CN103119432A - Surface property magnetic evaluation device and method - Google Patents
Surface property magnetic evaluation device and method Download PDFInfo
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- CN103119432A CN103119432A CN2011800452785A CN201180045278A CN103119432A CN 103119432 A CN103119432 A CN 103119432A CN 2011800452785 A CN2011800452785 A CN 2011800452785A CN 201180045278 A CN201180045278 A CN 201180045278A CN 103119432 A CN103119432 A CN 103119432A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/80—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating mechanical hardness, e.g. by investigating saturation or remanence of ferromagnetic material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/127—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using inductive means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
- G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
- G01N27/9046—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents by analysing electrical signals
Abstract
A surface property evaluation device capable of non-destructively and accurately evaluating the surface properties of an object under inspection subjected to heat treatment, nitriding treatment, shot-peening treatment, or the like is provided. The surface property evaluation device 1 of the present invention comprises a magnetic sensor 10 for detecting the magnetic properties of the surface of an object under inspection and outputting a surface property signal, a power supply means 20 for supplying AC power at a predetermined frequency to the magnetic sensor 10; a signal detection means 21 for extracting from a magnetic detection signal a surface property signal in response to the magnetic properties of the surface of an object under inspection; a surface property calculation means 22 for calculating surface properties based on a surface property signal; and a memory means 23 for storing the calibration curve showing the relationship between surface property signals and surface properties and/or reference values obtained in advance using a reference sample of which surface properties are already known. The magnetic sensor 10 comprises a core 11 having a magnetic body, and a coil 12; a closed magnetic path is formed by the magnetic sensor 10 and the surface of the object under inspection.
Description
Technical field
The present invention relates to a kind of character of surface evaluating apparatus and character of surface evaluation method, especially, relate to character of surface evaluating apparatus and character of surface evaluation method that the character of surface such as a kind of unrelieved stress to checked object, hardness are estimated.
Background technology
In being used in the steel products such as the gear of auto parts etc., axle, in order to improve wearing quality, to improve fatigue strength etc., the surface treatments such as surface cure, shot blast of the thermal treatment of utilizing, nitrogen treatment etc. are arranged.
In the past, the evaluation of the character of surface such as the unrelieved stress after the surface treatment of these products, hardness was undertaken by carrying out destructive test in the extraction mode.Therefore, have following problems: can not all products of direct-detection, owing to being that product that therefore destructive test has carried out detecting can not use etc.
Therefore, nondestructively the exploitation request of the device of the character of surface of testing product increases.As this device, for example, in TOHKEMY 2008-2973 communique, disclose the cannot-harm-detection device of following shot blast face: Yi Bian the frequency of the testing circuit that possesses the coil that is configured in shot blast face top is changed, on one side to the testing circuit input exchange signal, and detect the generation state of the unrelieved stress in detected object with the frequency response characteristic of the impedance on testing circuit.
Summary of the invention
The problem that invention will solve
But, technology described above, have following such problem: due in the pick-up unit of coil configuration above the shot blast face with open-flux structure, the decay of the magnetic between checked object and sensor, leak greatlyr, so the repeatability of detection sensitivity and measured value reduces.In addition, also there is following such problem: while due to the method that changes the frequency input exchange signal and try to achieve the frequency response characteristic of impedance, therefore magnetic changes the length of penetration of checked object, and can not rest in exactly the character of surface that has distribution on depth direction.
Therefore, the object of the present invention is to provide a kind of character of surface evaluating apparatus and character of surface evaluation method that can can't harm and accurately the character of surface of having carried out the surface-treated checked objects such as thermal treatment, nitrogen treatment, shot blast be estimated.
For the scheme of dealing with problems
In order to reach above-mentioned purpose, the present invention is a kind of character of surface evaluating apparatus that the character of surface of checked object is estimated, it is characterized in that, this character of surface evaluating apparatus has: Magnetic Sensor, the coil that it comprises the core body that is made of magnetic and is wound in this core body, this Magnetic Sensor is for detection of the magnetic characteristic on the surface of checked object; The power feeding section part, it is used for supplying with alternating electromotive force to the coil of this Magnetic Sensor; Signal detecting part, it is for detection of the character of surface signal corresponding with the magnetic characteristic on the surface that utilizes the detected checked object of Magnetic Sensor; Memory unit, it is used for the storage expression by the value of the relation between the character of surface of predefined character of surface signal and checked object; And character of surface calculating unit, it is used for according to the value that is stored in this memory unit and the character of surface of utilizing the detected character of surface calculated signals of signal detecting part checked object, the power feeding section part is supplied with the alternating electromotive force of constant frequency to the coil of Magnetic Sensor, thus, the core body of Magnetic Sensor forms closed magnetic circuit by excitation and with the surface of checked object.
