CN103103495A - Full-automatic downward transmission system - Google Patents
Full-automatic downward transmission system Download PDFInfo
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- CN103103495A CN103103495A CN2011103577888A CN201110357788A CN103103495A CN 103103495 A CN103103495 A CN 103103495A CN 2011103577888 A CN2011103577888 A CN 2011103577888A CN 201110357788 A CN201110357788 A CN 201110357788A CN 103103495 A CN103103495 A CN 103103495A
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Abstract
The invention belongs to the field of transmission system for PECVD (plasma enhanced chemical vapor deposition), and particularly relates to a full-automatic downward transmission system. The full-automatic downward transmission system comprises a charging platform, a lifting transmission, a downward transmission system and a discharging platform, wherein the downward transmission system comprises four transmission stations, a solid-state relay and a PLC (programmable logic controller), wherein each transmission station is composed of a motor, a sensor and a transmission profile, and the motor and the sensor are arranged on the transmission profile; the PLC is electrically connected with the sensors and the solid-state relay; and the solid-state relay is electrically connected with each motor. Carbon plates are transmitted on the downward transmission system composed of the 4 transmission stations, thereby overcoming the defects of low transmission stability and the like in the transmission system composed of 8 transmission stations, and lowering the fragment rate. Since the equipment components are reduced, the cost is lowered.
Description
Technical field
The invention belongs to the transmission system field of PECVD, specifically a kind of Full-automatic down transmission system.
Background technology
Along with the fast development of economic construction, microelectronics has obtained rapidly development, and the exploitation of PECVD apparatus for processing plasma and use are also increasingly extensive.PECVD is the plasma enhanced chemical vapor deposition method, when chemical vapour deposition, for chemical reaction can be carried out at lower temperature, can utilize the activity of plasma body to promote reaction, this chemical gaseous phase depositing process is called the plasma enhanced chemical vapor deposition method, and the equipment of implementing this kind working method is PECVD equipment.
The transmission system of our production line for manufacturing battery PECVD comprises loading stage, lifting transmission, lower transmission line, relieving platform at present, wherein said lower transmission line is made of overhead control power switch, motor, photo-sensor and section bar etc., and the lower transmission of tradition mostly is the mode that 8 transmission stations connect, this transmission system has 8 groups of correlation sensors, 8 motors usually, when carbon plate transmits, there are the shortcomings such as cost is high, poor stability in this time transmission.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide a kind of Full-automatic down transmission system, this Full-automatic down transmission system has that cost is low, the reliability high.
To achieve these goals, the present invention is by the following technical solutions:
A kind of Full-automatic down transmission system, comprise loading stage, lifting transmission, lower transmission system, relieving platform, described lower transmission system comprises 4 transmission station, solid state relay and PLC, wherein each transmission station forms by motor, sensor and transmission section bar, and described motor and sensor setting are on the transmission section bar; Described PLC is electrically connected to sensor and solid state relay, and solid state relay is electrically connected to described motor.
Described motor is single-phase machine.
Described sensor is the correlation sensor.
Described correlation sensor is two, is respectively projector and receptor.
The present invention has advantages of following:
The present invention is transmitted carbon plate on the lower transmission system that is made of 4 transmission stations, avoided transmitting the shortcomings such as unstable in the transmission system that 8 transmission stations consist of, and can reduce fragmentation rate, and owing to having reduced equipment component, can reduce costs.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of each transmission station of the present invention;
Wherein: 1 is the correlation sensor, and 2 are the transmission section bar, and 3 is single-phase machine, and 4 are transmission station I, and 5 are transmission station II, and 6 are transmission station III, and 7 are transmission station IV.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 1 and Figure 2, the present invention includes loading stage, lifting transmission, lower transmission system, relieving platform, described lower transmission system comprises 4 transmission station, solid state relay and the PLC such as transmission station I4, transmission station II5, transmission station III6, transmission station IV7, wherein each transmits station by 1 single-phase machine 3, two pairs of correlation sensors 1 and transmits section bar 2 and forms, single-phase machine 3 and two pairs of correlation sensors 1 all are arranged on transmission section bar 2, and two pairs of correlation sensors are respectively projector and receptor; Described PLC is electrically connected to solid state relay, uses PLC to control solid state relay.Solid state relay is electrically connected to single-phase machine 3, controls starting or stoping of each single-phase machine 3.Single-phase machine 3 is controlled the running of transmission station.Correlation sensor 1 is connected with PLC, and correlation electric transducer 1 is used for monitoring the carbon plate position, for time variable control carbon plate suitable exercise on transmission line provides the judgement signal.
