CN103134635B - Alarm system of pressure criteria exceeding of small nitrogen for Holland tempress diffusion furnace - Google Patents
Alarm system of pressure criteria exceeding of small nitrogen for Holland tempress diffusion furnace Download PDFInfo
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- CN103134635B CN103134635B CN201210250163.6A CN201210250163A CN103134635B CN 103134635 B CN103134635 B CN 103134635B CN 201210250163 A CN201210250163 A CN 201210250163A CN 103134635 B CN103134635 B CN 103134635B
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- port
- little nitrogen
- relay
- tempress
- dpc
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 70
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 36
- 238000009792 diffusion process Methods 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 6
- 230000004048 modification Effects 0.000 claims description 3
- 238000012986 modification Methods 0.000 claims description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 102220182705 rs191061766 Human genes 0.000 description 1
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- Emergency Alarm Devices (AREA)
Abstract
The invention relates to an alarm system of pressure criteria exceeding of small nitrogen for a Holland tempress diffusion furnace. An unoccupied port X12 with data processing center (DPC) of a tempress device used for inputting leads pressure signals of the small nitrogen into a control system and writes the signals into a process procedure of the tempress at the same time, and a leapfrogging instruction is added into the procedure. Sound-light alarm can be given out when the small nitrogen presser exceeds a range, leapfrogging can be achieved before diffusion when the small nitrogen pressure exceeds the range, and therefore piece reworking can be avoided.
Description
Technical field
The present invention relates to a kind of automation control system, the little nitrogen being specifically related to Dutch tempress diffusion furnace exceeds pressure criteria warning system.
Background technology
Diffusion furnace is one of important technological equipment of operation before integrated circuit production line, its main application is adulterated to semiconductor, namely under the high temperature conditions dopant material is diffused into silicon chip, thus change and control the type of impurity in semiconductor, concentration and distribution, to set up different electrical characteristics regions.
A large amount of pure nitrogen gas to be passed into during diffusion as diluents, therefore claim large nitrogen; Also have a road to measure smaller nitrogen to carry phosphorus source by phosphorus source bottle and enter body simultaneously, therefore claim little nitrogen.When the pressure of little nitrogen goes beyond the scope, can cut off V12A & V12B two solenoid valves, causing cannot TongYuan, and its object is to prevent little nitrogen pressure excessive, making source bottle breakage.Simultaneously the silicon chip spread also can be caused to spread, and it also can not be reported to the police, also can not leapfrog, many sheets of doing over again can be caused.
Summary of the invention
The little nitrogen that the object of this invention is to provide a kind of Dutch tempress diffusion furnace exceeds pressure criteria warning system, utilize the vacant port x 12 of the input of the DPC of tempress equipment that the pressure signal of little nitrogen is introduced control system, signal is write in the process of tempress simultaneously, add skip in a program.Can sound and light alarm be sent when the pressure when little nitrogen can be made off-limits, can leapfrog before diffusion when the pressure of little nitrogen is off-limits time, avoid sheet of doing over again.
The little nitrogen of Holland tempress diffusion furnace exceeds pressure criteria warning system, realizes through the following steps:
(1) wiring: the A2 port superpressure signal of little nitrogen press detection sensor 180s7 being connected to the trigger relay 180k17 of the vacant port one 2 of DPC from the A2 port of relay 180k8, the superpressure signal of little nitrogen press detection sensor 180s7 is connected to the A1 port of the trigger relay 180k17 of the vacant port one 2 of DPC from the A1 port of relay 180k8, when little nitrogen pressure transducer has superpressure signal time, just can trigger the trigger relay 180k17 of DPC port one 2.
(2) modification of program: " Branch on Dig.Input (5) UPSPOWER Alarm to Step 10 " in alert program is increased little nitrogen signal afterwards: " Branch on Dig.Input (12) CUSTALRM Alarm to Step 10 ".
(3) test: manually debugging makes little nitrogen pressure go beyond the limit of, the LED that the hummer at equipment operating interface can send warning sound and the redness ticked can send ruddiness warning.The working procedure of equipment is as jumped to the 10th step of whole diffusion process before operating in diffusing step, and the product of diffusion can exit diffusion furnace tube.
Advantage of the present invention can send sound and light alarm in process of production when the pressure of little nitrogen is off-limits time, can leapfrog before diffusion when the pressure of little nitrogen is off-limits time, avoids sheet of doing over again.
accompanying drawing illustrates:
Fig. 1 is electrical block diagram of the present invention.
Specific embodiment
Below in conjunction with specific embodiment, the present invention is described further, to help understanding content of the present invention.
Embodiment 1:
The little nitrogen of Holland tempress diffusion furnace exceeds pressure criteria warning system, realizes through the following steps:
(1) wiring: the A2 port superpressure signal of little nitrogen press detection sensor 180s7 being connected to the trigger relay 180k17 of the vacant port one 2 of DPC from the A2 port of relay 180k8, the superpressure signal of little nitrogen press detection sensor 180s7 is connected to the A1 port of the trigger relay 180k17 of the vacant port one 2 of DPC from the A1 port of relay 180k8, when little nitrogen pressure transducer has superpressure signal time, just can trigger the trigger relay 180k17 of DPC port one 2.
(2) modification of program: " Branch on Dig.Input (5) UPSPOWER Alarm to Step 10 " in alert program is increased little nitrogen signal afterwards: " Branch on Dig.Input (12) CUSTALRM Alarm to Step 10 ".
