CN103050878A - High-accuracy voltage control method of quasi-molecular laser resonance type charging power supply - Google Patents
High-accuracy voltage control method of quasi-molecular laser resonance type charging power supply Download PDFInfo
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- CN103050878A CN103050878A CN2012105626864A CN201210562686A CN103050878A CN 103050878 A CN103050878 A CN 103050878A CN 2012105626864 A CN2012105626864 A CN 2012105626864A CN 201210562686 A CN201210562686 A CN 201210562686A CN 103050878 A CN103050878 A CN 103050878A
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Abstract
The invention discloses a high-accuracy voltage control method of a quasi-molecular laser resonance type charging power supply. In the real-time accurate feedback adjusting method, the high-accuracy voltage control method is characterized in that in a quasi-molecular laser power supply with the front end adopting the resonance charging power supply and the rear end adopting a magnetic switch, the voltage of a resonance capacitor is sampled and differentially amplified and then is compared with the reference voltage to drive a leaking circuit to carry out leakage on the capacitor. The reference voltage can be controlled by manual control or an output signal of a single chip microcomputer, and the speed and the accuracy can be adjusted and controlled by selecting different resistors. The high-accuracy voltage control method disclosed by the invention has the advantages that accurate and fast control is carried out on a resonance charging part, and the voltage of a resonance capacitor is sampled and differentially amplified and then is compared with the reference voltage to drive a leaking circuit to carry out leakage on the capacitor, so that the final discharging voltage of a quasi-molecular laser can be effectively controlled, and the purpose of accurately controlling the output pulse energy is achieved.
Description
Technical field
The present invention relates to a kind of voltage control method, relate in particular to a kind of high-accuracy voltage control method of excimer laser resonant mode charge power supply.
Background technology
Excimer laser can provide at ultraviolet band the Laser output of high-energy, high-peak power, high light beam quality, because wavelength is short, pulsewidth is short, peak power is high, its output beam makes various metals, nonmetallic materials gasification in cold working, produce neat side cut, without the heat affected area, have a wide range of applications at the little manufacture field excimer laser of industry, irreplaceable status is particularly also arranged especially at present in the ultraviolet photolithographic field.
In recent years, an important developing direction of excimer laser is exactly that high repetition is used, and usually adopts in the magnetic pulse compressor (mpc) exciting circuit in high repetition application at present, and the front end power supply architecture adopts the resonant charging formula usually, as shown in Figure 1.Its course of work is: DC power supply is to storage capacitor C0 charging, the energy after the controllable silicon K1 conducting on the C0 by inductance L 0 to C1 shift and voltage double; After this IGBT pipe K2 conducting, the energy on the C1 transmits to C2 by pulse booster transformer T1; Energy on the C2 is transferred to C3 by magnetic switch MS1, transfers to C4 through magnetic switch MS2 again; Energy alignment molecular laser head on the C4 encourages bright dipping.
Excimer laser need to be realized by the mode of control voltage the control to the output pulse energy, but in above this course of work, pulse boosting process and magnetic pulse compression process are almost uncontrollable, and the adjusting of the output voltage of DC power supply generally is slow process, can't satisfy the pulse energy quick adjustment needs of high frequency excimer laser.
Summary of the invention
The object of the invention is exactly in order to remedy the defective of prior art, a kind of high-accuracy voltage control method of excimer laser resonant mode charge power supply to be provided.
