CN103056783A - Sand blasting equipment - Google Patents
Sand blasting equipment Download PDFInfo
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- CN103056783A CN103056783A CN2011103193106A CN201110319310A CN103056783A CN 103056783 A CN103056783 A CN 103056783A CN 2011103193106 A CN2011103193106 A CN 2011103193106A CN 201110319310 A CN201110319310 A CN 201110319310A CN 103056783 A CN103056783 A CN 103056783A
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- sand
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- putting
- sheet case
- abrasive blast
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Abstract
The invention provides sand blasting equipment for removal of silicon wafer edges. The equipment comprises the following parts: a piece placement box; a wafer clamp arranged on the bottom of the piece placement box; a sand spray gun with a nozzle opposite to a silicon wafer clamped in the silicon wafer clamp and arranged on an inner wall of the piece placement box; a sand box connected with the sand blast gun through a sand pipe and arranged on the piece placement box; and air compressor connected with the sand blast gun through an air pipe. During working, compressed air produced by the air compressor enters into the sand blast gun through the air pipe to generate negative pressure in the sand blast gun; and due to the effect of the negative pressure, sand in the sand box connected with a sand blast box enters into the sand blast gun through the sand pipe and conducts spray treatment on the silicon wafer edge along with high pressure air flow. Compared with manual polishing by operators in the prior art, the sand blast equipment provided by the invention employs mechanization equipment to replace the manual polishing, so as to significantly reduce the labor intensity of operators.
Description
Technical field
The present invention relates to the semiconductor processing technology field, more particularly, relate to a kind of abrasive blast equipment, be used for removing silicon chip edge.
Background technology
Silicon is a kind of very important semi-conducting material, is widely used in fields such as diode, luminescent device, solar cells.Present energy scarcity, the silicon chip of solar cell generation technology has caused people's attention, cause the in short supply of silicon resource, become the key that improves the silicon materials utilization rate so how effectively to produce high-quality silicon chip, this also becomes the important ring that enterprise increases profit.But, can produce a large amount of edge piece in the solar silicon wafers production process, have a strong impact on its quality.For yield rate, the increase enterprise profit that improves silicon chip, at present practices well is its surface to be carried out the polishings such as plain grinding, barreling before silicon rod slicing, in order to reach the requirement of roughness, but the silicon chip that cuts out still has many rough surface or edge piece, how these substandard products even waste product are become certified products, enjoy people to pay close attention to.
Existing, there is no the relevant device of silicon chip edge being removed edge piece on the market, often adopt the way of manual polishing to remove its edge to mass-produced silicon chip in producing, concrete, marginate silicon chip after about 20 flushings is neat with thumb and four fingers extruding arrangement; Pinch and get carborundum and be put on the glass plate tiling thickness between 1-3mm; Both hands fasten silicon chip, make the silicon chip end face have damaged limit to press down in the part that glass plate holds carborundum; Then the silicon chip of being done over again is carried out the front and back push-and-pull, make the carborundum friction on silicon chip edge and the glass plate; Repeatedly clean, check edge polishing effect midway, until push-and-pull to edge is removed.Because above-mentioned technique is by operating personnel's manual grinding, the push-and-pull process may reach up to a hundred times just can reach the roughness that needs, and this causes operating personnel's labour intensity large.
In sum, how to provide a kind of abrasive blast equipment, be used for removing silicon chip edge, to reduce operating personnel's labour intensity, become present those skilled in the art's problem demanding prompt solution.
Summary of the invention
In view of this, the invention provides a kind of abrasive blast equipment, be used for removing silicon chip edge, to reduce operating personnel's labour intensity.
In order to achieve the above object, the invention provides following technical scheme:
A kind of abrasive blast equipment is used for removing silicon chip edge, comprising:
Put the sheet case;
Be arranged on the clamping fixture for silicon wafer on the described base plate of putting the sheet case;
Sand-blasting gun, its shower nozzle and clamping are relative and be arranged on the described inwall of putting the sheet case at the silicon chip of described clamping fixture for silicon wafer;
By the sand hopper that sand material pipe links to each other with described sand-blasting gun, described sand hopper is arranged on described putting on the sheet case;
The air compressor that links to each other with described sand-blasting gun by tracheae.
