JP2013050334A - X-ray waveguide and manufacturing method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray waveguide which makes X-rays incident by resonance coupling and can highly efficiently introduce the X-rays.SOLUTION: The X-ray waveguide for introducing an X-ray by resonance coupling includes: an X-ray waveguide part which has a core and a clad and which shuts, in the core, the X-ray made incident by total reflection, to guide the X-ray; a reflected X-ray transmission region for transmitting a reflected X-ray having been reflected on a surface of the clad; an X-ray reflection part for reflecting the reflected X-ray having been transmitted, and making the reflected X-ray reach the surface of the clad once more; and a reflected X-ray outgoing prevention part for preventing the X-ray from outgoing from the reflected X-ray transmission region directly to the outside.

Description

  The present invention relates to an X-ray waveguide and a manufacturing method thereof.

X-rays are widely used in fields such as medical care, nondestructive inspection, and crystal structure analysis. Since the refractive index difference between different substances for electromagnetic waves with a short wavelength of several tens of nm or less such as X-rays is as small as 10 ⁻⁵ or less, a large spatial optical system is mainly used to control such electromagnetic waves. It is done. Recently, X-ray waveguides that confine and propagate electromagnetic waves in a thin film or multilayer film have been studied with the aim of reducing the size and increasing the functionality of such a large spatial optical system.

  As a method for injecting X-rays into the X-ray waveguide, there are several methods such as a front coupling method and a resonance coupling method. The waveguide is designed, manufactured and used in a structure adapted to the incident method used.

  Among these incident methods, the resonance coupling method is a method in which a part of the X-ray is introduced into the waveguide under the condition that the X-ray is totally reflected on the waveguide surface. This resonance coupling method has higher mode selectivity of guided X-rays than other methods. That is, for example, by changing the energy and incident angle of X-rays, it is relatively easy to selectively guide and emit X-rays having the same phase. Non-Patent Document 1 discloses an X-ray waveguide that receives X-rays by a resonance coupling method.

Physical Review B, Volume 62, 16939 (2000)

  An X-ray waveguide that receives X-rays by the resonance coupling method has the above-described features. On the other hand, the incident is performed under the condition that the X-rays are totally reflected on the surface of the waveguide. Therefore, most of the incident X-rays are reflected on the surface of the waveguide. Therefore, since the introduction efficiency of the incident X-ray is not sufficient, further improvement has been demanded.

  The present invention has been made in view of such background art, and provides an X-ray waveguide having high X-ray introduction efficiency in an X-ray waveguide that receives X-rays by resonance coupling, and a method for manufacturing the same. .

  An X-ray waveguide that solves the above problem is an X-ray waveguide that introduces X-rays by resonant coupling, and includes a core for guiding X-rays, and a clad for confining the X-rays in the core. An X-ray waveguide portion that guides the X-ray by confining the X-ray incident upon the total reflection at the interface between the core and the cladding, and a reflection that transmits the reflection X-ray reflected from the surface of the cladding by the total reflection. An X-ray transmission region, an X-ray reflection portion that reflects the reflection X-ray transmitted through the reflection X-ray transmission region, and makes the reflection X-ray reach the surface of the clad again, and an X-ray exits directly from the reflection X-ray transmission region. Reflex X gland emission prevention part to prevent Characterized in that it.

  An X-ray waveguide manufacturing method that solves the above-described problems is a manufacturing method of the above-described X-ray waveguide, and a step of forming an X-ray waveguide portion and a reflection X-ray transmission region adjacent to the X-ray waveguide portion. A step of forming, a step of forming a reflection X-ray emission preventing portion adjacent to the X-ray waveguide portion and the reflection X-ray transmission region, and a step of forming an X-ray reflection portion adjacent to the reflection X-ray transmission region. It is characterized by that.

  Further, an X-ray waveguide manufacturing method for solving the above-described problems is the above-described X-ray waveguide manufacturing method, and a step of forming an X-ray waveguide portion, and a reflection X-ray emission adjacent to the X-ray waveguide portion. A step of forming a prevention site, a step of forming a reflection X-ray transmission region adjacent to the X-ray waveguide portion and the reflection X-ray emission prevention portion, and a step of forming an X-ray reflection portion adjacent to the reflection X-ray transmission region It is characterized by having.

  ADVANTAGE OF THE INVENTION According to this invention, in the X-ray waveguide which injects an X-ray by resonance coupling, an X-ray waveguide with high X-ray introduction efficiency and its manufacturing method can be provided.

It is a schematic diagram which shows one embodiment of the X-ray waveguide of this invention. It is the schematic showing the X-ray waveguide part of the X-ray waveguide of this invention. It is explanatory drawing showing the effective propagation angle which the fundamental wave of waveguide mode advances in a vacuum. It is a schematic diagram which shows the other embodiment of the X-ray waveguide of this invention. It is a figure which shows the relationship between the thickness of the reflective X-ray transmissive area | region of the X-ray waveguide of Example 1, and the frequency | count of X-ray introduction. It is a figure which shows the relationship between the X-ray introduction | transduction efficiency of the X-ray waveguide of Example 1, and the position of a reflection X-ray emission prevention part.

  Hereinafter, embodiments of the present invention will be described in detail.

  An X-ray waveguide according to the present invention is an X-ray waveguide that introduces X-rays by resonance coupling, and includes a core for guiding X-rays, and a clad for confining the X-rays in the core, and the core An X-ray waveguide portion that guides the X-ray by confining the X-ray incident upon the total reflection at the cladding interface, and a reflection X-ray transmission that transmits the reflection X-ray reflected from the surface of the cladding by the total reflection. A region, an X-ray reflecting portion that reflects the reflected X-ray transmitted through the reflective X-ray transmitting region, and again reaches the surface of the clad, and an X-ray is emitted directly from the reflecting X-ray transmitting region to the outside. It has a reflective X-ray emission prevention part to prevent The features.

  The X-ray waveguide according to the present invention includes an X-ray waveguide portion for guiding X-rays, a reflective X-ray transmission region provided adjacent to the X-ray waveguide portion, and an adjacent to the reflection X-ray transmission region. It is preferable to have an X-ray reflection part provided and a reflection X-ray gland emission preventing part provided in the reflection X-ray transmission region.

  The configuration of the X-ray waveguide of the present invention will be described based on the drawings.

