CN101640369B - Radio-frequency (RF) power supply device - Google Patents
Radio-frequency (RF) power supply device Download PDFInfo
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- CN101640369B CN101640369B CN2009101896415A CN200910189641A CN101640369B CN 101640369 B CN101640369 B CN 101640369B CN 2009101896415 A CN2009101896415 A CN 2009101896415A CN 200910189641 A CN200910189641 A CN 200910189641A CN 101640369 B CN101640369 B CN 101640369B
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Abstract
The invention provides a radio-frequency (RF) power supply device provided with a multi-way output synchronizing signal source, power amplifiers, matchers and discharging electrodes. The output of each matcher is connected and matched with the discharging electrode; the input of each matcher is connected and matched with the output of the power amplifier; the outputs of the multi-way output synchronizing signal source are synchronously amplified by a plurality of ways of power amplifiers under the power supply action of a direct current power source; the RF discharge of a plurality of ways of discharging electrodes to gas is carried out under the joint action of a plurality of ways of matchers so that the gas in a plurality of ways of discharging electrodes generates glow. The gas produces plasma, generates laser in a laser resonant cavity and adopts a radio RF motivation mode; the RF electrodes are arranged outside the resonant cavity without contacting with the discharged gas; the RF is from 10 thousand to 3 million MHz; and ionization and discharge are carried out by the isolation of the gas in a glass motivation cavity so as to avoid polluting the resonant cavity and optical devices by the sputtering and the erosion of the electrodes.
Description
Technical field
The present invention relates to a kind of radio-frequency power supply device.
Background technology
Aspect the gas laser excitation, fast Axial-flow CO particularly
2Laser all encourages with direct-current discharge.CO in the resonant cavity
2Molecule to high level, forms the counter-rotating of population by ground state transition under the excitation of DC electric current, fall to low ergosphere then rapidly, and the photon of emitting is preceding, and vibration repeatedly between the rear window mirror forms the amplification of light behind the resonance, and 50% forms laser after the front window mirror goes out.The electrode of DC electric field all is installed in the resonant cavity glass tube or the joint, directly contacts with discharge gas.How long use not have, the resonant cavity of laser and optical mirror slip just by the coating contamination of these metallics, cause the laser power to descend, and it is inhomogeneous to discharge, beam quality and pattern variation.Be not difficult to find that the metal electrode of DC electric field is ionized and has degraded.Trace it to its cause, be because the gas after the ionization, and lobe pump oil spill steam, in the high temperature that discharge is produced (reaching as high as 200 ℃), during with subsonic flow (about 300 meter per seconds), metal surface to electrode is impacted, and has produced the sputter of negative electrode and degrades, and has caused the loss of material.The lubricating oil that spills in the lobe pump again the metallic that degrades after these sputters, is attached on the tube wall and optical mirror slip of resonant cavity, has caused pollution, has both destroyed the performance of laser, has reduced the life-span of these devices again.
Summary of the invention
The object of the present invention is to provide a kind of radio-frequency power supply device, it adopts the energisation mode of radio frequency, the electrode of radio frequency is placed on outside the resonant cavity, the contact of discord discharge gas, the frequency of radio from 10,000 to three trils are conspicuous, gas in the glass excitation cavity carries out ionization and discharge, thereby avoids electrode sputter and corrosion to cause that resonant cavity and optics pollute.
Technical scheme proposed by the invention is: a kind of radio-frequency power supply device comprises: multichannel output source of synchronising signal, multichannel power amplifier, multichannel adaptation and multichannel sparking electrode etc.; Wherein, the output of described adaptation connects described sparking electrode and matches, and the input of described adaptation connects the output of described power amplifier and matches; The output of described multichannel output source of synchronising signal, the input of the described power amplifier of access multichannel; The described power amplifier of multichannel amplifies synchronously to the radiofrequency signal of input, and by the described adaptation of multichannel the described sparking electrode of multichannel is carried out radio frequency discharge, makes the gas in the described sparking electrode of multichannel produce glow discharge.
Wherein, described multichannel output source of synchronising signal is installed in the metal shell, and this multichannel source of synchronising signal inside produces strength with quartz oscillator, and this rf oscillation signal is distributed and multichannel is exported with a distributor.
