CN103103495B - Full-automatic downward transmission system - Google Patents
Full-automatic downward transmission system Download PDFInfo
- Publication number
- CN103103495B CN103103495B CN201110357788.8A CN201110357788A CN103103495B CN 103103495 B CN103103495 B CN 103103495B CN 201110357788 A CN201110357788 A CN 201110357788A CN 103103495 B CN103103495 B CN 103103495B
- Authority
- CN
- China
- Prior art keywords
- transmission
- transmission system
- sensor
- state relay
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Control Of Conveyors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention belongs to the field of transmission system for PECVD (plasma enhanced chemical vapor deposition), and particularly relates to a full-automatic downward transmission system. The full-automatic downward transmission system comprises a charging platform, a lifting transmission, a downward transmission system and a discharging platform, wherein the downward transmission system comprises four transmission stations, a solid-state relay and a PLC (programmable logic controller), wherein each transmission station is composed of a motor, a sensor and a transmission profile, and the motor and the sensor are arranged on the transmission profile; the PLC is electrically connected with the sensors and the solid-state relay; and the solid-state relay is electrically connected with each motor. Carbon plates are transmitted on the downward transmission system composed of the 4 transmission stations, thereby overcoming the defects of low transmission stability and the like in the transmission system composed of 8 transmission stations, and lowering the fragment rate. Since the equipment components are reduced, the cost is lowered.
Description
Technical field
The invention belongs to the transmission system field of PECVD, specifically a kind of Full-automatic down transmission system.
Background technology
Along with the fast development of economic construction, microelectronics obtains and rapidly develops, and exploitation and the use of PECVD apparatus for processing plasma are also increasingly extensive.PECVD is plasma enhanced chemical vapor deposition method, when chemical vapour deposition, can carry out at a lower temperature to make chemical reaction, the activity that can make use of plasma body promotes reaction, this chemical gaseous phase depositing process is called plasma enhanced chemical vapor deposition method, and the equipment implementing this kind of working method is PECVD device.
The transmission system of our production line for manufacturing battery PECVD comprises loading stage, lifting transmission, lower transmission line, relieving platform at present, wherein said lower transmission line is made up of overhead control power switch, motor, photo-sensor and section bar etc., and the lower transmission of tradition mostly is the mode that 8 transmission stations connect, this transmission system has 8 groups of opposite type sensor, 8 motors usually, when carbon plate transmits in this lower transmission, there is the shortcomings such as cost is high, poor stability.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide a kind of Full-automatic down transmission system, this Full-automatic down transmission system has that cost is low, reliability high.
To achieve these goals, the present invention is by the following technical solutions:
A kind of Full-automatic down transmission system, comprise loading stage, lifting transmission, lower transmission system, relieving platform, described lower transmission system comprises 4 transmission station, solid state relay and PLC, wherein each transmission station is by motor, sensor and transmission section bar composition, and described motor and sensor setting are transmitting on section bar; Described PLC is electrically connected with sensor and solid state relay, and solid state relay is electrically connected with described motor.
Described motor is single-phase machine.
Described sensor is opposite type sensor.
Described opposite type sensor is two, is respectively projector and receptor.
The present invention has following advantage:
The present invention transmits carbon plate in the lower transmission system be made up of 4 transmission stations, avoids the shortcomings such as the transmission system transmission shakiness formed at 8 transmission stations, can reduce fragmentation rate, and owing to decreasing equipment component, can reduce costs.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of each transmission station of the present invention;
Wherein: 1 is opposite type sensor, 2 is transmission section bar, and 3 is single-phase machine, and 4 is transmission station I, and 5 is transmission station II, and 6 is transmission station III, and 7 is transmission station IV.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1 and Figure 2, the present invention includes loading stage, lifting transmission, lower transmission system, relieving platform, described lower transmission system comprises 4 transmission station, solid state relay and the PLC such as transmission station I4, transmission station II5, transmission station III6, transmission station IV7, wherein each transmission station forms by 1 single-phase machine, 3, two pairs of opposite type sensor 1 and transmission section bar 2, single-phase machine 3 and two pairs of opposite type sensor 1 are all arranged on to be transmitted on section bar 2, and two pairs of opposite type sensor are respectively projector and receptor; Described PLC is electrically connected with solid state relay, uses PLC to control solid state relay.Solid state relay is electrically connected with single-phase machine 3, controls starting or stoping of each single-phase machine 3.The running of single-phase machine 3 controls transfer station.Opposite type sensor 1 is connected with PLC, correlation electric transducer 1 be used for monitor carbon plate position, for time variable control carbon plate on the transmission line suitable exercise judgement signal is provided.
Loading stage, relieving platform complete carbon plate and to work from lower transmission line to PECVD the transportation in transmission face.Use servo-driver or frequency transformer to control the lifting motor of loading, unloading microscope carrier, use PLC to control each described servo-driver.Lifting process is without the need to manual intervention, and system automatic decision carbon plate position completes lifting.
