CN201478679U - Radio-frequency power supply device - Google Patents
Radio-frequency power supply device Download PDFInfo
- Publication number
- CN201478679U CN201478679U CN2009202040794U CN200920204079U CN201478679U CN 201478679 U CN201478679 U CN 201478679U CN 2009202040794 U CN2009202040794 U CN 2009202040794U CN 200920204079 U CN200920204079 U CN 200920204079U CN 201478679 U CN201478679 U CN 201478679U
- Authority
- CN
- China
- Prior art keywords
- output
- power supply
- radio
- multichannel
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Amplifiers (AREA)
Abstract
The utility model provides a radio-frequency power supply device, wherein a multiplexed output synchronizing signal source, power amplifiers, matchers and discharge electrodes are arranged, the output of the matcher is connected and matched with the discharge electrode, and the input of the matcher is connected and matched with the output of the power amplifier; under the power supply action of a DC power supply, the output of the multiplexed output synchronizing signal source is synchronously amplified by multiple paths of the power amplifiers; under the combined action of multiple matches, multiple discharge electrodes conduct radio-frequency discharge to air to cause the air in the multiple discharge electrodes to generate glow; the air generates plasma, and generates laser in a laser resonant cavity; a wireless radio-frequency motivation manner is adopted, and radio-frequency electrodes are arranged outside the resonant cavity and do not contact with discharge air; the frequency of radio radiation is from ten thousand MHz to three million MHz; and air in the glass resonant cavity conducts ionization and discharge, thus avoiding electrode sputtering and corrosion which pollute the resonant cavity and optical devices.
Description
Technical field
The utility model relates to a kind of radio-frequency power supply device.
Background technology
Aspect the gas laser excitation, fast Axial-flow CO particularly
2Laser all encourages with direct-current discharge.CO in the resonant cavity
2Molecule to high level, forms the counter-rotating of population by ground state transition under the excitation of DC electric current, fall to low ergosphere then rapidly, and the photon of emitting is preceding, and vibration repeatedly between the rear window mirror forms the amplification of light behind the resonance, and 50% forms laser after the front window mirror goes out.The electrode of DC electric field all is installed in the resonant cavity glass tube or the joint, directly contacts with discharge gas.How long use not have, the resonant cavity of laser and optical mirror slip just by the coating contamination of these metallics, cause the laser power to descend, and it is inhomogeneous to discharge, beam quality and pattern variation.Be not difficult to find that the metal electrode of DC electric field is ionized and has degraded.Trace it to its cause, be because the gas after the ionization, and lobe pump oil spill steam, in the high temperature that discharge is produced (reaching as high as 200 ℃), during with subsonic flow (about 300 meter per seconds), metal surface to electrode is impacted, and has produced the sputter of negative electrode and degrades, and has caused the loss of material.The lubricating oil that spills in the lobe pump again the metallic that degrades after these sputters, is attached on the tube wall and optical mirror slip of resonant cavity, has caused pollution, has both destroyed the performance of laser, has reduced the life-span of these devices again.
The utility model content
The purpose of this utility model is to provide a kind of radio-frequency power supply device, it adopts the energisation mode of radio frequency, the electrode of radio frequency is placed on outside the resonant cavity, the contact of discord discharge gas, the frequency of radio from 10,000 to three trils are conspicuous, gas in the glass excitation cavity carries out ionization and discharge, thereby avoids electrode sputter and corrosion to cause that resonant cavity and optics pollute.
The technical scheme that the utility model proposed is: a kind of radio-frequency power supply device comprises: multichannel output source of synchronising signal, multichannel power amplifier, multichannel adaptation and multichannel sparking electrode etc.; Wherein, the output of described adaptation connects described sparking electrode and matches, and the input of described adaptation connects the output of described power amplifier and matches; The output of described multichannel output source of synchronising signal, the input of the described power amplifier of access multichannel; The described power amplifier of multichannel amplifies synchronously to the radiofrequency signal of input, and the described adaptation of multichannel carries out radio frequency discharge to the described sparking electrode of multichannel, and the gas in the described sparking electrode of multichannel produces glow discharge.
