CN203128646U - Microwave-excited PVD (physical vapor deposition) coating device - Google Patents
Microwave-excited PVD (physical vapor deposition) coating device Download PDFInfo
- Publication number
- CN203128646U CN203128646U CN 201220724436 CN201220724436U CN203128646U CN 203128646 U CN203128646 U CN 203128646U CN 201220724436 CN201220724436 CN 201220724436 CN 201220724436 U CN201220724436 U CN 201220724436U CN 203128646 U CN203128646 U CN 203128646U
- Authority
- CN
- China
- Prior art keywords
- microwave
- pvd
- coated
- chamber body
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a microwave-excited PVD (physical vapor deposition) coating device. The microwave-excited PVD coating device comprises a housing and a target material, as well as a microwave generator with a microwave transmitting horn, wherein the housing comprises a sealed PVD cavity, a target material carrying boat is mounted in the PVD cavity, the target material carrying boat comprises an accommodating slot for placing the target material, a material to be coated is positioned above the accommodating slot, and one surface to be coated of the material to be coated is opposite to the accommodating slot; a body of the microwave generator is mounted outside the PVD cavity, and the microwave transmitting horn is arranged in the PVD cavity; a metal screen for shielding microwaves is transversely arranged in the PVD cavity, and the metal screen is positioned between the target material carrying boat and the material to be coated; and a moving device which is used for driving the target material carrying boat to move along the surface of the material to be coated in parallel is mounted in the PVD cavity. The microwave-excited PVD coating device provided by the utility model has the advantages of high heating efficiency, high coating efficiency, easiness in control of heating temperature and low manufacturing cost, and is less prone to damaging the material to be coated; and a film coated by the microwave-excited PVD coating device provided by the utility model is uniform, and the surface of the coated film is smooth.
Description
Technical field
The utility model belongs to the physical gas phase deposition technology field, relates in particular to a kind of microwave-excitation PVD filming equipment.
Background technology
Physical vapor deposition (English: Physical Vapor Deposition, be called for short PVD) be the technology that a kind of industry is made, be vacuum plating, be used in sheet metal component, etching part, extrusion, metal ejection formation (MIM), powder ejection formation (PIM), machine more and add on the technology of parts such as part, weldment.Physical vaporous deposition is to utilize high temperature heat source that raw material is heated to high temperature, makes it gasification or forms plasma body, is condensed into the material (as monocrystalline, film, crystal grain etc.) of various forms then in matrix (being material to be coated) cooling.
In physical vapor deposition, hot vapour deposition method and sputtering method are the coating techniques that industry member extensively adopts, and wherein hot vapour deposition method is the core of this technology.Hot evaporation coating technique utilizes high temperature to come fusion target (being coating raw material) in principle, makes it by the solid-state gaseous state that sublimates directly to, and the target atom of gaseous state or molecule Yin Jiawen and fierce accelerated motion are by vacuum cavity, and coagulating sedimentation becomes film on substrate.In this process, vacuum is a very important factor, if cavity in be full of air molecule, then target atom can because of when advancing constantly collide with air molecules depart from the direction that this is advanced, cause most target atom can't strike the surface of substrate, can't reach the effect of plated film.
It is the core of hot evaporation coating technique that raw material is heated to the high temperature evaporation distillation.In the prior art, the type of heating of target (being raw material) generally has following several: TR heating method, electron beam gun heating method and LASER HEATING method.The TR heating method is to make the target distillation by the heat that the resistance that is connected with target produces, and the material of resistance also can evaporate thereupon when this method heated, and influence the purity of plated film, and this method rate of heating was slow, wayward temperature.The electron beam gun heating method is by high-velocity electrons bump target, kinetic energy can be realized heats in being converted into, but this method is if control the bad target ionization that then causes easily, cause the plated film of coagulating sedimentation on material to be coated to gather electric charge, damage the quality of coatings, and the electric energy that this method consumes is also very big.The LASER HEATING method is by the laser that focuses on target to be heated, and this method heating efficiency height, pollutes lowly, but its manufacturing cost is also very high.
The utility model content
The purpose of this utility model is to overcome the defective of prior art, a kind of heating efficiency height, plated film efficient height are provided, have controlled Heating temperature, not fragile material to be coated, microwave-excitation PVD filming equipment cheap for manufacturing cost easily, uniform film thickness, coated surface that this equipment plates are smooth.