  FIG. 1 is a schematic view showing an embodiment of an X-ray waveguide of the present invention. In the figure, 1000 is an X-ray waveguide part. This X-ray waveguide portion is composed of a core 1002 for guiding X-rays and a clad 1004 for confining the X-rays in the core by total reflection. The X-ray 1010 incident under the condition of being totally reflected by the surface of the clad is an X-ray that can generate an X-ray of a waveguide mode that is allowed corresponding to the structure of the core when totally reflected by the surface of the clad. Selectively introduced into the core. In the figure, the X-ray incident angle is 1015, the X-ray reflected by the surface of the cladding is 1020, and the X-ray introduced into the core is 1030. The reflected X-ray 1020 passes through the reflection X-ray transmission region 1040 provided adjacent to the X-ray waveguide region and reaches the X-ray reflection region 1050 provided adjacent to the reflection X-ray transmission region 1040. Then, the light is reflected on the surface of the X-ray reflection portion 1050 and reaches the cladding surface again through the reflection X-ray transmission region.

  On the other hand, the X-ray 1060 that passes through only the reflection X-ray transmission region and exits from the end opposite to the incident end is blocked by the reflection X-ray emission prevention portion 1070 disposed in the reflection X-ray transmission region. The reflection X-ray that repeats reflection in the reflection X-ray transmission region is prevented from being emitted to the outside. Reference numeral 1031 denotes an X-ray introduced into the core. Accordingly, it is possible to prevent the X-rays that are not selected from being emitted by being mixed with the X-rays 1090 that are selectively guided using the resonance coupling method, and the phase of the outgoing X-rays to be disturbed.

  In the present invention, the introduction efficiency of X-rays can be improved by setting the number of opportunities of introduction of the incident X-rays into the core once in the conventional resonance coupling method. At the same time, by providing a reflection X-ray emission preventing portion, the X-rays having the same phase, which is a feature of the resonance coupling method, can be selectively guided and emitted.

  Hereinafter, embodiments of the present invention will be described by classifying them into items.

(1-1) X-ray The X-ray in the present invention means an X-ray band electromagnetic wave in which the real part of the refractive index of the substance is 1 or less. The X-ray band electromagnetic wave specifically refers to an electromagnetic wave having a wavelength of 100 nm or less including extreme ultraviolet light (Extreme Ultra Violet (EUV) light).

  It is known that such a short wavelength electromagnetic wave has a high frequency and the outermost electrons of the substance cannot respond, so that the real part of the refractive index of the substance is smaller than 1 unlike visible light and infrared rays. The refractive index n of a substance with respect to electromagnetic waves in the X-ray band is generally represented by a complex number. In this specification, the real part is referred to as the real part of the refractive index or the real part of the refractive index, and the imaginary part is the imaginary part of the refractive index. Or called the imaginary part of the refractive index.

(1-2) Resonant coupling Resonant coupling in the present invention is an X-ray introducing method characterized in that a part of the X-ray is introduced into the core under the condition that the X-ray is totally reflected on the cladding surface. is there. X-rays are totally reflected on the cladding surface when they are incident on the cladding at an angle smaller than the critical angle given by the following equation (1).
θ _C = sin ⁻¹ (2 (n ₁ −n ₂ ) / n ₁ ) ^1/2 (1)
Here, θ _C is the critical angle, n ₁ is the refractive index of the incident medium when entering the cladding, and n ₂ is the refractive index of the cladding.

  The resonance coupling method is introduced into the waveguide and has a higher mode selectivity of the guided X-ray than the other methods. Therefore, by using the incident method of the present invention, for example, X-rays having desired characteristics can be selectively guided and emitted.

(1-3) About X-ray waveguide The X-ray waveguide according to the present invention is a waveguide for guiding X-rays in a wavelength band in which the real part of the refractive index of a substance is 1 or less. It consists of an X-ray transmission region, an X-ray reflection part, and a reflection X-ray emission prevention part.

(1-4) X-ray wave guide part The X-ray wave guide part according to the present invention comprises a core for guiding X-rays and a clad for confining the X-ray in the core, and an interface between the core and the clad. The X-rays are confined in the core by total reflection at, and the X-rays are guided.

  In order to guide the X-ray by confining the X-ray to the core by total reflection at the interface between the core and the cladding, this X-ray waveguide part has the real part of the refractive index of the core near the interface between the core and the cladding. It needs to be larger than the department. Since it is known that a substance having a higher electron density has a lower refractive index real part, the electron density of the material used for the core needs to be smaller than the electron density of the material used for the cladding.

(1-4-1) Cladding As a specific example of the material used for the cladding, a metal having a high density can be given. More specifically, a simple substance of Os, Ir, Pt, Au, W, Ta, Hg, Ru, Rh, Pd, Pb, and Mo, or a material containing these elements can be used. A clad using such a material can be formed by sputtering, vapor deposition, or the like. The thickness of the clad varies depending on the material, but is preferably thick enough to sufficiently confine the X-rays in the core and thin enough to be introduced into the core by resonance coupling. The thickness is about 1 nm to 100 nm, preferably about 1 nm to 50 nm. The clad is preferably formed with a film thickness distribution on the X-ray waveguide region. For example, it is preferable to increase the X-ray confinement effect by forming a thin film in the region where the resonance coupling is actively performed to improve the introduction efficiency while increasing the introduction efficiency.

(1-4-2) Core As specific examples of the material used for the core, organic substances, carbon, oxides, boron, beryllium, and materials containing these can be given. More specifically, a polymer, carbon, carbon tetraboride, silicon oxide, metal oxide, etc. can be mentioned. In addition, it is also preferable to reduce the density by making these materials porous materials.

(1-4-3) About X-ray waveguide part having a periodic structure in the core As an X-ray waveguide part according to the present invention, the core has a periodic structure in which a plurality of substances having different real parts of refractive index are periodically arranged. An X-ray waveguide portion is preferably used. In this X-ray waveguide region, the number of antinodes or nodes of the X-ray electric field intensity distribution or magnetic field intensity distribution in a specific direction in a plane perpendicular to the X-ray guiding direction in the core region has a period in the specific direction. There are guided modes that are greater than or equal to the number of periods of the structure.

  The case where the real part of the refractive index is the maximum with respect to X-rays is the case where the X-ray propagates in a vacuum, but the real part of the refractive index of air is maximized for almost all substances that are not gases in a general environment. . In the present invention, the plurality of substances having different real parts of refractive index are often two or more kinds of substances having different electron densities.

  The X-ray waveguide part in the present invention guides the X-ray by confining the X-ray in the core by total reflection at the interface between the core and the clad. In order to realize this total reflection, the real part of the refractive index of the core near the interface between the core and the clad is larger than the real part of the refractive index of the clad.