Wherein, described multichannel output source of synchronising signal is installed in the metal shell, and this multichannel source of synchronising signal inside produces strength with quartz oscillator, and this rf oscillation signal is distributed and multichannel is exported with a distributor.
Wherein, described power amplifier is installed in to be with in the water-cooled metal shell, and this power amplifier is a nonlinear amplifier, and the built-in power tube of this power amplifier is operated on off state.
Wherein, described sparking electrode is positioned at discharge tube, the discharge of sparking electrode be projected as long rectangle, the cross section of sparking electrode is short rectangle, being arranged in the discharge tube of two identical described sparking electrode symmetries forms pair of discharge electrodes.
Wherein, also comprise dc power supply, described dc power supply is simultaneously respectively to a plurality of described power amplifier power supplies.
Wherein, described dc power supply also comprises the output chopper of the power output of regulating described power amplifier, and described output chopper is made up of diode and IGBT, and described IGBT is controlled by a controller, and described IGBT works on off state.
Wherein, described dc power supply also comprises: the three-phase transformer, three-phase commutation bridge and the filter capacitor that the 380V of input are depressurized to 160～170V, filtering through described three-phase commutation bridge rectification and described filter capacitor, produce DC power supply, described radio-frequency power supply device is powered by described output chopper.
Wherein, described adaptation also comprises: the input balancing transformer, shunt capacitor, series reactor and adjustable condenser, described adjustable condenser is parallel on the output port of described adaptation, one end of described series reactor is connected in the anode tap of output port, the other end is connected in an end of described shunt capacitor, the other end of described shunt capacitor is connected in the cathode terminal of output port, the output port of described input balancing transformer is parallel on the two ends of described shunt capacitor, and the input port of described input balancing transformer is parallel on the input port of described adaptation.
Wherein, described power amplifier also comprises: recommend output transformer, MOSFET, mosfet driver, and positive-negative half-cycle separator, wherein, a pair of described MOSFET is connected in described elementary two ends of recommending output transformer, described output of recommending output transformer is connected on the output of described power amplifier, a pair of described mosfet driver is connected on a pair of described MOSFET, the positive half cycle of described positive-negative half-cycle separator and negative half period output port are connected on the input of a pair of described mosfet driver, and the input of described positive-negative half-cycle separator is connected on the input of described power amplifier.
The utility model is by being provided with multichannel output source of synchronising signal, the multichannel power amplifier, the multichannel adaptation, and multichannel sparking electrode, and the output of described adaptation connects described sparking electrode and matches, the input of described adaptation connects the output of described power amplifier and matches, and under the power supply function of DC power supply, the output of described multichannel output source of synchronising signal, synchronous amplification through the described power amplifier of multichannel, under the acting in conjunction of the described adaptation of multichannel, the described sparking electrode of multichannel carries out radio frequency discharge to gas, make the gas in the described sparking electrode of multichannel produce aura, described gas generation plasma, and in laserresonator, produce laser, it adopts the energisation mode of radio frequency, and the electrode of radio frequency is placed on outside the resonant cavity, the contact of discord discharge gas, the frequency of radio from 10,000 to three trils are conspicuous, gas in the glass excitation cavity carries out ionization and discharge, thereby avoids electrode sputter and corrosion to cause that resonant cavity and optics pollute.
Description of drawings
Fig. 1 is the electrical block diagram of the utility model radio-frequency power supply device;
Fig. 2 is the electrical block diagram of the power unit of radio-frequency power supply device shown in Figure 1;
Fig. 3 is the electrical block diagram of the adaptation of radio-frequency power supply device shown in Figure 1;
Fig. 4 is the electrical block diagram of the power amplifier of radio-frequency power supply device shown in Figure 1.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in detail.Be illustrated in figure 1 as the electrical block diagram of the utility model radio-frequency power supply device, this radio-frequency power supply device comprises: multichannel is exported source of synchronising signal 1, multichannel power amplifier 2, multichannel adaptation 3, is reached multichannel sparking electrode 4.
Wherein, described multichannel output source of synchronising signal 1 is installed in the metal shell, and this multichannel source of synchronising signal 1 inside produces strength with quartz oscillator, and this rf oscillation signal is distributed and multichannel is exported with a distributor.
