Embodiment
Advantage of the present invention, feature and reach the method for described object will be clear and definite by accompanying drawing and detailed description described later.But the present invention is not limited to the embodiment of the following stated and can be presented as various different form, following examples are used for making the present invention definitely, and provide complete technical scope to those skilled in the art in the invention.The present invention is only determined by right.In whole instructions, identical symbol is marked to identical inscape.
The term of first, second ordinal number such as grade uses for illustration of various element, inscape and/or part, but described element, inscape and/or part are not limited to described term.Described term be only used for difference element, inscape and/or part and another element, inscape and/or part.Therefore, first element of the following stated, the first inscape or Part I also can be the second element, the second inscape or Part II in technological thought of the present invention.
The term used in this manual is used to embodiment is described, does not limit the present invention.In this instructions, when being not particularly illustrated, odd number form also comprises plural form." comprising (comprises) " of using in instructions and/or " by ~ form (made of) ", the existence or additional of other inscapes more than one, step, action and/or element do not got rid of by mentioned inscape, step, action and/or element.
When not having other to define, all terms (comprising technology and scientific terminology) used in this manual can use the implication for those skilled in the art in the invention can understand jointly.And, when not defining especially, must not exaggerate and explain the meaning of a word on dictionary.
Below, present invention will be described in detail with reference to the accompanying.
Fig. 1 is the schematic diagram checking product at conveyor.Fig. 2 is the structure block diagram of the validation verification device of product examination according to one embodiment of the invention.
According to Fig. 1, product P is sent to conveyor 11, and obtain sensor (Grab sensor) 142 induction product P, product P taken by the video camera 21 being positioned at conveyor 11 top, and then, the product P captured by analysis is to detect the flaw of product P.Herein, acquisition sensor 142 is the sensors for obtaining image, and whenever sensing the product P transmitted from conveyor 11, video camera 21 carries out taking and obtaining image, then checks, stops after setting-up time.When obtaining image, various lighting device 27 is set according to the flaw of the product P that will check.If when image processing module 110 receives from acquisition sensor 142 instruction obtaining image, lighting device 27 and video camera 21 are synchronized and obtain image.
According to Fig. 2, verifying according to the validation verification device 100 of the product examination of one embodiment of the invention checks whether effectively to the bad of the product P transmitted by conveyor 11, and possesses: multiple image processing module 110, central processing module 120, validation verification module 130, sensor assembly 140 and display module 150 etc.Herein, product P is comprised substrate, wafer etc. and can confirm bad all products based on the image obtained by video camera 21.Preferably, product P can be the display screen of the portable equipments such as smart mobile phone.
Specifically, according to the validation verification device 100 of the product examination of one embodiment of the invention, according to described flame, the flame of the image taken based on each video camera 21 being arranged on conveyor 11 by image processing module 110 respectively testing product P, is judged whether described product P is bad respectively and generates indivedual check result value.By central processing module 120 add up to from multiple image processing module 110-1,110-2 ..., indivedual check result values of obtaining of 110-n (namely, multiple check result values to a product obtains), generate the final inspection end value of described product P thus, and add up to described each flame and generate overall flame, then by validation verification module 130 using overall flame as an image display at display module 150, and compare with the inspection benchmark book stored in advance and verify the validity of described final detection result value.Described image processing module 110, central processing module 120 and validation verification module 130 can respectively as independent module installation or as a module installation.This is clear and definite to one skilled in the art.Responding to by multiple sensor assembly 140 glass transmitted by conveyor 11 according to the validation verification device 100 of the product examination of one embodiment of the invention makes each video camera 21 can take product P such as glass (glass), and is shown in image by flame by display module 150.
