CN103137233A - X-ray waveguide and X-ray waveguide system - Google Patents

Abstract

The invention relates to an X-ray waveguide and an X-ray waveguide system. The X-ray waveguide includes a core having a curved portion and a cladding . The core has a periodic structure that substances each having a different real part of refractive index are periodically arrayed perpendicularly to a guiding direction. A critical angle for the total reflection at a core-cladding interface is larger than a Bragg angle attributable to the periodic structure for an X-ray. A critical angle for the total reflection at a substance interface in the periodic structure is smaller than the Bragg angle. Following formula is satisfied: where s is a core width in direction perpendicular to the guiding direction and parallel to a curvature radius of the curved portion, n low is a refractive-index real part of the substance having a minimum real part, n high is a refractive-index real part of the substance having a maximum real part thereof, and R is the curvature radius.

Description

X ray waveguide and X ray Wave guide system

Technical field

The present invention relates to the X ray waveguide and comprise x-ray source and the X ray Wave guide system of X ray waveguide.The X ray waveguide for example can be used in the X ray optical system according to an embodiment of the invention, and can further be used as the X ray optics that uses in the X ray optical system, this X ray optical system is used for for example X-ray analysis technology, x-ray imaging technology and X ray exposure technique.

Background technology

For example X ray, electromagnetic wave that have tens nm or shorter short wavelength shows the difference of very little refractive index between different material.As a result of, this short wavelength's electromagnetic wave is very little to the cirtical angle of total reflection at the interface between different materials for for example having.With the electromagnetic wave phase ratio in control example such as visible frequency band, it is more difficult controlling the electromagnetic wave with short wavelength.Up to the present, the large scale Space Optical System mainly is used to the electromagnetic wave with short wavelength of control example such as X ray.One of critical piece that consists of the large scale Space Optical System is alternately laminated many layer mirror with material of different refractivity.Many layer mirror has various functions, selects such as beam-shaping, spot size conversion and wavelength.In such X ray Space Optical System, use the total reflection at material interface place or based on the periodic Bragg reflection of periodic structure to change the direction of propagation of X ray.On the other hand, generally do not carry out the continuous bend of the direction of propagation of X ray.

Except the above-mentioned Space Optical System of up to the present main use, Jap.P. No.4133923 discloses and has been called poly-x-ray spread element capillaceous, in this poly-kapillary, have respectively by total reflection a plurality of kapillaries that X ray is limited to the form in tubular waveguide are bundled in together.According to disclosed x-ray spread element in Jap.P. No.4133923, owing to propagating when X ray is in being restricted to each kapillary, therefore can gather the direction of propagation that kapillary changes X ray by bending.In addition, also be studied for the small size X ray waveguide that forms on substrate recently, purpose is the performance that reduces the size of optical system and strengthen optical system.Example is only by utilizing the total reflection at the interface between covering and core, be clipped between covering or in by the core area of encompasses the restriction X ray so that the X ray waveguide that its propagation is passed.At " Applied Physics A ", Volume91, Number1, p.7(2008) in such X ray waveguide of describing in (hereinafter referred to as " document "), the X ray waveguide forms with curved shape on substrate, with the channeling direction of the X ray in the crooked waveguide mode that forms in the core of X ray waveguide continuously.

But, the problem below occurring in the X ray waveguide of the method for the direction of the X ray in the low order waveguide mode of describing in above-mentioned document, use is limited to X ray by the total reflection at the interface between core and covering in core and bending forms in waveguide.So that low order (particularly 0 rank) waveguide mode becomes leadingly in the propagation of X ray, must make the cross section diameter of waveguide core very little in order to build the X ray waveguide, that is, and tens nanometers.Therefore, X ray can only be propagated with considerably less amount.

Describe in Jap.P. No.4133923, with X ray is limited in kapillary and come the relevant x-ray spread element of the technology of the direction of propagation of crooked X ray by tortuous capillary in problem below occurring.Because diameter capillaceous is too large, the situation that the concept of " waveguide mode " does not keep therefore the X ray about propagating by kapillary appears.In other words, the direction of propagation of X ray is flexible, but the phase place of the X ray of propagating by kapillary is not space uniform in the face vertical with length direction capillaceous.

Summary of the invention

In view of the above-mentioned problems, embodiments of the invention provide be configured to the X ray waveguide that guides X ray to pass its core and be configured to X ray is limited to the covering in core a kind of comprising.Core have along from core and covering between the vertical direction in the interface periodic structure of periodically arranging the many kinds of substance that has respectively different refractive index real parts.The cirtical angle of total reflection of the X ray at the interface between core and covering is larger than the Bragg angle of the X ray of the periodic structure that is attributable to core.The cirtical angle of total reflection at the interface between the many kinds of substance of the periodic structure of formation core is less than Bragg angle.Core comprises sweep, and satisfies following formula:

$\frac{s}{\ln \left(\frac{n_{\mathrm{high}}}{n_{\mathrm{low}}}\right)}<R$

Here, s is the width of the core on vertical with the X ray channeling direction and parallel with the direction of the definition radius-of-curvature of sweep direction, n _lowThe refractive index real part of the material with minimum refractive index real part among the material of core, n _HighBe the refractive index real part of the material with maximum refractive index real part among the material of core, and R is the radius-of-curvature of sweep.

Read the following explanation of exemplary embodiment with reference to accompanying drawing, it is obvious that further feature of the present invention will become.

Description of drawings

Fig. 1 is the schematic cross-sectional view that core has the X ray waveguide of periodic structure, and this waveguide does not comprise sweep.

Fig. 2 is for the diagram of explaining wave vector and effective propagation angle.

Fig. 3 represents the transmission loss (TL) of each waveguide mode in the waveguide region of X ray waveguide according to an embodiment of the invention and the effective diagram of the example of the relation between propagation angle.

Fig. 4 is the diagram of an example of the Electric Field Distribution in the core that represents in the periodicity resonant wave guide pattern that forms in the waveguide region of X ray waveguide according to an embodiment of the invention.

Fig. 5 illustrate in X ray waveguide according to an embodiment of the invention with core and covering between the vertical direction in interface on the example of distribution of refractive index real part.

Fig. 6 is the schematic cross-sectional view that an example of the X ray waveguide that comprises according to an embodiment of the invention sweep is shown.

Fig. 7 is the schematic cross-sectional view of an example that the behavior of the X ray by the guiding of X ray waveguide according to an embodiment of the invention is shown.

