CN1996684A - Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system - Google Patents
Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system Download PDFInfo
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- CN1996684A CN1996684A CN 200610166423 CN200610166423A CN1996684A CN 1996684 A CN1996684 A CN 1996684A CN 200610166423 CN200610166423 CN 200610166423 CN 200610166423 A CN200610166423 A CN 200610166423A CN 1996684 A CN1996684 A CN 1996684A
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Abstract
This invention relates to radio board bar CO2 laser matching system changeable capacitor automatic adjusting device and method, wherein, the device comprises variable capacitor C1 and C2, sensor L, co-axis cable, radio board bar CO2 laser, radio source, microwave tester, small signal amplifying circuit, PLC and step in motor. The invention method comprises the following steps: a, radio source inputs radio impulse with space occupancy less than 20 percent and laser starts and the step motor adjusts capacitor in front and back by speed of 50 to 70; radio source inputs power radio impulse for 40 to 60 percent.
Description
Technical field
The present invention relates to a kind of radio-frequency (RF) board bar CO
2Laser especially relates to a kind of radio-frequency (RF) board bar CO
2The automatic regulating equipment of laser matching system and method.Belong to the laser technique field.
Background technology
Radio-frequency (RF) board bar CO
2Laser is by two variable capacitance C
1, C
2Constituted the pin network impedance transformer with an inductance L, it is transformed into the coaxial cable 50 Ω characteristic impedances that link to each other with radio-frequency power supply with the plasma impedance of laser, thereby realizes that radio-frequency (RF) energy is from the areflexia transmission of radio frequency source to laser.In national inventing patent application (200610098045.2) " pulse radiation frequency CO slab
2The build-up of luminance of laser, stable discharging method " in, the variable capacitor C of pin network
2After input low duty ratio radio-frequency pulse, laser build-up of luminance and after this, import 50% duty ratio fully loaded radio-frequency pulse energy, the matching system variable capacitor C of laser
2All to be regulated, so that laser stable operation.The present invention relates to this variable capacitor C
2Automatic regulating equipment and method.
United States Patent (USP) " radio-frequency pumped system ", the patent No. is 4451766 to have narrated a kind of laser radio frequency source of exporting radio-frequency power 100～500W, this radio frequency source uses electronics method fully, utilize feedback circuit to change the voltage of variable capacitance diode, thereby change of the variation of its electric capacity, realized the coupling of laser and radio frequency source with compensate for laser discharge back capacitance.The capacitance of the variable capacitance diode here is 1～2pf, and therefore, the ability of building-out capacitor amount is very limited, can only be used for the radio frequency CO of 10～50W laser power
2On the laser.The maximum of our laser output pulsed laser power reaches 600W.After the laser discharge, the electric capacity the when electric capacity of its plasma does not discharge between the laser pole plate has increased up to a hundred pf, thereby the capacitance compensation of variable capacitance diode method is to the high-power RF CO slab
2The automatic allotment of laser is helpless.
The external network analyzer that also has use based on the large scale integrated circuit technology, measure amplitude and two parameters of phase place of radio-frequency power of the input point of rf (discharge) plasma simultaneously, with the capacitor of its FEEDBACK CONTROL match circuit, thus the coupling of realization radio frequency source and discharge plasma.Though two parameters of amplitude, phase place of the rf (discharge) plasma input point radio-frequency power of measuring are very effective to coupling, measuring instrument is based on the network analyzer of large scale integrated circuit technology, costs an arm and a leg.Laser is as product, and the impedance matching box inside of every laser all is equipped with a network analyzer, will increase cost widely, reduces the competitiveness of product in market.
Summary of the invention
The object of the present invention is to provide a kind of radio-frequency (RF) board bar CO that makes
2The radio-frequency (RF) board bar CO of the smooth build-up of luminance of laser, stable discharging
2The automatic regulating equipment of laser matching system variable capacitor and method.
The object of the present invention is achieved like this: a kind of radio-frequency (RF) board bar CO
2The automatic regulating equipment of laser matching system variable capacitor is characterized in that: it comprises variable capacitance C
1With C
2, inductance L, coaxial cable, radio-frequency (RF) board bar CO
2Laser, radio frequency source, microwave detector, small signal amplification circuit, PLC and stepping motor are with variable capacitance C
1And C
2Positive pole link to each other with inductance L, with variable capacitance C
1Positive pole link to each other with the coaxial cable of 50 Ω, with variable capacitance C
2Positive pole and radio-frequency (RF) board bar CO
2The electrode of laser links to each other, with variable capacitance C
1And C
2Minus earth, constituted the pin network impedance matching box, coaxial cable is linked to each other with the output of radio frequency source, the reflection power monitoring side of the oriented opposite coupler of radio frequency source is linked to each other with the input of microwave detector, the output of microwave detector links to each other with the input of small signal amplification circuit, the output of small signal amplification circuit links to each other with the analog quantity input of PLC, wherein PLC adopts the PLC of transistor output type to realize pulse output function, the pulse output end of PLC links to each other with the Stepping Motor Control device, and the output axle head of stepping motor connects variable capacitance C
2
The present invention installs a microwave detector in the directional coupler reflection power monitoring side of radio-frequency power supply, uses the variable capacitor of the detecting circuit feedback drive stepping motor rotary laser match circuit that is directly proportional with reflection power and reaches coupling.The present invention need not to use complicated network analyzer, also need not the phase parameter of reflection power, just can mechanically change the electric capacity of laser match circuit variable capacitor, has realized that the impedance of complete solid state pulse radio frequency source and laser is mated automatically.Simplify device, reduced measurement parameter, reduced cost widely, increased the market competitiveness of laser.