Wherein, described power amplifier is installed in to be with in the water-cooled metal shell, and this power amplifier is a nonlinear amplifier, and the built-in power tube of this power amplifier is operated on off state.
Wherein, described sparking electrode is positioned at discharge tube, the discharge of sparking electrode be projected as long rectangle, the cross section of sparking electrode is short rectangle, being arranged in the discharge tube of two identical described sparking electrode symmetries forms pair of discharge electrodes.
Wherein, also comprise dc power supply, described dc power supply is simultaneously respectively to a plurality of described power amplifier power supplies.
Wherein, described dc power supply also comprises the output chopper of the power output of regulating described power amplifier, described output chopper is made up of diode and IGBT, described IGBT is controlled by external controller also, make the pulsewidth and the frequency of described chopper output pulse waveform all variable, described IGBT works on off state.
Wherein, described dc power supply also comprises: three-phase transformer, three-phase commutation bridge and filter capacitor, described three-phase transformer is depressurized to 160～170V to the 380V of input, pass through the filtering of described three-phase commutation bridge rectification and described filter capacitor again, produce DC power supply, described radio-frequency power supply device is powered by described output chopper.
Wherein, described adaptation also comprises: the input balancing transformer, shunt capacitor, series reactor and adjustable condenser, described adjustable condenser is parallel on the output port of described adaptation, one end of described series reactor is connected in the anode tap of output port, the other end is connected in an end of described shunt capacitor, the other end of described shunt capacitor is connected in the cathode terminal of output port, the output port of described input balancing transformer is parallel on the two ends of described shunt capacitor, and the input port of described input balancing transformer is parallel on the input port of described adaptation.
Wherein, described power amplifier also comprises: recommend output transformer, MOSFET, mosfet driver, and positive-negative half-cycle separator, wherein, a pair of described MOSFET is connected in described elementary two ends of recommending output transformer, described output of recommending output transformer is connected on the output of described power amplifier, a pair of described mosfet driver is connected on a pair of described MOSFET, the positive half cycle of described positive-negative half-cycle separator and negative half period output port are connected on the input of a pair of described mosfet driver, the input of described positive-negative half-cycle separator is connected on the input of described power amplifier, when radiofrequency signal is connected on the input of described power amplifier, radiofrequency signal is separated into positive half cycle and negative half-cycle signal through described positive-negative half-cycle separator, again by described mosfet driver, the signal of positive half cycle and negative half period fed respectively be connected in a pair of MOSFET on the described push-pull transformer, positive half cycle of described input and negative half-cycle signal are under the effect of a pair of described MOSFET, in described push-pull transformer, synthesize complete sine wave signal, and by described push-pull transformer output.
The present invention is by being provided with multichannel output source of synchronising signal, the multichannel power amplifier, the multichannel adaptation, and multichannel sparking electrode, and the output of described adaptation connects described sparking electrode and matches, the input of described adaptation connects the output of described power amplifier and matches, and under the power supply function of DC power supply, the output of described multichannel output source of synchronising signal, synchronous amplification through the described power amplifier of multichannel, under the acting in conjunction of the described adaptation of multichannel, the described sparking electrode of multichannel carries out radio frequency discharge to gas, make the gas in the described sparking electrode of multichannel produce aura, described gas generation plasma, and in laserresonator, produce laser, it adopts the energisation mode of radio frequency, and the electrode of radio frequency is placed on outside the resonant cavity, the contact of discord discharge gas, the frequency of radio from 10,000 to three trils are conspicuous, gas in the glass excitation cavity carries out ionization and discharge, thereby avoids electrode sputter and corrosion to cause that resonant cavity and optics pollute.
Description of drawings
Fig. 1 is the electrical block diagram of radio-frequency power supply device of the present invention;
Fig. 2 is the electrical block diagram of the power unit of radio-frequency power supply device shown in Figure 1;
Fig. 3 is the electrical block diagram of the adaptation of radio-frequency power supply device shown in Figure 1;
Fig. 4 is the electrical block diagram of the power amplifier of radio-frequency power supply device shown in Figure 1.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is described in detail.Be illustrated in figure 1 as the electrical block diagram of radio-frequency power supply device of the present invention, this radio-frequency power supply device comprises: multichannel is exported source of synchronising signal 1, multichannel power amplifier 2, multichannel adaptation 3, is reached multichannel sparking electrode 4.