  Since the core of the X-ray waveguide part of the present invention has a periodic structure made of at least two kinds of substances having different real parts of the refractive index, it is possible to perform waveguide mode phase control and spatial intensity distribution control. The periodic structure may be a one-dimensional to three-dimensional periodic structure. Such a periodic structure can also be produced by a conventional semiconductor process such as photolithography, electron beam lithography, etching process, lamination or bonding. In addition, since at least one substance among the plurality of substances having different real parts of the refractive index forming the periodic structure is an oxide, deterioration due to oxidation can be prevented. It is also possible to create a periodic structure having an oxide by applying a semiconductor process using an oxide.

  Further, as a material for forming the periodic structure, a mesostructured film manufactured by a self-organized formation mechanism different from a normal semiconductor process may be used. Here, the mesostructured film in the present invention has a 1-3-dimensional structure period, (A) mesoporous film, and (B) a mesoporous film in which pores are mainly filled with an organic compound, (C ) Mesostructured film with lamellar structure.

(A) Mesoporous film A porous material having pores with regularly arranged diameters of 2 to 50 nm, and the material of the wall portion is not particularly limited. Examples thereof include manufacturability, period From the viewpoint of constructing the structure film from materials having different real parts of the refractive index, inorganic oxides, carbon, and organic compounds are exemplified. Examples of inorganic oxides include silicon oxide, titanium oxide, aluminum oxide, and zinc oxide. Moreover, an organic polymer compound can be mentioned as an example of an organic compound. The surface of the wall portion may be modified as necessary. For example, hydrophobic molecules may be modified to suppress water adsorption.

(B) About mesoporous film in which pores are mainly filled with an organic compound As the material of the wall, the same materials as those described in the section (A) can be used. The substance filling the pores is not particularly limited as long as it is mainly composed of an organic compound. The meaning of “main” means 50% or more by volume ratio. Examples of the organic compound include a surfactant and a material in which a site having a function of forming a molecular assembly is bonded to a material forming a wall or a precursor of a material forming a wall. Examples of this surfactant include the surfactants described in the section (A). Examples of a material in which a part having a function of forming a molecular assembly forms a wall or a material bonded to a precursor of a material that forms a wall include an alkoxysilane having an alkyl group and an alkyl group. The oligosiloxane compound which has can be mentioned. Examples of the chain length of the alkyl chain include 10 to 22 carbon atoms.

  The inside of the hole may contain water, an organic solvent, a salt, or the like as necessary or as a result of a material to be used or a process. Examples of the organic solvent include alcohol, ether and hydrocarbon.

(C) Mesostructured film having a lamellar structure The mesostructured film of the present invention includes a mesostructured film having a lamellar structure in addition to (A) and (B). As an example of this lamellar structure, there can be mentioned a lamellar structure in which a layer made of the material of the wall described in (B) and a layer made of a substance filling the pores described in (B) are laminated. These two types of materials (substances) (A) and (B) may be bonded by chemical bonding as necessary in order to obtain desired characteristics. An example of this bonded compound is trialkoxyalkylsilane.

  In the X-ray waveguide portion of the present invention, the X-ray is confined in the core, which is a periodic structure, by total reflection at the interface between the core and the clad to form a waveguide mode, and the X-ray is propagated. The total reflection critical angle at the interface between the core and the clad is larger than the Bragg angle due to the periodicity of the periodic structure.

  FIG. 2 is a schematic view showing an X-ray waveguide portion of the X-ray waveguide of the present invention. The X-ray waveguide portion shown in FIG. 2 has a form in which the core 2001 is sandwiched between the clad 2002 and the clad 2003. A core 2001 is formed by laminating a basic structure 2004 including a material layer 2006 having a low refractive index real part and a material layer 2005 having a high refractive index real part. When 2007 is the critical angle for total reflection at the interface between the clad and the core, 2008 is the Bragg angle, and when the periodic structure is a multilayer film, 2009 is the critical angle for total reflection at the material interface in the basic structure.

In FIG. 2, the total reflection critical angle θ _{c-total at} the interface between the clad and the core, the total reflection critical angle θ _c-multi at the interface of each layer forming the basic structure in the multilayer film, and the periodicity of the multilayer film An example of the Bragg angle θ _B is shown. In the present specification, these angles are measured from a direction parallel to the plane of the film. The advancing direction of the arrow X-ray in the figure is shown.

The total reflection critical angle θ from the direction parallel to the film surface, where n _{clad is} the real part of the refractive index of the material on the clad side and n _core is the real part of the refractive index of the material on the core side at the interface between the clad and the core _c-total (°) is expressed by the following formula (2) where n _clad <n _core.

It is represented by

If the period of the periodic structure of the core is d and the real part of the average refractive index of the periodic structure of the core is n _avg , an approximate Bragg like the following formula (3) regardless of the presence or absence of multiple diffraction in the core An angle θ _B (°) is defined.

m is a constant, and λ is the wavelength of X-rays.

  The physical property parameter of the substance constituting the X-ray waveguide portion of the present invention, the structural parameter of the waveguide portion, and the wavelength of the X-ray are designed to satisfy the following formula (4).

As a result, the waveguide mode having an effective propagation angle such as the vicinity of the Bragg angle due to the periodicity of the core having a periodic structure can be always confined in the core by the clad and contribute to the X-ray propagation. Here, in this specification, the effective propagation angle θ ′ (°) is an angle measured from a direction parallel to the surface of the film, and a wave number vector (propagation constant) k _z in the propagation direction of the waveguide mode, in vacuum with the wave vector k ₀ is expressed by the following equation (5). Since k _z is constant at the interface of each layer due to the continuous condition, as shown in FIG. 3, it is derived at an angle defined between the propagation constant k _z of the fundamental wave of the guided mode and the wave vector k _{0 in} vacuum. The effective propagation angle θ ′ (°) represents the angle at which the fundamental wave of the wave mode travels in vacuum. Since this can be considered to roughly represent the propagation angle of the fundamental wave of the waveguide mode in the core, it will be used for the future explanation.

  In the X-ray waveguide portion of the present invention, the periodic structure is configured as a multilayer film, and the total reflection critical angle at the interface of each layer forming the multilayer film is smaller than the Bragg angle due to the periodicity of the multilayer film. The multilayer film may be composed of the plurality of substances.

The multilayer film forming the core of the present invention is formed by periodically laminating a plurality of films having different refractive index real parts, but the total reflection critical angle due to the difference in the real refractive index part is different at the adjacent film interface. Exists. When there are three or more kinds of substances having different real parts of refractive index forming a multilayer film, there may be a plurality of total reflection critical angles, and these are collectively defined as θ _c-multi (°).