Concrete regulating step of the present invention is as follows:
The radio-frequency pulse of step 1, radio frequency source input duty cycle≤20%, the laser build-up of luminance, the sampling period T that microwave detector RF-reflective power is set is 200～00ms, each sampling period T
nOnce sampling RF-reflective performance number Pr
n, and with a last sampling period T
N-1Sampled value Pr
N-1Make comparisons, stepping motor is with the positive modulation joint of 50～70 °/s speed variable capacitor C simultaneously
2, this moment Pr
N-1＞Pr
n, RF-reflective power is and reduces trend, and stepping motor continues with the positive modulation joint of 50～70 °/s speed variable capacitor C
2Until Pr
N-1＜Pr
n, illustrating that at this moment RF-reflective power has passed through minimum point and has been increase tendency, stepping motor is then regulated variable capacitor C with the counter-rotating of 10～20 °/s speed
2Make the RF-reflective power reduction, if occur Pr once more
N-1＜Pr
n, stepping motor is then again with the positive modulation joint of 10～20 °/s speed variable capacitor C
2Make the RF-reflective power reduction, if adjusting RF-reflective power in the process that reduces, can not reach the condition of stopping the rotation and occur the situation that reflection power increases once more, then stepping motor is then regulated C with the counter-rotating of 10～20 °/s speed
2, reflection is reduced once more, make in the process of RF-reflective power reduction with low speed rotation at stepping motor, no matter C
2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr
1=Pr
N-1-Pr
n, if RF-reflective power reduction amount Δ Pr
1＜setting reflection power decrease δ
1, then stepping motor stops the rotation, and regulates and finishes; If reflection power decrease Δ Pr
1＞setting reflection power decrease δ
1, stepping motor continues to regulate C with current speed and direction
2Until Δ Pr
1＜δ
1, regulating variable capacitor C
2Make in the process of coupling of plasma impedance of laser, the RF-reflective performance number has shown as minimizing one pole value curve, and therefore, in case increase tendency occurs, opposite spin more at once just can make the RF-reflective performance number remain near the minimum value;
Step 2, radio frequency source input 40～60% duty ratio full power radio-frequency pulses, the sampling period T that microwave detector RF-reflective power is set is 50～200ms, each sampling period T
mOnce sampling RF-reflective performance number Pr
m, and with a last sampling period T
M-1Sampled value Pr
M-1Make comparisons, stepping motor is regulated variable capacitor C with the counter-rotating of 3～10 °/s speed simultaneously
2, this moment Pr
M-1＞Pr
m, RF-reflective power is and reduces trend, and stepping motor continues to regulate C with the counter-rotating of 3～10 °/s speed
2Until Pr
m-1＜Pr
m, RF-reflective power is increase tendency, and stepping motor is then with the positive modulation joint of 3～10 °/s speed C
2Thereby make the RF-reflective power reduction make Pr
M-1＞Pr
m, if occur Pr once more
M-1＜Pr
m, stepping motor is then regulated C with the counter-rotating of 3～10 °/s speed again
2Make the RF-reflective power reduction, in the process of RF-reflective power reduction, no matter C
2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr
2=Pr
M-1-Pr
m, if reflection power decrease Δ Pr
2＜setting reflection power decrease δ
2, then stepping motor stops the rotation, and getting current RF-reflective power is minimum RF-reflective power P r
Min, this time regulate and finish; If reflection power decrease Δ Pr
2＞setting reflection power decrease δ
2, stepping motor continues to regulate C with current speed and direction
2Until Δ Pr
2＜δ
2,, regulate variable capacitor C at input full power radio-frequency pulse
2Make the coupling of the plasma impedance of laser need a time, the RF-reflective performance number has shown as minimizing one pole value curve in this process, therefore, in case increase tendency occurs, opposite spin more at once, the RF-reflective performance number is remained near the minimum value, in laser stable operation process, get minimum RF-reflective power recruitment Δ Pr
Min=current RF-reflective power-minimum RF-reflective power P r
Min, in case Δ Pr appears
Min＞setting RF-reflective power permissible value δ
Prmin, then start stepping motor once more and regulate.
Obviously the present invention also is different from the automatic matching method that United States Patent (USP) 4451766 is realized in the electronics mode purely.In the high-power RF CO slab
2In the automatic coupling of laser, United States Patent (USP) 4451766 can't resolve the compensation of high capacitance, and the present invention has just showed vitality.In the automatic coupling of the pulse radiation frequency source of peak power 8kW and laser was used, through long-time running checking, the present invention was easy, reliable, the practicable adaptation Automatic adjustment method of of high-power RF laser.