Fig. 8 illustrates the exit end of X ray waveguide according to an embodiment of the invention and near schematic cross-sectional view thereof.

Fig. 9 is the schematic cross-sectional view of the X ray waveguide of example 1.

Figure 10 is the schematic cross-sectional view of the X ray waveguide of example 2.

Figure 11 is the perspective schematic view of the X ray waveguide of use in example 5.

Figure 12 is the schematic diagram that the X ray channeling direction in the X ray waveguide of example 5 is shown.

Embodiment

Below describe embodiments of the invention in detail.

Comprise according to the X ray waveguide of embodiment and be configured to guide X ray to pass its core and be configured to X ray is limited to covering in core.Core has along having respectively the periodic structure of the many kinds of substance of different refractive index real parts from the vertical direction periodic arrangement of X ray channeling direction.The cirtical angle of total reflection of the X ray at the interface between core and covering is larger than the Bragg angle of the periodic X ray of the periodic structure that is attributable to core.The cirtical angle of total reflection at the interface between the many kinds of substance of formation periodic structure is less than the Bragg angle of the periodic X ray of the periodic structure that is attributable to core.Core comprises sweep, and satisfies following formula (1):

$\frac{s}{\ln \left(\frac{n_{\mathrm{high}}}{n_{\mathrm{low}}}\right)}<R---\left(1\right)$

Here, s is the width of the core on vertical with the X ray channeling direction and parallel with the direction (radius-of-curvature direction) of the definition radius-of-curvature of sweep direction, n _lowThe refractive index real part of the material with minimum refractive index real part in the material of core, n _HighBe the refractive index real part of the material with maximum refractive index real part in the material of core, R is the radius-of-curvature of sweep.

In the disclosure, term " X ray " mean the refractive index real part of material have 1 or the wave band of less value in electromagnetic wave.More specifically, in the disclosure, term " X ray " means more than or equal to 1pm and less than or equal to the electromagnetic wave in the wavelength coverage of 100nm, comprises extreme ultraviolet (EUV) light.Electromagnetic frequency with this short wavelength is very high, and the outermost electronics of material is not responsible for this electromagnetic wave.Can know thus, from different unlike the electromagnetic wave (visible light and infrared light) in the short frequency band of ultraviolet light for wavelength, the refractive index real part of material has value less than 1 for X ray.Material is expressed by plural number for the refractive index of X ray.In this manual, be called as " refractive index real part " or " real part of refractive index " as the real of refractive index, and the imaginary part of plural number is called as " refractive index imaginary part " or " imaginary part of refractive index ".

Be n ', n ' from 1 depart from and be δ at the refractive index real part, and be in the situation of β ' with absorbing relevant refractive index imaginary part, material is generally expressed by following formula (2) for the refractive index n of above-mentioned X ray:

n=1-δ-iβ′=n′-iβ′(2)

Electron density ρ due to δ and material _eProportional, therefore the refractive index real part has less value when material has larger electron density.Refractive index real part n ' is expressed by following formula:

n′=(1-δ)

In addition, electron density ρ _eWith atomic density ρ _aZ is proportional with the atom sequence number.Therefore, in the disclosure, in many cases, " two or more materials that have respectively different refractive index real parts " can also be expressed as " two or more materials with different electron densities ".

When X ray was propagated in a vacuum, the refractive index real part was maximum for X ray.In typical environment on earth, compare with the nearly all material beyond gas, the refractive index real part is maximum in air.The term " material " that uses in this manual comprises air and vacuum.In the X ray waveguide according to embodiment, the total reflection of X ray by the X ray at the interface between core and covering is restricted in core to form waveguide mode, causes thus X ray to pass through the X ray waveguide and propagates.In this manual, the direction of propagating in the waveguide mode that the guiding X ray forms at this moment is called as " (X ray) channeling direction ".Channeling direction is identical with the x-ray spread direction that obtains based on the theory of waveguide.In many forms in the general type of X ray waveguide according to an embodiment of the invention, channeling direction be given with core and covering between the interface parallel and with the direction of the perpendicular direction of the radius-of-curvature of sweep.Now, the direction of radius-of-curvature is along the direction of definition radius-of-curvature.

In addition, have periodic structure according to the core of the X ray waveguide of embodiment, in this periodic structure, the refractive index real part along with core and covering between vertical or direction perpendicular in interface show periodic distribution.The waveguide mode that uses in an embodiment is the waveguide mode with the periodicity resonance of the periodic structure of core.In this manual, this waveguide mode is called as " periodically resonant wave guide pattern ".

Below, for example the channeling direction with reference to the X ray waveguide is the situation description periodicity resonant wave guide pattern of straight line.Should be noted that because X ray waveguide according to an embodiment of the invention comprises sweep, therefore, following description is only to help to understand reference of the present invention.

Fig. 1 is the schematic cross-sectional view that core has the X ray waveguide of periodic structure, and this waveguide does not comprise sweep.The X ray waveguide of Fig. 1 represents that the channeling direction of X ray waveguide is the situation of straight line.Core 101 is sandwiched between covering 105 and 106, and the periodic structure of formation core is made by corresponding with one-period respectively a plurality of unit structures 102.Unit structure 102 is made of the material 103 with relatively large refractive index real part and the material 104 with refractive index real part of less.Therefore, core have along with core 101 and covering 105 between interface or core 101 direction (y direction in Fig. 1) vertical with the interface between covering 106 have the form of the multilayer film of One Dimension Periodic structure.Arrow 109 and 110 typical examples are as propagating by core and by the behavior of the X ray of the interface total reflection between core and covering.The example that illustrates represent X ray when being mapped to the interface with the cirtical angle of total reflection by the situation of total reflection, and the cirtical angle of total reflection is by θ _cExpression.In this manual, be that under the condition of 0 °, about the X ray of a target wavelength, all angles are all to define in parallel with channeling direction and vertical with the interface between core and covering face in the angle of channeling direction.Provide the track of channeling direction for drawing by the center of the edge of the core direction vertical with the interface between core and covering.In the example that illustrates, dotted line 107 represents this track.In Fig. 1, the direction of track and z direction coupling.In addition, in this manual, the length of waveguide represents the length of track.In this manual, the cirtical angle of total reflection of the material 103 in unit structure 102 and the X ray at the interface between material 104 is defined as θ _C-inIn addition, in this manual, be attributable to the periodic Bragg angle of periodic structure of core 101 by θ _BExpression.Bragg angle θ _BBe X ray about the incident angle of periodic structure, on this incident angle, when applying X ray to periodic structure, as the result of the multiple interference in periodic structure, X ray is reflected consumingly.Determine Bragg angle θ according to the wavelength of X ray and the periodicity of periodic structure _BHere, effective propagation angle of the first-harmonic of the periodicity resonant wave guide pattern in the X ray waveguide is the angle that is substantially equal to Bragg angle according to an embodiment of the invention.Based on following approximate, that is, form waveguide mode by interfering when a plane wave during repeatedly propagating in total reflection at the interface between core and covering, first-harmonic represents this plane wave.As shown in Figure 2, in the wave vector at waveguide mode the wave vector 201 parallel with channeling direction by k _z=(0,0, k _z) when representing, first-harmonic is defined as having by k in a vacuum ₀The plane wave of the wave vector 202 of expression.At this on the one hand, at wave vector k ₀With wave vector k _zBetween the angle that forms be called as effective propagation angle θ ' (°), and by following formula (4), that wave vector is relevant with effective propagation angle θ '.Wave vector k _⊥The wave vector composition of the direction (i.e. the direction vertical with channeling direction) that 203 expressions are vertical with the interface between core and covering.