The utility model is to realize like this, a kind of microwave-excitation PVD filming equipment, comprise housing and target, also comprise the microwave generator with microwave emission loudspeaker, described housing has the pvd chamber body of sealing, in the described pvd chamber body target is installed and carries boat, described target carries boat to have for the storage tank of placing described target, and material to be coated is positioned at described storage tank top and it needs the one side of plated film relative with it; It is external that the body of described microwave generator is installed on described pvd chamber, and its microwave emission loudspeaker are located in the described pvd chamber body; Be horizontally set with the wire netting that is useful on shield microwaves in the described pvd chamber body, this wire netting carries between boat and the described material to be coated at described target.
Further, be equipped with in the described pvd chamber body for driving described target and carry boat along the running gear of the parallel movement of described material surface to be coated.
Further, described running gear comprises the screw mandrel with screw thread and drives first motor that this screw mandrel rotates, and described target carries boat and offers the screw adaptive with the screw thread of described screw mandrel, and described screw mandrel is arranged in the described screw.
Further, described housing offers the opening for feed that enters described pvd chamber body for described material to be coated, described housing also offers the discharge port that leaves described pvd chamber body for described material to be coated, and described opening for feed and described discharge port are oppositely arranged and all are equipped with tightness system.
Particularly, described tightness system comprises that elasticity presses on first cylinder of described material one side to be coated and the second tin roller that elasticity presses on described material another side to be coated.
Further, described tightness system also comprises second motor that drives described first cylinder or the rotation of described second tin roller.
Further, be equipped with in the described pvd chamber body water-cooling heat radiating device, for detection of the film thickness monitoring device of coating film thickness on the material to be coated, be used for video monitoring apparatus and the temperature measuring equipment of the described pvd chamber body internal medium of monitoring.
Particularly, described housing is provided with to described water-cooling heat radiating device and injects the water inlet of cooling fluid and the water outlet of discharging cooling fluid.
Preferably, in the described pvd chamber body four groups of described water-cooling heat radiating devices are installed.
Further, described video monitoring apparatus comprises video lens, and described housing offers for the camera lens open holes that described video lens is installed.
The utility model carries boat to the pvd chamber body with the target that carries target by microwave and heats, and target carries boat with the heat passage target of giving, target heat absorption back distillation, and its heating efficiency height, plated film efficient is improve thereupon also; Because microwave generator is regulated microwave power easily, therefore can regulate rate of heating and temperature neatly again, guarantee the accuracy of coating film thickness, uniform film thickness, the coated surface of plating are smooth.Moreover because the cost of microwave generator is low, manufacturing cost of the present utility model also decreases.In addition, be horizontally set with in the pvd chamber body at target and carry wire netting maskable microwave between boat and the material to be coated, microwave can't arrive on the material to be coated after by metal mesh shield, can prevent that material to be coated from being burnt out by microwave heating.
Description of drawings
Fig. 1 is the schematic perspective view of microwave-excitation PVD filming equipment among the utility model embodiment;
Fig. 2 is the schematic internal view of microwave-excitation PVD filming equipment among the utility model embodiment;
Fig. 3 is the sectional view of A-A among Fig. 1, i.e. microwave-excitation PVD filming equipment backsight sectional view among the utility model embodiment;
Fig. 4 carries the structural representation of boat for target among the utility model embodiment;
Fig. 5 is the structural representation of wire netting among the utility model embodiment;
Fig. 6 is the structural representation of tightness system among the utility model embodiment.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
Referring to Fig. 1 and Fig. 2, the utility model embodiment provides a kind of microwave-excitation PVD filming equipment, comprise housing 1 and target, also comprise the microwave generator 4 with microwave emission loudspeaker 42, described housing 1 has the pvd chamber body 11(of sealing referring to Fig. 2), in the described pvd chamber body 11 target is installed and carries boat 2, described target carries boat 2 to have for the storage tank 21(that places described target referring to Fig. 4), material 3 to be coated is positioned at described storage tank 21 tops and it needs the one side of plated film relative with it; The body 41 of described microwave generator is installed on outside the described pvd chamber body 11, and its microwave emission loudspeaker 42 are located in the described pvd chamber body 11; Be horizontally set with the wire netting 5 that is useful on shield microwaves in the described pvd chamber