The present invention is achieved by the following technical solutions:
A kind of high-accuracy voltage control method of excimer laser resonant mode charge power supply, the two ends of resonant capacitor C1 are parallel with respectively the resistance R 1 of series connection, the capacitor C a of R2 and series connection, Cb, the two ends of resonant capacitor C1 also connect respectively grid and the drain electrode of IGBT pipe K0, between the drain electrode of resonant capacitor C1 and IGBT pipe K0, be in series with resistance R 0, between resistance R 1 and R2, be provided with node 1, between capacitor C a and Cb, be provided with node 2, node 1 is connected connection with node, the in-phase input end that node 2 also connects follower A1 connects, the inverting input of follower A1 is connected with output, output connects the in-phase input end of differential amplifier A2, inverting input input reference voltage Ref1, output connects the in-phase input end of comparator A3, inverting input input reference voltage Ref2, output connects an input with door A4, another input input triggering signal Time, the source electrode that is connected IGBT pipe K0 with the output of door A4, voltage on the resonant capacitor C1 passes through by resistance R 1, R2, with capacitor C a, the capacitance-resistance sampling microwave network that Cb forms is taken a sample, sampled signal is isolated through follower A1, then carry out differential amplification through differential amplifier A2 and reference voltage Ref1, signal after the amplification compares by comparator A3 and reference voltage Ref2, comparator A3 output signal is by jointly driving IGBT pipe K0 conducting with door A4 and triggering signal Time, electric weight on the resonant capacitor C1 is released by resistance R 0, realizes the control to excimer laser resonant mode charge power supply voltage.
The scope of described reference voltage Ref1, Ref2 is 0～10V.
Described reference voltage Ref1, Ref2 and triggering signal Time are all by manual control or the control of single-chip microcomputer output signal.
Speed and the precision of the resistance value adjusting control by selecting different resistance R 0.
Advantage of the present invention is: the present invention partly carries out accurately the fast method of control in resonant charging, resonant capacitance voltage is released to electric capacity through sampling, differential amplification with reference voltage comparison rear drive leadage circuit, can effectively control the final discharge voltage of excimer laser, reach the purpose of accurate control output pulse energy.
Description of drawings
Fig. 1 is the high repetition circuit for generating of excimer laser.
Fig. 2 is circuit diagram of the present invention.
Embodiment
As shown in Figure 2, a kind of high-accuracy voltage control method of excimer laser resonant mode charge power supply, the two ends of resonant capacitor C1 are parallel with respectively the resistance R 1 of series connection, the capacitor C a of R2 and series connection, Cb, the two ends of resonant capacitor C1 also connect respectively grid and the drain electrode of IGBT pipe K0, between the drain electrode of resonant capacitor C1 and IGBT pipe K0, be in series with resistance R 0, between resistance R 1 and R2, be provided with node 1, between capacitor C a and Cb, be provided with node 2, node 1 is connected connection with node, the in-phase input end that node 2 also connects follower A1 connects, the inverting input of follower A1 is connected with output, output connects the in-phase input end of differential amplifier A2, inverting input input reference voltage Ref1, output connects the in-phase input end of comparator A3, inverting input input reference voltage Ref2, output connects an input with door A4, another input input triggering signal Time, the source electrode that is connected IGBT pipe K0 with the output of door A4, voltage on the resonant capacitor C1 passes through by resistance R 1, R2, with capacitor C a, the capacitance-resistance sampling microwave network that Cb forms is taken a sample, sampled signal is isolated through follower A1, then carry out differential amplification through differential amplifier A2 and reference voltage Ref1, signal after the amplification compares by comparator A3 and reference voltage Ref2, comparator A3 output signal is by jointly driving IGBT pipe K0 conducting with door A4 and triggering signal Time, electric weight on the resonant capacitor C1 is released by resistance R 0, realizes the control to excimer laser resonant mode charge power supply voltage.
The scope of described reference voltage Ref1, Ref2 is 0～10V.
Described reference voltage Ref1, Ref2 and triggering signal Time are all by manual control or the control of single-chip microcomputer output signal.
Speed and the precision of the resistance value adjusting control by selecting different resistance R 0.