${\mathrm{\&theta;}}^{\&prime;}=\arccos \left(\frac{\left|k_z\right|}{\left|{\mathrm{<figure-callout\; id="0"\; label="k"\; filenames="HDA00002497314400021.png,HDA00002497314400071.png"\; state="\{\{state\}\}">k</figure-callout>}}_0\right|}\right)---\left(4\right)$

Actual Bragg angle has the width that is called as the Bragg angle scope.But the Bragg angle in the disclosure is regarded as effective propagation angle of the first-harmonic in indication cycle's property resonant wave guide pattern, and is given the minimum angles in actual Bragg angle scope.Periodically the resonant wave guide pattern is the waveguide mode that forms by following process, and in this process, X ray causes multiple interference by each reflection of part repeatedly and the refraction at the interface in periodic structure, and the periodicity resonance of final and periodic structure.In order to realize multiple interference, the X ray waveguide has the cirtical angle of total reflection θ of the X ray at material 103 in unit structure 102 and the material interface place between material 104 according to an embodiment of the invention _C-inPeriodic Bragg angle θ less than the periodic structure that is attributable to core 101 _BFeature.This condition is expressed by following formula (5).Note, determine Bragg angle θ according to the relation between the wavelength of the periodicity of the periodic structure of core and X ray _B

θ _c-in<θ _B(5)

For will obtain by multiple interference and be limited in core with the X ray of the periodicity resonance of periodic structure, the X ray waveguide also has the cirtical angle of total reflection θ at the interface between core and covering according to an embodiment of the invention _cPeriodic Bragg angle θ greater than the periodic structure that is attributable to core _BFeature.This condition is expressed by following formula (6).

θ _c>θ _B(6)

By satisfying above-mentioned feature, can form periodically resonant wave guide pattern according to the X ray waveguide of embodiment, that is, and with the waveguide mode of the periodicity resonance of core.

Fig. 3 mean the transmission loss (TL) of each waveguide mode that forms in the example of the straight line X ray waveguide shown in Fig. 1 and effectively propagation angle θ ' (°) between the diagram of relation.Diagram is based on result of calculation.In diagram, the longitudinal axis represents the imaginary part Im[k as the propagation constant of each waveguide mode of the index of transmission loss (TL) _z].Build the X ray waveguide of satisfying formula (5) and (6) shown in Figure 1, and core has multi-layer film structure.Although waveguide mode has discrete effective propagation angle according to its exponent number, there is effective propagation angle scope that can not have any waveguide mode as shown in Figure 3.This effective propagation angle scope is Bragg angle scope 302, and in this manual, the minimum angles of Bragg angle scope is called as " Bragg angle ".This Bragg angle can be by the approximate periodically effective propagation angle of resonant wave guide pattern that is considered as.Therefore, as can be seen from Figure 3, by the waveguide mode indication cycle property resonant wave guide pattern of 301 expressions, and periodically the transmission loss (TL) of resonant wave guide pattern obviously to approach the transmission loss (TL) of other waveguide mode of effective propagation angle of resonant wave guide pattern periodically than effective propagation angle little.This means and to form the waveguide mode with very little transmission loss (TL) by the X ray waveguide according to embodiment.Because the transmission loss (TL) of periodicity resonant wave guide pattern is obviously less, therefore periodically the X ray of resonant wave guide pattern becomes leading in the X ray waveguide.As a result of, can guide X ray in the periodicity resonant wave guide pattern as single waveguide mode basically.In addition, by being used to form the periodically structure of the X ray waveguide of resonant wave guide pattern, the section of core can increase in the plane vertical with channeling direction greatly, and can increase the amount of the X ray that will be directed.

As the example of reality, Fig. 4 representative when core be the space distribution of the electric field intensity in periodicity resonant wave guide pattern when having the form of multilayer film of 50 periodicity.In the waveguide with this structure, as shown in Figure 4, center towards core under the periodic impact that is distributed in multilayer film of whole electric field intensity is localized, and the amount of the X ray that is penetrated into covering that exists as evanescent field reduces, and can reduce transmission loss (TL) thus.In Fig. 4, transverse axis represents the direction with the Surface Vertical of multilayer film, that is, and and the y direction in Fig. 1. Reference numeral 401 and 403 corresponding with covering, and 402 is corresponding with core.In addition, the distribution of the electric field intensity from periodicity resonant wave guide pattern can be found out, the quantity of the antinode of electric-field intensity distribution and the periodicity of periodic structure coupling, and electric field concentrate on multilayer film by in the each several part made of the less absorbefacient material of performance, further reduce thus transmission loss (TL).By above-mentioned feature, namely, periodically the resonant wave guide pattern can be formed basically single waveguide mode, and electric field concentrates in the material that shows less transmission loss (TL), and the distribution of the electric field on the direction vertical with the interface between core and covering has the periodicity of mating with the periodicity of multilayer film, and periodically the resonant wave guide pattern edge direction vertical with the interface between core and covering has uniform phase place.Therefore, can form by the basic structure of above-mentioned straight line X ray waveguide the single waveguide mode of the phase place with space uniform.Here, expression way " even phase " means that not only the phase differential of elect magnetic field is always 0 situation, and means phase differential periodically variable situation in the space.