body 11, this wire netting 5 carries between boat 2 and the described material to be coated 3 at described target.Carry out needing first gas (housing 1 is provided with the bleeding point 15 for withdrawing gas) of discharging in the pvd chamber body 11 before the plated film.Open 4 pairs of pvd chamber bodies 11 of microwave generator and target then and carry boat 2 and heat, need to prove, pvd chamber body 11 inwalls adopt electro-conductive material to make, and with shield microwaves, prevent that microwave from leaking.After target carried boat 2 and is heated, its heat will pass to target, and it is gaseous atom or molecule that target is subjected to heat sublimation, and gaseous atom or molecule be vigorous exercise in the pvd chamber body, finally struck against material to be coated 3 surfaces and went up coagulating sedimentations and become film.Because the utility model heats by microwave, its heating efficiency height, plated film efficient also improves thereupon; Because microwave generator is regulated microwave heating power easily, therefore can regulate rate of heating and temperature neatly again, guarantee the accuracy of coating film thickness, uniform film thickness, the coated surface of plating are smooth.Moreover because the cost of microwave generator is low, therefore, manufacturing cost of the present utility model also decreases.Be horizontally set with in the pvd chamber body 11 at target and carry wire netting 5 maskable microwaves between boat 2 and the material to be coated 3, microwave can't arrive on the material 3 to be coated after by wire netting 5 shieldings, can prevent that material to be coated from being burnt out by microwave heating.Wherein, the structure of wire netting 5 shown in Figure 5 is a kind of preferred structure of the present utility model, and the grid of this wire netting 5 is crisscross arranged, and can guarantee further that plated film is more even.
Referring to Fig. 2, be equipped with in the described pvd chamber body 11 for driving described target and carry boat 2 along the running gear 6 of described material 3 surperficial parallel movements to be coated.For the bigger material to be coated of width, be installed on target on the running gear 6 and carry boat 2 and can move around at the different positions on material to be coated 3 surfaces, make the target atom of gaseous state or the different positions that the molecule coagulable is deposited on material surface to be coated.
Referring to Fig. 2, described running gear 6 comprises the screw mandrel 61 with screw thread and drives first motor 62 that this screw mandrel 61 rotates, described target carries boat 2 and offers with the adaptive screw 22(of the screw thread of described screw mandrel 61 referring to Fig. 4), described screw mandrel 61 is arranged in the described screw 22.Screw mandrel 61 can order about target and carry boat 2 along the moving axially of screw mandrel 61 when rotating, screw mandrel 61 not only can be so that target carries boat 2 quick travel, and in the moving process steadily, prevent from steadily not causing plated film inhomogeneous owing to target carries boat 2 in the coating process.
Referring to Fig. 3, described housing 1 offers the opening for feed 12 that enters described pvd chamber body 11 for described material 3 to be coated, described housing 1 also offers the discharge port 13 that leaves described pvd chamber body 11 for described material 3 to be coated, and described opening for feed 12 is oppositely arranged and all is equipped with tightness system 7 with described discharge port 13.Long material to be coated 3 can be entered by opening for feed 12, carries boat 2 tops through target and carries out plated film, and along with advancing of material 3 to be coated, the end that plated film finishes will be by discharge port 13 outputs.For guaranteeing the stopping property of pvd chamber body 11, need tightness system 7 be installed at opening for feed 12 and discharge port 13, simultaneously, can also prevent that ambient atmos and impurity from entering in the pvd chamber body 11.The microwave-excitation PVD filming equipment that is provided with opening for feed 12 and discharge port 13 can apply in the streamline of processing continuously, and material to be coated is entered by opening for feed 12, by discharge port 13 outputs, enters into down work program one again.Need to prove that the setting of opening for feed 12 and discharge port 13 is not necessary, for the material to be coated that need process separately, open housing 1 taking-up after plated film is finished in pvd chamber body 11 and get final product.
Referring to Fig. 3 and Fig. 6, described tightness system 7 comprises that elasticity presses on first cylinder 71 of described material to be coated 3 one sides and the second tin roller 72 that elasticity presses on described material to be coated 3 another sides.Because first cylinder 71 is pressed on the material 3 to be coated with second tin roller 72 elasticity, when material 3 to be coated left tightness system 7, two cylinders were pressed applying mutually, prevented from having the gap and the breakseal effect between two cylinders.
Referring to Fig. 6, described tightness system 7 also comprises second motor 73 that drives described first cylinder 71 or 72 rotations of described second tin roller.Second motor 73 is connected with second tin roller 72 among the utility model embodiment, but second motor, 73 head rolls rotate, material 3 to be coated can be at the uniform velocity mobile under the driving that cylinder rotates, and can pass through the translational speed of the speed adjustment material 3 to be coated of control second motor 73.