Wherein, described multichannel output source of synchronising signal 1 is installed in the metal shell, and this multichannel source of synchronising signal 1 inside produces strength with quartz oscillator, and this rf oscillation signal is distributed and multichannel is exported with a distributor.
Wherein, described power amplifier 2 is installed in to be with in the water-cooled metal shell, and this power amplifier 2 is a nonlinear amplifier, and these power amplifier 2 built-in power tubes are operated on off state.
Wherein, described sparking electrode 4 is positioned at columniform discharge tube, the discharge of sparking electrode 4 be projected as long rectangle, the cross section of sparking electrode is short rectangle, discharge face is a circular arc, the both sides that are arranged in columniform discharge tube of two identical described sparking electrode 4 symmetries form pair of discharge electrodes.
Wherein, the output of described adaptation 3 is connected to described sparking electrode 4 and matches, the input of described adaptation 3 is connected to the output of described power amplifier 2 and matches, the output of described multichannel output source of synchronising signal 1, insert the input of the described power amplifier 2 of multichannel, the radiofrequency signal of 2 pairs of inputs of the described power amplifier of multichannel is amplified synchronously, and carry out radio frequency discharge by the described sparking electrode 4 of 3 pairs of multichannels of the described adaptation of multichannel, make the gas in the described sparking electrode 4 of multichannel produce glow discharge, described gas generation plasma, and in laserresonator, produce laser.
So this radio-frequency power supply adopts the energisation mode of radio frequency, the electrode of radio frequency is placed on outside the resonant cavity, the contact of discord discharge gas, the frequency of radio from 10,000 to three trils are conspicuous, gas in the glass excitation cavity, carry out ionization and discharge, thereby avoid electrode sputter and corrosion to cause that resonant cavity and optics pollute.
With reference to figure 2 is the electrical block diagram of the power unit of this radio-frequency power supply device, device 5 shown in Figure 2 is supply unit 5 parts to the direct current supply of a kind of radio-frequency power supply device of Fig. 1, be used for multichannel power amplifier 2 is carried out pulse and direct current supply, promptly installing 5 is power amplifier 2 pulse power supply power supplys.
Described dc power supply device 5 also comprises: three-phase transformer 51, three-phase commutation bridge 52, filter capacitor 53 and chopper 54, described three-phase transformer 51 is depressurized to 160～170V to the 380V of input, pass through the filtering of described three-phase commutation bridge 52 rectifications and described filter capacitor 53 again, produce DC power supply, described DC power supply is carried out pulse power supply by 54 pairs of this radio-frequency power supply devices of described output chopper.
In power supply device 5, described output chopper 54 is made up of diode and IGBT, and described IGBT also is subjected to external controller 6 controls, makes the pulsewidth of described chopper 54 output pulse waveforms and frequency all variable, and described IGBT works on off state.
Described output chopper 54 is used to regulate the power output of described power amplifier 2, and described output chopper 54 also is subjected to external controller 6 controls, makes the pulsewidth of described chopper 54 output pulse waveforms and frequency all variable.
With reference to figure 3, Figure 3 shows that the part of the adaptation 3 of this radio-frequency power supply device, be used for the coupling between sparking electrode 4 and the power amplifier 2.
Wherein, adjustable condenser 34 is parallel on the output port of described adaptation 3, one end of series reactor 33 is connected in the anode tap of output port, the other end is connected in an end of described shunt capacitor 32, the other end of described shunt capacitor 32 is connected in the cathode terminal of output port, the output port of described input balancing transformer 31 is parallel on the two ends of described shunt capacitor 32, and the input port of described input balancing transformer 31 is parallel on the input port of described adaptation 3.