At the X ray that guides in the periodicity resonant wave guide pattern that forms after the end face of waveguide penetrates, as the result of Fraunhofer diffraction, it is formed on the propagation X ray of propagating along both direction with high intensity on very little dispersion angle in the far-field region.In this manual, these X ray are called as " diffraction X ray ".Along periodically lower direction, for example, along the zx face direction in Fig. 1, the diffraction X ray has large dispersion angle, and reason is that it is not subjected to periodically affect and not controlled by periodic structure.But, if exist periodically along the zx face direction in Fig. 1, can reduce so the dispersion angle of the diffraction X ray on zx face direction, reason is that the diffraction X ray is subjected to periodically to affect.In order to explain the diffraction X ray, Fig. 8 show the X ray waveguide that comprises the core 803 that is clipped by covering 801 and 802 exit end and near.As shown in dotted line 806, channeling direction is parallel with the z direction.Because the periodic structure of core has periodically in the y-direction, therefore the X ray from the end outgoing of waveguide forms the edge about the diffraction X ray 804 and 805 of the axisymmetric both direction diffraction of z the far-field region.Related therewith, the emission angle of two diffraction X ray in the yz face becomes very little, and is diffracted by many slits as X ray.In addition, as shown in Figure 8, the X ray 804 of diffraction and 805 angle of diffraction about the z direction are substantially equal to respectively Bragg angle.

Although above description is about the waveguide that does not comprise sweep,, as long as do not have contradiction between it, above description just is applicable to X ray waveguide according to an embodiment of the invention similarly.

Have according to the X ray waveguide of embodiment the feature that comprises the part (that is, sweep) with curved shape, in this part, represent that the direction of the periodic basic vector of periodic structure continuously changes.In addition, provide s be with sweep in vertical and parallel with the direction of the radius-of-curvature of the sweep direction of X ray channeling direction on width, the n of core _lowRefractive index real part, the n of the material with minimum refractive index real part in the material of core _HighThe refractive index real part and the R that are the material with maximum refractive index real part in the material of core are the radius-of-curvature of the sweep of the center of waveguide in sweep, and the X ray channeling direction in sweep satisfies above-mentioned formula (1)." " center " of waveguide mean with core and covering between the vertical direction in interface on the center of core.When presenting as shown in Figure 7 covering 701 and 702, the center that can say waveguide be on point on one group of interface that is limited to respectively between covering 701 and core 703 and the interface between covering 702 and core 703 near the mid point between a point of this point.As an alternative, the center that can say waveguide is present on the average line of two cores occurring in the section vertical with channeling direction-covering parting line, that is, be present on center line between two cores occurring in the section vertical with channeling direction-covering parting line.According to this concept, when the whole core periphery of encompasses, can say that the center of gravity of the figure that the core that occurred-covering parting line surrounds is the center of waveguide in the section vertical with channeling direction.

By build the X ray waveguide according to the above embodiments, periodically the channeling direction of the X ray in the resonant wave guide pattern can be in the sweep of waveguide changes continuously at the radius of curvature R place.In other words, can change the channeling direction that is limited in the core with wide section and has the X ray of single even phase.

Advantageously satisfy formula (1) according to the X ray waveguide of embodiment in the whole zone of sweep.When the material that consists of periodic structure is constant along the X ray channeling direction, can be said to that to satisfy formula (1) in the zone of radius of curvature R minimum be enough.

Fig. 5 illustrates the example of distribution of the refractive index real part of the direction (y direction) vertical according to the interface with between core and covering in the X ray waveguide core of embodiment.In Fig. 5, solid line and dotted line represent when channeling direction to be the corresponding distribution of straight line and the refractive index real part when channeling direction is crooked.In the y-direction, Reference numeral 502 and 503 expression cladding regions, 504 expression core areas.The zone of Reference numeral 501 representation unit structures.Unit structure consists of by the zone 505 of being made by the material with larger refractive index real part and the zone 506 of being made by the material with less refractive index real part.As shown in Figure 5, by arranging a plurality of unit structures, refractive index real part periodic distribution in the y-direction in core.Each single center of interconnection core also represents that the straight line (also can be described as track) of channeling direction is positioned on y=0.Can know, in the part of channeling direction bending, when curved waveguide was approximately straight waveguide, as shown in Figure 5, the whole distribution of refractive index was the situation inclination of straight line with respect to the channeling direction of X ray waveguide.Provide n ₀(y) represent the distribution of the refractive index that is represented by the solid line in Fig. 5, that is, provide n ₀' (y) distribution of the representative refractive index real part of being expressed by formula (2), the distribution of the refractive index in crooked sweep on radius of curvature R of the channeling direction in parallel with channeling direction and vertical with the interface between core and covering plane can be by the following formula approximate expression:

$n_0\left(y\right)e^{\frac{y}{R}}$

The distribution of the refractive index real part that is represented by the dotted line in Fig. 5 can be expressed by following formula:

${{\mathrm{<figure-callout\; id="0"\; label="n"\; filenames="HDA00002497314400021.png,HDA00002497314400071.png"\; state="\{\{state\}\}">n</figure-callout>}}_0}^{\&prime;}\left(y\right)e^{\frac{y}{R}}$

Even also can form periodically resonant wave guide pattern in order to make when the distribution of refractive index is tilted, must be larger than the refractive index real part near the material with less refractive index real part of the other end of core near the refractive index real part of the material with larger refractive index real part of an end of core.Therefore, the refractive index real part by 509 expressions must be than large by the refractive index real part of 508 expressions.Provide y _HighBe from the center of core near an end of core and by the distance 507 of position corresponding to the refractive index real parts of 509 expressions, y _lowBe from the center of core near the other end of core and by the distance 510 of position corresponding to the refractive index real parts of 508 expressions, n _HighThe refractive index real part that consists of the material with larger refractive index real part in the material of periodic structure, n _lowBe the refractive index real part of the material with less refractive index real part in them, and s is the width of core, in the part of channeling direction bending, must satisfies following formula (9).