  When the critical angle for total reflection in the multilayer film is smaller than the Bragg angle due to the periodicity of the multilayer film as shown in the above formula (6), it is incident on the interface in the multilayer film at an angle greater than or equal to the Bragg angle. X-rays that are generated are not totally reflected, but cause partial reflection or refraction. Since the multilayer film is composed of a plurality of periodically laminated films having different refractive index real parts, there are a plurality of interfaces in the stacking direction, and X-rays inside the multilayer film are repeatedly reflected and refracted at these interfaces. Become. Since the multilayer film in the present invention has a periodic structure, repeated reflection and refraction of X-rays inside the multilayer film cause multiple interference. As a result, an X-ray having a condition capable of resonating with the periodic structure of the multilayer film, that is, a propagation mode that can exist inside the multilayer film is formed, and a waveguide mode is formed in the core of the X-ray waveguide region structure of the present invention. Become. This is referred to as a periodic resonance waveguide mode.

  Each of such periodic resonant waveguide modes has an effective propagation angle, and the effective propagation angle of the periodic resonant waveguide mode having the smallest effective propagation angle appears near the Bragg angle of the multilayer film. Since the periodic resonant waveguide mode is a mode that resonates with the periodicity of the periodic structure, it is referred to as a periodic resonant waveguide mode in this specification. This corresponds to a propagation mode satisfying the lowest order band when the multilayer film is considered as a photonic crystal with an infinite number of cycles, and this propagation mode is confined by total reflection at the interface between the clad and the core.

  In an actual periodic structure, since the number of periods is finite, the photonic band structure deviates from the photonic band structure of an infinite period periodic structure. Would approach that on the photonic band. The Bragg angle is slightly larger than the effective propagation angle of the periodic resonant waveguide mode, but this Bragg reflection is caused by the effect of the photonic band gap due to periodicity. When the effective propagation angle of the waveguide mode is considered with the X-ray energy constant, two waveguide modes having an angle corresponding to the angle of the photonic band gap edge when viewed in angle are formed. Among these, the waveguide mode having an effective propagation angle on the low angle side is the lowest-order periodic resonance waveguide mode. In the spatial distribution of the electric field intensity of the periodic resonant waveguide mode, the number of antinodes of the electric field intensity basically matches the number of periods of the multilayer film. The position of the antinode of the higher-order periodic resonant waveguide mode having an effective propagation angle corresponding to the higher-order Bragg angle is basically a natural number two or more times the number of periods of the periodic structure.

  In a multilayer film having a finite number of periods, there may be a waveguide mode having an angle other than the effective propagation angle of the periodic resonance waveguide mode as described above. These are waveguide modes that exist when the entire multilayer film, which is not a periodic resonant waveguide mode, is considered as a uniform medium with the real part of the refractive index averaged. The influence of periodicity is small. On the other hand, in the periodic resonant waveguide mode realized by the configuration of the X-ray waveguide portion of the present invention, the electric field concentrates at the center of the core, which is a multilayer film, as the number of periods of the periodic structure increases, and the cladding leaks out. X-ray propagation loss is reduced. In addition, the envelope curve of the electric field intensity distribution has a shape biased toward the center of the core, and the loss due to the seepage into the clad is further reduced. Furthermore, the phases of the periodic resonant waveguide mode used in the X-ray waveguide portion of the present invention are uniform in the direction of high periodicity of the periodic structure, and can have spatial coherence. In the present invention, the fact that the waveguide modes are in phase does not only mean that the phase difference of the electromagnetic field in the plane perpendicular to the waveguide direction is zero, but also corresponds to the spatial refractive index distribution of the periodic structure. This also means that the phase difference of the electromagnetic field periodically changes between −π and + π. In the periodic resonant waveguide mode of the present invention, the phase of the electric field changes between −π and + π in the direction perpendicular to the waveguide direction at the same period as the period of the periodic structure.

(1-5) Reflective X-ray transmission region The X-ray waveguide of the present invention is characterized by having a reflection X-ray transmission region between the cladding of the X-ray transmission region and the X-ray reflection region. The reflection X-ray transmission region is provided adjacent to the X-ray waveguide region, and transmits the reflection X-ray reflected by the surface of the clad in the incident X-ray. The X-ray incident on the X-ray waveguide of the present invention is totally reflected on the cladding surface. The reflected X-ray passes through the reflection X-ray transmission region, is reflected by the X-ray reflection portion, and reaches the cladding surface again. As a result, the incident X-rays are introduced with high efficiency by increasing the opportunity to be introduced into the core.

  For this reason, it is preferable that the reflection X-ray transmission region has a high X-ray transmittance. A state filled with a gas such as vacuum or air is preferable from the viewpoint of transmittance. On the other hand, a solid material is preferable from the viewpoint of controlling the distance between the clad and the X-ray reflection part. Specific examples of the solid material include organic substances, carbon, oxides, boron, and materials containing them. More specifically, a polymer, carbon, carbon tetraboride, silicon oxide, and metal oxide can be mentioned. In addition, it is also preferable to reduce the density by making these materials porous materials. Preferably, it is made of an organic substance, carbon, boron compound or silicon oxide.

  The thickness of the reflection X-ray transmission region is preferably large enough to allow a necessary amount of X-rays to enter, and is preferably small enough to allow X-rays reflected at the X-ray reflection portion to reach the cladding surface again. Examples include 1 nm to 1000 nm, preferably 5 nm to 100 nm.

  A method for forming the reflective X-ray transmission region is not particularly limited, and a general film forming method according to the material may be used. For example, if the material is a polymer, it can be formed by dissolving and coating the polymer in a solvent. If it is a gas such as vacuum or air, it can be formed by introducing a spacer and filling the remaining space with a gas that is evacuated. If it is an oxide, it can be formed using a sol-gel method or the like. Carbon, carbon tetraboride, or the like can be formed by sputtering, vapor deposition, or the like.

(1-6) X-ray reflection part The X-ray reflection part is provided adjacent to the reflection X-ray transmission region, reflects the transmitted reflection X-ray, and makes the reflection X-ray reach the surface of the clad again.

  The X-ray waveguide of the present invention has an X-ray reflection part at a position facing the X-ray waveguide part. This facing position means that the positional relationship between at least a part of the X-ray reflection part and the X-ray waveguide part is substantially parallel. The X-ray reflection part has a function of causing the X-rays to reach the cladding surface again by reflecting the X-rays reflected by the cladding surface of the X-ray waveguide part.

