CN103185729A - Appearance inspection apparatus and execution method thereof - Google Patents
Appearance inspection apparatus and execution method thereof Download PDFInfo
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- CN103185729A CN103185729A CN2011104499547A CN201110449954A CN103185729A CN 103185729 A CN103185729 A CN 103185729A CN 2011104499547 A CN2011104499547 A CN 2011104499547A CN 201110449954 A CN201110449954 A CN 201110449954A CN 103185729 A CN103185729 A CN 103185729A
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Abstract
The invention provides an appearance inspection apparatus and an execution method thereof. The appearance inspection apparatus comprises a plurality of image capturing units, a light source, a synchronization unit, an image analysis and judgment unit, a motor and a conveying unit. The image capturing units capture a plurality of surface images of a to-be-inspected integrated circuit; the light source provides needed light; the synchronization unit transmits the captured surface images to the image analysis and judgment unit synchronously; the image analysis and judgment unit determines whether the to-be-inspected integrated circuit has flaws or not according to the captured surface images; the motor receives control signals transmitted by the image analysis and judgment unit and drives the conveying unit to move according to the control signals. The surface images captured by the image capturing unit are transmitted to the image analysis and judgment unit synchronously, so that inspection time is shortened.
Description
Technical field
The present invention relates to pick-up unit, particularly is a kind of visual testing (Final Visual Inspection, FVI) device and manner of execution thereof.
Background technology
Early stage integrated circuit surface flaw all is to adopt manual detection, by using high power digital display micro mirror to carry out artificial visually examine's inspection, yet the speed of manual detection is slow, the uneven easy omission of operating personnel's quality, cause the false drop rate height, and some flaw is very difficult with manually detecting, and makes that the mode efficient of manual detection is not good.
In order to improve the shortcoming of above-mentioned manual detection, industry develops the mode that the detection of employing machine.See also Fig. 1, Fig. 1 is the calcspar of existing visual testing device.But this visual testing device mainly comprises two taking units 100,102, two image analysing computer unit 110,112, one motor 120, a supply unit 130 and a program logic controller (Programmable Logic Controller, PLC) 140.
Taking unit 100,102 capture to-be-measured integrated circuit 150 respectively, 152 surface image, the surface image that captures is sent to image analysing computer unit 110 respectively, 112, image analysing computer unit 110,112 analyze the surface image capture respectively and finish to-be-measured integrated circuit 150, after 152 surface blemish detects, can carry out two-way communication and confirm whether to finish each other detection, after confirming all to finish detection each other, inform that by image analysing computer unit 110 but program logic controller 140 finishes detection, but program logic controller 140 transmits a control signal to motor 120 then, motor 120 drives supply unit 130 according to described control signal and moves along the direction of arrow, make to-be-measured integrated circuit 150,152 leave taking unit 100,102 coverage is again by to-be-measured integrated circuit 154,156,158,160 enter taking unit 100 in regular turn, 102 coverage repeats above-mentioned detection step.
Yet in the step that above-mentioned machine detects, when confirming whether to finish detection each other, taking unit 100,102 need do two-way non-while communication, therefore expend the more time, add that image analysing computer unit 110 informs that but program logic controller 140 finishes detection and also need communication time, causing needs long communication time in the testing process, make the efficient of this visual testing device not good.
Therefore need the proposition method to solve above-mentioned existing visual testing device communication time and cause the not good problem of efficient after for a long time.
Summary of the invention
First purpose of the present invention is to provide a kind of visual testing device and manner of execution thereof that can shorten detection time.
According to one embodiment of the invention, described visual testing device comprises several taking units, a light source, a synchronous unit, an image analysing computer judging unit, a motor and a supply unit.Described taking unit captures the surface image of several to-be-measured integrated circuit respectively.Required light when described light source is used for providing the surface image that described taking unit captures described to-be-measured integrated circuit.Described lock unit makes surface image synchronous driving that described taking unit captures to described image analysing computer judging unit, and described image analysing computer judging unit judges according to the surface image that captures whether the surface of described to-be-measured integrated circuit has flaw.Described motor receives the control signal that described image analysing computer judging unit transmits, and drives described supply unit according to described control signal and move.
According to another embodiment of the present invention, in the manner of execution of described visual testing device, described visual testing device comprises several taking units, a synchronous unit, an image analysing computer judging unit, a motor and a supply unit, and described manner of execution comprises: described taking unit captures the surface image of several to-be-measured integrated circuit respectively; Described lock unit makes surface image synchronous driving that described taking unit captures to described image analysing computer judging unit; Described image analysing computer judging unit judges according to the surface image that captures whether the surface of described to-be-measured integrated circuit has flaw; And described motor receives the control signal that described image analysing computer judging unit transmits, and drives described supply unit according to described control signal and move.
