CN103060777B - Coating apparatus for laser excitating chemical vapor deposition (CVD) - Google Patents
Coating apparatus for laser excitating chemical vapor deposition (CVD) Download PDFInfo
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- CN103060777B CN103060777B CN201210571822.6A CN201210571822A CN103060777B CN 103060777 B CN103060777 B CN 103060777B CN 201210571822 A CN201210571822 A CN 201210571822A CN 103060777 B CN103060777 B CN 103060777B
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- cvd
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- 238000000576 coating method Methods 0.000 title claims abstract description 15
- 239000011248 coating agent Substances 0.000 title claims abstract description 12
- 238000005229 chemical vapour deposition Methods 0.000 title abstract description 52
- 239000000463 material Substances 0.000 claims abstract description 51
- 230000005284 excitation Effects 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 16
- 239000013307 optical fiber Substances 0.000 claims description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 238000012544 monitoring process Methods 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 238000012806 monitoring device Methods 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 abstract description 2
- 239000000835 fiber Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000006731 degradation reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000012809 cooling fluid Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The invention provides a coating apparatus for a laser excitating chemical vapor deposition (CVD), and belongs to the technical field of the chemical vapor deposition (CVD). The coating apparatus for a laser excitating CVD includes a shell body. The shell body is provided with a sealing CVD cavity, an air-jet device suitable for jetting working air and a laser-focusing device suitable for focusing the laser source on the front end of a nozzle of the air-jet device are arranged inside the CVD cavity. The materials to be coated are arranged on the front end of the nozzle of the air-jet device and opposite to that. The CVD cavity is provided inside with a mobile device which is used for driving air-jet device to move along with the surface of the materials to be coated in a parallel mode. The air-jet device includes an air-jet bracket with the nozzle; the laser focusing device includes a focusing head of the focusing laser source and a fiber optic connection tube suitable for connecting the fiber optic. The focusing head is connected with the fiber optic connection tube. The air-jet bracket is provided with an air inlet used for introducing the working air and an installing hole for the focusing head, wherein the installing hole for the focusing head is used for installing the focusing head. The coating apparatus for the laser excitating CVD has the advantages of being high in coating efficiency, not easy to damage the materials to be coated, uniform in the coating thickness and smooth in the coating surface.
Description
Technical field
The invention belongs to chemical vapor deposition (CVD) technical field, particularly relate to a kind of laser excitation CVD filming equipment.
Background technology
Chemical vapour deposition (English: Chemical Vapor Deposition, to be called for short CVD) is a kind of chemical technology being used for producing the solid-state material that purity is high, performance is good.Semiconductor industry uses this technology to carry out grow films.Typical CVD processing procedure is under wafer (substrate) is exposed to one or more different precursors, produces the film for deposition at substrate surface generation chemical reaction and/or decomposition.Usually also can produce different byproducts concomitantly in reaction process, but mostly can be pulled away along with air-flow, and can not stay in the reactor chamber.
Chemical vapour deposition technique extensively uses in plated film field, in prior art, the type of heating of working gas is all generally the chemical reaction that use Infrared Heating gas or the mode heating material to be coated promote gas, use the mode efficiency of Infrared Heating gas low, plate out come thickness also uneven, coated surface is coarse, and the easy damaged material of the mode heating material to be coated.
Summary of the invention
The object of the invention is to the defect overcoming prior art, provide the laser excitation CVD filming equipment of high, the not fragile material to be coated of a kind of plated film efficiency, the uniform film thickness that this equipment plates, coated surface are smooth.
The present invention realizes like this, a kind of laser excitation CVD filming equipment, comprise housing, the Packed CVD cavity of this housing tool, be provided with the air jet system for spraying working gas and the laser focusing device for laser source being focused on air jet system spray nozzle front end in described CVD cavity, material to be coated is positioned at the spray nozzle front end of described air jet system also in contrast.
Further, the running gear for driving described air jet system to move in parallel along described material surface to be coated is installed in described CVD cavity.
Further, described air jet system comprises the jet frame with described nozzle, described laser focusing device comprises the focus head in laser focusing source and the optical fiber connecting pipe for optical fiber of plugging into, described focus head is connected with described optical fiber connecting pipe, and described jet erection has introduces the inlet mouth of working gas and the focus head open holes for installing described focus head.
Particularly, described nozzle is finedraw shape, and described focus head open holes is located at described nozzle both sides equably side by side.
Preferably, described jet erection has the pickup groove for fixing described optical fiber connecting pipe.
Especially, the first motor that described running gear comprises the threaded screw mandrel of tool and drives this screw mandrel to rotate, described jet frame offers the screw with the threaded adapter of described screw mandrel, and described screw mandrel is arranged in described screw.