  As the material used for the X-ray reflection part, a material having a large total reflection critical angle of X-rays is preferably used in order to efficiently reflect X-rays, and specifically, a metal having a high density can be mentioned. More specifically, a simple substance of Os, Ir, Pt, Au, W, Ta, Hg, Ru, Rh, Pd, Pb, and Mo, or a material containing these elements can be used.

  Such an X-ray reflection part can be formed by sputtering, vapor deposition, or the like. The thickness of the X-ray reflection part varies depending on the material, but is not particularly limited as long as it has a sufficiently high X-ray reflectivity. Examples include 1 nm to 1000 nm, preferably 10 nm to 100 nm.

  As the installation position of the X-ray reflection part, it is preferable that the X-ray reflection part is installed at a position that does not interfere with the incident X-ray. Specifically, it is preferable that the end portion on the incident end side of the X-ray reflection portion is the same as the end portion on the incident end side of the X-ray waveguide portion or is closer to the emission end side of the X-ray. For example, referring to FIG. 1, it is preferable that the left end of the X-ray reflection portion 1050 is the same as the left end of the X-ray waveguide portion 1000 or at the right side (X-ray emission end side).

  This X-ray reflection part may function as an X-ray reflection part and simultaneously as a cladding of the X-ray waveguide part. This concept will be described with reference to FIG. FIG. 4 is a schematic view showing another embodiment of the X-ray waveguide of the present invention. FIG. 4 shows an embodiment of the X-ray waveguide according to the present invention, in which the X-ray reflecting portion functions as a cladding of the X-ray waveguide portion. Reference numeral 2000 denotes a first X-ray wave guide portion, and 2020 X-ray reflection portions are arranged with an adjacent reflection X-ray transmission region 2010 interposed therebetween. The X-ray reflection portion 2020 functions as a clad of the second X-ray waveguide portion 2030, and the incident X-ray 2040 is partially reflected in the core of 2050 while being totally reflected on the surface of the clad. Will be introduced.

(1-7) Reflective X-ray emission prevention part The X-ray waveguide of the present invention of the present invention has a reflection X-ray emission prevention part provided in the reflection X-ray transmission region. The reflection X-ray emission preventing portion prevents the reflection X-ray that repeats reflection in the reflection X-ray transmission region from being emitted to the outside.

  The X-ray waveguide of the present invention is characterized by introducing X-rays by resonance coupling. By using this introduction method, X-rays can be guided with higher mode selectivity compared to other methods. As described above, a material having a high X-ray transmittance is preferably used as the reflective X-ray transmission region in the X-ray waveguide of the present invention. On the other hand, if the incident X-ray is transmitted through the reflection X-ray transmission region by repeating total reflection, the X-ray mode is selected even though the resonance coupling facilitates the selection of the X-ray mode. X-rays that are not emitted simultaneously. This reduces the advantages of introducing X-rays using resonant coupling. Therefore, the X-ray waveguide of the present invention is characterized by having a reflection X-ray emission preventing portion in the reflection X-ray transmission region. This makes it possible to provide an X-ray waveguide with improved introduction efficiency while maintaining the selectivity of the outgoing X-ray.

  The position of the reflection X-ray emission prevention part will be described. This reflection X-ray emission preventing portion is for preventing X-rays that have been repeatedly reflected through the reflection X-ray transmission region from being emitted as they are. Therefore, this reflection X-ray emission preventing portion is disposed in the reflection X-ray transmission region. The position of the reflection X-ray emission preventing portion in the reflection X-ray transmission region is arranged at a position that achieves both improvement in introduction efficiency due to X-ray transmission through the reflection X-ray transmission region and prevention of emission as it is. It is preferable. Specifically, the position is 5 μm or more, preferably 50 μm or more away from the incident end and does not exceed the waveguide length, and most preferably the position facing the emission end.

  The material of the reflection X-ray emission preventing portion will be described. The reflection X-ray emission preventing portion is installed for the purpose of shielding the transmission X-ray in the reflection X-ray transmission region. Therefore, it is preferable to use a material (low density) having a low X-ray transmittance. Specific examples of the material include metals. More specifically, a simple substance of Os, Ir, Pt, Au, W, Ta, Hg, Ru, Rh, Pd, Pb, Mo, Ag, Sn, Cu, Fe, Ni, or a material containing these elements. Can be mentioned. Such a reflection X-ray emission preventing portion can be formed by sputtering, vapor deposition, or the like. This reflection X-ray emission prevention part may be formed as an integral part of the X-ray reflection part.

  As the length of the reflection X-ray emission preventing portion in the X-ray waveguide direction, a length necessary for reducing the X-rays to a desired degree is used in the material to be used. On the other hand, in order to ensure that the reflection X-ray transmission region has a sufficient length to exert its effect, the length of the reflection X-ray emission preventing portion in the X-ray waveguide direction exceeds the necessary length described above. For example, a shorter one is preferable. As an example, the lower limit is 1 nm, and the upper limit is a value obtained by subtracting 5 μm from the length of the waveguide in the X-ray waveguide direction. Preferably, the lower limit is 5 nm, and the upper limit is the guide in the X-ray waveguide direction. A value obtained by subtracting 50 μm from the length of the waveguide can be mentioned. The expression of the upper limit value is expressed by using the length of the waveguide in order to express the meaning that the length of the reflection X-ray transmission region is 5 μm, preferably 50 μm. Moreover, it is preferable that the thickness is the same or larger than the thickness of a reflective X-ray transmission area | region functionally.

(Manufacturing method of X-ray waveguide)
An X-ray waveguide manufacturing method according to the present invention is the above-described X-ray waveguide manufacturing method, wherein a step of forming an X-ray waveguide portion and a reflection X-ray transmission region are formed adjacent to the X-ray waveguide portion. Forming a reflection X-ray emission preventing portion adjacent to the X-ray waveguide portion and the reflection X-ray transmission region, and forming an X-ray reflection portion adjacent to the reflection X-ray transmission region. Features.

  Further, the X-ray waveguide manufacturing method according to the present invention is the above-described X-ray waveguide manufacturing method, the step of forming the X-ray waveguide portion, and the reflection X-ray emission preventing portion adjacent to the X-ray waveguide portion. Forming a reflection X-ray transmission region adjacent to the X-ray wave guide portion and the reflection X-ray emission prevention portion, and forming an X-ray reflection portion adjacent to the reflection X-ray transmission region. It is characterized by having.

  In the above manufacturing method, the steps may be formed in any order, and the adjacent relationship is based on the final positional relationship. The manufacturing method is demonstrated for every process below.