Visual testing device of the present invention and manner of execution thereof can make surface image synchronous driving that taking unit captures to the image analysing computer judging unit, shorten detection time whereby.
Description of drawings
Fig. 1 is the calcspar of existing visual testing device;
Fig. 2 is the calcspar of visual testing device of the present invention;
Fig. 3 is an embodiment of supply unit among Fig. 2; And
Fig. 4 is the manner of execution process flow diagram of visual testing device of the present invention.
Wherein:
100,102,200,202 taking units
110,112 image analysing computer unit
120,220 motors
130,230 supply units
But 140 program logic controllers
150、152、154、156、158、160、250、252、254、256、
258,260 to-be-measured integrated circuit
210 image analysing computer judging units
270 light sources
280 lock units
S400～S430 step S400～S430.
Embodiment
Below in conjunction with accompanying drawing technical scheme of the present invention is elaborated.
See also Fig. 2, Fig. 2 is the calcspar of visual testing device of the present invention.Described visual testing device is for the last detection of integrated circuit before shipment, mainly comprises two taking units 200,202, one image analysing computer judging unit 210, a motor 220, a supply unit 230, a light source 270 and a synchronous unit 280.
Taking unit 200,202 is used for capturing respectively to-be-measured integrated circuit 250,252 surface image.In a preferred embodiment, taking unit 200,202 be Charged Coupled Device (Charge-Coupled Device, CCD).In the present embodiment, be to explain with two taking units 200,202, but the present invention can comprise the taking unit of other quantity.
Required light when light source 270 is used for providing taking unit 200,202 acquisition to-be-measured integrated circuit 250,252 surface image.In a preferred embodiment, light source 270 be selected from Halogen lamp LED, xenon lamp, fluorescent light and light emitting diode (Light Emitting Diode, LED) a kind of in the group that lamp constitutes.
Lock unit 280 is electrically coupled to taking unit 200,202 and image analysing computer judging unit 210,, transmit the time that (namely not synchronous) can save half in regular turn compared with existing to image analysing computer judging unit 210 for the surface image synchronous driving that taking unit 200,202 is captured.
After image analysing computer judging unit 210 receives taking units 200,202 picked image, judge according to the surface image that captures whether to-be-measured integrated circuit 250,252 surface have flaw, namely with this institute's picked image is analyzed, calculated and compares, judge whether to-be-measured integrated circuit 250,252 surface have flaw.
In one embodiment, image analysing computer judging unit 210 stores a to-be-measured integrated circuit with reference to image, whether identical with reference to image with to-be-measured integrated circuit by the surface image of analyzing and comparison taking unit 200,202 captures, judge the whether breakage of to-be-measured integrated circuit 250,252 surfaces.
In another embodiment, image analysing computer judging unit 210 is by the GTG value (gray level) of analyzing the surface image that taking unit 200,202 captures, judges that whether correctly or micro dust particle (particle) is not arranged the literal on to-be-measured integrated circuit 250,252 surfaces or sign.
After image analysing computer judging unit 210 is finished the surface blemish detection, motor 220 receives the control signal that image analysing computer judging unit 210 transmits, and according to described control signal driving supply unit 230, for example a scroll bar (reel) is with, move along the direction of arrow, make to-be-measured integrated circuit 250,252 leave taking unit 200,202 coverage, again by to-be-measured integrated circuit 254,256,258,260 enter taking unit 200 in regular turn, 202 coverage repeats above-mentioned detection step.Fig. 3 is the embodiment that Fig. 2 plants supply unit 230.
See also Fig. 4, Fig. 4 is the manner of execution process flow diagram of visual testing device of the present invention.Described visual testing device comprises several taking units, a synchronous unit, an image analysing computer judging unit, a motor and a supply unit, and described manner of execution comprises the following steps.
In step S400, described taking unit captures the surface image of several to-be-measured integrated circuit respectively.Described taking unit can be Charged Coupled Device.
In step S410, described lock unit makes surface image synchronous driving that described taking unit captures to described image analysing computer judging unit.
In step S420, described image analysing computer judging unit judges according to the surface image that captures whether the surface of integrated circuit to be measured such as described has flaw.In one embodiment, described image analysing computer judging unit stores a to-be-measured integrated circuit with reference to image, whether with to-be-measured integrated circuit with reference to image identical, judge whether described to-be-measured integrated circuit surface is damaged if analyzing and comparing the surface image that described taking unit captures thus.In another embodiment, described image analysing computer judging unit is by the GTG value of the surface image analyzing described taking unit and capture, judges that the literal on described to-be-measured integrated circuit surface or sign be whether correct or micro dust particle is not arranged.
In step S430, described motor receives the control signal that described image analysing computer judging unit transmits and drives described supply unit according to this control signal and moves.