Adopt the present invention who consists of like this, can utilize the magnetic characteristic that detects the surface of checked object from the Magnetic Sensor of power feeding section part supply alternating electromotive force, detect the character of surface signal corresponding with the magnetic characteristic on the surface that utilizes the detected checked object of Magnetic Sensor in signal detecting part, utilize the character of surface calculating unit, according to being stored in expression in memory unit by the value of the relation between the character of surface of predefined character of surface signal and checked object and character of surface signal, calculate the character of surface of checked object.
The core body of Magnetic Sensor and the surface of checked object form closed magnetic circuit, thereby can prevent decay, the leakage of the magnetic between checked object and Magnetic Sensor.Thus, can strengthen the intensity of character of surface signal, can improve the detection sensitivity of the magnetic characteristic of Magnetic Sensor, thereby can can't harm and accurately the character of surface of checked object be estimated.
In addition, due to the alternating electromotive force that passes through to supply with to coil constant frequency, thereby the character of surface to checked object is estimated, and therefore can make magnetic keep constant to the length of penetration of checked object, thereby can also rest in exactly the character of surface that has distribution on depth direction.
At this, " gauging surface characteristic " is to comprise not only by calculating the absolute value of unrelieved stress, hardness etc., thereby also whether is in the concept of the situation that in the scope of regulation, the effects on surface characteristic is estimated with respect to reference value by the gauging surface characteristic signals.
In the present invention, preferably, expression is the typical curve of the corresponding relation between presentation surface characteristic signals and checked object by the value of the relation between the character of surface of predefined character of surface signal and checked object.
Adopt the present invention who so consists of, can calculate the character of surface (degree of depth of the thickness of the nitration case when for example, having implemented nitrogen treatment, the compressive residual stress when having implemented shot blast etc.) of checking matter.
In the present invention, preferably, expression is the reference value with the presentation surface characteristic signals in the benchmark sample of character of surface of regulation by the value of the relation between the character of surface of predefined character of surface signal and checked object.
Adopt the present invention who so consists of, the character of surface signal that goes out by computation and measurement and the difference between this reference value, thereby the quality that can carry out checking matter is judged (whether the degree of depth of the thickness of the nitration case when for example, having implemented nitrogen treatment, the compressive residual stress when having implemented shot blast etc. are sufficient).
In the present invention, preferably, the core body of Magnetic Sensor can contact with checked object along the surface configuration of checked object.
Adopt the present invention who so consists of, because the core body of Magnetic Sensor can contact with checked object along the surface configuration of checked object, thus therefore can be by decay, the leakage that makes core body contact and prevent the magnetic between checked object and Magnetic Sensor with the surface of checked object.Thus, the intensity of character of surface signal can be strengthened, the detection sensitivity of the magnetic characteristic of Magnetic Sensor can be improved.
In the present invention, preferably, the distance that the core body of Magnetic Sensor can be configured between the surface of this core body and checked object is below 3.0mm.
Adopt the present invention who so consists of, it is the situation of ferromagnetism body as checked object, in the situation that utilize the detection signal of the detected magnetic characteristic of Magnetic Sensor stronger, the distance that can be configured between the surface of core body and checked object is below 3.0mm, thereby can form closed magnetic circuit by the surface of Magnetic Sensor and checked object, obtain the magnetic detection signal of intensity abundance, thereby can can't harm and accurately the character of surface of checked object be estimated.
In the present invention, preferably, the distance that the core body of Magnetic Sensor can be configured between the surface of this core body and checked object is below 0.3mm.
Adopt the present invention who so consists of, the distance that can be configured between the surface of core body and checked object is below 0.3mm, even thereby in the situation that measure the weak checked object of detection signal of magnetic characteristic, also can can't harm and accurately the character of surface of checked object be estimated.
In the present invention, preferably, the core body of Magnetic Sensor is formed by the ferromagnetism body.