(2-1) Step of Forming X-Ray Waveguide Site The X-ray waveguide site according to the present invention includes a core for guiding X-rays and a clad for confining X-rays in the core.

  The cladding is formed by depositing the cladding material described in (1-4), for example, a metal having a high density. As this film forming method, a general metal film manufacturing method such as sputtering or vapor deposition can be used.

  The core forming method varies greatly depending on the material used for the core, and a general manufacturing method can be used as a film forming method for each core material. As the core material, the core material described in (1-4) can be used. Specific examples include polymers, carbon, carbon tetraboride, silicon oxide, beryllium, and metal oxides. Among these, for example, carbon, carbon tetraboride, silicon oxide, and metal oxide can be formed by sputtering. Moreover, if it is a silicon oxide and a metal oxide, it can form also by the sol-gel method, the hydrothermal method, etc. If it is a polymer, the method of melt | dissolving these materials in a solvent and apply | coating can be used.

  In the case where a periodic structure made of at least two kinds of substances having different real parts of the refractive index is adopted as the core, the core can be formed using a general technique for manufacturing the periodic structure. For example, if this periodic structure is a general multilayer film structure, it can be formed by alternating sputtering or the like. If this periodic structure is a mesostructured film, it can be formed by a method such as a sol-gel method or a hydrothermal method. It is possible to form.

  A typical structure of the X-ray waveguide portion is a structure in which a core is sandwiched between clads. As an example of the step of forming this structure, a step of forming a core on a substrate on which a clad is formed and further forming a clad thereon can be cited.

(2-2) Step of forming a reflective X-ray transmissive region The method of forming the reflective X-ray transmissive region varies greatly depending on the material used, and a general manufacturing method can be used as a film forming method of each material. As a material used for the reflection X-ray transmission region, the material described in the item (1-5) can be used. Specific examples include polymers, carbon, carbon tetraboride, silicon oxide, and metal oxides. A state filled with a gas such as vacuum or air is also preferably used from the viewpoint of X-ray transmittance. Among these, for example, carbon, carbon tetraboride, silicon oxide, and metal oxide can be formed by sputtering. If it is a silicon oxide and a metal oxide, it can form also by the sol-gel method, the hydrothermal method, etc. If it is a polymer, the method of melt | dissolving these materials in a solvent and apply | coating can be used. If it is in a state of being filled with a gas such as a vacuum or air, it can be formed by introducing a spacer and filling the remaining space with a gas that is evacuated.

(2-3) Step of forming the reflection X-ray emission preventing portion The method of forming the reflection X-ray emission prevention portion varies greatly depending on the material to be used, but a general manufacturing method can be used as a film forming method for each material. As a material used for the reflection X-ray emission preventing portion, the material described in the item (1-7) can be used. Specific examples of the material include a metal having a high density. As this film forming method, a general metal film manufacturing method such as sputtering or vapor deposition can be used.

Finally, the reflection X-ray emission preventing portion needs to be disposed in the reflection X-ray transmission region. In order to enable this, the formation of the reflection X-ray emission preventing portion is performed by, for example, the following two methods.
(A) A method of forming a reflection X-ray transmission region after forming a reflection X-ray emission preventing portion.
(B) A method of forming a reflection X-ray transmission region before forming the reflection X-ray emission preventing portion.

  In the case of (A), before forming the reflection X-ray transmission region, a reflection X-ray emission preventing portion is formed in a region that will later become the reflection X-ray transmission region. For example, a method of forming a reflection X-ray transmission region after first forming a reflection X-ray emission prevention portion on the X-ray waveguide portion in a position-selective manner is performed. Examples of the position-selective formation method include film formation using a mask and position-selective etching after film formation is performed on the entire surface.

  In the case of (B), the step of forming the reflection X-ray transmission region is performed before the formation of the reflection X-ray emission prevention region, so that a region for forming the reflection X-ray emission prevention region is secured in the reflection X-ray transmission region. To be done. As an example of the securing method, an X-ray transmission region can be selectively formed. Examples of the position-selective formation method include film formation using a mask and position-selective etching after film formation is performed on the entire surface. Further, when the reflection X-ray transmission preventing region is formed before forming the reflection X-ray emission preventing portion, the step of forming the reflection X-ray emission preventing portion is performed simultaneously with the step of forming the X-ray reflection portion of (2-4), or It is also preferably performed continuously.

(2-4) Step of forming X-ray reflection site The method of forming the X-ray reflection site varies greatly depending on the material to be used, but a general manufacturing method can be used as a film forming method for each material. As a material used for the X-ray reflection part, the material described in the item (1-6) can be used. Specific examples of the material include a metal having a high density. As this film forming method, a general metal film manufacturing method such as sputtering or vapor deposition can be used. This step is also preferably performed simultaneously or continuously with the step (2-3) of forming the reflection X-ray emission preventing portion.

  In the case of forming a structure in which the X-ray reflection part functions as the cladding of the adjacent X-ray waveguide part at the same time as described in (1-6), after the X-ray reflection part / cladding is formed, (2- The step of forming the core described in the item 1) and the opposing clad may be performed.

  The present invention will be described in more detail with reference to the following examples. However, the method of the present invention is not limited to these examples.

Example 1
In this embodiment, the effects of the configuration characterizing the X-ray waveguide of the present invention are classified and described.

(1-1) Relationship between thickness of reflection X-ray transmission region and number of X-ray introductions FIG. 5 shows an X-ray when X-rays are incident on an X-ray waveguide having the following conditions arranged as shown in FIG. The calculation result of the thickness dependence of the reflection X-ray transmission area | region of the frequency | count of introduction is shown. In this calculation, the number of introductions is obtained geometrically from the arrangement of the X-ray waveguide of FIG. 1 and the incident angle of the X-ray.

(Configuration: Fixed condition)
Waveguide length: 10mm
X-ray reflective part material: W
Outgoing prevention part material: W
Position of emission preventing portion: Length of emission end emission preventing portion: 100 μm
(Composition: Variable conditions)
Reflective X-ray transmission region thickness: 1 to 1000 nm
(X-ray incidence conditions)
X-ray incident angle: 0.5 degree X-ray energy: 8042 eV

  The vertical axis in FIG. 5 represents the number of times X-rays are introduced (N), and the horizontal axis represents the thickness (T) of the reflective X-ray transmission region. The X-ray waveguide of the present invention is characterized in that the introduction efficiency of the X-ray, which has been a problem, is improved by setting the introduction opportunity to the X-ray waveguide once in the conventional resonance coupling method. And FIG. 5 confirms that the thickness of the reflective X-ray transmission region is 1 to 10000 nm, so that the conventional resonance coupling method can introduce the waveguide into the waveguide once. It was.