Preferably, in the above-mentioned abrasive blast equipment, described clamping fixture for silicon wafer is the lock-screw device, and it comprises the silicon chip mounting groove that is arranged on the described base plate of putting the sheet case and by the lock-screw of threaded engagement on the sidewall of silicon chip mounting groove, and the front end of described lock-screw and described silicon chip offset.
Preferably, in the above-mentioned abrasive blast equipment, also comprise drive unit, described drive unit links to each other with described sand-blasting gun by connecting rod, is used for driving described sand-blasting gun motion, and described drive unit is fixed on the described outer wall of putting the sheet case.
Preferably, in the above-mentioned abrasive blast equipment, also comprise the fagging that is fixed on the described outer wall of putting the sheet case, described drive unit is arranged on the described fagging.
Preferably, in the above-mentioned abrasive blast equipment, described drive unit comprises the first drive unit and the second drive unit, described the first drive unit is arranged on described putting on the fagging, described the second drive unit links to each other with the mobile terminal of described the first drive unit, and the pushing direction of the pushing direction of described the first drive unit and described the second drive unit intersects, and the mobile terminal of described the second drive unit links to each other with described sand-blasting gun.
Preferably, in the above-mentioned abrasive blast equipment, also comprise induced-draught fan, described induced-draught fan is arranged on the described outer wall of putting the sheet case and with the described inner chamber of putting the sheet case and communicates.
Preferably, in the above-mentioned abrasive blast equipment, also comprise illuminating lamp, described illuminating lamp is arranged on the described sheet case inside of putting.
Preferably, in the above-mentioned abrasive blast equipment, also comprise control cabinet, described control cabinet is arranged on described putting on the sheet case, is used for controlling the start and stop of the air pressure of described air compressor, described drive unit and the dynamics of described induced-draught fan.
Preferably, in the above-mentioned abrasive blast equipment, the outlet of described air compressor connects oil water separator.
Preferably, in the above-mentioned abrasive blast equipment, bracing frame is installed in the described sheet case bottom surface of putting.
Can find out that from above-mentioned technical scheme sand hopper abrasive blast equipment provided by the invention is used for removing silicon chip edge.This device comprises: put sheet case, clamping fixture for silicon wafer, sand-blasting gun and air compressor.Wherein, clamping fixture for silicon wafer is arranged on to be put on the sheet box plate, and the shower nozzle of sand-blasting gun and clamping are relative and be fixed on and put on the sheet tank wall at the silicon chip on the clamping fixture for silicon wafer, and the sand hopper links to each other with sand-blasting gun by sand material pipe, and air compressor links to each other with sand-blasting gun by tracheae.During work, the compressed air that air compressor produces enters sand-blasting gun by tracheae, in the inner negative pressure that produces of sand-blasting gun, owing to the effect of negative pressure, the sand material in the sand hopper that links to each other with blasting cabinet enters sand-blasting gun and with high pressure draught silicon chip edge is carried out inject process by sand material pipe.Compare by operating personnel's manual grinding with of the prior art, abrasive blast equipment provided by the invention has significantly reduced operating personnel's labour intensity with the polishing of mechanized equipment instead of manual.
Description of drawings
In order to be illustrated more clearly in the technical scheme in the embodiment of the invention, the accompanying drawing of required use was done to introduce simply during the below will describe embodiment, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The structural representation of the abrasive blast equipment that Fig. 1 provides for the embodiment of the invention.
Among the upper figure:
The specific embodiment
The invention provides a kind of abrasive blast equipment, be used for removing silicon chip edge, to reduce operating personnel's labour intensity.
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
Please refer to accompanying drawing 1, the figure shows the structural representation of the abrasive blast equipment that the embodiment of the invention provides.
Abrasive blast equipment provided by the invention is used for removing silicon chip edge, comprises and puts sheet case 11, clamping fixture for silicon wafer 2, sand-blasting gun 3, sand hopper 4 and air compressor (not shown).Wherein:
Clamping fixture for silicon wafer 2 is arranged on to be put on sheet case 11 base plates; The shower nozzle of sand-blasting gun 3 is relative with the silicon chip 21 of clamping on clamping fixture for silicon wafer 2, and sand-blasting gun 3 is arranged on the inwall of putting sheet case 11; Sand hopper 4 links to each other with sand-blasting gun 3 by sand material pipe 31 as the source of sand material, and sand hopper 4 is fixed on to be put on the sheet case 11; Air compressor links to each other with sand-blasting gun 3 by tracheae.
Abrasive blast equipment provided by the invention replaces manual grinding with plant equipment, and purpose is to reduce operating personnel's labour intensity.Given this, the present invention arranges sand-blasting gun 3, is used for the edge of silicon chip 21 is processed, and air compressor is as the power resources of sand-blasting gun 3, and it is that sand-blasting gun 3 is supplied raw materials that sand hopper 4 is used for holding the sand material.During work, the compressed air that air compressor produces enters sand-blasting gun 3 by tracheae, in sand-blasting gun 3 interior generation negative pressure, sand material in the sand hopper 4 that link to each other with sand-blasting gun 3 this moment acts on silicon chip edge because the effect of negative pressure enters sand-blasting gun 3 from sand hopper 4 through sand material pipe 31 with high-speed compressed air.Can find out that from the above-mentioned course of work for 21 stable the even of removal that make of silicon chip when sand-blasting gun 3 sprays, this equipment need to be fixed silicon chip 21, therefore, the present invention also is provided with clamping fixture for silicon wafer 2, is used for silicon chip 21 is positioned clamping.Clamping fixture for silicon wafer 2, sand-blasting gun 3 and sand hopper 4 all need to be placed on the support, and therefore, abrasive blast equipment provided by the invention also is provided with puts sheet case 11, are used to provide the environment of sand-blasting gun 3 work.Clamping fixture for silicon wafer 2 is arranged on the base plate of putting sheet case 11; Sand-blasting gun 3 is arranged on the inwall of putting sheet case 11 relative with clamping fixture for silicon wafer 2, and is relative at the pending edge of the silicon chip 21 of clamping fixture for silicon wafer 2 with clamping; Sand hopper 4 is arranged on to be put on the sheet case 11.
Clamping fixture for silicon wafer 2 in the abrasive blast equipment provided by the invention is the lock-screw device, specifically comprises silicon chip mounting groove and lock-screw.The silicon chip mounting groove is arranged on the base plate of putting sheet case 11, preferably, is arranged on the left side of base plate, and on the sidewall of silicon chip mounting groove, and the front end of lock-screw and silicon chip 21 offset lock-screw by threaded engagement.During work, by screwing lock-screw silicon chip 21 is fixed in the silicon chip mounting groove, by unscrewing lock-screw sheet 21 is dismantled.What those skilled in the art can expect is, processes when the length by regulating lock-screw and the size of silicon chip mounting groove can realize a large amount of silicon chip 21, has reduced operating personnel's the replacing time and has shut down the number of times of start.
For convenient the silicon chip edge of diverse location is processed, abrasive blast equipment provided by the invention further comprises drive unit 6, drive unit 6 links to each other with sand-blasting gun 3 by connecting rod 61 and is installed on the outer wall of putting sheet case 11, be used for driving sand-blasting gun 3 direction motion on demand, corresponding having at the sidewall of putting sheet case 11 can be satisfied the opening that connecting rod 61 moves.Save material and production cost for the length that shortens connecting rod 61, drive unit 6 is installed on the left side outer wall of putting sheet case 11.
Drive unit may produce vibrations in when work, and sand-blasting gun 3 is exerted an influence, and affect the removal quality of silicon chip edge, so at the fixing fagging 62 of the outer wall of putting sheet case 11, be used for supporting the installation drive unit.Preferably, fagging is arranged on the left side outer wall of putting sheet case 11.
Because the edge of the silicon chip 21 that cuts out may spread all over end face, so need sand-blasting gun 3 can transverse movement again can lengthwise movement, with convenient the silicon chip edge of diverse location is processed, reduced the number of times of operating personnel's manual adjustment silicon chip 21 positions, further reduce operating personnel's labour intensity.Given this, drive unit 6 provided by the invention specifically comprises the first drive unit and the second drive unit.The first drive unit is arranged on that 62, the second drive units link to each other with the mobile terminal of the first drive unit on the fagging, and the pushing direction of the pushing direction of the first drive unit and the second drive unit intersects, and the mobile terminal of the second drive unit links to each other with sand-blasting gun 3.Because the pushing direction of the first drive unit and the pushing direction of the second drive unit intersect, so by control the first drive unit and the second drive unit, can realize that sand-blasting gun 3 moves, and finally realizes the processing of the silicon chip edge of diverse location in planar range.
What it may occur to persons skilled in the art that is that drive unit 6 can be linear electric motors, cylinder or linear electric motors and cylinder combination.When the first drive unit and the second drive unit are linear electric motors, one of them linear electric motors links to each other with sand-blasting gun 3 by connecting rod 61, realize the round rectilinear motion of sand-blasting gun 3 by the feed screw nut of linear electric motors inside, these linear electric motors link to each other with the mobile terminal of another linear electric motors, and the direction of the mobile terminal of two linear electric motors is crossing, and the linear electric motors that link to each other with sand-blasting gun 3 are like this realized coming and going the straight-line while and done round rectilinear motion by another linear electric motors drive in crossing direction again.When the first drive unit and the second drive unit are cylinder or drive unit 6 during for the combination of linear electric motors and cylinder, its operation principle is identical with above-mentioned linear electric motors, and this paper repeats no more.
When abrasive blast equipment is worked, because the sand material was processed to be trapped in behind the silicon chip edge with high-speed compressed air and was put in the sheet case 11, more poly-more may exerting an influence to equipment, and the sand material can reuse, therefore, need to recycle the sand material in order to save cost, Given this, abrasive blast equipment provided by the invention has further comprised induced-draught fan 7.Induced-draught fan 7 is installed on the outer wall of putting sheet case 11 and with the inner chamber of putting sheet case 11 and communicates, and preferably, induced-draught fan 7 communicates with the lower right corner of putting sheet case 11, and when sand-blasting gun 3 work, the sand material that induced-draught fan 7 will be processed silicon chip 21 siphons away and collects, and recycles.
For the handled easily personnel carry out the quality that the silicon chip 21 in the processing is also conveniently checked in operation, also comprise illuminating lamp 8 among the embodiment of abrasive blast equipment provided by the invention, illuminating lamp 8 is arranged on the inside of putting sheet case 11.
In order further to optimize technique scheme, conveniently the above-mentioned course of work is controlled, further comprise control cabinet 9 in the abrasive blast equipment provided by the invention.Control cabinet 9 is arranged on to be put on the sheet case 11, preferably, control cabinet is arranged on the outside of the loam cake of putting the sheet case, with handled easily personnel's operation.Control cabinet 9 is controlled respectively the air pressure of air compressor by electromagnetic induction, regulates the different dynamics of sand-blasting gun 3; The start and stop of accessory drive 6, the diverse location of adjusting sand-blasting gun 3; The absorption dynamics of control induced-draught fan 7 adapts to different requirements.
From the compressed air that air compressor produces, may be mingled with the impurity such as oil gas and steam, can make the adhesion of sand material, affect the removal quality of silicon chip edge, therefore in the exit of air compressor oil water separator 51 has been installed, be used for to compressed-air actuated purified treatment.
For handled easily personnel's work, save the operating time and reduce labour intensity, in the abrasive blast equipment provided by the invention, in the bottom surface of putting sheet case 11 bracing frame 12 has been installed, be used for adjusting operating platform and operating personnel's relative altitude.
Each embodiment adopts the mode of going forward one by one to describe in this specification, and what each embodiment stressed is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can in the situation that does not break away from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. an abrasive blast equipment is used for removing silicon chip edge, it is characterized in that, comprising:
Put sheet case (11);
Be arranged on the clamping fixture for silicon wafer (2) on the described base plate of putting sheet case (11);
Sand-blasting gun (3), its shower nozzle and clamping are relative and be arranged on the described inwall of putting sheet case (11) at the silicon chip (21) of described clamping fixture for silicon wafer (2);
By the sand hopper (4) that sand material pipe (31) links to each other with described sand-blasting gun (3), described sand hopper (4) is arranged on described putting on the sheet case (11);
The air compressor that links to each other with described sand-blasting gun (3) by tracheae.
2. abrasive blast equipment according to claim 1, it is characterized in that, described clamping fixture for silicon wafer (2) is the lock-screw device, it comprises the silicon chip mounting groove that is arranged on the described base plate of putting sheet case (11) and by the lock-screw of threaded engagement on the sidewall of silicon chip mounting groove, and the front end of described lock-screw and described silicon chip (21) offset.
3. abrasive blast equipment according to claim 1, it is characterized in that, also comprise drive unit (6), described drive unit (6) links to each other with described sand-blasting gun (3) by connecting rod (61), be used for driving described sand-blasting gun (3) motion, described drive unit (6) is fixed on the described outer wall of putting sheet case (11).
4. abrasive blast equipment according to claim 3 is characterized in that, also comprises the fagging (62) that is fixed on the described outer wall of putting sheet case (11), and described drive unit (6) is arranged on the described fagging (62).
5. abrasive blast equipment according to claim 4, it is characterized in that, described drive unit (6) comprises the first drive unit and the second drive unit, described the first drive unit is arranged on described putting on the fagging (62), described the second drive unit links to each other with the mobile terminal of described the first drive unit, and the pushing direction of the pushing direction of described the first drive unit and described the second drive unit intersects, and the mobile terminal of described the second drive unit links to each other with described sand-blasting gun (3).
6. abrasive blast equipment according to claim 3 is characterized in that, also comprises induced-draught fan (7), and described induced-draught fan (7) is arranged on the described outer wall of putting sheet case (11) and with the described inner chamber of putting sheet case (11) and communicates.
7. abrasive blast equipment according to claim 1 is characterized in that, also comprises illuminating lamp (8), and described illuminating lamp (8) is arranged on described sheet case (11) inside of putting.
8. abrasive blast equipment according to claim 6, it is characterized in that, also comprise control cabinet (9), described control cabinet (9) is arranged on described putting on the sheet case (11), is used for controlling the start and stop of the air pressure of described air compressor, described drive unit (6) and the dynamics of described induced-draught fan (7).
9. each described abrasive blast equipment is characterized in that according to claim 1-8, and the outlet of described air compressor connects oil water separator (51).
