrode internal vacuum requires, this slipper seal panel assembly comprises the oval-shaped groove of gang (totally 5), wherein both sides and three middle grooves are used for installing the O RunddichtringO, and all use the rubber material, can make whole extraction electrode device positiver sealing.Two other groove inboard respectively arranges a through hole that links to each other with straight-through cutting ferrule terminal fitting (1), is used for connecting difference and bleeds when extraction electrode is worked, and can guarantee the vacuum degree requirement that it is inner reliably.
As shown in Figure 2, be the slipper seal board assembly of extraction electrode: two ends, the left and right sides respectively comprise a horizontal mounting guide rail, respectively fix by three screws; Comprise two fixed blocks up and down that contain through hole, wherein the fixed block of upside (2) installs and fixes the brush DC small machine of band reduction box by four screws, the through hole installed inside deep groove ball bearing of downside fixed block (3), its medial end is equipped with the bearing spacer, and with the fixing screw mandrel of locking nut.Wherein the axle of brush DC small machine links to each other with screw mandrel by the spring coupling of installing between upside fixed block (2) and the downside fixed block (3), thereby the drive screw mandrel is stablized level and smooth motion; The fixture (4) that comprises an installation guide rod, its installed inside linear roller bearing, end installed inside circlip makes guide rod stablize smooth motion under the effect of screw mandrel, the final educt beaming flow of drawing electric field and the best that obtains the best; Fixture (4) left side that guide rod is installed arranges two screwed holes, be used for installing X-direction potentiometer mounting panel, and two screwed holes of dead ahead downside is used for installing and fixing piece, can connect water-cooled contiguous block etc.
Specific embodiment of the present invention elaborates content of the present invention.For persons skilled in the art, any apparent change that it is done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities without departing from the premise in the spirit of the present invention.
Claims (4)
1. slipper seal panel assembly that is applied to extraction electrode in the ion implant systems, it is characterized in that: comprise the oval-shaped groove of gang (totally 5), wherein both sides and three middle grooves are used for the O RunddichtringO is installed, and all use the rubber material, can make whole extraction electrode device positiver sealing.
2. the slipper seal panel assembly of extraction electrode as claimed in claim 1, it is characterized in that: two other groove inboard respectively arranges a through hole that links to each other with straight-through cutting ferrule terminal fitting (1), be used for when extraction electrode is worked, connecting difference and bleed, can guarantee the vacuum degree requirement that it is inner reliably.
3. slipper seal panel assembly that is applied to extraction electrode in the ion implant systems, it is characterized in that: comprise two fixed blocks up and down that contain through hole, wherein the fixed block of upside (2) installs and fixes the brush DC small machine of band reduction box by four screws, the through hole installed inside deep groove ball bearing of downside fixed block (3) makes screw mandrel stablize smooth motion.
4. slipper seal panel assembly that is applied to extraction electrode in the ion implant systems, it is characterized in that: comprise the fixture (4) that guide rod is installed, its through hole installed inside linear roller bearing, make guide rod under the effect of screw mandrel, stablize smooth motion, the final educt beaming flow of drawing electric field and the best that obtains the best.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104524286A CN103187229A (en) | 2011-12-30 | 2011-12-30 | Sliding sealplate device used for extraction electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104524286A CN103187229A (en) | 2011-12-30 | 2011-12-30 | Sliding sealplate device used for extraction electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103187229A true CN103187229A (en) | 2013-07-03 |
Family
ID=48678340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011104524286A Pending CN103187229A (en) | 2011-12-30 | 2011-12-30 | Sliding sealplate device used for extraction electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103187229A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1119338A (en) * | 1994-06-29 | 1996-03-27 | 易通公司 | Structure for alignment of an ion source aperture with a predetermind ion beam path |
| US6501078B1 (en) * | 2000-03-16 | 2002-12-31 | Applied Materials, Inc. | Ion extraction assembly |
| CN2788345Y (en) * | 2005-04-22 | 2006-06-14 | 北京中科信电子装备有限公司 | Ion source outlet device capable of being adjusted in X direction |
-
2011
- 2011-12-30 CN CN2011104524286A patent/CN103187229A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1119338A (en) * | 1994-06-29 | 1996-03-27 | 易通公司 | Structure for alignment of an ion source aperture with a predetermind ion beam path |
| US6501078B1 (en) * | 2000-03-16 | 2002-12-31 | Applied Materials, Inc. | Ion extraction assembly |
| CN2788345Y (en) * | 2005-04-22 | 2006-06-14 | 北京中科信电子装备有限公司 | Ion source outlet device capable of being adjusted in X direction |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: the First Notification of an Office Action |
|
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130703 |