$n_{\mathrm{high}}\exp (-\frac{y_{\mathrm{high}}}{R})>n_{\mathrm{low}}\exp \left(\frac{y_{\mathrm{low}}}{R}\right)---\left(9\right)$

Therefore, based on following approximate acquisition formula (1):

y _low≈y _high≈s/2

Fig. 6 illustrates the simple example of X ray waveguide of the sweep of the shape bending that comprises according to an embodiment of the invention the X ray waveguide.It is the part 607 of straight line and the part 605 and 606 of channeling direction bending that X ray waveguide shown in Figure 6 comprises channeling direction.Core 603 is sandwiched between covering 601 and 602.Although the core edge direction vertical with the interface between core and covering has periodic index distribution in Fig. 6, the reason for simplifying does not illustrate periodic structure.Dotted line 604 expression channeling directions.Sweep 605 has radius of curvature R ₁, and sweep 606 has radius of curvature R ₂When the physical property of X ray waveguide and structural parameters are set when all satisfying formula (1), (5) and (6) in sweep 605 and 606, such variation that the channeling direction of the X ray in forming in waveguide and having the single periodicity resonant wave guide pattern of even phase can be as shown in the dotted line 604 in Fig. 6.

In addition, advantageously be fabricated according to the X ray waveguide of embodiment and make when Bragg angle by θ _BDuring (radian) expression, the length of the waveguide in sweep is 2R θ _B

With reference to as described in Fig. 8, the X ray of the end face outgoing of the waveguide from periodicity resonant wave guide pattern is reverse etc. equidirectional diffracted by the angle of diffraction that is substantially equal to Bragg angle along two in channeling direction at the outgoing end face shangguan of waveguide in the far-field region as top.On the contrary, end face when X ray by waveguide is during with resonant wave guide Mode Coupling periodically, can by make X ray with core and covering between vertical and parallel with channeling direction plane, interface in enter the incident end of waveguide with Bragg angle about channeling direction, obtain for the higher coupling efficiency of periodicity resonant wave guide pattern.Fig. 7 illustrates such process: X ray enter into according to an end face of the X ray waveguide of embodiment with periodicity resonant wave guide Mode Coupling, and the X ray that guides in periodicity resonant wave guide pattern is from the other end outgoing of waveguide.With Fig. 6 similarly, in order to simplify, omit the periodic structure of core 703.The X ray of Reference numeral 705 expression incidents, and the 706 and 707 diffraction X ray along the both direction diffraction (the propagation X ray the far-field region) that produce when being illustrated in X ray in resonant wave guide pattern periodically from the other end outgoing of waveguide.In the X ray waveguide, covering 701 and 702 clips the core 703 with periodic structure betwixt, and channeling direction is by dotted line 704 expressions.Enter the incident end face of waveguide by the X ray 705 that makes incident with Bragg angle about the straight line 708 that represents channeling direction on incident end face, the X ray 705 of incident with high efficient in waveguide with periodicity resonant wave guide Mode Coupling.Crooked with radius of curvature R by the channeling direction in the waveguide of dotted line 704 expressions, and the X ray in periodicity resonant wave guide pattern is crooked along channeling direction.In periodicity resonant wave guide pattern guiding and from the X ray of the other end (namely from its outgoing end face) outgoing of waveguide about the straight line 709 that represents the X ray channeling direction on the outgoing end face with Bragg angle along the both direction diffraction.The Bragg angle that provides the periodic structure that is attributable to core is θ _BThe length of (radian) and waveguide (being the length of dotted line 704) is L, and the X ray 705 of incident and the X ray 706 of outgoing satisfy in the X ray waveguide under the condition of following formula (10) in the plane parallel with the drawing surface to be propagated on same axle:

L=2Rθ _B(10)

Therefore, by building the X ray waveguide of satisfying formula (10) according to embodiment, can in the situation that do not change the optical axis of X ray optical system in forming resonant wave guide pattern periodically X ray and obtain to have very little dispersion angle and the X ray of uniform phase place spatially.Certainly, may not require formula (10) to set up on strict meaning, and allow the error based on the system of needs.Therefore, in this manual, but the situation that is in the error in the permissible error scope also is interpreted as satisfying formula (10).

In accompanying drawing of the present disclosure, X ray is represented by arrow.Should be noted that arrow illustrates the canonical dissection that has the X ray of a width along the direction vertical with the direction of propagation, and it does not illustrate the X ray of all propagation for the ease of explaining.The arrow that X ray is shown is intended that concrete representation case as the direction of propagation of the X ray in the accompanying drawing of mentioning in instructions.Especially, the X ray of incident is applied on the whole section of the core on the incident end of waveguide at least, and the X ray of outgoing is from the whole section outgoing of the core of the exit end of waveguide.

Formation according to the periodic structure of the core of the X ray waveguide of embodiment with channeling direction and the core plane vertical with the interface between covering in have along with core and covering between the periodic distribution of refractive index real part of the vertical direction in interface.It is multilayer film that the simplest material of this periodic structure is provided.By stacked a plurality of material layers that have respectively different refractive index real parts periodically, consist of multilayer film.By the alternately laminated material that has the material of higher electron density (that is, less refractive index value of real part) and have lower electron density (that is, larger refractive index value of real part), obtain the particularly advantageous example of periodic structure.

Can carry out by the sputter of for example using the method for stacked a plurality of layers in semiconductor technology.Have higher electron density and smaller X ray absorption loss and can comprise by the example of stacked material when using sputter: aluminium oxide (Al ₂O ₃), silit (SiC), silicon nitride (Si ₃N ₄), magnesium oxide (MgO) and titanium dioxide (TiO ₂).Have lower electron density and smaller X ray absorption loss and can comprise by the example of stacked material when using sputter: beryllium (Be), boron (B), boron carbide (B ₄C), boron nitride (BN) and carbon (C).Should be noted that spendable material is not limited to above-mentioned example here.

Multilayer film can be set to have conduct by meso-hole structure (mesostructured) material of the lamellar structure of the One Dimension Periodic structure of the self assembly formation of amphiphile, amphiphilic molecule.This meso-hole structure material has for example form of silica gel, tin oxide or oxidation titanyl compound and organic substance of mutual overlapping placement, and can make it by for example sol-gel process.

When periodic structure is constituted as the meso-hole structure material, periodic structure is not limited to have the meso-hole structure material of lamellar structure, and periodically arranges in the oxide material in the plane vertical with channeling direction and be filled with the hole of organic substance or the meso-hole structure material of emptying aperture.Although a rear meso-hole structure material has two-dimensional structure in the plane vertical with channeling direction, it can be regarded as having the mean refractive index edge direction periodically variable One Dimension Periodic structure vertical with the interface between core and covering.Therefore, a rear meso-hole structure material can advantageously be used as consisting of the periodic structure according to the core of the X ray waveguide of embodiment.