Adopt the present invention who so consists of, the core body of Magnetic Sensor is formed by the ferromagnetism body, thereby can improve the magnetic flux density of core body inside, can improve S/N than (S: the magnetic that infiltrates into checked object, N: leakage field), thereby can improve the detection sensitivity of the magnetic characteristic of Magnetic Sensor.
In the present invention, preferably, the core body of Magnetic Sensor forms the shank of central authorities for the E font core body of coil winding.
Adopt the present invention who so consists of, coil is clamped by core body, thereby can effectively suppress the leakage of magnetic, is easy to form closed magnetic circuit.
In the present invention, preferably, the core body of Magnetic Sensor comprises: columnar portion, and it is by coil winding; And pipe section, it is sealed by base portion around this columnar portion configuration and one end, and the end that columnar portion is configured in the axle center of pipe section and columnar portion is connected with the base portion of pipe section.
Adopt the present invention who so consists of, coil is surrounded by core body, thereby can effectively suppress the leakage of magnetic, is easy to form closed magnetic circuit.In addition, the manufacturing of core body ratio is easier to and cost is lower.
In order to reach above-mentioned purpose, the present invention is a kind of character of surface evaluation method that the character of surface of checked object is estimated, it is characterized in that, this character of surface evaluation method has following operation: prepare to comprise the core body that is made of magnetic and be wound in the coil of this core body and detect the Magnetic Sensor of magnetic characteristic on the surface of checked object; Supply with the alternating electromotive force of constant frequency to the coil of this Magnetic Sensor, thus the core body of Magnetic Sensor is carried out excitation and forms closed magnetic circuit with the surface of checked object; Detect the character of surface signal corresponding with the magnetic characteristic on the surface that utilizes the detected checked object of Magnetic Sensor; The storage expression is by the value of the relation between the character of surface of predefined character of surface signal and checked object; And relation stored according to this and utilize the detected character of surface signal of signal detecting part, calculate the character of surface of checked object.
Description of drawings
Fig. 1 means the block diagram of the character of surface evaluating apparatus of embodiments of the present invention.
Fig. 2 means the key diagram of Magnetic Sensor of the character of surface evaluating apparatus of embodiments of the present invention.
Fig. 3 is the stereographic map of a plurality of modifications of Magnetic Sensor that represents respectively the character of surface evaluating apparatus of embodiments of the present invention.
Fig. 4 means the chart of the distribution on the depth direction of the unrelieved stress in the steel that carried out shot blast in embodiments of the invention 1.
Fig. 5 means the chart of the distribution on the depth direction of the remained austenite content in the steel that carried out shot blast in embodiments of the invention 1.
Fig. 6 means the chart of the relation between the magnitude of voltage of hardness in embodiments of the invention 2 and character of surface signal.
Fig. 7 means the chart of the relation between the magnitude of voltage of the thickness of the nitration case in embodiments of the invention 4 and character of surface signal.
Embodiment
Below, with reference to accompanying drawing, the character of surface evaluating apparatus of embodiments of the present invention is described.
As shown in Figure 1, the character of surface evaluating apparatus 1 of embodiments of the present invention comprises: Magnetic Sensor 10, and the magnetic characteristic such as its magnetic permeability variation for detection of the surface of checked object, inverse magnetostriction effect is also exported the magnetic detection signal; Power feeding section part 20, it is used for supplying with alternating electromotive force to this Magnetic Sensor 10; Signal detecting part 21, it is used for from utilizing the extraction of the detected magnetic detection signal of Magnetic Sensor 10 and the detection character of surface signal corresponding with the magnetic characteristic on the surface of checked object; Character of surface calculating unit 22, it is used for the character of surface according to checked objects such as the character of surface calculated signals unrelieved stress of utilizing this signal detecting part 21 to obtain, hardness; And memory unit 23, it is used for the storage expression by predefined character of surface signal and utilizes the value of the relation between the detected character of surface of signal detecting part, specifically, be used for the typical curve of the relation between storage list presentation surface characteristic signals and character of surface and the character of surface signal (reference value) that obtains in advance with the known benchmark sample of the character of surface such as hardness, unrelieved stress.In addition, also comprise the display unit 24 such as display frame, voice output that utilizes the character of surface that character of surface calculating unit 22 calculates for demonstration.
In addition, character of surface evaluating apparatus 1 is such as comprising other structure members such as amplifier.
At this, " character of surface " refers to that the near surface of checked object and arrival are subject to the characteristic of the prescribed depth of surface-treated impact, and " magnetic characteristic on surface " means that the magnetic that is encouraged by Magnetic Sensor 10 infiltrates into the magnetic characteristic of location of the prescribed depth of detected checked object.
