CN203128658U - Laser CVD (chemical vapor deposition) coating equipment - Google Patents
Laser CVD (chemical vapor deposition) coating equipment Download PDFInfo
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- CN203128658U CN203128658U CN 201220726070 CN201220726070U CN203128658U CN 203128658 U CN203128658 U CN 203128658U CN 201220726070 CN201220726070 CN 201220726070 CN 201220726070 U CN201220726070 U CN 201220726070U CN 203128658 U CN203128658 U CN 203128658U
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Abstract
The utility model provides laser CVD (chemical vapor deposition) coating equipment. The coating equipment comprises an upper shell and a lower shell, wherein the upper shell covers the lower shell to form a sealed CVD cavity; a planar location device for driving a material to be coated to move on a plane and determining the location is installed in the upper shell; the material to be coated is installed on the planar location device; gas jet devices for jetting working gases and laser focusing devices for focusing laser sources at the front ends of nozzles of the gas jet devices are installed in the lower shell; the material to be coated is arranged at the front ends of the nozzles of the gas jet devices and is opposite to the nozzles; the planar location device comprises first chutes and a second chute vertical to the first chutes; first sliders are arranged in the first chutes; a second slider is arranged in the second chute; the second chute is connected with the first sliders; an installation plate is arranged on the second slider; and the material to be coated is attached to the installation plate. The coating equipment has high coating efficiency and does not damage the material to be coated easily, and the coated film is uniform in thickness and has a smooth surface.
Description
Technical field
The utility model belongs to the chemical vapor deposition (CVD) technical field, relates in particular to a kind of laser CVD filming equipment.
Background technology
Chemical vapour deposition (English: Chemical Vapor Deposition, be called for short CVD) is a kind of chemical technology that is used for producing purity height, solid-state material that performance is good.Semiconductor industry is used this technology film of growing up.Typical CVD processing procedure is that wafer (substrate) is exposed under one or more different precursors, produces the film that desire deposits at substrate surface generation chemical reaction or decomposition.Usually also can produce different byproducts concomitantly in the reaction process, but understand along with air-flow is pulled away mostly, and can not stay in the reaction chamber.
Chemical vapour deposition technique extensively uses in the plated film field, in the prior art, the mode that the type of heating of working gas generally all is to use Infrared Heating gas or heats material to be coated promotes the chemical reaction of gas, use the mode efficient of Infrared Heating gas low, to plate out the thickness that comes also inhomogeneous, coated surface is coarse, and the mode that heats material to be coated burns out material easily.
The utility model content
The purpose of this utility model is to overcome the defective of prior art, and a kind of plated film efficient height, the laser CVD filming equipment of fragile material to be coated not are provided, and uniform film thickness, coated surface that this equipment plates are smooth.
The utility model is to realize like this, a kind of laser CVD filming equipment, comprise upper housing and lower housing, described upper housing is covered on the described lower housing to form the CVD cavity of sealing, be equipped with in the described upper housing for driving material to be coated moved and determined the position on the plane two-dimensional positioning system, described material to be coated is installed on the described two-dimensional positioning system; Be equipped with in the described lower housing for the air jet system of ejection working gas with for the laser focusing device that laser source is focused on this air jet system spray nozzle front end; The spray nozzle front end that described material to be coated is positioned at described air jet system is also relative with it.
Further, described air jet system comprises jet with described nozzle, described laser focusing device comprises for the focus head in laser focusing source and the optical fiber of the optical fiber that is used for plugging into is plugged into pipe, described focus head and the described optical fiber pipe coupling of plugging into, described jet also is provided with the inlet mouth of introducing working gas and the focus head open holes that is used for installing described focus head.
Further, described jet setting up is useful on the plug into pickup groove of pipe of fixing described optical fiber.
Particularly, described nozzle is circular hole, and described focus head open holes is uniformly distributed in described nozzle ring week.
Further, described two-dimensional positioning system comprise first chute that is installed on described upper enclosure inner wall and with vertically disposed second chute of this first chute, be provided with first slide block in described first chute, be provided with second slide block in described second chute, described second chute is connected with described first slide block, described second slide block is provided with mounting plate, and described material to be coated is attached on the described mounting plate.