(1-2) Influence of material of reflective X-ray transmission region on introduction efficiency Reflection X-ray of X-ray introduction efficiency when X-ray is introduced under the following conditions into an X-ray waveguide having the arrangement of the following conditions as shown in FIG. The calculation result of the material dependence of the transmission region is shown with the introduction efficiency in the conventional resonance coupling method (with one introduction opportunity) as 1. This calculation result is calculated from the arrangement of the X-ray waveguide of FIG. 1 and the incident angle of the X-ray, the reflection efficiency at the clad part, the X-ray reflection part, the reflection X-ray transmission region, and the absorption by the X-ray emission prevention part.

  The X-ray introduction efficiency means the number of photons of X-rays introduced at the time of one total reflection / the total number of photons of incident X-rays.

(Configuration: Fixed condition)
Waveguide length: 5mm
X-ray reflective part material: W
Outgoing prevention part material: W
Position of emission preventing portion: Length of emission end emission preventing portion: 100 μm
X-ray transmission site thickness: 10nm
Introduction efficiency at each introduction opportunity: 1%
(Composition: Variable conditions)
Reflective X-ray transmission region materials: polystyrene, carbon, carbon tetraboride, silicon oxide, titanium oxide (X-ray incident conditions)
X-ray incident angle: 0.4 degree X-ray energy: 8042 eV
The results are shown in Table 1.

  From Table 1, it was confirmed that the X-ray waveguide of the present invention gives high introduction efficiency as compared with the conventional waveguide even when any of the reflective X-ray transmission region materials shown in Table 1 is used. . In particular, it was confirmed that high introduction efficiency was obtained when polystyrene, carbon, carbon tetraboride, and silicon oxide, which are lower density materials, were used.

(1-3) Effect of position of reflection X-ray emission preventing part on introduction efficiency Reflection of X-ray introduction efficiency when X-rays are incident on an X-ray waveguide having the following conditions configured as shown in FIG. The calculation result of the position dependency of the X-ray emission preventing part is shown with the introduction efficiency in the conventional resonance coupling method (with one introduction opportunity) as 1. This calculation result was calculated from the arrangement of the X-ray waveguide of FIG. 1 and the incident angle of the X-ray, the reflection efficiency at the clad part, the X-ray reflection part, the absorption by the X-ray transmission part, and the X-ray emission prevention part.

(Configuration: Fixed condition)
Waveguide length: 5mm
X-ray reflective part material: W
Outgoing prevention part material: W
Length of emission preventing part: 100 μm
X-ray transmission site thickness: 10nm
Introduction efficiency at each introduction opportunity: 1%
Reflective X-ray transmission region material: Polystyrene (Composition: Variable condition)
Output prevention site position: Distance (L) from 0 to 4900 μm from the incident side end of the waveguide to the input side end of the output prevention site
(X-ray incidence conditions)
X-ray incident angle: 0.4 degree X-ray energy: 8042 eV
The result is shown in FIG.

  The vertical axis in FIG. 6 represents the X-ray introduction efficiency (E), and the horizontal axis represents the distance (L) from the incident side end of the X-ray waveguide to the incident side end of the reflection X-ray emission preventing portion. From here, the position of the reflection X-ray emission preventing part is effective from the distance from the incident side end of the waveguide to the incident side end of the emission preventing part being approximately 5 μm, and can reach almost constant at 50 μm or more. confirmed.

(Example 2)
In this example, a method for manufacturing an X-ray waveguide of the present invention and the effect thereof will be described.

(2-1)
In this embodiment, an X-ray waveguide manufacturing method using a mesostructured film as the core of the X-ray waveguide portion and the waveguide characteristics of the waveguide having the configuration shown in FIG. 1 will be described.

(2-1-1) Step of forming X-ray waveguide portion A step of forming an X-ray waveguide portion in which the core of the mesostructured film is sandwiched between tungsten clads will be described.

  Tungsten serving as a clad for the X-ray waveguide region is formed on the silicon substrate by sputtering. A mesostructure film is formed on the tungsten. Formation of the mesostructure is composed of (a) preparation of a precursor solution of the mesostructure film and (b) film formation, and (c) the periodic structure of the film is confirmed by performing the evaluation.

(A) Preparation of precursor solution of mesostructured film A silicon oxide mesostructured film having a lamellar structure is prepared by a dip coating method. The precursor solution of the mesostructure is prepared by adding an ethanol solution of a block polymer to a solution obtained by adding ethanol, 0.01M hydrochloric acid and tetraethoxysilane and mixing for 20 minutes, and stirring for 3 hours. In addition, a block polymer is ethylene oxide (20) propylene oxide (70) ethylene oxide (20): (the number of repetition of each block is in parentheses)). The mixing ratio (molar ratio) is tetraethoxysilane: 1.0, hydrochloric acid: 0.0011, ethanol: 5.2, block polymer: 0.026, and ethanol: 3.5. The solution is appropriately diluted and used for the purpose of adjusting the film thickness.

(B) Film formation of mesostructured film Dip coating is performed on the tungsten sputtering substrate prepared previously. After film formation, the film is held in a constant temperature and humidity chamber.

(C) Evaluation The prepared mesostructured film is subjected to X-ray diffraction analysis in a Bragg-Brentano configuration. As a result, it is confirmed that this mesostructured film has high ordering in the normal direction of the substrate surface, and the interval between the surfaces, that is, the period in the confinement direction, is 10.24 nm. Its film thickness is approximately 500 nm.

  On the mesostructured film, tungsten serving as a clad is further formed by sputtering to form an X-ray waveguide region.

  In this configuration, the relationship between the period of the multilayer film as the core and the real part of the refractive index of the material forming the core satisfies Expression (6). Therefore, X-rays of 12400 electron volts are propagated at an effective propagation angle near the Bragg angle of 0.28 °, which is an angle less than the total reflection critical angle (about 0.35 °) at the interface between the core and the cladding. It is confined in the core by total reflection at the interface. That is, the waveguide mode is excited in the waveguide portion.

  This guided mode is a periodic resonant guided mode obtained as a result of multiple interference in the core. The number of maximal values of the electric field intensity of the waveguide mode matches the number of periods of the multilayer film, and the value becomes stronger near the center of the core, although there is a bias due to the asymmetry of the structure. In addition, since this waveguide mode has a small loss, an efficient waveguide portion can be realized.

