CN103064206A - Glass substrate defect detection method - Google Patents
Glass substrate defect detection method Download PDFInfo
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- CN103064206A CN103064206A CN2013100061354A CN201310006135A CN103064206A CN 103064206 A CN103064206 A CN 103064206A CN 2013100061354 A CN2013100061354 A CN 2013100061354A CN 201310006135 A CN201310006135 A CN 201310006135A CN 103064206 A CN103064206 A CN 103064206A
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Abstract
The invention discloses a glass substrate defect detection method which includes the steps of capturing a detection image, and displaying a plurality of defects on a glass substrate, of the glass substrate; dividing the detection image into a first region and a second region; detecting only whether the defects in the first region of the detection image need to be repaired or not; and repairing the defects, in the first region of the detection image and to be repaired.
Description
Technical field
The invention relates to a kind of defect inspection method of glass substrate, particularly relevant for a kind of defect inspection method of promoting the glass substrate of maintenance of equipment production capacity.
Background technology
In recent years, Thin Film Transistor-LCD (Thin-Film Transistor Liquid-CrystalDisplay, TFT-LCD) the industry application from undersized mobile phone, personal digital assistant to notebook computer, the PC of size, in large-sized LCD TV up till now, panel vendor constantly promotes the technology of manufacturing process, the glass substrate size also has increasing trend, large-sized glass substrate also can improve production capacity except can cutting larger sized product application.
On the TFT-LCD manufacture craft for the detection of defective, mainly be to use automated optical to detect (Automated Optical Inspection, AOI) technology replaces the manual detection defective, to reduce the flase drop that may cause with the long-time detection of manual type or undetected risk, also can promote detection efficiency and low testing cost.As for the classification of defects after detecting, and the panel grade judges main or judges with manual type, and next step is will do repairing, remake, scrap or past next processing procedure could to determine panel after the judgement.
Thin film transistor (TFT) (Thin-Film Transistor, TFT) manufacture craft is mainly five road circuit layers and makes, the per pass circuit all needs through film, gold-tinted, the techniques such as etching, after finishing, the per pass circuit all needs to detect and measure whether defectiveness can affect circuit, if judge the defective that can affect circuit, just must adopt remedial measures, for example repair (Repair) or circuit recasting (Rework), if defective is too serious, possible full wafer glass is scrapped (Scrap), the main work of AOI board is exactly automatically to detect one by one (review) all defectives, in fact needs to repair or recasting to determine those defectives.
Repair and remake and all need time and material cost, judge easily because individual's preference or fatigue cause erroneous judgement or fails to judge with manual type, or inspect one by one with the automated optical detection mode and to judge that whole defectives then still have restriction consuming time and that efficient can't further promote.So, be necessary to provide a kind of defect inspection method of glass substrate, to solve the existing problem of prior art.
Summary of the invention
In view of this, the invention provides a kind of defect inspection method of glass substrate, to solve the existing manual type erroneous judgement of prior art or the defect problem of failing to judge.
Fundamental purpose of the present invention is to provide a kind of defect inspection method of glass substrate, it drops on the zone (zone that namely has circuit) that can affect product yield and the zone (zone that namely has pixel electrode) that does not affect product yield by first defective locations being distinguished into, and determines to reduce subsequent detection (review) defective whether defective needs operation number of times and the required time of repairing.
Secondary objective of the present invention is to provide a kind of defect inspection method of glass substrate, and it can promote efficient and accuracy that automated optical detects, and reduces artificial erroneous judgement or fail to judge.
For reaching aforementioned purpose of the present invention, one embodiment of the invention provides a kind of defect inspection method of glass substrate, wherein said defect inspection method comprises the detection striograph that Bu Zhou ︰ captures a glass substrate, and described detection striograph shows a plurality of defectives on the described glass substrate; Described detection striograph is distinguished into a first area and a second area; Whether only detect the defective of judging the first area that is arranged in described detection striograph needs respectively to repair; And only for the first area that is arranged in described detection striograph and judge that the defective that need to repair repairs action.
In one embodiment of this invention, described glass substrate is a thin-film transistor array base-plate of a liquid crystal display.
In one embodiment of this invention, described first area is the circuit region in the described glass substrate, and described circuit region comprises transistor circuit.
In one embodiment of this invention, described circuit region comprises sweep trace, data line or storage capacitors in addition.