Further, be provided with in described first chute for driving first screw mandrel that described first slide block slides, be provided with in described second chute for driving second screw mandrel that described second slide block slides, described first slide block offers first screw suitable with the screw thread of described first screw mandrel, described second slide block offers second screw suitable with the screw thread of described second screw mandrel, described first screw mandrel is arranged in described first screw, and described second screw mandrel is arranged in described second screw; Described two-dimensional positioning system also comprises for first motor that drives described first screw mandrel rotation and is used for driving second motor that described second screw mandrel rotates.
Preferably, on the described mounting plate water-cooling heat radiating device is installed.
Particularly, described jet is fixedly installed in described lower housing bottom, and described lower housing bottom offers the air inlet through hole corresponding with described jet inlet mouth and holds the described optical fiber through hole of plugging into that pipe passes of plugging into.
Further, be folded with sealing-ring between described upper housing and the described lower housing.
Particularly, be equipped with in the described CVD cavity for the video monitoring apparatus of observing described CVD inside cavity working condition, for detection of film thickness monitoring device, heating unit and the temperature measuring equipment of coating film thickness on the material to be coated; Described video monitoring apparatus comprises video lens, and described lower housing offers for the camera lens open holes that described video lens is installed.
During the utility model plated film, laser focusing device focuses on the air jet system spray nozzle front end with laser source and forms focal zone, the working gas of nozzle ejection is decomposed by LASER HEATING at focal zone, and the working gas that is decomposed is because inertial impaction and adhere on the material surface to be coated and form plated film.Because the utility model adopts the mode of laser focusing that working gas is added thermal excitation, its plated film efficient height, not fragile material to be coated, the uniform film thickness of plating, coated surface are smooth.Moreover material to be coated moves by two-dimensional positioning system and locatees, and air jet system and laser focusing device maintain static, and like this, can the inhomogeneous phenomenon of plated film not occur because air jet system and laser focusing device move the vibration that brings during plated film.
Description of drawings
Fig. 1 is the wiring layout of laser CVD filming equipment among the utility model embodiment;
Fig. 2 is the exploded view of laser CVD filming equipment among the utility model embodiment;
Fig. 3 watches the synoptic diagram of Fig. 1 for another visual angle;
Fig. 4 watches the synoptic diagram of Fig. 2 for another visual angle;
Fig. 5 is the structural representation of upper housing and two-dimensional positioning system among the utility model embodiment;
Fig. 5 a is the partial enlarged drawing of I among Fig. 5;
Fig. 6 is the structural representation of lower housing among the utility model embodiment;
Fig. 6 a is the partial enlarged drawing of II among Fig. 6;
Fig. 7 sheds front view behind the lower housing for laser CVD filming equipment among the utility model embodiment;
Fig. 8 is installed on synoptic diagram on the air jet system for laser focusing device among the utility model embodiment;
Fig. 9 is the structural representation of air jet system among the utility model embodiment;
Figure 10 watches the synoptic diagram of Fig. 9 for another visual angle.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
Referring to Fig. 1-Fig. 4, the utility model embodiment provides a kind of laser CVD filming equipment, comprise upper housing 1 and lower housing 2, described upper housing 1 is covered on the described lower housing 2 to form the CVD cavity 21 of sealing, be equipped with in the described upper housing 1 for driving material 3 to be coated moved and determined the position on the plane two-dimensional positioning system 4, described material 3 to be coated is installed on the described two-dimensional positioning system 4; Be equipped with in the described lower housing 2 for the air jet system 5 of ejection working gas with for laser source is focused on the laser focusing device 6(of these air jet system nozzle 511 front ends referring to Fig. 8); Described material to be coated 3 is positioned at nozzle 511 front ends of described air jet system and relatively (referring to Fig. 7) with it.Carry out needing before the plated film to discharge earlier the unnecessary gas in the CVD cavity 21, feed shielding gas then.During plated film, laser focusing device 6 focuses on air jet system nozzle 511 front ends with laser source and forms focal zone, nozzle 511 ejection working gass, working gas at focal zone by the laser excitation thermal degradation, because the gas of ejection has inertia, the working gas bump that is decomposed then adheres on the material surface to be coated and forms plated film.As a kind of preferred implementation of the present utility model, laser source focuses on the position about distance material to be coated 3 surfaces, 0.3～1mm, position about air jet system nozzle 511 distances material 3 surperficial 3mm to be coated, like this, focal zone is all closer from the distance of material to be coated 3 surfaces and nozzle 511, can take full advantage of working gas.Because the utility model adopts the mode of laser focusing that working gas is excited heating, its plated film efficient height, not fragile material to be coated, the uniform film thickness of plating, coated surface are smooth.The utility model moves material 3 to be coated transverse plane before nozzle 511 by two-dimensional positioning system 4, air jet system 5 and laser focusing device 6 can be fixedly installed in the lower housing 2 and not need mobile, like this, can the inhomogeneous phenomenon of plated film not appear because air jet system 5 and laser focusing device 6 move the vibration that brings during plated film.Be appreciated that in the utility model practical application and can many group air jet systems 5 and laser focusing device 6 be installed according to concrete needs.