As shown in Figure 2, Magnetic Sensor 10 is made of E font core body 11 and coil 12, and wherein, this E font core body 11 is made of magnetic.Core body 11 is made of following part: the shank 11a of central authorities; Shank 11b, 11c, it is configured in the both sides of shank 11a; And base portion 11d, it is in the face of the surperficial 30a ground configuration of checked object 30.The end of shank 11a, 11b, 11c is linked to base portion 11d separately.Core body 11 is to erect setting from base portion 11d towards the mode that surperficial 30a is the E font.Coil 12 is wound in shank 11a.
At this, core body 11 is preferably formed by the ferromagnetism body, in this case, can improve the magnetic flux density of core body 11 inside, can improve S/N than (S: infiltrate into the magnetic of steel, N: leakage field), thereby can improve the detection sensitivity of the magnetic characteristic of Magnetic Sensor 10.As the ferromagnetism body, can list such as iron, super-permalloy, permalloy, silicon steel, ferrite (Mn-Zn class, Ni-Zn class), carbonyl iron dust, molybdenum permalloy, Sendust etc.
The character of surface evaluation method of the character of surface of utilizing character of surface evaluating apparatus 1 to estimate checked object then, is described.At this, describe as the example of checked object 30 to utilize near nitrogen treatment formed compound layer 30b surperficial 30a steel.
At first, so that the contacted mode of surperficial 30a of shank 11a, 11b, 11c and checked object 30 configures Magnetic Sensor 10.In addition, the contacted situation of surperficial 30a that " contact " in the present embodiment also comprises at least a portion in shank 11a, 11b, 11c and checked object 30 (for example, due to error in the manufacturing of the shape of this surface 30a, Magnetic Sensor 10 etc., the situation that the integral body of this shank 11a, 11b, 11c and this surface 30a are not close to etc.).
By so that the contacted mode of surperficial 30a of Magnetic Sensor 10 and checked object 30 configures this Magnetic Sensor, thereby can prevent decay, the leakage of the magnetic between checked object 30 and Magnetic Sensor 10.Thus, the intensity of character of surface signal can be strengthened, the detection sensitivity of the magnetic characteristic of Magnetic Sensor 10 can be improved.
If can form closed magnetic circuit by the surface (compound layer 30b) of Magnetic Sensor 10 and checked object 30, obtain the magnetic detection signal of intensity abundance, Magnetic Sensor 10 is contacted with the surperficial 30a of checked object 30.At this, the distance between the surface of Magnetic Sensor 10 and checked object 30 is preferably below 3.0mm, more preferably below 0.3mm.In the situation that the weak material of magnetic detection signal, for the intensity that obtains sufficient magnetic detection signal preferably is made as this distance below 0.3mm.In the situation that checked object 30 is for example the stronger material of magnetic detection signal as the ferromagnetism body, can utilizes Magnetic Sensor 10 to obtain the intensity of sufficient magnetic detection signal, thereby this distance can be made as below 3.0mm.
In addition, also can change matchingly Magnetic Sensor 10 with the shape of checked object thing 30 with respect to the configuration direction of checked object thing 30.Particularly, in the situation that checked object thing 30 is curved surface, for example, shown in Fig. 3 (D), in the situation that checked object thing 30 is cylindrical shape, better along the length direction configuration Magnetic Sensor 10 of cylindrical shape as described later.
By the distance between the surface of Magnetic Sensor 10 and checked object 30 being set to such an extent that the distance when having obtained typical curve, reference value is identical, thereby can get rid of by the variable error of lifting from the character of surface signal that causes.
By estimating in non-contacting mode, thereby, while for example can carry checked object 30 in the situation that do not need to make this checked object 30 to stop measuring, thereby can shorten the required time of detecting.
Then, supply with the alternating electromotive force of assigned frequency to coil 12 if utilize power feeding section part 20, produce AC magnetic field H at core body 11, according to frequency, magnetic infiltrates into the prescribed depth of the compound layer 30b of checked object 30, forms closed magnetic circuit by shank 11a, 11c and the zone at prescribed depth place that arrives the compound layer 30b of checked object 30.