Referring to Fig. 3, water-cooling heat radiating device 8 is installed in the described pvd chamber body 11, for detection of the film thickness monitoring device of coating film thickness on the material to be coated, be used for video monitoring apparatus and the temperature measuring equipment of described pvd chamber body 11 internal mediums of monitoring.Owing to can produce a large amount of heat in the coating process, if being installed on the equipment, water-cooling heat radiating device 8 can distribute the heat that coating process produces fast, prevent that temperature is too high and burn out inner components.The film thickness monitoring device can feed back to principal controller with measured coating film thickness, and principal controller is made respective reaction according to measured result.
Referring to Fig. 1, described housing 1 is provided with to described water-cooling heat radiating device 8 and injects the water inlet 81 of cooling fluid and the water outlet 82 of discharging cooling fluid.
Referring to Fig. 3, as a kind of preferred implementation of the present utility model, four groups of described water-cooling heat radiating devices 8 are installed in the described pvd chamber body 11.
Referring to Fig. 1, described video monitoring apparatus comprises video lens, and described housing 1 offers for the camera lens open holes 14 that described video lens is installed.
Device mentioned above all is connected with principal controller, and principal controller can be collected the mode of operation of respectively installing institute's feedack and each device of control.
The microwave-excitation PVD filming equipment working process that the utility model embodiment provides is described below:
At first, the gas in the extraction pvd chamber body 11;
Opening microwave generator 4 carries boat 2 with the internal medium of pvd chamber body 11 and target and is heated to temperature required;
After temperature measuring equipment recorded pvd chamber body 11 internal temperatures and reaches requirement, microwave generator 4 carried boat 2 controls in the required temperature range of works better with pvd chamber body 11 and target, opens relative unit, and material 3 to be coated is sent in the pvd chamber body 11 by feeding mouth 12;
When material 3 to be coated carries boat 2 tops through target, target atom or molecules strike coagulating sedimentation on material 3 to be coated after the heat absorption distillation become film, the film thickness monitoring device detects coating film thickness, detected result is fed back to principal controller, principal controller is according to the heating power of the gauge control microwave generator 4 of required plated film, with film thickness monitoring in required thickness range;
The material of plated film can be finished the plated film of a block of material by discharge port 13 outputs.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace or improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. microwave-excitation PVD filming equipment, comprise housing and target, it is characterized in that: also comprise the microwave generator with microwave emission loudspeaker, described housing has the pvd chamber body of sealing, in the described pvd chamber body target is installed and carries boat, described target carries boat to have for the storage tank of placing described target, and material to be coated is positioned at described storage tank top and it needs the one side of plated film relative with it; It is external that the body of described microwave generator is installed on described pvd chamber, and its microwave emission loudspeaker are located in the described pvd chamber body; Be horizontally set with the wire netting that is useful on shield microwaves in the described pvd chamber body, this wire netting carries between boat and the described material to be coated at described target.
2. microwave-excitation PVD filming equipment as claimed in claim 1 is characterized in that: be equipped with in the described pvd chamber body for driving described target and carry boat along the running gear of the parallel movement of described material surface to be coated.
3. microwave-excitation PVD filming equipment as claimed in claim 2, it is characterized in that: described running gear comprises the screw mandrel with screw thread and drives first motor that this screw mandrel rotates, described target carries boat and offers the screw adaptive with the screw thread of described screw mandrel, and described screw mandrel is arranged in the described screw.
4. microwave-excitation PVD filming equipment as claimed in claim 1, it is characterized in that: described housing offers the opening for feed that enters described pvd chamber body for described material to be coated, described housing also offers the discharge port that leaves described pvd chamber body for described material to be coated, and described opening for feed and described discharge port are oppositely arranged and all are equipped with tightness system.
5. microwave-excitation PVD filming equipment as claimed in claim 4 is characterized in that: described tightness system comprises that elasticity presses on first cylinder of described material one side to be coated and the second tin roller that elasticity presses on described material another side to be coated.
6. microwave-excitation PVD filming equipment as claimed in claim 5 is characterized in that: described tightness system also comprises and drives second motor that described first cylinder or described second tin roller rotate.
7. as each described microwave-excitation PVD filming equipment of claim 1-6, it is characterized in that: water-cooling heat radiating device is installed in the described pvd chamber body, for detection of the film thickness monitoring device of coating film thickness on the material to be coated, be used for video monitoring apparatus and the temperature measuring equipment of the described pvd chamber body internal medium of monitoring.