In addition, periodic structure can be made by mesoporous property (mesoporous) material that obtains by the organic substance of removing filling pore in the meso-hole structure material or emptying aperture.Because mesoporous property material comprises empty part, therefore use mesoporous property material can reduce the absorption loss of X ray.The orientation of hole can be controlled to reduce the decay of X ray.In this manual, as mentioned above, air and vacuum also are contained in the concept of " material ".Therefore, even when the hole in mesoporous property material is occupied by air or vacuum, owing to comprising a plurality of parts with different refractive indexes, therefore mesoporous property material can be regarded as forming the meso-hole structure material of being made by many kinds of substance.

When structure satisfy formula (6) according to the X ray waveguide of embodiment the time, in order to cause consumingly for the total reflection that X ray is limited in core, the material that forms covering advantageously is selected from the material with higher electron density, such as Au, W, Ta, Pt, Ir and Os.

X ray Wave guide system is according to an embodiment of the invention below described.At least comprise x-ray source and X ray waveguide according to the X ray Wave guide system of embodiment.X-ray source emission have more than or equal to 1pm and less than or equal to the electromagnetic wave in the general X ray wave band of the wavelength of 100nm as X ray.Can be the X ray with wavelength of single wavelength or certain width from the X ray of x-ray source emission.Enter the X ray waveguide from the X ray of x-ray source emission.Can be set to above-mentioned X ray waveguide according to the X ray waveguide in the X ray Wave guide system of embodiment.

Example 1

Fig. 9 illustrates the section according to the X ray waveguide of example 1 of the present invention, and this section is vertical with substrate surface and comprise channeling direction.In the structure of the X ray waveguide of example 1, above-below direction is defined, so that substrate portion is arranged on nethermost position.In Fig. 9, the X ray channeling direction is by dotted line 908 expressions.The length of the waveguide corresponding with the length of dotted line 908 is about 3mm.The substrate that Reference numeral 901 expressions are made by quartz.Have by being polished to the curved surface that radius-of-curvature is the drum of 2m in yz face in Fig. 9, form the surface of quartz base plate 901.By sputter form on quartz base plate 901 successively by W make and have the under-clad layer 903 of the thickness of 20nm, as the multilayer film 902 of the periodic structure that consists of core with make and have the top covering 904 of the thickness of 20nm by W.Multilayer film 902 consists of carbon (C) layer 906 and the aluminium oxide (Al with thickness of 4nm of the thickness of the alternately laminated 12nm of having ₂O ₃) layer 907 periodic structure.Periodic structure has the cycle of the 16nm on 50 periodicity and the direction vertical with the interface between core and covering.In addition, the uppermost part of core and nethermost part are respectively by the Al with less refractive index real part ₂O ₃Film forms.X ray for the photon energy with 8keV, the cirtical angle of total reflection at the interface between core and covering is approximately 0.51 °, the aluminium oxide and the cirtical angle of total reflection at the interface between carbon that consist of the unit structure in multilayer film are approximately 0.19 °, and the periodic Bragg angle that is attributable to multilayer film is approximately 0.35 °.Therefore, satisfy formula (5) and (6), and periodically the resonant wave guide pattern becomes the waveguide mode of the dominance in the X ray waveguide of example 1.Because the X ray waveguide of example 1 is crooked in the yz face with the radius-of-curvature of 2m, so the X ray of the periodicity resonant wave guide pattern in waveguide is being conducted through waveguide in the channeling direction bending by dotted line 908 expressions.Here, core is along having the approximately width of 804nm with the core direction vertical with covering.For the X ray of the photon energy with 8keV, the refractive index real part of covering has approximately 0.999952992 value, and the refractive index real part of the aluminium oxide with less refractive index real part in the material of multilayer film has approximately 0.9999872224544 value.Therefore, satisfy formula (1), and can guide it in periodicity resonant wave guide pattern when being limited to X ray in core.When the channeling direction on the X ray incident end face of waveguide was represented by straight line 910 by the channeling direction on the X ray outgoing end face of straight line 909 expressions and waveguide, the angle that forms between straight line 909 and 910 was 0.08 °.Therefore, the channeling direction of periodicity resonant wave guide pattern changes 0.08 ° by the X ray waveguide of example 1.For example, when X ray 913 on the X ray incident end face about channeling direction so that approximately the Bragg angle of 0.35 ° enters, form respectively about the channeling direction on the outgoing end face with the outgoing X ray 911 and 912 the far-field region of about 0.35 ° of diffraction from the X ray of outgoing end face outgoing.By selecting 911 in the outgoing X ray, the direction of incident X-rays can change approximately 0.78 °.In addition, owing to using the periodicity resonant wave guide pattern that forms in the X ray waveguide of example 1, therefore provide the X ray of outgoing as the propagation X ray with very little dispersion angle and space uniform phase place.

Example 2

Figure 10 illustrates the section according to the X ray waveguide of example 2 of the present invention, and this section is vertical with substrate surface and comprise channeling direction.On the quartz base plate 1001 with the surface that forms by the drum surface that is polished to the approximately radius-of-curvature bending of 1m, by sputter form successively by tungsten (W) make and have the about thickness of 20nm under-clad layer 1003, consist of the multilayer film 1002 of core and make and have an approximately top covering 1004 of the thickness of 20nm by tungsten (W).Pass the dotted line 1008 expression X ray channeling directions at the center of core in passing above-mentioned section, and the length of dotted line 1008 is defined as the length of waveguide.In example 2, the length of waveguide is about 10.5mm.Multilayer film 1002 is by having the approximately aluminium oxide (Al of the thickness of 3nm stacked comprising respectively ₂O ₃) layer 1007 and have an approximately boron carbide (B of the thickness of 12nm ₄C) periodic structure of the formation core of 100 layers formation of the unit structure 1005 of layer 1006.Periodic structure has the approximately cycle of 15nm and 100 periodicity.In addition, the uppermost layer of multilayer film and nethermost layer are formed by alumina layer respectively.X ray for the photon energy with 10keV, the cirtical angle of total reflection at the interface between core and covering is approximately 0.43 °, the aluminium oxide and the cirtical angle of total reflection at the interface between carbon that consist of the unit structure in multilayer film are approximately 0.18 °, and are attributable to the Bragg angle θ of multilayer film _B(°) be approximately 0.3 °.Therefore, formula (5) and (6) are satisfied in the X ray waveguide of example 2, and it can form periodicity resonant wave guide pattern to guide X ray in this pattern.In addition, the length of the X ray waveguide of example 2 is about 10.5mm and satisfy formula (10).As shown in figure 10, by making X ray enter waveguide about near the straight line 1009 of the channeling direction the incident end of expression waveguide with Bragg angle, the X ray 1013 of incident is with high efficient and periodicity resonant wave guide Mode Coupling, thus, periodically the X ray in the resonant wave guide pattern after being conducted through waveguide from the exit end outgoing of waveguide.Form along form respectively the outgoing X ray 1011 and 1012 of the both direction diffraction of Bragg angle about straight line 1010 from the X ray of exit end surface outgoing, straight line 1010 represents near the channeling direction of exit end of waveguide.Because the X ray waveguide of example 2 is constructed to satisfy formula (10), so incident X-rays 1013 and outgoing X ray 1012 are propagated on same axle.This is favourable, and reason is that optical axis does not change in the X ray optical system.