Owing to changing according to the magnetic characteristic of the compound layer 30b that has permeated magnetic with the AC magnetic field H of coil 12 interlinkages, therefore can utilize coil 12 to detect the magnetic characteristics corresponding with the characteristic (character of surface) of compound layer 30b.And the magnetic permeability that will change according to character of surface, the quantity of magnetism that produces according to inverse magnetostriction effect change as 21 outputs from coil 12 to signal detecting part of magnetic detection signal.
In relation between character of surface and magnetic characteristic, for example, if the surface has been carried out curing or has been formed magnetic permeability reduction of compound layer.When utilizing shot blast etc. to apply the unrelieved stress of compression, because causing magnetic permeability, inverse magnetostriction effect reduces.Because the quantity of magnetism in magnetic circuit when magnetic permeability reduces reduces, so the strength decreased of magnetic detection signal.
Suitably set the frequency of alternating electromotive force according to the material of checked object 30, the characteristic of evaluation, the degree of depth of evaluation etc.For example, can be set as concentrating infiltration magnetic from the degree of depth of top layer face to the 100 μ m of steel～200 μ m.
In signal detecting part 21, according to the magnetic detection signal from Magnetic Sensor 10 input, the character of surface signal corresponding with the magnetic characteristic (magnetic characteristic of compound layer 30b) of the surperficial 30a of checked object 30 detected as voltage signal.
Be imported into lock detector 21a from the magnetic detection signal of Magnetic Sensor 10 inputs, in lock detector 21a, according to carrying out detection with the carrier wave that utilizes power feeding section part 20 to the alternating electromotive force same frequency of coil 12 supplies.The detection output of lock detector 21a is output to low-pass filter 21b, character of surface signal that will be corresponding with the magnetic characteristic of the surperficial 30a of checked object 30 in low-pass filter 21b extracts from detection output as voltage signal, exports character of surface calculating unit 22 to.
Character of surface calculating unit 22 calculates the character of surface of the checked objects 30 such as unrelieved stress, hardness according to the signal that utilizes signal detecting part 21 to obtain.Character of surface calculating unit 22 can according to as the typical curve of the relational storage between voltage and character of surface in memory unit 23, calculate hardness, residual-stress value etc.At this, in the situation that as the management checked object 30 character of surface value and only use the magnitude of voltage of character of surface signal just enough, also can not carry out the calculating according to the character of surface of typical curve.
Whether character of surface calculating unit 22 also can carry out quality within the limits prescribed according to the character of surface that calculates is judged.
In addition, can also carry out the quality judgement with the difference between the character of surface signal of measuring according to the character of surface signal (reference value) of the benchmark sample of the character of surface of expression regulation.In this case, at first, prepare the benchmark sample of the character of surface of expression regulation and also measure in advance surperficial characteristic signals, it is stored in memory unit 23 as reference value.Character of surface calculating unit 22 calculates the difference between these reference values and the character of surface signal of measuring, and whether carries out within the limits prescribed the quality judgement according to the character of surface signal.
For example, in wish with the management of the hardness on the surface of checked object 30 during for H ± α, set reference value as the benchmark sample with the sample of hardness H, the difference of character of surface signal that will be corresponding with α is set as threshold value, is judged to be bad when the difference that calculates has surpassed threshold value.
Utilize character of surface, the result of determination that character of surface calculating unit 22 calculates to be output to display unit 24, display unit 24 comes display surface characteristic, result of determination by picture, voice output etc.The value that for example, can show the character of surface such as hardness, unrelieved stress.In addition, magnitude of voltage that can also a display surface characteristic signals.
In character of surface calculating unit 22, when the quality of carrying out checked object is judged, also can utilize warning tones, emergency warning lamp to warn demonstration bad.
Adopt character of surface evaluating apparatus 1, form closed magnetic circuit by Magnetic Sensor 10 and the zone from the surperficial 30a of checked object 30 to the degree of depth of regulation, thereby can prevent decay, the leakage of the magnetic between checked object 30 and Magnetic Sensor 10.Thus, can strengthen the intensity of character of surface signal, and can improve the detection sensitivity of the magnetic characteristic of Magnetic Sensor 10, thereby can can't harm and accurately the character of surface of checked object 30 be estimated.
In addition, pass through to supply with to coil 12 alternating electromotive force of constant frequencies in detection, thereby the character of surface to checked object 30 is estimated, thereby can make magnetic keep constant to the length of penetration of checked object 30, thereby also can rest in exactly the character of surface that has distribution on depth direction.Thus, can carry out the evaluation etc. of the thickness of nitration case.