Claims (4)
1. the high-accuracy voltage control method of an excimer laser resonant mode charge power supply, it is characterized in that: the two ends of resonant capacitor C1 are parallel with respectively the resistance R 1 of series connection, the capacitor C a of R2 and series connection, Cb, the two ends of resonant capacitor C1 also connect respectively grid and the drain electrode of IGBT pipe K0, between the drain electrode of resonant capacitor C1 and IGBT pipe K0, be in series with resistance R 0, between resistance R 1 and R2, be provided with node 1, between capacitor C a and Cb, be provided with node 2, node 1 is connected connection with node, the in-phase input end that node 2 also connects follower A1 connects, the inverting input of follower A1 is connected with output, output connects the in-phase input end of differential amplifier A2, inverting input input reference voltage Ref1, output connects the in-phase input end of comparator A3, inverting input input reference voltage Ref2, output connects an input with door A4, another input input triggering signal Time, the source electrode that is connected IGBT pipe K0 with the output of door A4, voltage on the resonant capacitor C1 passes through by resistance R 1, R2, with capacitor C a, the capacitance-resistance sampling microwave network that Cb forms is taken a sample, sampled signal is isolated through follower A1, then carry out differential amplification through differential amplifier A2 and reference voltage Ref1, signal after the amplification compares by comparator A3 and reference voltage Ref2, comparator A3 output signal is by jointly driving IGBT pipe K0 conducting with door A4 and triggering signal Time, electric weight on the resonant capacitor C1 is released by resistance R 0, realizes the control to excimer laser resonant mode charge power supply voltage.
2. the high-accuracy voltage control method of excimer laser resonant mode charge power supply according to claim 1, it is characterized in that: the scope of described reference voltage Ref1, Ref2 is 0～10V.
3. the high-accuracy voltage control method of excimer laser resonant mode charge power supply according to claim 1 is characterized in that: described reference voltage Ref1, Ref2 and triggering signal Time are all by manual control or the control of single-chip microcomputer output signal.
4. the high-accuracy voltage control method of excimer laser resonant mode charge power supply according to claim 1 is characterized in that: speed and the precision of the resistance value adjusting control by selecting different resistance R 0.
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| CN201210562686.4A CN103050878B (en) | 2012-12-22 | 2012-12-22 | High-accuracy voltage control method of quasi-molecular laser resonance type charging power supply |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104852276A (en) * | 2014-10-31 | 2015-08-19 | 北京遥测技术研究所 | Pulse-type laser adjustable rapid normal pressure intelligent drive circuit |
| CN110208722A (en) * | 2019-07-15 | 2019-09-06 | 珠海格力电器股份有限公司 | Detect the device and method thereof of DC power supply stability |
| CN112868148A (en) * | 2019-03-01 | 2021-05-28 | Gan系统公司 | Fast pulse, high current laser driver |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4504951A (en) * | 1982-06-01 | 1985-03-12 | American Laser Corporation | High speed switching power supply for a light controlled laser system |
| CN2672926Y (en) * | 2003-09-24 | 2005-01-19 | 郑宣成 | Novel continuous laser power |
| CN201336506Y (en) * | 2008-12-17 | 2009-10-28 | 北京泰富瑞泽科技有限公司 | Excitation power source for laser |
-
2012
- 2012-12-22 CN CN201210562686.4A patent/CN103050878B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4504951A (en) * | 1982-06-01 | 1985-03-12 | American Laser Corporation | High speed switching power supply for a light controlled laser system |
| CN2672926Y (en) * | 2003-09-24 | 2005-01-19 | 郑宣成 | Novel continuous laser power |
| CN201336506Y (en) * | 2008-12-17 | 2009-10-28 | 北京泰富瑞泽科技有限公司 | Excitation power source for laser |
Non-Patent Citations (2)
| Title |
|---|
| 樊友平等: "大功率准分子激光器控制系统研究", 《量子电子学报》, vol. 19, no. 1, 28 February 2002 (2002-02-28), pages 21 - 24 * |
| 王效顺等: "高重复率ArF准分子激光器能量控制算法研究", 《激光技术》, vol. 36, no. 6, 30 November 2012 (2012-11-30), pages 763 - 766 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104852276A (en) * | 2014-10-31 | 2015-08-19 | 北京遥测技术研究所 | Pulse-type laser adjustable rapid normal pressure intelligent drive circuit |
| CN104852276B (en) * | 2014-10-31 | 2017-10-20 | 北京遥测技术研究所 | A kind of adjustable quick normal pressure intelligent drive circuit of pulsed laser |
| CN112868148A (en) * | 2019-03-01 | 2021-05-28 | Gan系统公司 | Fast pulse, high current laser driver |
| CN110208722A (en) * | 2019-07-15 | 2019-09-06 | 珠海格力电器股份有限公司 | Detect the device and method thereof of DC power supply stability |
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| CN103050878B (en) | 2014-12-31 |
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