Lower transmission system completes the transport of carbon plate in PECVD device bottom.Transportation is without the need to manual intervention.System completes transmitting procedure automatically.Whole lower transmission line can hold at most 4 pieces of carbon plates.The overall power supply supply of overhead control power supply switch control system.
The present invention transmits carbon plate in the lower transmission system be made up of 4 transmission stations, transmits the lower transmission system of stations composition compared to traditional 8, avoids the shortcomings such as the transmission system transmission shakiness formed at 8 transmission stations, reduces fragmentation rate.Save 4 individual event motors, 8 pairs of opposite type sensor simultaneously, reduce equipment component, reduce cost.Carbon plate can easily be transported to loading stage from relieving platform by the motor-driven transmission system automatically controlled, to loading stage transport carbon plate to vertex from relieving platform dress carbon plate, time≤60 seconds, this system has the advantages such as succinct, the stable and maintenance time of modular design, equipment is short.
Claims (1)
1. a Full-automatic down transmission system, comprise loading stage, lifting transmission, lower transmission system, relieving platform, it is characterized in that: described lower transmission system comprises 4 transmission station, solid state relay and PLC, wherein each transmission station is by motor, sensor and transmission section bar (2) composition, and described motor and sensor setting are transmitting on section bar (2); Described PLC is electrically connected with sensor and solid state relay, and solid state relay is electrically connected with described motor; Described sensor is opposite type sensor (1); Described motor is single-phase machine (3), and described opposite type sensor (1) is two, is respectively projector and receptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110357788.8A CN103103495B (en) | 2011-11-11 | 2011-11-11 | Full-automatic downward transmission system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110357788.8A CN103103495B (en) | 2011-11-11 | 2011-11-11 | Full-automatic downward transmission system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103103495A CN103103495A (en) | 2013-05-15 |
| CN103103495B true CN103103495B (en) | 2015-01-14 |
Family
ID=48311681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110357788.8A Active CN103103495B (en) | 2011-11-11 | 2011-11-11 | Full-automatic downward transmission system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103103495B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100476460B1 (en) * | 2001-11-05 | 2005-03-17 | 주성엔지니어링(주) | Plasma prcess chamber monitoring method and system used therefor |
| FR2888587B1 (en) * | 2005-07-13 | 2007-10-05 | Sidel Sas | APPARATUS FOR THE PECVD DEPOSITION OF AN INTERNAL BARRIER LAYER ON A CONTAINER COMPRISING AN OPTICAL PLASMA ANALYSIS DEVICE |
| CN101515391B (en) * | 2009-03-20 | 2010-08-11 | 北京理工大学 | Automatic book management system based on closed stacks |
| CN102220567A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院沈阳科学仪器研制中心有限公司 | Flat PECVD (plasma-enhanced chemical vapor deposition) silicon nitride coating system |
| CN202321565U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Full-automatic down transmission system |
-
2011
- 2011-11-11 CN CN201110357788.8A patent/CN103103495B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103103495A (en) | 2013-05-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201778110U (en) | Plasma enhanced chemical vapor deposition (PECVD) automatic loading and unloading boat device | |
| CN102820060B (en) | Fully automatic on-line programming device and its programming method | |
| CN104149206B (en) | A kind of foamed ceramics automation cutting equipment and cutting method thereof | |
| CN104512710A (en) | Turnover mechanism in pot conveying device | |
| CN103575108B (en) | Method for rapidly replacing trolleys in sintering machine online | |
| CN103103495B (en) | Full-automatic downward transmission system | |
| CN106964896A (en) | Auto-duplex position cover plate of power battery pole piece laser welding system and technique | |
| CN204405808U (en) | Whole-automatic double-drum battery washing facility | |
| CN202296876U (en) | Self-propelled hoist conveyor line | |
| CN203054544U (en) | Electrical control system of glass tempering furnace | |
| CN202321565U (en) | Full-automatic down transmission system | |
| CN103662683A (en) | Lifter | |
| CN206811311U (en) | Auto-duplex position cover plate of power battery pole piece laser welding system | |
| CN202529537U (en) | Energy-saving workpiece conveying device | |
| CN202929421U (en) | Unmanned control equipment for coke dry quenching lifting machine | |
| CN102627185B (en) | Transmission type goods elevator | |
| CN208736186U (en) | Automatic charging system for charging bucket at top of tank-type calcining furnace | |
| CN204490004U (en) | A kind of carrier and the Novel conveying device based on this carrier | |
| CN103812206A (en) | Carrying vehicle AC/DC power supply switching device | |
| CN206115233U (en) | Controlling means who feeds or unload in dry coke quenching production technology | |
| CN202468392U (en) | Blower fan switching control system for roller kiln | |
| CN202839567U (en) | Conveyer used for feeding material and discharging material for vacuum reaction cavity | |
| CN205199955U (en) | Ware is relayed to adjustable control by temperature change capsule | |
| CN114084018A (en) | Automatic electric pile that fills of low-cost industry AGV | |
| CN203428465U (en) | Conveying device for crucible spraying |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
| CP01 | Change in the name or title of a patent holder |