Example 3

In the X ray waveguide of example 3 according to the present invention, the meso-hole structure material substitution that the core of the X ray waveguide of describing in example 1 is had lamellar structure.The meso-hole structure material with lamellar structure at the core of being made and form the X ray waveguide that consists of example 3 by tungsten on the covering that forms on quartz base plate.In the meso-hole structure material, the layer that has the layer of the about organic substance of the thickness of 7.7nm (material that namely has larger refractive index real part) and have the about silica gel of the thickness of 3.3nm (material that namely has less refractive index real part) is by alternately laminated, make along with core and covering between the vertical direction in interface the One Dimension Periodic distribution of refractive index is provided.Meso-hole structure material with lamellar structure has the approximately cycle of 11nm and 48 periodicity.The length of waveguide is about 4mm.By using the precursor solution dip coating, form the meso-hole structure material with lamellar structure according to example 3, this precursor solution is to add in the solution of surfactant of the mould that serves as the aggregate form by the precursor with inorganic oxide to prepare.Here, by use the abaculus polymkeric substance as surfactant, use tetraethoxysilane as the precursor of inorganic oxide and use ethanol as solvent, add to be used for inorganic oxide precursor hydrolysis water and hydrochloric acid and stir the mixture, prepare precursor solution.Mixing ratio (mol ratio) is set as that tetraethoxysilane is 1, the abaculus polymkeric substance is 0.0264, water is 8, hydrochloric acid is 0.01, and ethanol is 40.Use three abaculus multipolymers of polyglycol (20)-polypropylene glycol (70)-polyglycol (20) as abaculus polymkeric substance (repeat number of each abaculus of number expression in bracket).Form the meso-hole structure material with lamellar structure by the process of self-organization that occurs in the evaporation of the solvent of the solution of introducing.X ray for the photon energy with 8keV, the organic substance and the cirtical angle of total reflection at the interface between silica gel that consist of the unit structure in the meso-hole structure material with lamellar structure are approximately 0.13 °, the cirtical angle of total reflection at the interface between core and covering is approximately 0.53 °, and the Bragg angle that is attributable to have the meso-hole structure material of lamellar structure is approximately 0.44 °.Therefore, the structure of the X ray waveguide of example 3 satisfies formula (5) and (6).Therefore, can form periodically resonant wave guide pattern, and can be by the X ray waveguide guiding of example 3 and the X ray in flexure cycles resonant wave guide pattern.Channeling direction changes approximately 0.115 ° between the X ray incident end of waveguide and X ray exit end.

Example 4

In the X ray waveguide of example 4 according to the present invention, be formed in the meso-hole structure material with lamellar structure of the core of the X ray waveguide of description in example 3 by mesoporous property material substitution.The length of waveguide is about 3mm.The mesoporous property material of the core of the X ray waveguide of formation example 4 is the mesoporous silica gel materials that have a large amount of holes with uniform diameter in silica gel.The mesoporous silica gel material has two-dimensional structure in the section vertical with channeling direction.But, the alternately laminated layer that comprises the layer of a large amount of air parts and comprise a large amount of silicon gel part of direction that the edge is vertical with the interface between core and covering, and mesoporous property material has the mean refractive index of making edge direction periodically variable index distribution vertical with the interface between core and covering.Therefore, the mesoporous property material edge direction vertical with the interface between core and covering provides the One Dimension Periodic structure.The One Dimension Periodic structure has the approximately cycle of 10nm and 50 periodicity.Especially, process by forming the mesoporous film demoulding afterwards the transmission loss (TL) that the empty mesoporous property material of hole change that makes in mesoporous silica gel can reduce X ray.By describe in example 3 for the preparation of the method for precursor solution in mixing ratio (mol ratio) be made as that tetraethoxysilane is 1, the abaculus polymkeric substance is 0.0096, water is 8, hydrochloric acid be 0.01 and ethanol be 40, obtain the precursor solution of mesoporous silica gel.By apply precursor solution on the under-clad layer of being made by tungsten, with the precursor solution dryingization and the ageing that apply, it is impregnated into solvent in and extract the step of removing as the abaculus polymkeric substance of mould, prepare mesoporous film.Therefore, the core of the X ray waveguide of example 4 is made by the mesoporous silica gel that obtains after the organic substance in side by side removing hole with demoulding step.Due to different from the meso-hole structure material with lamellar structure, periodic structure is not the film-stack structure, therefore with core and covering between the vertical direction in interface on the unit structure of mesoporous silica gel in, the indefinite definition cirtical angle of total reflection.This situation also satisfies formula (5).X ray for the photon energy with 10keV, the cirtical angle of total reflection at the interface between core and covering is approximately 0.43 °, and the meso-hole structure material that is attributable to be made by mesoporous silica gel (namely corresponding to core and covering between the vertical direction in interface on the periodicity of mean value of refractive index real part) Bragg angle be approximately 0.36 °.Therefore, further satisfy formula (6).As a result of, can be by the X ray waveguide guiding of example 4 and the X ray in flexure cycles resonant wave guide pattern.Channeling direction changes approximately 0.09 ° between the X ray incident end of waveguide and X ray exit end.