With reference to figure 4, Figure 4 shows that the part of the power amplifier 2 of this radio-frequency power supply device, be used for the radiofrequency signal of multichannel output source of synchronising signal 1 output is amplified to the power amplifier 2 of rated power output, and the power signal that output feeds inserted the input of adaptation 3.
Described power amplifier 2 also comprises: recommend output transformer 24, MOSFET " 23 ", mosfet driver 22, positive-negative half-cycle separator 21.
Wherein, described multichannel output source of synchronising signal 1, except providing the radiofrequency signal for each described power amplifier 2, simultaneously, return mosfet driver 22 dc power supply is provided, a pair of described MOSFET " 23 " is connected in described elementary two ends of recommending output transformer 24, described output of recommending output transformer 24 is connected on the output of described power amplifier 2, a pair of described mosfet driver 22 is connected on a pair of described MOSFET " 23 ", the positive half cycle of described positive-negative half-cycle separator 21 and negative half period output port are connected on the input of a pair of described mosfet driver 22, the input of described positive-negative half-cycle separator 21 is connected on the input of described power amplifier 2, when radiofrequency signal is connected on the input of described power amplifier 2, radiofrequency signal is separated into positive half cycle and negative half-cycle signal through described positive-negative half-cycle separator 21, again by described mosfet driver 22, the signal of positive half cycle and negative half period fed respectively be connected in a pair of MOSFET " 23 " on the described push-pull transformer, positive half cycle of described input and negative half-cycle signal are under the effect of a pair of described MOSFET " 23 ", synthesize complete sine wave signal in the output transformer 24 described recommending, and export by the secondary end of described push-pull transformer 24.
Claims (8)
1. a radio-frequency power supply device is characterized in that, comprising: multichannel output source of synchronising signal, multichannel power amplifier, multichannel adaptation and multichannel sparking electrode; Wherein, the output of described adaptation connects described sparking electrode and matches, and the input of described adaptation connects the output of described power amplifier and matches; The output of described multichannel output source of synchronising signal, the input of the described power amplifier of access multichannel; The described power amplifier of multichannel amplifies synchronously to the radiofrequency signal of input, and the described sparking electrode of multichannel is carried out radio frequency discharge by the described adaptation of multichannel, make the gas in the described sparking electrode of multichannel produce glow discharge, described power amplifier also comprises: recommend output transformer, MOSFET, mosfet driver, and positive-negative half-cycle separator, wherein, a pair of described MOSFET is connected in described elementary two ends of recommending output transformer, described output of recommending output transformer is connected on the output of described power amplifier, a pair of described mosfet driver is connected on a pair of described MOSFET, the positive half cycle of described positive-negative half-cycle separator and negative half period output port are connected on the input of a pair of described mosfet driver, the input of described positive-negative half-cycle separator is connected on the input of described power amplifier, when radiofrequency signal is connected on the input of described power amplifier, radiofrequency signal is separated into positive half cycle and negative half-cycle signal through described positive-negative half-cycle separator, again by described mosfet driver, the signal of positive half cycle and negative half period fed respectively be connected in a pair of MOSFET on the described push-pull transformer, positive half cycle of described input and negative half-cycle signal are under the effect of a pair of described MOSFET, in described push-pull transformer, synthesize complete sine wave signal, and by described push-pull transformer output.
2. radio-frequency power supply device as claimed in claim 1, it is characterized in that: described multichannel output source of synchronising signal is installed in the metal shell, and this multichannel output source of synchronising signal inside produces strength with quartz oscillator, and this rf oscillation signal is distributed and multichannel output with a distributor.
3. radio-frequency power supply device as claimed in claim 1 is characterized in that: described power amplifier is installed in to be with in the water-cooled metal shell, and this power amplifier is a nonlinear amplifier, and the built-in power tube of this power amplifier is operated on off state.
4. radio-frequency power supply device as claimed in claim 1, it is characterized in that: described sparking electrode is positioned at discharge tube, the discharge of sparking electrode be projected as long rectangle, the cross section of sparking electrode is short rectangle, being arranged in the discharge tube of two identical described sparking electrode symmetries forms pair of discharge electrodes.
5. radio-frequency power supply device as claimed in claim 1 is characterized in that: also comprise dc power supply, described dc power supply is simultaneously respectively to the described power amplifier power supply of multichannel.