Further, described housing offers the opening for feed entering described CVD cavity for described material to be coated, described housing also offers the discharge port leaving described CVD cavity for described material to be coated, and described opening for feed and described discharge port are oppositely arranged and are all provided with tightness system.
Further, described tightness system comprises elasticity and presses on the second tin roller that the first cylinder of described material to be coated one side and elasticity press on described material another side to be coated.
Particularly, described tightness system also comprises the second motor driving described first cylinder or described second tin roller to rotate.
Preferably, be provided with in described CVD cavity water-cooling heat radiating device, for detect coating film thickness on material to be coated film thickness monitoring device, for monitoring the video monitoring apparatus of described CVD inside cavity environment, heating unit and temperature measuring equipment.
During plated film of the present invention, laser source is focused on air jet system spray nozzle front end and forms focal zone by laser focusing device, the working gas of nozzle ejection is at focal zone by laser excitation thermal degradation, and the working gas be decomposed is due to inertia strike and adhere on material surface to be coated and form plated film.Because the present invention adopts the mode of laser focusing to add thermal excitation to working gas, high, the not fragile material to be coated of its plated film efficiency, the uniform film thickness of plating, coated surface are smooth.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view of laser excitation CVD filming equipment in the embodiment of the present invention;
Fig. 2 is the schematic internal view of laser excitation CVD filming equipment in the embodiment of the present invention;
Fig. 3 is the sectional view of A-A in Fig. 1, i.e. laser excitation CVD filming equipment rear cross sectional view in the embodiment of the present invention;
Fig. 4 is the structural representation of tightness system in the embodiment of the present invention;
Fig. 5 is the air jet system schematic perspective view being provided with laser focusing device in the embodiment of the present invention;
Fig. 6 is the schematic perspective view of air jet system in the embodiment of the present invention;
Fig. 7 is the schematic perspective view at another visual angle of air jet system in the embodiment of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
See Fig. 1 and Fig. 2, embodiments provide a kind of laser excitation CVD filming equipment, comprise housing 1, the Packed CVD cavity 11 of this housing 1 tool, be provided with in described CVD cavity 11 air jet system 2 for spraying working gas and for laser source is focused on air jet system nozzle 211 front end laser focusing device 3(see Fig. 5), material 4 to be coated be positioned at described air jet system 2 nozzle 211 front end and in contrast.Need the excessive gas (housing 1 is provided with the mixed gas outlet 15 for discharging excessive gas) of first discharging in CVD cavity 11 before carrying out plated film, and then pass into shielding gas.During plated film, laser source is focused on air jet system nozzle 211 front end and forms focal zone by laser focusing device 3, nozzle 211 sprays working gas, working gas at focal zone by laser excitation thermal degradation, because the gas of ejection has inertia, the working gas impact be then decomposed adheres on material surface to be coated and forms plated film.As a kind of preferred implementation of the present invention, laser source focuses on the position apart from material 4 surface 0.3 ~ 1mm to be coated, air jet system nozzle 211 is apart from the position of the surperficial 3mm of material 4 to be coated, like this, focus on local all closer from the distance of material surface to be coated and nozzle 211, can working gas be made full use of.Because the present invention adopts the mode of laser focusing to excite heating to working gas, high, the not fragile material to be coated of its plated film efficiency, the uniform film thickness of plating, coated surface are smooth.
See Fig. 2, the running gear 5 for driving described air jet system 2 to move in parallel along described material 4 surface to be coated is installed in described CVD cavity 11.For the material to be coated that width is larger, working gas can be sprayed on the different positions on material 4 surface to be coated by the air jet system 2 be installed on running gear 5.
See Fig. 5-Fig. 7, described air jet system 2 comprises the jet frame 21 with described nozzle 211, described laser focusing device 3 comprises the focus head 31 in laser focusing source and the optical fiber connecting pipe 32 for optical fiber of plugging into, described focus head 31 is connected with described optical fiber connecting pipe 32, and described jet frame 21 is provided with introduces the inlet mouth 212 of working gas and the focus head open holes 213 for installing described focus head 31.Working gas passes into inlet mouth 212(see Fig. 2 by pneumatic tube 22).Poly-air jet system 2 is assemblied in one with laser focusing device 3, both geo-stationary, can ensure that focal zone is stable and be positioned at nozzle 211 front end.Laser source is passed to focus head 31 by optical fiber, and focus head 31 pairs of laser sources focus on.Focus head open holes 213 can arrange its position and angle according to real needs.
See Fig. 5, described nozzle 211 is finedraw shape, described focus head open holes 213 is located at described nozzle 211 both sides equably side by side, like this, focal zone is the fillet focal zone being positioned at nozzle 211 front end, and working gas is sprayed by the nozzle 211 of finedraw shape and excites thermal degradation in fillet focal zone, because nozzle 211 is bar shaped finedraw shape, if material to be coated moves in contrast, it is large that it sweeps away width, can greatly improve plated film efficiency.