In one embodiment of this invention, described second area is the pixel electrode area in the described glass substrate.
In one embodiment of this invention, in detecting the step of judging, according at least a defective information detect each defective of judging in the described first area whether respectively needs repair, described defective information comprises: a location coordinate information and a defect size information.
In one embodiment of this invention, when detecting according to described location coordinate information, if described defective fully the position in described first area or at least one part position in described first area, judge that then described defective need to repair.
In one embodiment of this invention, when detecting according to described location coordinate information, if described defective surpasses a predetermined level and the maximum length value of vertical direction at the length value of level and vertical direction, judge that then described defective need to repair.
In one embodiment of this invention, after described defective detects judgement according to described defective information, described defective information is stored in a defective data bank, and analyzed and judge and to obtain a detection level, for judging whether each defective in the described first area needs respectively to repair, and wherein said detection level comprises: scrap, repair and good.
Moreover, another embodiment of the present invention provides the defect inspection method of another kind of glass substrate, wherein said defect inspection method comprises the detection striograph that Bu Zhou ︰ captures a glass substrate, described detection striograph shows a plurality of defectives on the described glass substrate, and described glass substrate is a thin-film transistor array base-plate of a liquid crystal display; Described detection striograph is distinguished into a first area and a second area, and described first area is the circuit region that comprises transistor circuit in the described glass substrate, and described second area is the pixel electrode area in the described glass substrate; Whether only detect the defective of judging the first area that is arranged in described detection striograph needs respectively to repair; And only for the first area that is arranged in described detection striograph and judge that the defective that need to repair repairs action.
Compared with prior art, the defect inspection method of glass substrate of the present invention, so not only can automatically detect these defectives, can also be by automatic decision and the process of these defectives with the judgement of simplification defective of classifying, that is can first defective locations be distinguished into drop on can affect the zone (zone that namely has circuit) of product yield reach the zone (zone that namely has pixel electrode) that does not affect product yield, determine to reduce subsequent detection (review) defective whether defective needs operation number of times and the required time of repairing, therefore really can promote efficient and the accuracy that automated optical detects, and reduce artificial erroneous judgement.
For foregoing of the present invention can be become apparent, preferred embodiment cited below particularly, and cooperate appended graphicly, be described in detail below:
Description of drawings
Fig. 1 is the synoptic diagram of the defective of an existing glass substrate.
Fig. 2 is the process flow diagram of the defect inspection method of one embodiment of the invention glass substrate.
Fig. 3 is the synoptic diagram of the defective of one embodiment of the invention glass substrate.
Fig. 4 is the local enlarged diagram of the defective of one embodiment of the invention glass substrate.
Embodiment
Below the explanation of each embodiment be with reference to additional graphic, can be in order to the specific embodiment of implementing in order to illustration the present invention.Moreover, the direction term that the present invention mentions, such as upper and lower, top, the end, front, rear, left and right, inside and outside, side, on every side, central authorities, level, laterally, vertically, vertically, axially, radially, the superiors or orlop etc., only be the direction with reference to annexed drawings.Therefore, the direction term of use is in order to explanation and understands the present invention, but not in order to limit the present invention.
Please refer to shown in Figure 1, one existing glass substrate 1, it comprises several base board units 10, being spaced on the described glass substrate 1 of rule, through after several circuit layer manufacture craft, can show a plurality of defectives 101 at described several base board units 10, detect (AutomatedOptical Inspection by automated optical of the present invention, AOI) but the technology Preliminary detection go out described a plurality of defective 101 and get rid of first the part defective 101 that need not recheck (review), confirm to reduce follow-up reinspection whether defective 101 needs the homework burden of repairing really, review, prior art is to utilize manually to detect and judge the described a plurality of defective 101 of whether repairing or remake, or inspect one by one with existing automated optical detection mode and to judge that whole defectives then still have restriction consuming time and that efficient can't further promote, if therefore can replace existing manual detection or automated optical detection with automatic testing method of the present invention, can promote efficient and the accuracy of detection, to reduce artificial erroneous judgement or to fail to judge, and further promote the automated optical detection efficiency, the defect inspection method of glass substrate of the present invention below will be described in detail in detail.