In the present embodiment, illustrated as checked object 30, character of surface evaluation formed the steel of compound layer 30b by nitrogen treatment, but the character of surface that also can change the magnetic characteristic of following the surfaces such as hardness, unrelieved stress is exactly estimated.
By utilizing power feeding section part 20 to change the frequency of the alternating electromotive force of supplying with to coil 12, thereby can change the length of penetration of magnetic.Because frequency is higher, the length of penetration of magnetic is just more shallow, and the character of surface in the shallow zone, surface of therefore can adjusting the distance is estimated.By the frequency of change alternating electromotive force like this, thereby can estimate thickness of the distribution on the depth direction of unrelieved stress, compound layer etc.
Then, utilize Fig. 3 that the variation of Magnetic Sensor is described.In the above-described embodiment, used the Magnetic Sensor with E font core body 11, but be not limited thereto, so long as form closed magnetic circuit by Magnetic Sensor and the zone from the surface of checked object to prescribed depth, just can use the Magnetic Sensor of the core body with various shapes.
As shown in Fig. 3 (A), can use following Magnetic Sensor 40, this Magnetic Sensor 40 comprises: columnar portion 41a, it is reeled for coil 42; And the pipe 41b of section, it is sealed by base portion 41c around this columnar portion 41a configuration and one end, and the end that columnar portion 41a is configured in the axle center of the pipe 41b of section and columnar portion 41a is connected to the base portion of the pipe 41b of section.Adopt this Magnetic Sensor 40, due to coil 42 complete cycles by the pipe 41b of section around, therefore can effectively suppress the leakage of magnetic, be easy to form closed magnetic circuit.
In addition, can also use as shown in Fig. 3 (B) at the Magnetic Sensor 50 of the coil 52 of having reeled on U font core body 51, the Magnetic Sensor 60 etc. of the coil 62 of having reeled on L font core body 61 as shown in Fig. 3 (C).
And, as shown in Fig. 3 (D), can also use Magnetic Sensor 10, this Magnetic Sensor 10 has used so that the core body 11 that the mode that the shape of shank 11a, 11b, 11c can contact with checked object 30 along the shape of checked object 30 consists of.
The effect of character of surface evaluating apparatus of the embodiment of the invention described above then, is described.
(1) adopt the character of surface evaluating apparatus 1 of present embodiment, the zone from surperficial 30a to prescribed depth by Magnetic Sensor 10 and checked object 30 forms closed magnetic circuit, thereby can prevent decay, the leakage of the magnetic between checked object 30 and Magnetic Sensor 10.Thus, can strengthen the intensity of character of surface signal, can improve the detection sensitivity of the magnetic characteristic of Magnetic Sensor 10, thereby can can't harm and accurately the character of surface of checked object 30 be estimated.
In addition, by supply with the alternating electromotive force of constant frequency to coil 12, thereby the character of surface to checked object 30 is estimated, and therefore can make magnetic keep constant to the length of penetration of checked object 30, thereby can also rest in exactly the character of surface that has distribution on depth direction.
(2) by so that the contacted mode of surperficial 30a of the core body 11 of Magnetic Sensor 10 and checked object 30 configures this core body 11, thereby can prevent decay, the leakage of the magnetic between checked object 30 and Magnetic Sensor 10.Thus, the intensity of character of surface signal can be strengthened, the detection sensitivity of the magnetic characteristic of Magnetic Sensor 10 can be improved.In addition, can get rid of by the variable error of lifting from the character of surface signal that causes.
(3) when checked object is the ferromagnetism body, in the situation that the core body 11 of Magnetic Sensor 10 does not contact with checked object 30 and the surperficial 30a of core body 11 and checked object 30 between distance be that mode below 3.0mm configures, can form closed magnetic circuit by the surface of Magnetic Sensor 10 and checked object 30, obtain the magnetic detection signal of intensity abundance, thereby can can't harm and accurately the character of surface of checked object 30 be estimated.Even when measuring the weak checked object of the magnetic detection signal obtain, the distance that also can be configured between the surface of core body and checked object is below 0.3mm, thereby can't harm and accurately the character of surface of checked object be estimated.
In addition, by estimating in non-contacting mode, while for example can carry checked object 30 not need it is measured with stopping, thereby can shorten the required time of detecting.