Illustrate that according to Fig. 1 and Fig. 2 the action of the validation verification device 100 of the product examination of one embodiment of the invention is as follows.When product P is in time being arranged at the video camera 21 of conveyor 11 of each examination phase, the indivedual check result values detected are sent to central processing module 120 by image processing module 110.Product P is through finally checking conveyor, and in the end image processing module 110-n goes out judged result, and now, product P stops at the position of waiting for and judging validity (Verify).If the indivedual check result values checked from last image processing module 110-n arrive central processing module 120, then add up to the indivedual check result values to its product P, thus, central processing module 120 has final inspection end value.For example, in indivedual check result value, if even if only have one for bad, so final inspection end value becomes bad, all good, and final inspection end value becomes good.Compare central processing module 120 be positioned at upper validation verification module 130 owing to having, therefore, add up to the judged result of product P on inspection can change the final judged result of total.
That is, robotization checkout facility has checkout facility and checks the proof procedure confirming to check validity between benchmark book or operator, be can be described as checking (Verifier) module.When there is the judged result adding up to product P, validation verification module 130 automatic coupling is received central processing module 120 and is obtained result image, and shows the overall image of the product P added up on inspection, shows flaw (Defect) in overall image.If click each flaw, then picture becomes large, and compares with inspection benchmark book and judge the true and false that product P is bad.According to the result of the product P judged in validation verification module 130, final inspection end value resets as good (OK), bad (NG), reexamines (Rework) etc. by central processing module 120, and central processing module 120 utilizes the judged result value be changed to assign instruction with automatic classification product P to transfer equipment.Certainly, good (OK), bad (NG), reexamine the example that (Rework) is sort product P, according to classification object, can freely change is be clear and definite to one skilled in the art.
If authenticated to the validity checked specific products P by validation verification module 130, namely terminated checkout facility and checked confirmation process between benchmark book or operator, then be converted to automatic operational mode and self-verifying product P, thus the yield of checkout facility can be improved.And, the process checking the tuning work of parameter and the mistake of confirmation setting value can be carried out before the automatic running inspection of automatic operational mode, therefore, the reliability of checkout facility can be improved, and the validation verification device 100 of product examination instructs operator separately and the equipment that helps runs.Herein, automatic operational mode is the pattern that the final inspection end value of validation verification module 130 to inspection product P is weighed without any judgement, if the inspection of final step terminates, then central tupe 120 pairs of final inspection end values judge automatically.After last conveyor, do not receive indivedual check result value from each image processing module 110, or indivedual check result value time of reception is later than inspection setting-up time, then central processing module 120 or transfer equipment make the judgement of reexamining automatically.This is described in detail later.
Fig. 3 is the structure block diagram of the equipment of the validation verification device that the product examination being connected to Fig. 2 is shown.
According to Fig. 3, the validation verification device 100 of product examination is connected to front device 200 and transfer equipment 10 by central processing module 120 and sends or reception information etc., thus, by central processing module 120 opertaing device etc.When dropping into product P to transfer equipment 10, with front device 200 online and centre module 120 forward device 200 transmit the input signal of product P, drop into product P to transfer equipment 10 thus.In transfer equipment 10 by the validation verification device 100 of product examination product P is divided into again good, bad, reexamine and device 300 after product P being moved to after verifying validity.Such as, transfer equipment 10 is the conveyor 11 of the Fig. 1 being provided with video camera 21 and lighting device 27 or the equipment of conveyance product P, and central processing module 120 sends good (OK), bad (NG) according to classification object, reexamines category signals such as (Rework).If central processing module 120 sends described good (OK), bad (NG) to transfer equipment 10, reexamines the final judged result of (Rework), then the sorter (omitting diagram) being contained in transfer equipment 10 is classified according to judged result.Certainly, transfer equipment 10 can comprise sorting device, but also can not comprise sorting device, and arranges sorting device separately.Sorting device is adsorption production P and is classified into good (OK), bad (NG), reexamines the equipment of the classification position of (Rework) (such as, X-Y-Z mechanical arm), can according to classification object, be configured to independent conveyor, or can make according to various object.