Wherein, described power amplifier 2 is installed in to be with in the water-cooled metal shell, and this power amplifier 2 is a nonlinear amplifier, and these power amplifier 2 built-in power tubes are operated on off state.
Wherein, described sparking electrode 4 is positioned at columniform discharge tube, the discharge of sparking electrode 4 be projected as long rectangle, the cross section of sparking electrode is short rectangle, discharge face is a circular arc, the both sides that are arranged in columniform discharge tube of two identical described sparking electrode 4 symmetries form pair of discharge electrodes.
Wherein, the output of described adaptation 3 is connected to described sparking electrode 4 and matches, the input of described adaptation 3 is connected to the output of described power amplifier 2 and matches, the output of described multichannel output source of synchronising signal 1, insert the input of the described power amplifier 2 of multichannel, the radiofrequency signal of 2 pairs of inputs of the described power amplifier of multichannel is amplified synchronously, and carry out radio frequency discharge by the described sparking electrode 4 of 3 pairs of multichannels of the described adaptation of multichannel, make the gas in the described sparking electrode 4 of multichannel produce glow discharge, described gas generation plasma, and in laserresonator, produce laser.
So this radio-frequency power supply adopts the energisation mode of radio frequency, the electrode of radio frequency is placed on outside the resonant cavity, the contact of discord discharge gas, the frequency of radio from 10,000 to three trils are conspicuous, gas in the glass excitation cavity, carry out ionization and discharge, thereby avoid electrode sputter and corrosion to cause that resonant cavity and optics pollute.
With reference to figure 2, Fig. 2 is the electrical block diagram of the power unit of this radio-frequency power supply device, device 5 shown in Figure 2 is supply unit 5 parts to the direct current supply of a kind of radio-frequency power supply device of Fig. 1, be used for multichannel power amplifier 2 is carried out pulse and direct current supply, promptly installing 5 is power amplifier 2 pulse power supply power supplys.
Described dc power supply device 5 also comprises: three-phase transformer 51, three-phase commutation bridge 52, filter capacitor 53 and chopper 54, described three-phase transformer 51 is depressurized to 160～170V to the 380V of input, pass through the filtering of described three-phase commutation bridge 52 rectifications and described filter capacitor 53 again, produce DC power supply, described DC power supply is carried out pulse power supply by 54 pairs of this radio-frequency power supply devices of described output chopper.
In power supply device 5, described output chopper 54 is made up of diode and IGBT, and described IGBT also is subjected to external controller 6 controls, makes the pulsewidth of described chopper 54 output pulse waveforms and frequency all variable, and described IGBT works on off state.
Described output chopper 54 is used to regulate the power output of described power amplifier 2, and described output chopper 54 also is subjected to external controller 6 controls, makes the pulsewidth of described chopper 54 output pulse waveforms and frequency all variable.
With reference to figure 3, Figure 3 shows that the part of the adaptation 3 of this radio-frequency power supply device, be used for the coupling between sparking electrode 4 and the power amplifier 2.
Wherein, adjustable condenser 34 is parallel on the output port of described adaptation 3, one end of series reactor 33 is connected in the anode tap of output port, the other end is connected in an end of described shunt capacitor 32, the other end of described shunt capacitor 32 is connected in the cathode terminal of output port, the output port of described input balancing transformer 31 is parallel on the two ends of described shunt capacitor 32, and the input port of described input balancing transformer 31 is parallel on the input port of described adaptation 3.
With reference to figure 4, Figure 4 shows that the part of the power amplifier 2 of this radio-frequency power supply device, be used for the radiofrequency signal of multichannel output source of synchronising signal 1 output is amplified to the power amplifier 2 of rated power output, and the power signal that output feeds inserted the input of adaptation 3.
Described power amplifier 2 also comprises: recommend output transformer 24, MOSFET " 23 ", mosfet driver 22, positive-negative half-cycle separator 21.