Please refer to Fig. 2 and shown in Figure 3, one embodiment of the invention provides a kind of defect inspection method of glass substrate, wherein said defect inspection method, (S01) ︰ captures one of a glass substrate and detects striograph 1 at first to comprise step, described glass substrate in described detection striograph 1 comprises several base board units 10, a plurality of defectives 101 that described detection striograph 1 shows on the described glass substrate, described glass substrate is a thin-film transistor array base-plate (TFT array substrate) of a liquid crystal display.Described pick-up image is to utilize an optical camera lens automatically to carry out image analysing computer with relatively low multiple (such as 1 ~ 20 times) collocation computer software, may belong to position and the quantity of defective 101 with preliminary judgement.
Please in the lump with reference to shown in Figure 4, then, one embodiment of the invention provides a kind of defect inspection method of glass substrate to comprise step, and (S02) ︰ is distinguished into a first area 11 and a second area 12 with described detection striograph 1, if wherein said first area 11 refers to exist described defective 101 will affect the zone of product yield, if and described second area 12 refers to exist described defective 101 still not affect the zone of product yield, for example described first area 11 is the circuit regions in the described glass substrate, described circuit region comprises transistor circuit, and described circuit region can comprise sweep trace in addition, data line and/or storage capacitors.Described second area 12 for example is the pixel electrode area in the described glass substrate.The action of above-mentioned differentiation first area 11 and second area 12 is by the computer software automatic job, it is with being intended to, because the zone that comprises circuit easily produces short circuit because of the existence of defective 101 or opens circuit, can affect respective pixel inefficacy whether, so be made as important area, i.e. described first area 11; Pixel electrode area then can not affect because of the existence of defective 101 inefficacy of whole pixel.
Then, one embodiment of the invention provides a kind of defect inspection method of glass substrate to comprise step, and (S03) ︰ only detects the defective 101b that judges the first area 11 that is arranged in described detection striograph 1, whether need respectively to repair, the position is judged in the detection that the defective 101a of described second area 12 then can omit thin section; In detecting the step (S03) of judging, described detection refers to recheck (review), namely utilizing relatively high multiple (such as 25 ~ 1000 times) to carry out image detail detects, automatically detect (or artificial visual detection) further to cross computer software according at least a defective Zixuntong, judge whether each the defective 101b in the described first area 11 needs respectively to repair, and described defective information for example comprises: a location coordinate information and a defect size information.Described location coordinate information can X, Building Y mark (X-direction size, Building Y mark direction size) is done record, and the maximal value that described defect size information can (X-direction size, Building Y mark direction size) is come record.
At last, one embodiment of the invention provide a kind of defect inspection method of glass substrate to comprise step (S04) ︰ is only for the first area 11 that is arranged in described detection striograph 1 and judge that the defective 101b that need to repair repairs action.When detecting according to described location coordinate information, if described defective 101b fully the position in described first area 11 or at least one part position in described first area 11, judge that then described defective 101b need to repair, briefly, as long as described defective 101b has in the scope that drops on described first area 11, even a part of position in described first area 11 and part position at described second area 12, also be to be judged as described defective 101b need to repair.Described repairing action is to belong to prior art, but the recasting techniques such as choice for use laser or welding are given detailed description no longer in addition in this.
In addition, when detecting according to described location coordinate information, if described defective 101 surpasses a predetermined level and the maximum length value of vertical direction at the length value of level and vertical direction, when namely coverage (size) is very large, judge that then described defective 101 need to repair.After described defective 101 detects judgement according to described defective information, described defective information is stored in a defective data bank, and analyzed and judge and to obtain a detection level, for judging whether each defective 101 in the described first area 11 needs respectively to repair, and wherein said detection level comprises: scrap, repair and good.
As mentioned above, though can use automated optical compared to the defect inspection method of existing glass substrate detects in rough on a large scale detection defective, but need in follow-up reinspection judgement and classifying step, to inspect one by one all defect, and cause promoting detection efficiency and reduce the shortcomings such as testing cost, the defect inspection method of glass substrate of the present invention is by utilizing territorial classification to be benchmark, and can the automatic classification defective, that is can first defective locations be distinguished into drop on can affect the zone (zone that namely has circuit) of product yield reach the zone (zone that namely has pixel electrode) that does not affect product yield, determine to reduce subsequent detection (review) defective whether defective needs operation number of times and the required time of repairing, therefore really can effectively promote detection efficiency and reduce testing cost.
The present invention is described by above-mentioned related embodiment, yet above-described embodiment is only for implementing example of the present invention.Must be pointed out that published embodiment does not limit the scope of the invention.On the contrary, being contained in the spirit of claims and modification and impartial setting of scope is included in the scope of the present invention.