Fig. 4 is the figure of the position of the sensor assembly of the validation verification device of the product examination that Fig. 2 is shown.Fig. 5 is the beam pattern of the sensor assembly of the validation verification device of the product examination that Fig. 2 is shown and the figure of output characteristics file (output profile).
As mentioned above, the product P becoming check object can comprise the display glass G of the portable equipment such as smart mobile phone or panel computer.The display glass G of described portable equipment can possess the hole H for installing eyeglass etc.But due to described hole H, can there is the phenomenon responding to mistake in sensor assembly 140.
According to Fig. 4, multiple sensor assemblies 140 for responding to the described glass G transmitted by conveyor 11 can comprise the sensor 144 of acquisition sensor 142 and other purposes for obtaining image so that glass G taken by each video camera 21, each sensor 142,144 in conveyor 11 avoid hole H and setting up and down glass G width 1/4 position.By changing the position of described each sensor 142,144, described each sensor 142,144 independently can detect glass G all the time with the existence of the hole H of glass G.
According to Fig. 5, adjust beam pattern (BeamPattern) by moving up and down sensor assembly 140, thus even if form porose H at glass G, sensor assembly 140 also can respond to glass G.That is, when glass G forms porose H, sensor assembly 140 is moved towards glass G side and amplifies the output of the light beam from each sensor 142,144, thus, can prevent from advance responding to mistake.As shown in the right side of Fig. 5, moved up and down by sensor assembly 140, obtain sensor 142 and can show predetermined output characteristics file all the time.
Fig. 6 is the detailed configuration block diagram of the image processing module of the validation verification device of the product examination of Fig. 2.
According to Fig. 6, image processing module 110 can comprise: image obtaining section 112, obtains image from video camera 21; Flame inspection portion 114, goes out described flame from described Image detection; Bad judging part 116, judges the whether bad of described product P based on described flame and generates indivedual check result value.As mentioned above, image processing module 110 is made up of multiple, using by based on the judged result of flame of acquisition image use as the final basic data that judges.
Fig. 7 is the detailed configuration block diagram of the central processing module of the validation verification device of the product examination of Fig. 2.Fig. 8 is the figure of the process that reexamines of the validation verification device of product examination for illustration of Fig. 2.
According to Fig. 7, central processing module 120 can comprise: aggregate information generating unit 122, add up to obtain from image processing module 110 each indivedual check result value V1, V2 ..., V3 and generate the final inspection end value of product P, and add up to each flame of obtaining from described image processing module 110 and generate overall flame; Central control 124, is carried out control based on the result value verified by validation verification module 130 and reclassifies described product P.Therefore, central processing module 120 is sort product P by the check result of total image processing module 110, then verifies in other validation verification module 130, and reclassify product P according to the result of validation verification module 130 to this checking.
Now, central processing module 120 can determine the judgement of reexamining product P.
Specifically, when from multiple image processing module 110-1,110-2 ..., in indivedual check result values of receiving of 110-n when having at least needs to reexamine, the central control 124 of central processing module 120 can carry out controlling to reexamine the bad of product P.And, the central control 124 of central processing module 120 from multiple image processing module 110-1,110-2 ..., in 110-n one do not receive indivedual check result value, or more late than prior setting-up time when receiving, can carry out controlling to reexamine the bad of product P.Such as, if when can not get testing result in the control device check processing overlong time of central processing module 120 or transfer equipment 10 or generation problem, after setting-up time, (when namely end value is Null) output reexamines end value by the time.As shown in Figure 8, after being responded to by sensor 142, the set length value of glass G or set time value opening and closing (ON/OFF) Perceived control is utilized to detect.After being responded to by sensor 142, by reexamining Output rusults value when exceeding set zero result time (that is, Null Result Time).For the ease of understanding, meaning simple declaration represented by the undeclared symbol in Fig. 8 is as follows: d=checks the distance in space; A+b=receives and responds to and the distance of stop sensor under Validation Mode; C+d+e=stopped the distance of reaction of the sensor obtaining sensor receive end value after receiving induction before; The sensing station (also can carry out output counting in the sensor of c+d+e position) of f=net result value output counter (not shown); α=reception obtains the induction of sensor and obtains image and the distance (or time) processed image, and also namely check result judges the time; β=when check result value exports late than setting-up time (during without end value) is judged to be the time (Null Result Time) reexamining (Rework).Fig. 9 is the detailed configuration block diagram of the validation verification module of the validation verification device of the product examination of Fig. 2.