Wherein, described multichannel output source of synchronising signal 1, except providing the radiofrequency signal for each described power amplifier 2, simultaneously, return mosfet driver 22 dc power supply is provided, a pair of described MOSFET " 23 " is connected in described elementary two ends of recommending output transformer 24, described output of recommending output transformer 24 is connected on the output of described power amplifier 2, a pair of described mosfet driver 22 is connected on a pair of described MOSFET " 23 ", the positive half cycle of described positive-negative half-cycle separator 21 and negative half period output port are connected on the input of a pair of described mosfet driver 22, the input of described positive-negative half-cycle separator 21 is connected on the input of described power amplifier 2, when radiofrequency signal is connected on the input of described power amplifier 2, radiofrequency signal is separated into positive half cycle and negative half-cycle signal through described positive-negative half-cycle separator 21, again by described mosfet driver 22, the signal of positive half cycle and negative half period fed respectively be connected in a pair of MOSFET " 23 " on the described push-pull transformer, positive half cycle of described input and negative half-cycle signal are under the effect of a pair of described MOSFET " 23 ", synthesize complete sine wave signal in the output transformer 24 described recommending, and export by the secondary end of described push-pull transformer 24.
Claims (9)
1. a radio-frequency power supply device is characterized in that, comprising: multichannel output source of synchronising signal, multichannel power amplifier, multichannel adaptation and multichannel sparking electrode etc.; Wherein, the output of described adaptation connects described sparking electrode and matches, and the input of described adaptation connects the output of described power amplifier and matches; The output of described multichannel output source of synchronising signal, the input of the described power amplifier of access multichannel; The described power amplifier of multichannel amplifies synchronously to the radiofrequency signal of input, and the described adaptation of multichannel carries out radio frequency discharge to the described sparking electrode of multichannel, and the gas in the described sparking electrode of multichannel produces glow discharge.
2. radio-frequency power supply device as claimed in claim 1, it is characterized in that: described multichannel output source of synchronising signal is installed in the metal shell, and this multichannel source of synchronising signal inside produces strength with quartz oscillator, and this rf oscillation signal is distributed and multichannel output with a distributor.
3. radio-frequency power supply device as claimed in claim 1 is characterized in that: described power amplifier is installed in to be with in the water-cooled metal shell, and this power amplifier is a nonlinear amplifier, and the built-in power tube of this power amplifier is operated on off state.
4. radio-frequency power supply device as claimed in claim 1, it is characterized in that: described sparking electrode is positioned at discharge tube, the discharge of sparking electrode be projected as long rectangle, the cross section of sparking electrode is short rectangle, being arranged in the discharge tube of two identical described sparking electrode symmetries forms pair of discharge electrodes.
5. radio-frequency power supply device as claimed in claim 1 is characterized in that: also comprise dc power supply, described dc power supply is simultaneously respectively to a plurality of described power amplifier power supplies.
6. radio-frequency power supply device as claimed in claim 5, it is characterized in that: described dc power supply also comprises the output chopper of the power output of regulating described power amplifier, described output chopper is made up of diode and IGBT, described IGBT is controlled by a controller, and described IGBT works on off state.
7. radio-frequency power supply device as claimed in claim 5, it is characterized in that: described dc power supply also comprises: the three-phase transformer, three-phase commutation bridge and the filter capacitor that the 380V of input are depressurized to 160～170V, filtering through described three-phase commutation bridge rectification and described filter capacitor, produce DC power supply, described radio-frequency power supply device is powered by described output chopper.
8. radio-frequency power supply device according to claim 1, it is characterized in that: described adaptation also comprises: the input balancing transformer, shunt capacitor, series reactor and adjustable condenser, described adjustable condenser is parallel on the output port of described adaptation, one end of described series reactor is connected in the anode tap of output port, the other end is connected in an end of described shunt capacitor, the other end of described shunt capacitor is connected in the cathode terminal of output port, the output port of described input balancing transformer is parallel on the two ends of described shunt capacitor, and the input port of described input balancing transformer is parallel on the input port of described adaptation.