(4) when having formed core body 11 by ferromagnetism bodies such as ferrites, can improve the magnetic flux density of core body 11 inside, can improve S/N than (S: infiltrate into the magnetic of steel, N: leakage field), can improve the detection sensitivity of the magnetic characteristic of Magnetic Sensor 10.
Embodiment
Below, represent the embodiment that the character of surface of character of surface evaluating apparatus of the present invention is measured.
Embodiment 1
In the present embodiment, the unrelieved stress on the surface of the steel that carried out shot blast is estimated.
As estimating sample, used shot-blasting surface processing material has been carried out on the surface of SCH420H gas carburizing material.As a comparison materials'use do not carry out the surface-treated material that is untreated.It is that 100 μ m, hardness are the blasting materials of Hv900～Hv950 that shot blast is used the particle footpath, and is to carry out under the condition of 0.2MPa at expulsion pressure.
The evaluation of unrelieved stress makes the Magnetic Sensor of E font core body carry out with surperficial contacting.Core body is made of the Mn-Zn class ferrite of ferromagnetism body, and the shank of the corner post shape of 4mm * 4mm * 3mm forms with the 3mm arranged spaced.To be made as to the alternating current that coil is supplied with 20kHz, 3.5mA.
Utilize the voltage of the detected character of surface signal of character of surface evaluating apparatus to be 0.79V in the material that is untreated, and be reduced to 0.71V in finish materials.
In Fig. 4, presentation surface is processed the unrelieved stress of material in the distribution of depth direction.Unrelieved stress is to grind and utilize X ray stress measurement method to measure while utilizing electrolytic polishing to come effects on surface to process the every several μ m of material ground.As shown in Figure 5 as can be known, be applied with the compressive residual stress larger than the material that is untreated take the degree of depth 15 μ m as peak value in finish materials.
Have retained austenite in SCH420H gas carburizing material, owing to carrying out the martensite phase transformation by shot blast, so remained austenite content reduces.The distribution of the depth direction of expression remained austenite content in Fig. 5.As can be known in finish materials, compare remained austenite content with the material that is untreated and reduce significantly as shown in Figure 5.
In the situation that be applied with the unrelieved stress of compression, change with magnetic permeability that minimizing by remained austenite content causes and compare, the magnetic characteristic that is caused by inverse magnetostriction effect changes dominant, and the magnetic permeability of finish materials integral body changes and reduces.
The change in voltage of character of surface signal is corresponding with the magnetic permeability variation, thereby has confirmed to utilize character of surface evaluating apparatus of the present invention, can estimate accurately the situation of unrelieved stress.
Embodiment 2
In the present embodiment, use the steel (SKS3) utilize thermal treatment and to have changed hardness to carry out evaluation with respect to the character of surface signal of steel hardness.
The evaluation of hardness makes the Magnetic Sensor of E font core body carry out with surperficial contacting.To be made as to the alternating current that coil is supplied with 20kHz, 3.5mA.
Relation between the voltage of expression Vickers hardness and character of surface signal in Fig. 6 (device output).Confirmed that Vickers hardness more uprises, the lower tendency of the voltage of character of surface signal, confirmed to utilize character of surface evaluating apparatus of the present invention, situation about can estimate accurately accordingly.
Embodiment 3
In the present embodiment, to the contacted effect of Magnetic Sensor and checked object is estimated.
Estimate sample identical with embodiment 1 with condition.Be configured to core body with estimate specimen surface and do not contact, the distance of core body Distance evaluation specimen surface is in the situation of 1mm, the character of surface signal is the signal intensity of the abundance of 0.2V, but makes core body and estimating character of surface signal in the contacted situation of specimen surface and strengthen significantly and be 0.8V.Thus, having confirmed to contact with detected object by the core body that makes Magnetic Sensor strengthens the intensity of character of surface signal, can improve the situation of detection sensitivity.
Embodiment 4
In the present embodiment, use the steel utilize nitrogen treatment and to be provided with nitration case, carry out the evaluation with respect to the character of surface signal of the thickness of nitration case.By at NH
3Temperature with 500 ℃～600 ℃ in atmosphere heats steel (SKD61), thereby is provided with the nitration case that thickness is 1.5 μ m～10.0 μ m.
Evaluation makes the Magnetic Sensor of E font core body carry out with surperficial contacting.To be made as to the alternating current that coil is supplied with 20kHz, 3.5mA.