Referring to Fig. 8-Figure 10, described air jet system 5 comprises jet 51 with described nozzle 511, described laser focusing device 6 comprises for the focus head 61 in laser focusing source and the optical fiber of the optical fiber that is used for plugging into is plugged into pipe 62, described focus head 61 and the described optical fiber pipe 62 of plugging into is connected, described jet 51 also be provided with introduce working gas inlet mouth 512(referring to Figure 10) and be used for the focus head open holes 513 of the described focus head 61 of installation.Working gas feeds inlet mouth 512.Poly-air jet system 5 is assemblied in one with laser focusing device 6, and both are static relatively, can guarantee stable nozzle 511 front ends that are positioned at of focal zone.Laser source is passed to focus head 61 by optical fiber, and 61 pairs of laser sources of focus head focus on.Focus head open holes 513 can arrange its position and angle according to real needs.
Preferably, described jet 51 is provided with for the plug into pickup groove 514 of pipe 62 of fixing described optical fiber.Can be the further firm optical fiber of pickup groove 514 pipe 62 of plugging into prevents that plug into pipe 62 of optical fiber is loosening and influence the accuracy of focus head 61 focal positions.
Referring to Fig. 8, described nozzle 511 is circular hole, and described focus head open holes 513 is uniformly distributed in described 511 ring weeks of nozzle.Like this, focal zone be positioned at nozzle 511 front ends a bit, working gas excites thermal degradation by nozzle 511 ejections of circular hole and in focus point, because all laser focusings are on a bit, this focus point power is very high, rapid heating was decomposed after working gas entered focus point, can improve plated film efficient greatly.
Referring to Fig. 5, described two-dimensional positioning system 4 comprise first chute 41 that is installed on described upper housing 1 inwall and with these first chute, 41 vertically disposed second chutes 42, be provided with first slide block 411 in described first chute 41, be provided with second slide block 421 in described second chute 42, described second chute 42 is connected with described first slide block 411, described second slide block 421 is provided with mounting plate 43(referring to Fig. 2), described material 3 to be coated is attached on the described mounting plate 43.First slide block 411 can drive second chute 42 and move around along first chute, 41 length directions, and second slide block 421 can drive mounting plate 43 and move around along second chute, 42 length directions, material 3 to be coated is moved on the plane and locatees.Upper housing 1 inwall is equipped with two first chute, 41, the second chutes 42 that be arranged in parallel and is connected with two first slide blocks 411 among the utility model embodiment, and therefore, in moving process, second chute 42 is more steady, guarantee coating film thickness evenly.
Referring to Fig. 5, be provided with in described first chute 41 for driving first screw mandrel 412 that described first slide block 411 slides, be provided with in described second chute 42 for driving second screw mandrel 422 that described second slide block 421 slides, described first slide block 411 offers first screw suitable with the screw thread of described first screw mandrel 412, described second slide block 421 offers second screw suitable with the screw thread of described second screw mandrel 422, described first screw mandrel 412 is arranged in described first screw, and described second screw mandrel 422 is arranged in described second screw; Described two-dimensional positioning system 4 also comprises for first motor 43 that drives 412 rotations of described first screw mandrel and is used for driving second motor 44 that described second screw mandrel 422 rotates.Screw mandrel can order about slide block along the moving axially of screw mandrel when rotating, screw mandrel not only can be so that the slide block quick travel, and steadily mobile, prevents in the coating process owing to material 3 to be coated does not steadily cause plated film inhomogeneous.