Example 5

Figure 11 illustrates the X ray waveguide of example 5.The X ray waveguide of example 5 has the feature of curved guide direction in the flat substrate surface.The core of X ray waveguide is made by the mesoporous silica gel material of describing in example 4.In the structure of the X ray waveguide of example 5, the definition above-below direction makes substrate portion be arranged on nethermost position.By beamwriter lithography and dry ecthing, form in planar silicon (Si) substrate 1101 width with about 1 μ m and approximately in the degree of depth of 1 μ m and the zx face in Figure 11 with the groove 1107 of the radius-of-curvature bending of 2m.Then, make and have approximately the first covering 1102 of the thickness of 20nm by sputtering in groove 1107 to form by tungsten.Then apply the precursor solution of mesoporous silica gel material on the first covering 1102 by dip coating.As a result of, forming the meso-hole structure material during the evaporation of solvent by self-organization on the first covering 1102.After the mesoporous property material that forms, further form second covering 1104 of making and having the thickness of 20nm by tungsten by sputter on the surface of meso-hole structure material in the zone of removing by polishing beyond groove 1107.Therefore, form in the xy face that is included in Figure 11 by the X ray waveguide of the core 1103 of encompasses.As shown in the dotted line 1201 in Figure 12, channeling direction is crooked with the radius-of-curvature of 2m along the direction (namely zx face in) parallel with substrate surface.Therefore, satisfy formula (1).Above-mentioned result has the fact of curved shape based on the groove 1107 that forms in substrate 1101.Mesoporous property material has and makes in silica gel 1106 periodic arrangement have the periodic structure of periodic distribution along the x direction in Figure 11 along emptying aperture 1105 and the mean refractive index real part that channeling direction extends.In the x-direction, periodic structure has the approximately cycle of 12nm and 80 periodicity.Same with example 4, due to different from the meso-hole structure material with lamellar structure, periodic structure is not the film-stack structure, thus the cirtical angle of total reflection with core and covering between the vertical direction in interface on the unit structure of mesoporous silica gel in clearly do not defined.This situation also satisfies formula (5).X ray for the photon energy with 8keV, be approximately 0.53 ° as first covering 1102 at the interface parallel with the yz face and the cirtical angle of total reflection in the zx face at the interface between core 1103, and the periodic Bragg angle that is attributable to the periodic structure on the x direction it is approximately 0.38 °.Therefore, the X ray waveguide of example 5 makes the X ray in resonant wave guide pattern periodically can be crooked in the plane parallel with substrate.Therefore periodically because the mesoporous silica gel material in example 5 has two-dimensional and periodic in the plane vertical with channeling direction, the resonant wave guide pattern is formed and two-dimensional and periodic resonance and the waveguide mode that has uniform phase place in the plane vertical with channeling direction.The length of waveguide is about 4mm, and near the channeling direction the X ray exit end of waveguide finally changes approximately 0.12 ° near the channeling direction the X ray incident end of waveguide.

According to above-mentioned embodiments of the invention, can obtain the X ray waveguide that has respectively the single waveguide mode of even phase and comprise sweep on the wide section of core.In addition, according to an embodiment of the invention the X ray waveguide can be respectively as being used for for example being used for operation from the X ray optical system of the X ray of synchrotron output and being used for for example parts of the X ray optical system of x-ray imaging technology and X ray exposure technique, be used for the X ray optical technical field.

Although with reference to exemplary embodiment, the present invention has been described, has should be understood that to the invention is not restricted to disclosed exemplary embodiment.The scope of following claim should be endowed the 26S Proteasome Structure and Function of the widest explanation to comprise all this alter modes, to be equal to.

Claims (10)

1. X ray waveguide comprises being configured to guide X ray from its core that passes and being configured to X ray is limited to covering in core,

Wherein, core have along from core and covering between the vertical direction in the interface periodic structure of periodically arranging the many kinds of substance that has respectively different refractive index real parts,

The cirtical angle of total reflection of the X ray at the interface between core and covering is larger than the Bragg angle of the X ray of the periodic structure that is attributable to core,

The cirtical angle of total reflection at the interface between the many kinds of substance of the periodic structure of formation core is less than Bragg angle,

Core comprises sweep, and satisfies following formula:

$\frac{s}{\ln \left(\frac{n_{\mathrm{high}}}{n_{\mathrm{low}}}\right)}<R$

Here, s is the width of the core on vertical with the X ray channeling direction and parallel with the direction of the definition radius-of-curvature of sweep direction, n _lowThe refractive index real part of the material with minimum refractive index real part among the material of core, n _HighBe the refractive index real part of the material with maximum refractive index real part among the material of core, and R is the radius-of-curvature of sweep.

2. according to claim 1 X ray waveguide wherein, is that unit is the θ of radian at Bragg angle _BSituation under, the waveguide in the sweep length of the heart therein is 2R θ _B

3. according to claim 1 X ray waveguide, wherein, core is the stacked multilayer film that has respectively the material of different refractive index real parts periodically.

4. according to claim 1 X ray waveguide, wherein, core is the meso-hole structure material.

5. according to claim 1 X ray waveguide, wherein, core is made by mesoporous property material.

6. an X ray Wave guide system, comprise x-ray source and X ray waveguide,

This x-ray source is launched X ray to the X ray waveguide,

The X ray waveguide comprises and is configured to guide X ray from its core that passes and is configured to X ray is limited to covering in core,

Wherein, core have along from core and covering between the vertical direction in the interface periodic structure of periodically arranging the many kinds of substance that has respectively different refractive index real parts,

The cirtical angle of total reflection of the X ray at the interface between core and covering is larger than the Bragg angle of the X ray of the periodic structure that is attributable to core,

The cirtical angle of total reflection at the interface between the many kinds of substance of the periodic structure of formation core is less than Bragg angle,

Core comprises sweep, and satisfies following formula:

$\frac{s}{\ln \left(\frac{n_{\mathrm{high}}}{n_{\mathrm{low}}}\right)}<R$

Here, s is the width of the core on vertical with the X ray channeling direction and parallel with the direction of the definition radius-of-curvature of sweep direction, n _lowThe refractive index real part of the material with minimum refractive index real part among the material of core, n _HighBe the refractive index real part of the material with maximum refractive index real part among the material of core, and R is the radius-of-curvature of sweep.

7. according to claim 6 X ray Wave guide system, wherein, be that unit is the θ of radian at Bragg angle _BSituation under, the waveguide in the sweep length of the heart therein is 2R θ _B

8. according to claim 6 X ray Wave guide system, wherein, core is the stacked multilayer film that has respectively the material of different refractive index real parts periodically.

9. according to claim 6 X ray Wave guide system, wherein, core is the meso-hole structure material.

10. according to claim 6 X ray Wave guide system, wherein, core is made by mesoporous property material.

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