6. radio-frequency power supply device as claimed in claim 5, it is characterized in that: described dc power supply also comprises the output chopper of the power output of regulating described power amplifier, described output chopper is made up of diode and IGBT, described IGBT is controlled by external controller also, make the pulsewidth and the frequency of described chopper output pulse waveform all variable, described IGBT works on off state.
7. radio-frequency power supply device as claimed in claim 6, it is characterized in that: described dc power supply also comprises: three-phase transformer, three-phase commutation bridge and filter capacitor, described three-phase transformer is depressurized to 160～170V to the 380V of input, pass through the filtering of described three-phase commutation bridge rectification and described filter capacitor again, produce DC power supply, described radio-frequency power supply device is powered by described output chopper.
8. radio-frequency power supply device according to claim 1, it is characterized in that: described adaptation also comprises: the input balancing transformer, shunt capacitor, series reactor and adjustable condenser, described adjustable condenser is parallel on the output port of described adaptation, one end of described series reactor is connected in the anode tap of output port, the other end is connected in an end of described shunt capacitor, the other end of described shunt capacitor is connected in the cathode terminal of output port, the output port of described input balancing transformer is parallel on the two ends of described shunt capacitor, and the input port of described input balancing transformer is parallel on the input port of described adaptation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101896415A CN101640369B (en) | 2009-08-25 | 2009-08-25 | Radio-frequency (RF) power supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101896415A CN101640369B (en) | 2009-08-25 | 2009-08-25 | Radio-frequency (RF) power supply device |
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| CN101640369A CN101640369A (en) | 2010-02-03 |
| CN101640369B true CN101640369B (en) | 2011-05-25 |
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| CN2009101896415A Expired - Fee Related CN101640369B (en) | 2009-08-25 | 2009-08-25 | Radio-frequency (RF) power supply device |
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| US8238400B2 (en) * | 2010-08-09 | 2012-08-07 | Coherent Gmbh | High-precision synchronization of pulsed gas-discharge lasers |
| CN102315582A (en) * | 2011-07-26 | 2012-01-11 | 华中科技大学 | RF (radio frequency) power supply used for CO2 (carbon dioxide) laser |
| US8654805B2 (en) * | 2011-08-23 | 2014-02-18 | Coherent, Inc. | Apparatus and method for balancing combined RF power-supplies for driving a CO2 gas-discharge laser |
| US8952765B2 (en) * | 2012-03-23 | 2015-02-10 | Mks Instruments, Inc. | System and methods of bimodal automatic power and frequency tuning of RF generators |
| CN102695355B (en) * | 2012-03-30 | 2014-12-31 | 马鞍山市同力液压设备制造有限公司 | Remote-controlled dual ignition plasma igniting gun |
| CN103856214B (en) * | 2012-11-28 | 2016-12-21 | 中国科学院微电子研究所 | Method for synchronizing phases of external input signals of radio frequency power supply |
| CN103943448B (en) * | 2013-01-17 | 2016-06-08 | 中微半导体设备(上海)有限公司 | The plasma processing method of a kind of plasma treatment appts |
| JP6126905B2 (en) * | 2013-05-14 | 2017-05-10 | 東京エレクトロン株式会社 | Plasma processing equipment |
| CN104349568A (en) * | 2013-07-30 | 2015-02-11 | 沙嫣 | Radio-frequency power supply for plasma vapor deposition |
| CN105281190B (en) * | 2014-07-22 | 2018-08-03 | 北京热刺激光技术有限责任公司 | A kind of radio-frequency power supply for laser |
| CN109755856B (en) * | 2017-11-07 | 2024-08-23 | 核工业理化工程研究院 | Driving power supply of acousto-optic Q-switched crystal and laser |
| CN110196613B (en) * | 2019-05-28 | 2021-03-30 | 电子科技大学 | Power supply device for DUT in integrated circuit test system |
| CN114063479B (en) * | 2021-11-12 | 2024-01-23 | 华科电子股份有限公司 | Radio frequency power supply control method and system applied to multi-output module of etching machine |
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