Loading stage, relieving platform are completed work from lower transmission line to the PECVD transportation of transmission face of carbon plate.Control the lifting motor of loading, unloading microscope carrier with servo-driver or frequency transformer, use PLC to control each described servo-driver.Lifting process need not manual intervention, and lifting is completed in system's automatic decision carbon plate position.
Lower transmission system is completed carbon plate in the transportation of PECVD equipment bottom.Transportation need not manual intervention.System completes transmitting procedure automatically.Whole lower transmission line can hold at most 4 carbon plates.The whole power supply supply of overhead control power supply switch control system.
The present invention is transmitted carbon plate on by 4 lower transmission systems of consisting of of transmission stations, than the lower transmission system that 8 traditional transmission stations form, avoided the shortcomings such as the transmission systems transmission that consists of at 8 transmission stations is unstable, has reduced fragmentation rate.Save simultaneously 4 individual event motors, 8 pairs of correlation sensors, reduced equipment component, reduced cost.Motor-driven transmission system by automatic control can easily be transported to loading stage from relieving platform with carbon plate, begin to transport carbon plate to vertex to loading stage from relieving platform dress carbon plate, time≤60 second, the advantage such as this system has modular design, equipment is succinct, stable and maintenance time is short.
Claims (4)
1. Full-automatic down transmission system, comprise loading stage, lifting transmission, lower transmission system, relieving platform, it is characterized in that: described lower transmission system comprises 4 transmission station, solid state relay and PLC, wherein each transmission station forms by motor, sensor and transmission section bar (2), and described motor and sensor setting are on transmission section bar (2); Described PLC is electrically connected to sensor and solid state relay, and solid state relay is electrically connected to described motor.
2. by full-automatic transmission system claimed in claim 1, it is characterized in that: described motor is single-phase machine (3).
3. by full-automatic transmission system claimed in claim 1, it is characterized in that: described sensor is correlation sensor (1).
4. by full-automatic transmission system claimed in claim 3, it is characterized in that: described correlation sensor (1) is two, is respectively projector and receptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110357788.8A CN103103495B (en) | 2011-11-11 | 2011-11-11 | Full-automatic downward transmission system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110357788.8A CN103103495B (en) | 2011-11-11 | 2011-11-11 | Full-automatic downward transmission system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103103495A true CN103103495A (en) | 2013-05-15 |
| CN103103495B CN103103495B (en) | 2015-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110357788.8A Active CN103103495B (en) | 2011-11-11 | 2011-11-11 | Full-automatic downward transmission system |
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| CN (1) | CN103103495B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030085662A1 (en) * | 2001-11-05 | 2003-05-08 | Gi-Chung Kwon | Plasma process chamber monitoring method and system used therefor |
| US20090133626A1 (en) * | 2005-07-13 | 2009-05-28 | Sidel Participations | Apparatus for pecvd deposition of an internal barrier layer on a receptacle, the apparatus including an optical plasma analysis device |
| CN101515391A (en) * | 2009-03-20 | 2009-08-26 | 北京理工大学 | Automatic book management system based on closed stacks |
| CN102220567A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院沈阳科学仪器研制中心有限公司 | Flat PECVD (plasma-enhanced chemical vapor deposition) silicon nitride coating system |
| CN202321565U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Full-automatic down transmission system |
-
2011
- 2011-11-11 CN CN201110357788.8A patent/CN103103495B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030085662A1 (en) * | 2001-11-05 | 2003-05-08 | Gi-Chung Kwon | Plasma process chamber monitoring method and system used therefor |
| US20090133626A1 (en) * | 2005-07-13 | 2009-05-28 | Sidel Participations | Apparatus for pecvd deposition of an internal barrier layer on a receptacle, the apparatus including an optical plasma analysis device |
| CN101515391A (en) * | 2009-03-20 | 2009-08-26 | 北京理工大学 | Automatic book management system based on closed stacks |
| CN102220567A (en) * | 2010-04-14 | 2011-10-19 | 中国科学院沈阳科学仪器研制中心有限公司 | Flat PECVD (plasma-enhanced chemical vapor deposition) silicon nitride coating system |
| CN202321565U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Full-automatic down transmission system |
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| Publication number | Publication date |
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| CN103103495B (en) | 2015-01-14 |
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Address after: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
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