(2-1-2) Step of forming a reflection X-ray transmission region A reflection X-ray transmission region is formed by forming a film of carbon on the above X-ray waveguide region by sputtering. The film thickness of the carbon film is 10 nm. At this time, in order to secure the region of the emission end of 100 μm of the X-ray waveguide as a region for forming the reflection X-ray emission prevention portion, carbon deposition is prevented by covering the region with a mask.

(2-1-3) Step of forming a reflection X-ray emission preventing portion, step of forming an X-ray reflection portion A reflection X-ray emission prevention portion by forming a tungsten film on the above-mentioned reflection X-ray transmission region by sputtering, X-ray reflection site is formed. The film thickness of tungsten is 50 nm.

(2-1-4) Evaluation The X-ray waveguide of the present invention prepared through the processes from (2-1-1) to (2-1-3), and formed only by the process of (2-1-1). Comparison with the conventional waveguide is performed. The X-ray incidence conditions at this time are as follows.
X-ray incident angle: 0.28 degrees X-ray energy: 12400 eV
In the X-ray waveguide of the present invention, the X-ray transmittance when the X-ray is introduced by the resonance coupling method is about twice as high as that of the conventional transmittance. This shows that the manufacturing method of the present invention can provide an X-ray waveguide with high introduction efficiency and introducing X-rays by resonance coupling.

(2-2)
In this section, an X-ray waveguide manufacturing method using an alumina-carbon multilayer film as the core of the X-ray waveguide portion and the waveguide characteristics of the X-ray waveguide having the configuration shown in FIG. 4 will be described.

(2-2-1) Step of Forming X-Ray Waveguide Portion A step of forming an X-ray waveguide portion in which the core of an alumina-carbon multilayer film is sandwiched between tungsten clads is described.

  Tungsten serving as a clad for the X-ray waveguide region is formed on the silicon substrate by sputtering. An alumina-carbon multilayer film is formed on the tungsten by sputtering. Furthermore, an X-ray waveguide region is formed on the multilayer film by depositing tungsten as a clad by sputtering.

(2-2-2) Step of forming a reflection X-ray transmission region A reflection X-ray transmission region is formed by forming a silicon oxide film on the above X-ray waveguide region by sputtering. The film thickness of the silicon oxide film is 10 nm. At this time, in order to secure the region of the emission end of 100 μm of the X-ray waveguide as a region for forming the reflection X-ray emission prevention portion, deposition of silicon oxide is prevented by covering the region with a mask.

(2-2-3) Step of forming a reflection X-ray emission preventing portion, step of forming an X-ray reflection portion A reflection X-ray emission prevention portion by forming a tungsten film on the above-mentioned reflection X-ray transmission region by sputtering, X-ray reflection site is formed. The film thickness of tungsten is, for example, 50 nm.

(2-2-4) Evaluation The X-ray waveguide of the present invention prepared through the processes from (2-2-1) to (2-2-3), and formed only by the process of (2-2-1) Comparison with the conventional waveguide is performed. The X-ray incidence conditions at this time are as follows.
X-ray incident angle: 0.4 degree X-ray energy: 8042 eV
In the X-ray waveguide of the present invention, the X-ray transmittance when the X-ray is introduced by the resonance coupling method is about 2.5 times the value of the conventional transmittance. From this, it is shown that the manufacturing method of the present invention can provide an X-ray waveguide that introduces X-rays by resonance coupling with high introduction efficiency.

  The X-ray waveguide of the present invention can be used for components used in an X-ray optical system in imaging, exposure, analysis, etc. using X-rays.

1000 X-ray waveguide region 1002 Core 1004 Cladding 1010 Incident X-ray 1015 Incident angle of X-ray 1020 Reflected X-ray 1030 X-ray introduced into the core 1031 X-ray introduced into the core 1040 Reflective X-ray transmission region 1050 X-ray reflection region 1060 X-ray 1070 Reflected X-ray emission prevention portion 1090 X-ray guided

Claims (7)

  An X-ray waveguide for introducing X-rays by resonance coupling, comprising a core for guiding X-rays and a clad for confining the X-rays in the core, and the total reflection at the interface between the core and the cladding An X-ray waveguide part for confining the incident X-ray in the core and guiding the X-ray, a reflection X-ray transmission region for transmitting the reflection X-ray reflected on the surface of the clad by the total reflection, and the reflection X-ray transmission region An X-ray reflection part that reflects the transmitted X-rays and makes the reflection X-rays reach the surface of the cladding again, and a reflection X-ray emission prevention part that prevents the X-rays from directly exiting from the reflection X-ray transmission region. An X-ray waveguide comprising:   An X-ray waveguide part for guiding the X-ray, a reflective X-ray transmission region provided adjacent to the X-ray waveguide part, an X-ray reflection part provided adjacent to the reflection X-ray transmission region, and the reflection X-ray The X-ray waveguide according to claim 1, further comprising a reflection X-ray emission prevention portion provided in the transmission region.   3. The X-ray waveguide according to claim 1, wherein the X-ray waveguide has an X-ray reflection part at a position facing the X-ray waveguide part. 4.   3. The X-ray waveguide according to claim 1, wherein the reflective X-ray transmission region is made of an organic material, carbon, boron compound, or silicon oxide.   The X-ray waveguide part includes a core for guiding X-rays and a clad for confining the X-rays in the core, and the core has a periodic structure including a plurality of substances having different real refractive index parts. The clad is configured such that a total reflection critical angle at an interface between the core and the clad is larger than a Bragg angle resulting from periodicity of the periodic structure of the core. The X-ray waveguide according to any one of Items 4 to 4.   A method for manufacturing an X-ray waveguide according to any one of claims 1 to 5, wherein a step of forming an X-ray waveguide portion, and a step of forming a reflective X-ray transmission region adjacent to the X-ray waveguide portion; A step of forming a reflection X-ray emission preventing portion adjacent to the X-ray waveguide portion and the reflection X-ray transmission region; and a step of forming an X-ray reflection portion adjacent to the reflection X-ray transmission region. X-ray waveguide manufacturing method.   A method for manufacturing an X-ray waveguide according to any one of claims 1 to 5, wherein a step of forming an X-ray waveguide portion, and a step of forming a reflection X-ray emission preventing portion adjacent to the X-ray waveguide portion; And a step of forming a reflection X-ray transmission region adjacent to the X-ray waveguide region and the reflection X-ray emission prevention region, and a step of forming an X-ray reflection region adjacent to the reflection X-ray transmission region. A method for manufacturing an X-ray waveguide.

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