According to Fig. 9, validation verification module 130 can comprise: storage part 132, stores and checks benchmark book; Access control portion 134, carries out control and makes to show overall flame at display module 150, then compares with described inspection benchmark book the validity verifying final inspection end value.For example, validation verification module 130 can be carried out datumization (DB) to the inspection benchmark book of the product that will check and comprise bad and good image, and by the image of datumization, this also can be reflected that central processing module 120 adds up to the final inspection end value of product P and automatically changes.Described validation verification module 130 can be made up of physical arrangement, can also be made up of virtual operation program.
Figure 10 is the figure that the image obtained by the validation verification device of the product examination of Fig. 2 is shown.
According to Figure 10, show the image Ig processed by the validation verification device 100 of product examination at the screen 155 of display module 150.
When selecting a flaw f` in multiple flaw f of image Ig, picture becomes large, and operator reads on limit and checks that benchmark book limit confirms flaw and judges.According to judged result, validation verification module 130 changes the net result value of central processing module 120, and sort product P again.If make checking under checking (Verifier) pattern, be then converted to automatic operational mode, now, without the need to validation verification module 130, automatically check by image processing module 110 and central processing module 120.
Figure 11 is the precedence diagram of the order of the validation verification method of the product examination illustrated according to one embodiment of the invention.
According to Figure 11, according to the validation verification method of the product examination of one embodiment of the invention, comprising: obtain the step (S110) to image, the flame of described product and the indivedual check result values of described product that check object product is taken; Add up to indivedual check result value of described acquisition and generate the final inspection end value of described product, add up to described flame and generate the step (S120) of overall flame; The step (S130) of described overall flame is shown at the main image (master image) of described product; Compare with inspection benchmark book based on shown flame and verify the step (S140) of the true and false of described final inspection end value; Reset described final inspection end value based on described the result, then reclassify the step (S150) of described product.
Herein, if in the step (S120) generating overall flame, do not receive described indivedual check result value or time of receiving more late than prior setting-up time, then can re-start the bad inspection of described product.
Product can be categorized as bad (NG), good (OK) in the step (S150) reclassifying product, reexamine (Rework).Now, bad (NG) represents that product is bad, and good (OK) represents that product is good, reexamines (Rework) expression and does not confirm good and bad.
By this, again can verify the validity of product examination, it can be described as Validation Mode.Under Validation Mode, checkout facility terminated to specific products and checked the confirmation process between benchmark book or operator, being then converted to automatic operational mode and self-verifying product continuously, thus the yield of automatic checkout equipment can be improved.And, can carry out adjusting the work checking parameter, the process of mistake confirming setting value before the self-verifying of automatic operational mode, therefore, the reliability of checkout facility can be improved, individual coaching operator and operating equipment.
Figure 12 illustrates after the validation verification method of the product examination according to one embodiment of the invention performing Figure 11, the precedence diagram of the order of the product inspection method under automatic operational mode.
If verify product, namely complete Validation Mode, then can not perform with check benchmark book to compare and step (S140) (Figure 11) of verifying when repeatedly carry out each step of Figure 11.In Figure 12, obtain check object product is taken image, the flame of described product and indivedual check result values (S210) of described product; Add up to described indivedual check result value and generate the final inspection end value of described product, add up to described flame and generate overall flame (S220); Described overall flame (S230) is shown at the main image (master image) of described product; To classify described product (S240) based on described final inspection end value.