8. microwave-excitation PVD filming equipment as claimed in claim 7 is characterized in that: described housing is provided with to described water-cooling heat radiating device and injects the water inlet of cooling fluid and the water outlet of discharging cooling fluid.
9. microwave-excitation PVD filming equipment as claimed in claim 8 is characterized in that: four groups of described water-cooling heat radiating devices are installed in the described pvd chamber body.
10. microwave-excitation PVD filming equipment as claimed in claim 7, it is characterized in that: described video monitoring apparatus comprises video lens, described housing offers for the camera lens open holes that described video lens is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724436 CN203128646U (en) | 2012-12-25 | 2012-12-25 | Microwave-excited PVD (physical vapor deposition) coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724436 CN203128646U (en) | 2012-12-25 | 2012-12-25 | Microwave-excited PVD (physical vapor deposition) coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203128646U true CN203128646U (en) | 2013-08-14 |
Family
ID=48936642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220724436 Expired - Fee Related CN203128646U (en) | 2012-12-25 | 2012-12-25 | Microwave-excited PVD (physical vapor deposition) coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203128646U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103046007A (en) * | 2012-12-25 | 2013-04-17 | 王奉瑾 | Microwave excited PVD coating equipment |
-
2012
- 2012-12-25 CN CN 201220724436 patent/CN203128646U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103046007A (en) * | 2012-12-25 | 2013-04-17 | 王奉瑾 | Microwave excited PVD coating equipment |
| CN103046007B (en) * | 2012-12-25 | 2015-10-28 | 王奉瑾 | Microwave-excitation PVD filming equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101956176B (en) | Continuous evaporation apparatus | |
| CN104513967B (en) | Flexible parent metal magnetic-control sputtering coiling film coating machine | |
| CN108570651A (en) | A kind of horizontal magnetron sputtering film production line of multi-chamber and its film plating process | |
| CN208261071U (en) | A kind of device for target manufacture | |
| CN203128646U (en) | Microwave-excited PVD (physical vapor deposition) coating device | |
| CN103046007B (en) | Microwave-excitation PVD filming equipment | |
| CN207163005U (en) | A kind of air-blast atomizing refrigerating plant | |
| CN103695870A (en) | PECVD (plasma enhanced chemical vapor deposition) coating device | |
| CN102400088B (en) | Glow large-beam low-voltage plasma activation process for flexible metal substrate | |
| CN107217241A (en) | Reinforced graphite alkene coating thin film device and method based on PECVD | |
| CN103074613A (en) | Microwave excitation CVD coating equipment | |
| CN203128659U (en) | Microwave exciting CVD (chemical vapor deposition) coating equipment | |
| CN210261958U (en) | Negative pole coiling lithium plating system | |
| CN106191779A (en) | A kind of polymer vacuum electron beam evaporation coating machine | |
| CN111058000A (en) | High-speed roll-to-roll vacuum lithium film apparatus for producing of tertiary evaporation | |
| CN203754797U (en) | Vacuum evaporation coating device | |
| CN1920091A (en) | Multifunctional vacuum continuous coating apparatus | |
| CN103074580B (en) | Adopt the Pvd equipment of Electromagnetic Heating | |
| CN102433533B (en) | Vacuum jet coating machine for preparing polymer functional film | |
| CN203128647U (en) | PVD (physical vapor deposition) device adopting laser heating | |
| CN201793730U (en) | Evaporation plating equipment | |
| CN203128657U (en) | Laser exciting CVD (chemical vapor deposition) coating equipment | |
| CN210176936U (en) | Novel evaporation equipment | |
| CN203128658U (en) | Laser CVD (chemical vapor deposition) coating equipment | |
| CN103074582B (en) | PVD equipment adopting laser heating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING CAPSTAR AUTOMATION INSTRUMENT CO., LTD. Free format text: FORMER OWNER: WANG FENGJIN Effective date: 20140822 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 528400 ZHONGSHAN, GUANGDONG PROVINCE TO: 100260 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20140822 Address after: Aoyu No. 2 building, 100260 Beijing Jinyuan Daxing Industrial Development Zone Road 703 Patentee after: BEIJING CAPSTAR AUTOMATION INSTRUMENTATION Co.,Ltd. Address before: 4 building, No. 2 Xingye Road, Torch Development Zone, Guangdong, Zhongshan, 528400 Patentee before: Wang Fengjin |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130814 Termination date: 20211225 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |