CN103052251A - Cold plasma glow discharge generator under low vacuum state - Google Patents
Cold plasma glow discharge generator under low vacuum state Download PDFInfo
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- CN103052251A CN103052251A CN2012105209692A CN201210520969A CN103052251A CN 103052251 A CN103052251 A CN 103052251A CN 2012105209692 A CN2012105209692 A CN 2012105209692A CN 201210520969 A CN201210520969 A CN 201210520969A CN 103052251 A CN103052251 A CN 103052251A
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- glow discharge
- cold plasma
- pole plate
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- low vacuum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention relates to a cold plasma glow discharge generator under a low vacuum state. The cold plasma glow discharge generator comprises a plasma treatment device, wherein the plasma treatment device is arranged in a cavity with adjustable vacuum degree, the plasma treatment device comprises an insulating bracket, a discharging device, a driving roller, a driven roller, a press roller and a conveyor belt, the driving roller and the driven roller are respectively arranged at both ends of the insulating bracket by bearings, the conveyor belt is arranged on the driving roller and the driven roller, the press roller is arranged at one end of the insulating bracket by a bearing, the conveyor belt is pressed on the driving roller, the discharging device is arranged on the insulating bracket, and the conveyor belt penetrates through the inside of the discharging device. The cold plasma glow discharge generator has the advantage that a pole plate structure in the discharging device is improved, and a metal suspension shielding outer casing and an insulation filling material are additionally arranged, the discharging between the pole plate and the inner wall of the cavity is prevented, the displacement current is generated, and the activity of the plasma is improved.
Description
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Technical field
The invention belongs to the plasma generator field, be specifically related to the cold plasma glow discharge generator under a kind of low vacuum state.
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Background technology
In recent years, the application of plasma technique relates to every field, and it has been an important scientific and engineering with global implication that its physics is used with chemistry, can produce tremendous influence to the transformation of high-tech expanding economy and traditional industry.At present, the cold plasma technology has been widely used in the fields such as semiconductor manufacturing, material modification, refuse processing, polymer thin film preparation, agricultural produce.At present domestic relevant cold plasma generator patent is the plasma generator under the normal pressure substantially, comprises radio frequency glow discharge (CN1812686A, CN1859825A, CN101083868A, CN101835339A, CN102573264A, CN2571127Y, CN2604846Y, CN2682772Y), capacitive coupling glow discharge (CN1708204A), contacting glow (CN1642383A), dielectric barrier discharge (CN1819737A, CN1921250A, CN101415292A, CN101835336A, CN102333411A, CN201004732Y), corona discharge (CN1452448A, CN102656953A) etc.In addition, vacuum arc discharge plasma generator (CN1934914A) is also arranged, but it is open that the glow discharge plasma generator patent under the low vacuum condition has no, and mostly existing equipment is to adopt conduction current, cause instrument temperature to raise, needing to increase coolant or structure could the interior temperature of control device.Much simpler and easy existing apparatus for processing plasma is, can't realize processing in batches continuously, be used in the laboratory still can, be used for actual production and then highlight its inefficient deficiency, restricted to a certain extent the industrialization of apparatus for processing plasma.In addition, existing electric discharge device structure limitation, the plasma active particle of generation of low quality.We had found first in the world that cold plasma can produce mutual effect with large biological molecule in 2005, make the energy-producing transition of large biological molecule, be in particular in that the plant physiology activity strengthens greatly, potential adversity gene is expressed, and has improved growth vigor and the anti-adversity of crop.
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Summary of the invention
The technical problem that solves:Quality for the cold plasma active particle that promotes cold plasma generator, improve the operating efficiency of cold plasma modified treatment facility, the invention provides a kind of cold plasma glow discharge generator based on the capacitive reactance discharge, be placed in the low vacuum cavity, by the electrode plate structure of metal suspension shielding, through the cold plasma that displacement current produces material is processed continuously.
Technical scheme:Cold plasma glow discharge generator under the low vacuum state, comprise plasma processing apparatus, described device is located in the adjustable cavity of vacuum degree, this device comprises insulating support, electric discharge device, drive roll, driven voller, pressure roller and conveyer belt, drive roll and driven voller are located at respectively the two ends of insulating support by bearing, conveyer belt is located on drive roll and the driven voller, pressure roller is located at insulating support one end by bearing, conveyer belt is pressed on the drive roll, electric discharge device is located on the insulating support, and conveyer belt passes from the inside of electric discharge device; Described electric discharge device comprises up and down two pole plates that be arranged in parallel, every pole plate is provided with the metal suspension screening can, be filled with insulating material between pole plate and the metal suspension screening can, the spacing on two relative two sides of pole plate is 1.5 ~ 10cm, conveyer belt passes between two pole plates, each pole plate is provided with the pole plate joint, and described pole plate joint is connected with radio frequency source by the radio frequency output line.
The junction of described pole plate joint and pole plate is provided with insulating material.
Described radio frequency source is the dual output electric supply installation, and described dual output electric supply installation comprises AC power and transformer, and described transformer is former edge joint ground only, and the secondary output is connected with load after the insulation protection, and described load is electric discharge device.
Described insulating material is polytetrafluoroethylene, pottery or propylene.
The vacuum degree of described cavity is 90 ~ 180pa.
Described driven voller is provided with tensioning apparatus.
Described cavity, pole plate, metal suspension screening can are stainless steel material.
The axle core of described drive roll, driven voller and pressure roller is stainless steel material, external application electro-insulating rubber layer.
Described conveyer belt is natural macromolecular material, and described natural macromolecular material is cotton, fiber crops, flax or silk based article.
Be working gas in the cavity that described vacuum degree is adjustable, described gas is the mixture of a kind of or any several gases in air, argon gas, oxygen, helium or the nitrogen.
Beneficial effect:This device is present unique cold plasma generating means that can produce with interaction of biomacromolecules, by the electrode plate structure in the electric discharge device is improved, metal suspension screening can and insulation filling material have been increased, stoped the discharge between pole plate and the cavity inner wall, and make it produce displacement current, strengthen the activity of plasma, realized the shielding that suspends; Therefore be different from conduction current in the past, structure of the present invention has been avoided generating heat by electric current between pole plate and cavity, does not need to increase coolant or the structure temperature in just can control device in lower scope, has increased simultaneously the energy density of vacuum-ultraviolet light.By the adjusting of polar plate spacing, can obtain the density of suitable vacuum-ultraviolet light photon.Be different from existing atmospheric pressure glow discharge, corona discharge, the DBD dielectric barrier discharge, the jack ladder discharge, the plasma generating meanss such as slip arc discharge, the active particle energy that cold plasma glow discharge generator under the low vacuum state produces is higher, for example under low vacuum state, carry out glow discharge with argon hydrogen (volume ratio 1:3) mist as medium, the active particle energy that produces reaches 1 ~ 20ev, be in same energy level with electron energy in the large biological molecule, so that cold plasma and large biological molecule mutual effect become possibility, this feature is that at present other plasma discharge apparatus institute is incomparable and replacement.This device arranges conveyer belt between two parallel plate electrodes simultaneously, material can be realized transmitting continuously at conveyer belt, the automaticity of apparatus for processing plasma is further improved, promote treatment effeciency, make the mode material handling with suitability for industrialized production become possibility, bring more wide development space for the cold plasma treatment industry.
Description of drawings
Fig. 1 is the cold plasma glow discharge generator architecture schematic diagram under the low vacuum state, 1-insulating support, 2-electric discharge device, 3-drive roll, 4-driven voller, 5-pressure roller, 6-conveyer belt, 2-2-top crown joint;
Fig. 2 is that the electric discharge device cross-section structure is arranged schematic diagram, 2-1-top crown, 2-2-top crown joint, 2-3-bottom crown, 2-4-bottom crown joint, 2-5-cavity;
Fig. 3 is electric discharge device electrode plate structure schematic diagram, 6-conveyer belt, 7-pole plate, 8-metal suspension screening can, 9-insulating material, 10-pole plate joint, 11-radio frequency source;
Fig. 4 is the operating state comparison diagram of the present invention and existing equipment, and figure A is the operating state of present device, and figure B is the operating state of prior art equipment; As can be seen from Figure, discharge heating between the pole plate of prior art and cavity, and this device has been avoided generating heat by electric current between pole plate and cavity;
Fig. 5 is electric supply installation circuit diagram of the present invention, 12-AC power among the figure, 13-transformer, 14-load.The dual output operation principle: the operation principle of dual output is similar with conventional transformer working principle, and former secondary is stability and the antijamming capability for signal or energy transmission altogether.But in real work because former limit and secondary altogether, the rf electric field imbalance that causes can't be eliminated, and certainly leads to automatic bias and produces the Ions Bombardment that DC electric field causes, two plate electrodes will inevitably pass through conduction current.Connect rear employing dual output interface so we have cancelled, the power of its output has no effect under normal pressure less than changing commonly.Its shielding protection still adopts earthing.The shielding of just having arrived transmission protection dual output in the vacuum cavity is suspension, comprises the metal suspension shielding to pole plate.Retrained and only had between the two plate electrode plates and could discharge, guaranteed the generation of displacement current.
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Embodiment
The present invention is further described below in conjunction with drawings and Examples; be to be understood that; specific embodiment described herein is only in order to explain the present invention; be not intended to limit the present invention; all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., all should be included within protection scope of the present invention.
Embodiment 1:
Cold plasma glow discharge generator under the low vacuum state, as shown in Figure 1, comprise plasma processing apparatus, described device is located in the stainless steel cavity of vacuum degree 90 ~ 180pa, vacuum degree in the cavity is controlled by vacuum pump, be working gas in the cavity, described gas is air, argon, oxygen, a kind of or any several mixture in helium or the nitrogen, this device comprises insulating support 1, electric discharge device 2, drive roll 3, driven voller 4, pressure roller 5 and conveyer belt 6, insulating support is welded by the corrosion resistant plate bending, outer coating insulation material, drive roll 3, the axle core of driven voller 4 and pressure roller 5 is stainless steel material, external application electro-insulating rubber layer, conveyer belt 6 is natural macromolecular material, in order to set up a highfield, described natural macromolecular material is cotton, fiber crops, flax or silk based article, drive roll and driven voller are located at respectively the two ends of insulating support by bearing, conveyer belt is located on drive roll and the driven voller, pressure roller is located at insulating support one end by bearing, conveyer belt is pressed on the drive roll, conveyer belt is non-slip during with assurance work, and described driven voller 4 is provided with tensioning apparatus.Electric discharge device is located on the insulating support, and shown in Fig. 2,3, conveyer belt passes from the inside of electric discharge device; Described electric discharge device 2 comprises two stainless steel polar plates 7 that be arranged in parallel, every pole plate all partly is coated with stainless steel metal suspension screening can 8, described half clad structure such as Fig. 2, shown in 3, this clad structure makes two pole plates only leave exposed opposite face, be filled with polytetrafluoroethylene in pole plate and the formed space of metal suspension screening can, pottery or propylene, filler and pole plate, do not stay the gap between the shell, the spacing on two relative two sides of pole plate is 1.5 ~ 10cm, conveyer belt passes between two pole plates, each pole plate is provided with pole plate joint 10, and described pole plate joint is connected with radio frequency source by the radio frequency output line.Described pole plate joint 10 also is provided with insulating material with the junction of pole plate, avoids the junction electric leakage.As shown in Figure 5, radio frequency source is the dual output electric supply installation, and described dual output electric supply installation comprises AC power 12 and transformer 13, and described transformer is former edge joint ground only, and the secondary output is connected with electric discharge device 2 after the insulation protection.
By finding out among Fig. 4, discharge is generated heat between the pole plate of prior art and cavity, and this device has been avoided generating heat by electric current between pole plate and cavity.
The upper bottom crown of this device is connected the dual output radio frequency source of 13.56MHz, can between pole plate, produce uniform and stable plasma, take argon hydrogen (volume ratio 1:3) mist as working gas as example, carry out glow discharge under low vacuum state, the active particle energy that produces reaches 1 ~ 20ev.
Embodiment 2
As shown in Figure 1, cold plasma glow discharge generator under the low vacuum state, comprise that six parts such as insulating support 1, electric discharge device 2, drive roll 3, driven voller 4, pressure roller 5, conveyer belt 6 form: described insulating support is welded by the corrosion resistant plate bending, outer coating insulation material, two parallel being fixed on the insulating support of pole plate; Drive roll, driven voller and pressure roller are installed on the insulating support by bearing pedestal, can smooth and easyly rotate; Conveyer belt is wrapped on drive roll and the driven voller, and pressure roller is pressed on conveyer belt on the drive roll, and conveyer belt is non-slip during with assurance work.
As shown in Figure 1, the axle core of drive roll 3, driven voller 4 and pressure roller 5 is the stainless steel Raw material processing and forms, external application electro-insulating rubber layer.
As shown in Figure 1, driven voller 3 is provided with tensioning apparatus.Conveyer belt may fluff after equipment used a period of time, but adjusted the bolt re-tensioning conveyer belt on the tensioning apparatus.In addition, also can prevent the conveyer belt sideslip by adjusting tensioning apparatus.
As shown in Figure 1, conveyer belt 6 is natural macromolecular material, in order to set up a highfield.
As shown in Figure 2, top crown 2-1 passes from the cavity 2-5 between the two with the parallel positioned opposite of bottom crown 2-3, conveyer belt, and a pole plate joint is respectively arranged on the upper bottom crown, is convenient to be connected with radio frequency source by the radio frequency output line.
The upper bottom crown of this device is connected the dual output radio frequency source of 13.56MHz, can between pole plate, be produced uniform and stable plasma, as shown in Figure 1.Be equipped with corresponding automatic loading and unloading device and can realize the continuous processing of cold plasma.Carry out glow discharge with argon hydrogen (volume ratio 1:3) mist as working gas under low vacuum state, the active particle energy that produces reaches 1 ~ 20ev.
Claims (10)
1. the cold plasma glow discharge generator under the low vacuum state, it is characterized in that comprising plasma processing apparatus, described device is located in the adjustable cavity of vacuum degree, this device comprises insulating support (1), electric discharge device (2), drive roll (3), driven voller (4), pressure roller (5) and conveyer belt (6), drive roll and driven voller are located at respectively the two ends of insulating support by bearing, conveyer belt is located on drive roll and the driven voller, pressure roller is located at insulating support one end by bearing, conveyer belt is pressed on the drive roll, electric discharge device is located on the insulating support, and conveyer belt passes from the inside of electric discharge device; Described electric discharge device (2) comprises up and down two pole plates (7) that be arranged in parallel, every pole plate is provided with metal suspension screening can (8), be filled with insulating material (9) between pole plate and the metal suspension screening can, the spacing on two relative two sides of pole plate is 1.5 ~ 10cm, conveyer belt passes between two pole plates, each pole plate is provided with pole plate joint (10), and described pole plate joint is connected with radio frequency source by the radio frequency output line.
2. the cold plasma glow discharge generator under the low vacuum state according to claim 1 is characterized in that described pole plate joint (10) and the junction of pole plate are provided with insulating material.
3. the cold plasma glow discharge generator under the low vacuum state according to claim 1; it is characterized in that described radio frequency source is the dual output electric supply installation; described dual output electric supply installation comprises AC power (12) and transformer (13); described transformer is former edge joint ground only; the secondary output is connected with load (14) after the insulation protection, and described load is electric discharge device (2).
4. the cold plasma glow discharge generator under the low vacuum state according to claim 1 and 2 is characterized in that described insulating material is polytetrafluoroethylene, pottery or propylene.
5. the cold plasma glow discharge generator under the low vacuum state according to claim 1, the vacuum degree that it is characterized in that described cavity is 90 ~ 180pa.
6. the cold plasma glow discharge generator under the low vacuum state according to claim 1 is characterized in that described driven voller (4) is provided with tensioning apparatus.
7. the cold plasma glow discharge generator under the low vacuum state according to claim 1 is characterized in that cavity, pole plate, metal suspension screening can are stainless steel material.
8. the cold plasma glow discharge generator under the low vacuum state according to claim 1 is characterized in that the axle core of described drive roll (3), driven voller (4) and pressure roller (5) is stainless steel material, external application electro-insulating rubber layer.
9. the cold plasma glow discharge generator under the low vacuum state according to claim 1 is characterized in that described conveyer belt (6) is natural macromolecular material, and described natural macromolecular material is cotton, fiber crops, flax or silk based article.
10. the cold plasma glow discharge generator under the low vacuum state according to claim 1, it is characterized in that being working gas in the adjustable cavity of described vacuum degree, described gas is the mixture of a kind of or any several gases in air, argon gas, oxygen, helium or the nitrogen.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105209692A CN103052251A (en) | 2012-12-07 | 2012-12-07 | Cold plasma glow discharge generator under low vacuum state |
| PCT/CN2013/073336 WO2014086130A1 (en) | 2012-12-07 | 2013-03-28 | Cold plasma glow discharging generator in low-vacuum state |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012105209692A CN103052251A (en) | 2012-12-07 | 2012-12-07 | Cold plasma glow discharge generator under low vacuum state |
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| CN103052251A true CN103052251A (en) | 2013-04-17 |
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| CN2012105209692A Pending CN103052251A (en) | 2012-12-07 | 2012-12-07 | Cold plasma glow discharge generator under low vacuum state |
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| CN (1) | CN103052251A (en) |
| WO (1) | WO2014086130A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104584728A (en) * | 2015-01-05 | 2015-05-06 | 虞建明 | Equipment for performing modified treatment on medium and large particle seeds by using cold plasma |
| CN110139457A (en) * | 2018-11-06 | 2019-08-16 | 南京苏曼等离子科技有限公司 | Sub- vacuum low-temperature plasma on-line continuous material handling device |
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| WO2014086130A1 (en) | 2014-06-12 |
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Application publication date: 20130417 |