Utilize the voltage of the detected character of surface signal of character of surface evaluating apparatus as shown in Figure 7 along with the thickness of nitration case increases and increases.Thus, confirmed to estimate accurately the situation of the thickness of nitration case.
Claims (10)
1. the character of surface evaluating apparatus that the character of surface of checked object is estimated, is characterized in that,
This character of surface evaluating apparatus has:
Magnetic Sensor, the coil that it comprises the core body that is made of magnetic and is wound in this core body, this Magnetic Sensor is for detection of the magnetic characteristic on the surface of checked object;
The power feeding section part, it is used for supplying with alternating electromotive force to the coil of this Magnetic Sensor;
Signal detecting part, it is for detection of the character of surface signal corresponding with the magnetic characteristic on the surface that utilizes the detected checked object of above-mentioned Magnetic Sensor;
Memory unit, it is used for the storage expression by the value of the relation between the character of surface of predefined character of surface signal and checked object; And
The character of surface calculating unit, it is used for according to the value that is stored in this memory unit and utilizes the detected character of surface signal of above-mentioned signal detecting part to calculate the character of surface of checked object,
Above-mentioned power feeding section part is supplied with the alternating electromotive force of constant frequency to the coil of above-mentioned Magnetic Sensor, thus, the above-mentioned core body of above-mentioned Magnetic Sensor forms closed magnetic circuit by excitation and with the surface of checked object.
2. character of surface evaluating apparatus according to claim 1, wherein,
Represent that above-mentioned value by the relation between the character of surface of predefined character of surface signal and checked object is the typical curve of the corresponding relation between presentation surface characteristic signals and checked object.
3. character of surface evaluating apparatus according to claim 1, wherein,
Represent that above-mentioned value by the relation between the character of surface of predefined character of surface signal and checked object is the reference value with the presentation surface characteristic signals in the benchmark sample of character of surface of regulation.
4. the described character of surface evaluating apparatus of any one according to claim 1 to 3, wherein,
The core body of above-mentioned Magnetic Sensor can contact with checked object along the surface configuration of checked object.
5. according to claim 1 to 3, apparatus for evaluating characteristics is detected on the described surface of any one, wherein,
The distance that the core body of above-mentioned Magnetic Sensor can be configured between the surface of this core body and checked object is below 3.0mm.
6. according to claim 1 to 3, apparatus for evaluating characteristics is detected on the described surface of any one, wherein,
The distance that the core body of above-mentioned Magnetic Sensor can be configured between the surface of this core body and checked object is below 0.3mm.
7. the described character of surface evaluating apparatus of any one according to claim 1 to 3, wherein,
The core body of above-mentioned Magnetic Sensor is formed by the ferromagnetism body.
8. the described character of surface evaluating apparatus of any one according to claim 1 to 3, wherein,
The core body of above-mentioned Magnetic Sensor is that the shank of central authorities is for the E font core body of coil winding.
9. the described character of surface evaluating apparatus of any one according to claim 1 to 3, wherein,
The core body of above-mentioned Magnetic Sensor comprises: columnar portion, and it is by coil winding; And pipe section, it is sealed by base portion around this columnar portion configuration and one end, and the end that columnar portion is configured in the axle center of pipe section and columnar portion is connected with the base portion of pipe section.
10. the character of surface evaluation method that the character of surface of checked object is estimated, is characterized in that,
This character of surface evaluation method has following operation:
Preparation comprises the core body that is made of magnetic and is wound in the coil of this core body and detects the Magnetic Sensor of magnetic characteristic on the surface of checked object;
Supply with the alternating electromotive force of constant frequency to the coil of this Magnetic Sensor, thus excitation is carried out in the above-mentioned core body of above-mentioned Magnetic Sensor, and make the surface of this Magnetic Sensor and checked object form closed magnetic circuit;
Detect the character of surface signal corresponding with the magnetic characteristic on the surface that utilizes the detected checked object of above-mentioned Magnetic Sensor;
The storage expression is by the value of the relation between the character of surface of predefined character of surface signal and checked object; And
Relation stored according to this and detected character of surface signal, the character of surface of calculating checked object.
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| PCT/JP2011/080544 WO2012086845A1 (en) | 2010-12-21 | 2011-12-21 | Surface property magnetic evaluation device and method |
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| JP6104161B2 (en) | 2017-03-29 |
| CN103119432B (en) | 2015-12-02 |
| JP2014500476A (en) | 2014-01-09 |
| WO2012086845A1 (en) | 2012-06-28 |
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