See Fig. 6, described jet frame 21 is provided with the pickup groove 214 for fixing described optical fiber connecting pipe 32, and pickup groove 214 can firm optical fiber connecting pipe further, prevents optical fiber connecting pipe from loosening and affecting the accuracy of focus head 31 focal position.
See Fig. 2, the first motor 52 that described running gear 5 comprises the threaded screw mandrel 51 of tool and drives this screw mandrel 51 to rotate, described jet frame 21 offers with the screw 215(of the threaded adapter of described screw mandrel 51 see Fig. 5), described screw mandrel 51 is arranged in described screw 215.Can order about jet frame 21 moving axially along screw mandrel 51 when screw mandrel 51 rotates, screw mandrel 51 not only can make jet frame 21 quick travel, and, prevents in coating process because air jet system 2 does not steadily cause plated film uneven in moving process steadily.
See Fig. 3, described housing 1 offers the opening for feed 12 entering described CVD cavity 11 for described material 4 to be coated, described housing 1 also offers the discharge port 13 leaving described CVD cavity 11 for described material 4 to be coated, and described opening for feed 12 is oppositely arranged with described discharge port 13 and is all provided with tightness system 6.Longer material to be coated 4 can be entered by opening for feed 12, above air jet system 2, carry out plated film, and along with the advance of material 4 to be coated, the complete one end of plated film will be exported by discharge port 13.Being filled with shielding gas in CVD cavity 11, in order to ensure its stopping property, needing, at opening for feed 12 and discharge port 13 mounting sealing device 6, meanwhile, can also prevent introduced contaminants from entering in CVD cavity 11.
See Fig. 4, described tightness system 6 comprises elasticity and presses on the first cylinder 61 of described material to be coated 4 one side and elasticity presses on the second tin roller 62 of described material to be coated 4 another side.Because the first cylinder 61 and second tin roller 62 elasticity are pressed on material 4 to be coated, when material 4 to be coated leaves tightness system 6, two cylinders press laminating mutually, prevent from existing between two cylinders gap and breakseal effect.
Further, described tightness system 6 also comprises the second motor 63 driving described first cylinder 61 or described second tin roller 62 to rotate, in the present embodiment, the second motor 63 is connected with second tin roller 62, second motor 63 can rotate by head roll, at the uniform velocity move under the driving that material 4 to be coated can rotate at cylinder, the translational speed of the material 4 to be coated of the speed adjustment by controlling the second motor 63.
Particularly, water-cooling heat radiating device 7(is installed see Fig. 3 in described CVD cavity 11), for detect coating film thickness on material 4 to be coated film thickness monitoring device, for monitoring the video monitoring apparatus of described CVD inside cavity environment, heating unit and temperature measuring equipment.Due to a large amount of heat can be produced in coating process, can the heat that produces of Quick diffusing coating process if equipment is installed water-cooling heat radiating device 7, prevent temperature too high and burn out inner components.See Fig. 1, housing 1 is provided with and injects the water inlet 71 of cooling fluid and the water outlet 72 of discharge cooling fluid to water-cooling heat radiating device 7, housing 1 is also provided with the camera lens open holes 14 for installing video monitoring apparatus.Measured coating film thickness can be fed back to principal controller by film thickness monitoring device, and principal controller makes respective reaction according to measured result.Heating unit is used for heating the internal medium of CVD cavity 11, and heating unit can select infrared heating device, and certainly, the present invention also carries out the heating of CVD cavity 11 by other modes.
Device mentioned above is all connected with principal controller, and principal controller can be collected each device institute feedack and control the mode of operation of each device.
The laser excitation CVD filming equipment working process that the embodiment of the present invention provides is described below:
First, discharge excessive gas in CVD cavity 11, then pass into desired gas and shielding gas;
Opening heating unit is heated to temperature required by the internal medium of CVD cavity 11, and temperature measuring equipment records after CVD cavity 11 internal temperature reaches requirement, continues to pass into desired gas and shielding gas;
Complete step post heating device CVD cavity 11 to be controlled, in the temperature range needed for normal work, open relative unit, material 4 to be coated is sent into CVD cavity 11 by feeding mouth 12;
When material 4 to be coated is above air jet system 2, working gas excites thermal degradation through focal zone after being sprayed by nozzle 211, working gas after decomposition is due on the surface of inertia strike adheres to material 4 to be coated, film thickness monitoring device detects coating film thickness, by the result feedback that detects to principal controller, the efflux velocity of principal controller according to the gauge control air jet system 2 of required plated film and the power of translational speed and laser focusing device 3, by film thickness monitoring in required thickness range;
The material of plated film is exported the plated film that can complete a block of material by discharge port 13;
After by all material, all plated film completes, the gas in CVD cavity need being extracted out, through process, the atmosphere storage that can be recycled being got up in order to using again, discharge again in air after off gas treatment is carried out for the gas that not can be recycled, to prevent pollutant atmosphere; And unified process is also needed for generated solid, in order to avoid pollute physical environment.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement or improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a laser excitation CVD filming equipment, comprise housing, the Packed CVD cavity of this housing tool, it is characterized in that: be provided with the air jet system for spraying working gas and the laser focusing device for laser source being focused on air jet system spray nozzle front end in described CVD cavity, material to be coated is positioned at the spray nozzle front end of described air jet system also in contrast; Running gear for driving described air jet system to move in parallel along described material surface to be coated is installed in described CVD cavity.