And, owing to not carrying out the program verified the check result value of product, after therefore completing the inspection to last image, by means of only add up to result and final inspection end value automatic decision bad.
Figure 13 is the figure of the action sequence of the validation verification method of the product examination according to one embodiment of the invention that Figure 11 is shown.Figure 14 illustrates after the validation verification method of the product examination according to one embodiment of the invention performing Figure 11, the Sequence chart of the product inspection method under automatic operational mode.
According to Figure 13, when Validation Mode (1.), if conveyor 11 is driven (2.) and senses glass G, then input counting (3.) namely, carry out several to the product p (that is, glass G) of induction.First glass G detects drop edge (Edge) when first acquisition sensor 142, the next position of conveyor 11 is stopped at after setting-up time, second to the 4th glass G similarly carries out action, first glass G is after last acquisition sensor 142, conveyor stops, the position carrying out taking at the video camera 21 of each conveyor is all placed with glass G, and indivedual check result values of glass G are sent to central processing module 120 (4. ~ 8.) from image processing module 110.When indivedual check result value arrives central processing module 120, validation verification module 130 automatically connects central processing module 120 and shows overall image, and the flaw detected in show image (Defect) (9.).Operator reads on limit and checks that benchmark book limit confirms flaw and judges result (10.).Judged result out after, validation verification module 130 change central processing module 120 final inspection end value (
).Central processing module 120 sends to transfer equipment 10 and is verified and the final inspection end value that changes, then assign classification (good, bad, reexamine) instruction (
).
Then, the glass G input by continuous review also verifies the validity checked, is converted to automatic operational mode and automatically checks after validation verification terminates.Figure 14 illustrates the self-verifying under automatic operational mode.
According to Figure 14, be not Validation Mode but automatically operational mode time (1.), if conveyor 11 is driven (2.) and senses glass G, then input counting (3.).First glass G is after first acquisition sensor 142, then, second to the 4th glass G carries out action equally, first glass G is after last acquisition sensor 142, the position carrying out taking at the video camera 21 of each conveyor is all placed with glass G, processes indivedual check result value of glass G and be sent to central processing module 120 (4. ~ 8.) at image processing module 110.Namely central processing module 120 receives indivedual check result value from image processing module 110, carries out inspection continuously judge, so conveyor 11 does not stop without the need for the judgement of validity authentication module 130.If not arrive end value from image processing module 110 to central processing module 120 in setting-up time, be then sent to and reexamine.If indivedual check result values of image processing module 110 arrive central processing module 120, then central processing module 120 adds up to each indivedual check result value and calculates final inspection end value (9.), central processing module 120 sends described final inspection end value to transfer equipment 10, then assigns classification (good, bad, reexamine) instruction (10.).
In addition, according to validation verification device and its method of the product examination of one embodiment of the invention, software or hardware can be utilized to be configured to a module, above-mentioned embodiments of the invention can be realized by the program that can perform at computer, and embody by the general-purpose computer utilizing readable in computer recording medium to make described program run.The recording medium of described readable in computer is with optical mediums such as magnetic medium, CD, DVD such as ROM, floppy disk, hard disks and utilizes the forms such as the carrier wave of the transmission of internet etc. to embody.Readable in computer recording medium is scattered in the computer system connected by internet, stores the coding of readable in computer with a scattered manner and performs.
For the ease of understanding, be as follows to meaning simple declaration represented by the undeclared symbol in Figure 13, Figure 14: till from n to F1, according to obtaining each position of sensor, there is the end value of first in first out (first-in first-out) according to the movement of conveyer; Fn is the acquisition signal of input the n-th product (such as, glass); Gn is the testing result value of the n-th product (such as, glass).
Above, though with reference to the accompanying drawings of embodiments of the invention, however, it should be understood that those skilled in the art in the invention may be embodied as other concrete forms within the scope of technological thought of the present invention or essential feature.Therefore, the above embodiment is all illustrate, does not limit the present invention.