Claims (10)
1. the defect inspection method of a glass substrate, it is characterized in that: described defect inspection method comprises step: capture one of a glass substrate and detect striograph, described detection striograph shows a plurality of defectives on the described glass substrate;
Described detection striograph is distinguished into a first area and a second area;
Whether only detect the defective of judging the first area that is arranged in described detection striograph needs respectively to repair; And
Only for the first area that is arranged in described detection striograph and judge that the defective that need to repair repairs action.
2. defect inspection method as claimed in claim 1, it is characterized in that: described glass substrate is a thin-film transistor array base-plate of a liquid crystal display.
3. defect inspection method as claimed in claim 2, it is characterized in that: described first area is the circuit region in the described glass substrate, and described circuit region comprises transistor circuit.
4. defect inspection method as claimed in claim 3, it is characterized in that: described circuit region comprises sweep trace, data line or storage capacitors in addition.
5. defect inspection method as claimed in claim 2, it is characterized in that: described second area is the pixel electrode area in the described glass substrate.
6. defect inspection method as claimed in claim 1, it is characterized in that: in detecting the step of judging, according at least a defective information detect each defective of judging in the described first area whether respectively needs repair, described defective information comprises: a location coordinate information and a defect size information.
7. defect inspection method as claimed in claim 6, it is characterized in that: when detecting according to described location coordinate information, if described defective fully the position in described first area or at least one part position in described first area, judge that then described defective need to repair.
8. defect inspection method as claimed in claim 6, it is characterized in that: when detecting according to described location coordinate information, if described defective surpasses a predetermined level and the maximum length value of vertical direction at the length value of level and vertical direction, judge that then described defective need to repair.
9. defect inspection method as claimed in claim 6, it is characterized in that: after described defective detects judgement according to described defective information, described defective information is stored in a defective data bank, and analyzed and judge and to obtain a detection level, for judging whether each defective in the described first area needs respectively to repair, and wherein said detection level comprises: scrap, repair and good.
10. the defect inspection method of a glass substrate, it is characterized in that: described defect inspection method comprises step: capture one of a glass substrate and detect striograph, described detection striograph shows a plurality of defectives on the described glass substrate, and described glass substrate is a thin-film transistor array base-plate of a liquid crystal display;
Described detection striograph is distinguished into a first area and a second area, and described first area is the circuit region that comprises transistor circuit in the described glass substrate, and described second area is the pixel electrode area in the described glass substrate;
Whether only detect the defective of judging the first area that is arranged in described detection striograph needs respectively to repair; And
Only for the first area that is arranged in described detection striograph and judge that the defective that need to repair repairs action.
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| CN104991391A (en) * | 2015-07-30 | 2015-10-21 | 武汉华星光电技术有限公司 | Repair method for display panel |
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| CN105652480A (en) * | 2015-09-18 | 2016-06-08 | 京东方科技集团股份有限公司 | Base plate detection device, base plate detection method and base plate detection module |
| CN105807478A (en) * | 2016-05-20 | 2016-07-27 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
| CN105843436A (en) * | 2015-01-29 | 2016-08-10 | 政美应用股份有限公司 | Detection method and device for touch panel |
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| CN109142380A (en) * | 2018-09-19 | 2019-01-04 | 广州视源电子科技股份有限公司 | Fault detection method, device and system of circuit board |
| CN109227352A (en) * | 2018-09-18 | 2019-01-18 | 惠科股份有限公司 | Substrate defect repairing method and system |
| CN109671080A (en) * | 2018-12-25 | 2019-04-23 | 惠科股份有限公司 | Image detection method, detection device and display device |
| WO2020077784A1 (en) * | 2018-10-18 | 2020-04-23 | 深圳市华星光电半导体显示技术有限公司 | Method and system for determining defect aggregation in image overlay |
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| CN109227352A (en) * | 2018-09-18 | 2019-01-18 | 惠科股份有限公司 | Substrate defect repairing method and system |
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| WO2020077784A1 (en) * | 2018-10-18 | 2020-04-23 | 深圳市华星光电半导体显示技术有限公司 | Method and system for determining defect aggregation in image overlay |
| CN109671080A (en) * | 2018-12-25 | 2019-04-23 | 惠科股份有限公司 | Image detection method, detection device and display device |
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