(3) test: manually debugging makes little nitrogen pressure go beyond the limit of, the LED that the hummer at equipment operating interface can send warning sound and the redness ticked can send ruddiness warning.The working procedure of equipment is as jumped to the 10th step of whole diffusion process before operating in diffusing step, and the product of diffusion can exit diffusion furnace tube.
Claims (1)
1. the little nitrogen of Dutch tempress diffusion furnace exceeds pressure criteria warning system, it is characterized by: realize through the following steps:
(1) wiring: the A2 port superpressure signal of little nitrogen press detection sensor 180s7 being connected to the trigger relay 180k17 of the vacant port one 2 of DPC from the A2 port of relay 180k8, the superpressure signal of little nitrogen press detection sensor 180s7 is connected to the A1 port of the trigger relay 180k17 of the vacant port one 2 of DPC from the A1 port of relay 180k8, when little nitrogen pressure transducer has superpressure signal time, just can trigger the trigger relay 180k17 of DPC port one 2;
(2) modification of program: " Branch on Dig.Input (5) UPSPOWER Alarm to Step 10 " in alert program is increased little nitrogen signal afterwards: " Branch on Dig.Input (12) CUSTALRM Alarm to Step 10 ";
(3) test: manually debugging makes little nitrogen pressure go beyond the limit of, the LED that the hummer at equipment operating interface can send warning sound and the redness ticked can send ruddiness warning; The working procedure of equipment is as jumped to the 10th step of whole diffusion process before operating in diffusing step, and the product of diffusion can exit diffusion furnace tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210250163.6A CN103134635B (en) | 2012-09-07 | 2012-09-07 | Alarm system of pressure criteria exceeding of small nitrogen for Holland tempress diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210250163.6A CN103134635B (en) | 2012-09-07 | 2012-09-07 | Alarm system of pressure criteria exceeding of small nitrogen for Holland tempress diffusion furnace |
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| Publication Number | Publication Date |
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| CN103134635A CN103134635A (en) | 2013-06-05 |
| CN103134635B true CN103134635B (en) | 2015-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210250163.6A Active CN103134635B (en) | 2012-09-07 | 2012-09-07 | Alarm system of pressure criteria exceeding of small nitrogen for Holland tempress diffusion furnace |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020010304A (en) * | 2000-07-29 | 2002-02-04 | 윤종용 | Vertical diffusion furnace for manufacturing semiconductor device |
| CN201590408U (en) * | 2009-12-25 | 2010-09-22 | 深圳市捷佳伟创微电子设备有限公司 | Automatic pressure balancing structure of diffusion furnace |
| CN201946090U (en) * | 2010-11-12 | 2011-08-24 | 深圳市捷佳伟创微电子设备有限公司 | Hazardous gas monitoring device of diffusion furnace |
| CN102534803A (en) * | 2012-01-04 | 2012-07-04 | 北京七星华创电子股份有限公司 | Electrical apparatus control system and method for vertical diffusion furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007258561A (en) * | 2006-03-24 | 2007-10-04 | Fujitsu Ltd | Protector and protection method of diffusion furnace |
-
2012
- 2012-09-07 CN CN201210250163.6A patent/CN103134635B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020010304A (en) * | 2000-07-29 | 2002-02-04 | 윤종용 | Vertical diffusion furnace for manufacturing semiconductor device |
| CN201590408U (en) * | 2009-12-25 | 2010-09-22 | 深圳市捷佳伟创微电子设备有限公司 | Automatic pressure balancing structure of diffusion furnace |
| CN201946090U (en) * | 2010-11-12 | 2011-08-24 | 深圳市捷佳伟创微电子设备有限公司 | Hazardous gas monitoring device of diffusion furnace |
| CN102534803A (en) * | 2012-01-04 | 2012-07-04 | 北京七星华创电子股份有限公司 | Electrical apparatus control system and method for vertical diffusion furnace |
Non-Patent Citations (1)
| Title |
|---|
| 扩散工艺培训;无;《www.docin.com/p-427947034.html》;20120622;全文 * |
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| CN103134635A (en) | 2013-06-05 |
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| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 334100 Jiangxi Province, Shangrao City Economic Development Zone in the area Patentee after: JIANGXI ZHANYU NEW ENERGY CO., LTD. Address before: 334100 Jiangxi Province, Shangrao City Economic Development Zone in the area Patentee before: SRPV High-tech Co.,Ltd. |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Alarm system of pressure criteria exceeding of small nitrogen for Holland tempress diffusion furnace Effective date of registration: 20190822 Granted publication date: 20150617 Pledgee: Shangrao Branch of Jiujiang Bank Co., Ltd. Pledgor: JIANGXI ZHANYU NEW ENERGY CO., LTD. Registration number: Y2019360000006 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200724 Granted publication date: 20150617 Pledgee: Shangrao Branch of Jiujiang Bank Co.,Ltd. Pledgor: JIANGXI UNIEX NEW ENERGY Co.,Ltd. Registration number: Y2019360000006 |
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| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No.8 Xingye Avenue, Shangrao economic and Technological Development Zone, Jiangxi Province Patentee after: Shangrao Jietai New Energy Technology Co., Ltd Address before: No.8 Xingye Avenue, Shangrao economic and Technological Development Zone, Jiangxi Province Patentee before: Jiangxi Zhanyu Xinneng Technology Co.,Ltd. |