Referring to Fig. 4, on the described mounting plate 43 water-cooling heat radiating device 431 is installed.Water-cooling heat radiating device 431 can in time be taken away the heat on the material 3 to be coated in the coating process, prevents from effectively that temperature is too high to burn out material 3 to be coated.
Referring to Fig. 6, described jet 51 is fixedly installed in described lower housing 2 bottoms, and described lower housing 2 bottoms offer the air inlet through hole 22 corresponding with described jet inlet mouth 512 and hold described optical fiber pipe 62 through holes 23 of plugging into that pass of plugging into.The bottom sealing of jet 51 bottom and lower housing 2 is fitted, and optical fiber is at the device external incoming fiber optic pipe 62 of plugging into, and it is convenient to change.
Referring to Fig. 5 and Fig. 5 a, be folded with sealing-ring between described upper housing 1 and the described lower housing 2.Described upper housing 1 edge is provided with for the last sealing groove 11 of placing sealing-ring, referring to Fig. 6 and Fig. 6 a, described lower housing 2 edges are provided with for the lower seal groove cavity 24 of placing described sealing-ring, and described sealing groove 11 and the described lower seal groove cavity 24 gone up is relative and be folded with described sealing-ring between the two.Establish the seal request that sealing-ring can guarantee CVD cavity 21 by the sealing groove folder, guarantee that working gas does not leak, foreign matter does not enter in the cavity.As a kind of preferred embodiment of the present utility model, upper and lower casing all is provided with the two seals groove, and the two seals groove all is folded with sealing-ring, and its sealing effectiveness is splendid.
Particularly, be equipped with in the described CVD cavity 21 for the video monitoring apparatus of observing described CVD cavity 21 internal work situations, for detection of film thickness monitoring device, heating unit and the temperature measuring equipment of coating film thickness on the material 3 to be coated; Described video monitoring apparatus comprises video lens, and described lower housing 2 offers for the camera lens open holes 25(that described video lens is installed referring to Fig. 6).The film thickness monitoring device can feed back to principal controller with measured coating film thickness, and principal controller is made respective reaction according to measured result.Heating unit is used for the internal medium of CVD cavity 21 is heated, and heating unit can be selected infrared heating device for use, and certainly, the utility model also can carry out the heating of CVD cavity 21 by other means.
Device mentioned above all is connected with principal controller, and principal controller can be collected the mode of operation of respectively installing institute's feedack and each device of control.
The laser CVD filming equipment working process that the utility model embodiment provides is described below:
At first, material to be coated 3 attached be installed on the mounting plate 43, its one side that needs plated film outwardly, upper housing 1 is covered on the lower housing 2 then;
Discharge unnecessary gas in the CVD cavity 21, feed desired gas and shielding gas again;
Open heating unit and the internal medium of CVD cavity 21 is heated to temperature required, after temperature measuring equipment records CVD cavity 21 internal temperatures and reaches requirement, continue to feed desired gas and shielding gas;
Finishing the above-mentioned steps post heating device maintains CVD cavity 21 in the required temperature range of works better, open relative unit, material 3 to be coated is positioned at air jet system 5 tops and it needs the one side of plated film relative with nozzle 511, working gas excites thermal degradation through focal zone after being sprayed by nozzle 511, working gas after the decomposition adheres on the surface of material 3 to be coated owing to inertial impaction, the film thickness monitoring device detects coating film thickness, detected result is fed back to principal controller, principal controller is according to efflux velocity and the power of laser focusing device 6 and the speed that two-dimensional positioning system 4 moves material 3 to be coated of the gauge control air jet system 5 of required plated film, with film thickness monitoring in required thickness range;
After plated film finishes, need extract the gas in the CVD cavity 21 out, through handling, the atmosphere storage that can be recycled be got up to prepare against usefulness again, carry out discharging again in the atmosphere after the off gas treatment for the gas that not can be recycled, to prevent pollutant atmosphere; And also need unified the processing for the solid that generates, in order to avoid pollute physical environment.
After said procedure is finished, open upper housing 1 or lower housing 2, unload the material that plated film finishes and get final product.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace or improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. laser CVD filming equipment, comprise upper housing and lower housing, described upper housing is covered on the described lower housing to form the CVD cavity of sealing, it is characterized in that: be equipped with in the described upper housing for driving material to be coated moved and determined the position on the plane two-dimensional positioning system, described material to be coated is installed on the described two-dimensional positioning system; Be equipped with in the described lower housing for the air jet system of ejection working gas with for the laser focusing device that laser source is focused on this air jet system spray nozzle front end; The spray nozzle front end that described material to be coated is positioned at described air jet system is also relative with it.