9. radio-frequency power supply device as claimed in claim 1, it is characterized in that: described power amplifier also comprises: recommend output transformer, MOSFET, mosfet driver, and positive-negative half-cycle separator, wherein, a pair of described MOSFET is connected in described elementary two ends of recommending output transformer, described output of recommending output transformer is connected on the output of described power amplifier, a pair of described mosfet driver is connected on a pair of described MOSFET, the positive half cycle of described positive-negative half-cycle separator and negative half period output port are connected on the input of a pair of described mosfet driver, and the input of described positive-negative half-cycle separator is connected on the input of described power amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202040794U CN201478679U (en) | 2009-08-25 | 2009-08-25 | Radio-frequency power supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202040794U CN201478679U (en) | 2009-08-25 | 2009-08-25 | Radio-frequency power supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201478679U true CN201478679U (en) | 2010-05-19 |
Family
ID=42414935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202040794U Expired - Fee Related CN201478679U (en) | 2009-08-25 | 2009-08-25 | Radio-frequency power supply device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201478679U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101640369B (en) * | 2009-08-25 | 2011-05-25 | 深圳市大族激光科技股份有限公司 | Radio-frequency (RF) power supply device |
| CN104157541A (en) * | 2013-05-14 | 2014-11-19 | 东京毅力科创株式会社 | Plasma treatment apparatus |
| CN105846301A (en) * | 2016-06-04 | 2016-08-10 | 清华大学深圳研究生院 | High-power and small-volume radio-frequency power supply |
| CN105932859A (en) * | 2016-05-19 | 2016-09-07 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer |
-
2009
- 2009-08-25 CN CN2009202040794U patent/CN201478679U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101640369B (en) * | 2009-08-25 | 2011-05-25 | 深圳市大族激光科技股份有限公司 | Radio-frequency (RF) power supply device |
| CN104157541A (en) * | 2013-05-14 | 2014-11-19 | 东京毅力科创株式会社 | Plasma treatment apparatus |
| CN105932859A (en) * | 2016-05-19 | 2016-09-07 | 清华大学深圳研究生院 | Radio-frequency power supply for mass spectrometer |
| CN105846301A (en) * | 2016-06-04 | 2016-08-10 | 清华大学深圳研究生院 | High-power and small-volume radio-frequency power supply |
| CN105846301B (en) * | 2016-06-04 | 2018-08-14 | 清华大学深圳研究生院 | A kind of high-power small size radio-frequency power supply |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101640369B (en) | Radio-frequency (RF) power supply device | |
| CN103151679B (en) | Based on single chamber bipolar electrode discharge cavity of the cross-flow fan impeller improved | |
| CN201478679U (en) | Radio-frequency power supply device | |
| CN101454863B (en) | Power generator for spectrometry | |
| CN109804452B (en) | Circuit arrangement for supplying high-frequency energy and system for generating an electrical discharge | |
| WO2004095626A3 (en) | Plasma production device and method and rf driver circuit with adjustable duty cycle | |
| WO2006031251A3 (en) | A portable arc-seeded microwave plasma torch | |
| TW200746295A (en) | Etching apparatus and etching method for substrate bevel | |
| CA2448387A1 (en) | Method and apparatus for feedback controlled electrospray | |
| CN105792495B (en) | A kind of device and method generating atmospheric pressure homogeneous plasma brush | |
| CN201829806U (en) | Carbon dioxide laser radio frequency power board | |
| CN101778527B (en) | Independent tuning microwave electron gun with external cathode | |
| CN102315582A (en) | RF (radio frequency) power supply used for CO2 (carbon dioxide) laser | |
| KR20000018134A (en) | Portable Electrodless Microwave Plasma Torch | |
| CN2317561Y (en) | One thousand watt radio frequency exciting fast axial flow carbon dioxide laser | |
| CN103078239B (en) | Microwave gas excitation device and method | |
| CN207872690U (en) | A kind of laser gyro cavity cleaning device | |
| CN202750316U (en) | Electrodeless lamp with long service life | |
| US20050184678A1 (en) | Starting device for a high-pressure discharge lamp, and an illuminating system | |
| CN211829519U (en) | Radio frequency CO2 laser direct current power supply | |
| CN102377097A (en) | Optical fiber plasma discharge laser amplification device and technology | |
| CN110739201B (en) | High-power microwave double-spectrum ultraviolet lamp device | |
| RU2012136495A (en) | HIGH-FREQUENCY RADIATION GENERATOR BASED ON A Hollow Cathode Discharge (OPTIONS) | |
| CN218569482U (en) | Preionization device for radio frequency carbon dioxide laser | |
| CN100588051C (en) | Ultraviolet laser generation device with air as medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100519 Termination date: 20170825 |