10. each described abrasive blast equipment is characterized in that according to claim 1-8, and bracing frame (12) is installed in described sheet case (11) bottom surface of putting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103193106A CN103056783A (en) | 2011-10-19 | 2011-10-19 | Sand blasting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103193106A CN103056783A (en) | 2011-10-19 | 2011-10-19 | Sand blasting equipment |
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| Publication Number | Publication Date |
|---|---|
| CN103056783A true CN103056783A (en) | 2013-04-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103193106A Pending CN103056783A (en) | 2011-10-19 | 2011-10-19 | Sand blasting equipment |
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| CN (1) | CN103056783A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103846813A (en) * | 2013-10-23 | 2014-06-11 | 洛阳市鼎晶电子材料有限公司 | Device for removing oxidation fog on silicon polishing surface by impurity absorption source prepared on back of silicon wafer by sand blasting |
| CN105196188A (en) * | 2015-10-08 | 2015-12-30 | 江苏宏联环保科技有限公司 | Sand-blasting machine nozzle with edged projector |
| CN105215860A (en) * | 2015-10-30 | 2016-01-06 | 浙江辉弘光电能源有限公司 | A kind of silicon chip sand-blasting machine |
| CN105252423A (en) * | 2015-10-30 | 2016-01-20 | 浙江辉弘光电能源有限公司 | Sand blast device used for silicon wafers |
| CN105738235A (en) * | 2016-04-28 | 2016-07-06 | 内蒙古工业大学 | Corrosion experiment and injury evaluation methods of engineering material under wind sand environment |
| CN106625276A (en) * | 2016-11-03 | 2017-05-10 | 超威电源有限公司 | Polishing device |
| CN106784137A (en) * | 2016-11-30 | 2017-05-31 | 浙江晶科能源有限公司 | A kind of apparatus and method of cell piece PN junction edge isolation |
| CN107717754A (en) * | 2017-11-24 | 2018-02-23 | 无锡市日升机械厂 | Manual operation box precision sand-blasting machine |
| CN111590470A (en) * | 2020-04-29 | 2020-08-28 | 吴慧东 | Metal plate surface rust removal sand blasting unit |
| CN112706081A (en) * | 2020-12-07 | 2021-04-27 | 安徽精象重工机械有限公司 | Sand blasting burnishing device is used in steel casting production |
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| CN201815955U (en) * | 2010-09-07 | 2011-05-04 | 株洲敏锐机车配件有限责任公司 | Sand-blasting angle lapping machine |
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| CN2198072Y (en) * | 1994-06-28 | 1995-05-24 | 四川长平机械厂 | Box type sand blasting machine |
| US5785581A (en) * | 1995-10-19 | 1998-07-28 | The Penn State Research Foundation | Supersonic abrasive iceblasting apparatus |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103846813A (en) * | 2013-10-23 | 2014-06-11 | 洛阳市鼎晶电子材料有限公司 | Device for removing oxidation fog on silicon polishing surface by impurity absorption source prepared on back of silicon wafer by sand blasting |
| CN103846813B (en) * | 2013-10-23 | 2016-03-23 | 洛阳市鼎晶电子材料有限公司 | Silicon chip back side sandblasting manufactures the device that silicon polishing surface oxidation mist is eliminated in gettering source |
| CN105196188A (en) * | 2015-10-08 | 2015-12-30 | 江苏宏联环保科技有限公司 | Sand-blasting machine nozzle with edged projector |
| CN105215860A (en) * | 2015-10-30 | 2016-01-06 | 浙江辉弘光电能源有限公司 | A kind of silicon chip sand-blasting machine |
| CN105252423A (en) * | 2015-10-30 | 2016-01-20 | 浙江辉弘光电能源有限公司 | Sand blast device used for silicon wafers |
| CN105738235A (en) * | 2016-04-28 | 2016-07-06 | 内蒙古工业大学 | Corrosion experiment and injury evaluation methods of engineering material under wind sand environment |
| CN106625276A (en) * | 2016-11-03 | 2017-05-10 | 超威电源有限公司 | Polishing device |
| CN106784137A (en) * | 2016-11-30 | 2017-05-31 | 浙江晶科能源有限公司 | A kind of apparatus and method of cell piece PN junction edge isolation |
| CN106784137B (en) * | 2016-11-30 | 2019-07-09 | 浙江晶科能源有限公司 | A kind of device and method of cell piece PN junction edge isolation |
| CN107717754A (en) * | 2017-11-24 | 2018-02-23 | 无锡市日升机械厂 | Manual operation box precision sand-blasting machine |
| CN111590470A (en) * | 2020-04-29 | 2020-08-28 | 吴慧东 | Metal plate surface rust removal sand blasting unit |
| CN111590470B (en) * | 2020-04-29 | 2021-11-16 | 江苏八达重工科技有限公司 | Metal plate surface rust removal sand blasting unit |
| CN112706081A (en) * | 2020-12-07 | 2021-04-27 | 安徽精象重工机械有限公司 | Sand blasting burnishing device is used in steel casting production |
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Application publication date: 20130424 |