2. laser CVD filming equipment as claimed in claim 1, it is characterized in that: described air jet system comprises jet with described nozzle, described laser focusing device comprises for the focus head in laser focusing source and the optical fiber of the optical fiber that is used for plugging into is plugged into pipe, described focus head and the described optical fiber pipe coupling of plugging into, described jet also is provided with the inlet mouth of introducing working gas and the focus head open holes that is used for installing described focus head.
3. laser CVD filming equipment as claimed in claim 2 is characterized in that: described jet setting up is useful on the plug into pickup groove of pipe of fixing described optical fiber.
4. laser CVD filming equipment as claimed in claim 3, it is characterized in that: described nozzle is circular hole, described focus head open holes is uniformly distributed in described nozzle ring week.
5. laser CVD filming equipment as claimed in claim 1, it is characterized in that: described two-dimensional positioning system comprise first chute that is installed on described upper enclosure inner wall and with vertically disposed second chute of this first chute, be provided with first slide block in described first chute, be provided with second slide block in described second chute, described second chute is connected with described first slide block, described second slide block is provided with mounting plate, and described material to be coated is attached on the described mounting plate.
6. laser CVD filming equipment as claimed in claim 5, it is characterized in that: be provided with in described first chute for driving first screw mandrel that described first slide block slides, be provided with in described second chute for driving second screw mandrel that described second slide block slides, described first slide block offers first screw suitable with the screw thread of described first screw mandrel, described second slide block offers second screw suitable with the screw thread of described second screw mandrel, described first screw mandrel is arranged in described first screw, and described second screw mandrel is arranged in described second screw; Described two-dimensional positioning system also comprises for first motor that drives described first screw mandrel rotation and is used for driving second motor that described second screw mandrel rotates.
7. laser CVD filming equipment as claimed in claim 5 is characterized in that: on the described mounting plate water-cooling heat radiating device is installed.
8. laser CVD filming equipment as claimed in claim 2, it is characterized in that: described jet is fixedly installed in described lower housing bottom, and described lower housing bottom offers the air inlet through hole corresponding with described jet inlet mouth and holds the described optical fiber through hole of plugging into that pipe passes of plugging into.
9. laser CVD filming equipment as claimed in claim 1 is characterized in that: be folded with sealing-ring between described upper housing and the described lower housing.
10. as each described laser CVD filming equipment of claim 1-9, it is characterized in that: be equipped with in the described CVD cavity for the video monitoring apparatus of observing described CVD inside cavity working condition, for detection of film thickness monitoring device, heating unit and the temperature measuring equipment of coating film thickness on the material to be coated; Described video monitoring apparatus comprises video lens, and described lower housing offers for the camera lens open holes that described video lens is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220726070 CN203128658U (en) | 2012-12-25 | 2012-12-25 | Laser CVD (chemical vapor deposition) coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220726070 CN203128658U (en) | 2012-12-25 | 2012-12-25 | Laser CVD (chemical vapor deposition) coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203128658U true CN203128658U (en) | 2013-08-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220726070 Expired - Fee Related CN203128658U (en) | 2012-12-25 | 2012-12-25 | Laser CVD (chemical vapor deposition) coating equipment |
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| CN (1) | CN203128658U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074614A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | Laser cvd coating equipment |
| TWI689620B (en) * | 2018-09-17 | 2020-04-01 | 韓商Ｃｏｗｉｎｄｓｔ股份有限公司 | Method of forming fine pattern using laser chemical vapor deposition |
-
2012
- 2012-12-25 CN CN 201220726070 patent/CN203128658U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074614A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | Laser cvd coating equipment |
| CN103074614B (en) * | 2012-12-25 | 2015-10-28 | 王奉瑾 | Laser CVD filming equipment |
| TWI689620B (en) * | 2018-09-17 | 2020-04-01 | 韓商Ｃｏｗｉｎｄｓｔ股份有限公司 | Method of forming fine pattern using laser chemical vapor deposition |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130814 Termination date: 20201225 |