Compare with the visual testing device of Fig. 1, visual testing device of the present invention and manner of execution thereof can make surface image synchronous driving that taking unit captures to the image analysing computer judging unit, shorten detection time with this.
In sum; though the present invention discloses as above with preferred embodiment; so it is not in order to limit the present invention; the persond having ordinary knowledge in the technical field of the present invention; without departing from the spirit and scope of the present invention; when can being used for a variety of modifications and variations, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (9)
1. a visual testing device is characterized in that, comprising:
Several taking units capture the surface image of several to-be-measured integrated circuit respectively;
One light source, required light when being used for providing the surface image that described taking unit captures described to-be-measured integrated circuit;
One synchronous unit;
One image analysing computer judging unit, described lock unit makes surface image synchronous driving that described taking unit captures to described image analysing computer judging unit, and described image analysing computer judging unit judges according to the surface image that captures whether the surface of described to-be-measured integrated circuit has flaw;
One motor; And
One supply unit, described motor receive the control signal that described image analysing computer judging unit transmits and drive described supply unit according to described control signal and move.
2. visual testing device as claimed in claim 1 is characterized in that, and the is described taking unit of Denging is Charged Coupled Device.
3. visual testing device as claimed in claim 1 is characterized in that, described light source is selected from Halogen lamp LED, xenon lamp, fluorescent light and LED light lamp and constitutes a kind of in the group.
4. visual testing device as claimed in claim 1, it is characterized in that, described image analysing computer judging unit stores a to-be-measured integrated circuit with reference to image, whether the surface image that described taking unit captures is identical with reference to image with to-be-measured integrated circuit by analyzing and comparing, and judges whether breakage of integrated circuit surface to be measured such as described.
5. visual testing device as claimed in claim 1, it is characterized in that, described image analysing computer judging unit is by the GTG value of analyzing the surface image that described taking unit captures, judges that the literal on described to-be-measured integrated circuit surface or sign be whether correct or micro dust particle is not arranged.
6. the manner of execution of a visual testing device, described visual testing device comprises several taking units, a synchronous unit, an image analysing computer judging unit, a motor and a supply unit, it is characterized in that described manner of execution comprises:
Described taking unit captures the surface image of several to-be-measured integrated circuit respectively;
Described lock unit makes surface image synchronous driving that described taking unit captures to described image analysing computer judging unit;
Described image analysing computer judging unit judges according to the surface image that captures whether the surface of described to-be-measured integrated circuit has flaw; And
Described motor receives the control signal that described image analysing computer judging unit transmits, and drives described supply unit according to described control signal and move.
7. the manner of execution of visual testing device as claimed in claim 6 is characterized in that, and the is described taking unit of Denging is Charged Coupled Device.
8. the manner of execution of visual testing device as claimed in claim 6, it is characterized in that, described image analysing computer judging unit stores a to-be-measured integrated circuit with reference to image, whether the surface image that described taking unit captures is identical with reference to image with to-be-measured integrated circuit by analyzing and comparing, and judges whether described to-be-measured integrated circuit surface is damaged.
9. the manner of execution of visual testing device as claimed in claim 6, it is characterized in that, described image analysing computer judging unit is by the GTG value of analyzing the surface image that described taking unit captures, judges that whether correctly or micro dust particle is not arranged the literal of integrated circuit surface to be measured such as described or sign.
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| CN2011104499547A CN103185729A (en) | 2011-12-29 | 2011-12-29 | Appearance inspection apparatus and execution method thereof |
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| CN2011104499547A CN103185729A (en) | 2011-12-29 | 2011-12-29 | Appearance inspection apparatus and execution method thereof |
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| CN103969267A (en) * | 2014-05-20 | 2014-08-06 | 上海华力微电子有限公司 | Cleaning control method of particulate matters on probes of probe card |
| CN104297256A (en) * | 2013-07-19 | 2015-01-21 | 鸿富锦精密工业（深圳）有限公司 | Appearance flaw detection system and method |
| CN107941823A (en) * | 2017-11-23 | 2018-04-20 | 苏州艺力鼎丰智能技术有限公司 | A kind of carbon fiber surface of automobile part prints volume defect intelligent detecting method |
| CN110876055A (en) * | 2018-08-30 | 2020-03-10 | 菱光科技股份有限公司 | External triggering linear camera detection system and image uniformity processing method thereof |
| CN111435325A (en) * | 2019-01-15 | 2020-07-21 | 鸿富锦精密工业(武汉)有限公司 | Inspection apparatus and inspection method |
| CN112763493A (en) * | 2019-11-05 | 2021-05-07 | 华硕电脑股份有限公司 | Appearance image capturing device and appearance detection device comprising same |
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Application publication date: 20130703 |