2. laser excitation CVD filming equipment as claimed in claim 1, it is characterized in that: described air jet system comprises the jet frame with described nozzle, described laser focusing device comprises the focus head in laser focusing source and the optical fiber connecting pipe for optical fiber of plugging into, described focus head is connected with described optical fiber connecting pipe, and described jet erection has introduces the inlet mouth of working gas and the focus head open holes for installing described focus head.
3. laser excitation CVD filming equipment as claimed in claim 2, it is characterized in that: described nozzle is finedraw shape, described focus head open holes is located at described nozzle both sides equably side by side.
4. laser excitation CVD filming equipment as claimed in claim 3, is characterized in that: described jet erection has the pickup groove for fixing described optical fiber connecting pipe.
5. laser excitation CVD filming equipment as claimed in claim 2, it is characterized in that: the first motor that described running gear comprises the threaded screw mandrel of tool and drives this screw mandrel to rotate, described jet frame offers the screw with the threaded adapter of described screw mandrel, and described screw mandrel is arranged in described screw.
6. laser excitation CVD filming equipment as claimed in claim 1, it is characterized in that: described housing offers the opening for feed entering described CVD cavity for described material to be coated, described housing also offers the discharge port leaving described CVD cavity for described material to be coated, and described opening for feed and described discharge port are oppositely arranged and are all provided with tightness system.
7. laser excitation CVD filming equipment as claimed in claim 6, is characterized in that: described tightness system comprises elasticity and presses on the second tin roller that the first cylinder of described material one side to be coated and elasticity press on described material another side to be coated.
8. laser excitation CVD filming equipment as claimed in claim 7, is characterized in that: described tightness system also comprises the second motor driving described first cylinder or described second tin roller to rotate.
9. the laser excitation CVD filming equipment as described in any one of claim 1-8, is characterized in that: be provided with in described CVD cavity water-cooling heat radiating device, for detect coating film thickness on material to be coated film thickness monitoring device, for monitoring the video monitoring apparatus of described CVD inside cavity environment, heating unit and temperature measuring equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210571822.6A CN103060777B (en) | 2012-12-25 | 2012-12-25 | Coating apparatus for laser excitating chemical vapor deposition (CVD) |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210571822.6A CN103060777B (en) | 2012-12-25 | 2012-12-25 | Coating apparatus for laser excitating chemical vapor deposition (CVD) |
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| CN103060777A CN103060777A (en) | 2013-04-24 |
| CN103060777B true CN103060777B (en) | 2014-12-31 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN203128657U (en) * | 2012-12-25 | 2013-08-14 | 王奉瑾 | Laser exciting CVD (chemical vapor deposition) coating equipment |
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| US5620754A (en) * | 1994-01-21 | 1997-04-15 | Qqc, Inc. | Method of treating and coating substrates |
| US20030070620A1 (en) * | 2001-10-15 | 2003-04-17 | Cooperberg David J. | Tunable multi-zone gas injection system |
| KR20030095313A (en) * | 2002-06-07 | 2003-12-18 | 후지 샤신 필름 가부시기가이샤 | Laser annealer and laser thin-film forming apparatus |
| JP4453021B2 (en) * | 2005-04-01 | 2010-04-21 | セイコーエプソン株式会社 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
| CN101016618A (en) * | 2006-02-10 | 2007-08-15 | 株式会社半导体能源研究所 | Film forming apparatus, film forming method, and manufacturing method of light emitting element |
| CN201437551U (en) * | 2009-06-08 | 2010-04-14 | 广东中环真空设备有限公司 | Continuous winding coating equipment |
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| CN203128657U (en) * | 2012-12-25 | 2013-08-14 | 王奉瑾 | Laser exciting CVD (chemical vapor deposition) coating equipment |
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Effective date of registration: 20160128 Address after: Nine road 528400 Guangdong province Zhongshan Torch Development Zone No. 6 Building 3 floor five A zone Patentee after: Zhongshan Power Technology Co., Ltd. Address before: 4 building, No. 2 Xingye Road, Torch Development Zone, Guangdong, Zhongshan, 528400 Patentee before: Wang Fengjin |
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Granted publication date: 20141231 Termination date: 20171225 |