Description of drawings
Fig. 1 is a circuit block diagram of the present invention.
Fig. 2 is that low duty ratio build-up of luminance of the present invention is regulated flow chart.
Fig. 3 is that flow chart is regulated in 50% duty ratio full power operation of the present invention.
Among the figure: radio frequency source 1, microwave detector 2, small signal amplification circuit 3, PLC4, stepping motor 5, impedance matching box 6, radio-frequency (RF) board bar CO
2Laser 7, coaxial cable 8, variable capacitance C
1And C
2, inductance L.
Embodiment:
The present invention relates to a kind of radio-frequency (RF) board bar CO
2The automatic regulating equipment of the variable capacitor of laser matching system and method, its adjusting device structure as shown in Figure 1, mainly by radio frequency source 1, microwave detector 2, small signal amplification circuit 3, PLC4, stepping motor 5, impedance matching box 6, radio-frequency (RF) board bar CO
2Laser 7, coaxial cable 8, variable capacitance C
1And C
2Form with inductance L.With variable capacitance C
1And C
2Positive pole link to each other with inductance L, with variable capacitance C
1Positive pole link to each other with the coaxial cable 8 of 50 Ω, with variable capacitance C
2Positive pole and radio-frequency (RF) board bar CO
2The electrode of laser 7 links to each other, with variable capacitance C
1And C
2Minus earth, constituted pin network impedance matching box 6, the output of coaxial cable 8 with radio frequency source 1 linked to each other, the reflection power monitoring side of the oriented opposite coupler of radio frequency source 1 is linked to each other with the input of microwave detector 2, the output of microwave detector 2 links to each other with the input of small signal amplification circuit 3, the output of small signal amplification circuit 3 links to each other with the analog quantity input of PLC4, wherein PLC4 will adopt the PLC of transistor output type to realize pulse output function, can not select the PLC of types such as relay output or controllable silicon output for use, the pulse output end of PLC4 links to each other with the controller of stepping motor 5, and the output axle head of stepping motor 5 connects variable capacitance C
2
The present invention uses the microwave detector of the oriented opposite coupler that is connected radio frequency source to detect RF-reflective power, and through small signal amplification circuit amplification shaping, the analog signal of 0～5V of its output is as input variable, the PLC that adopts transistor-type is as master controller, as executive component, remove the variable capacitor C of control group adaptation with stepping motor
2Rotation, thus make RF-reflective power keep minimum and reach coupling; Under the situation of the different duty ratio radio-frequency pulse energy of radio frequency source input, adopt different rotary speeies to remove to regulate variable capacitor C
2, and in rotation, record adds up the anglec of rotation at any time in the PLC program, when radio frequency source was closed the radio-frequency pulse energy, according to the accumulative total anglec of rotation of record, PLC exported the opposite spin instruction automatically and goes rotating stepper motor to make C
2Be back to the state starting point.
Concrete control method is as follows:
The radio-frequency pulse of step 1, radio frequency source input duty cycle≤20%, the laser build-up of luminance, the sampling period T that microwave detector RF-reflective power is set is 300ms, each sampling period T
nOnce sampling RF-reflective performance number Pr
n, and with a last sampling period T
N-1Sampled value Pr
N-1Make comparisons.Stepping motor is with the positive modulation joint of 60 °/s speed variable capacitor C simultaneously
2, this moment Pr
N-1＞Pr
n, RF-reflective power is and reduces trend, and stepping motor continues with the positive modulation joint of 60 °/s speed variable capacitor C
2Until Pr
N-1＜Pr
n, illustrating that at this moment RF-reflective power has passed through minimum point and has been increase tendency, stepping motor is then regulated variable capacitor C with the counter-rotating of 15 °/s speed
2Make the RF-reflective power reduction, if occur Pr once more
N-1＜Pr
n, stepping motor is then again with the positive modulation joint of 15 °/s speed variable capacitor C
2Make the RF-reflective power reduction.If adjusting RF-reflective power in the process that reduces, can not reach the condition of stopping the rotation and occur the situation that reflection power increases once more, then stepping motor is then regulated C with the counter-rotating of 15 °/s speed
2, reflection is reduced once more.Make in the process of RF-reflective power reduction with low speed rotation at stepping motor, no matter C
2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr
1=Pr
N-1-Pr
n, if RF-reflective power reduction amount Δ Pr
1＜setting reflection power decrease δ
1, δ wherein
1Value according to actual needs degree of regulation determine that as 3 etc., then stepping motor stops the rotation, regulate and finish; If reflection power decrease Δ Pr
1＞setting reflection power decrease δ
1, stepping motor continues to regulate C with current speed and direction
2Until Δ Pr
1＜δ
1Regulating variable capacitor C
2Make in the process of coupling of plasma impedance of laser, the RF-reflective performance number has shown as minimizing one pole value curve, and therefore, in case increase tendency occurs, opposite spin more at once just can make the RF-reflective performance number remain near the minimum value.Its flow process is shown in Fig. 2.
Step 2, radio frequency source are imported 50% duty ratio full power radio-frequency pulse, and the sampling period T that microwave detector RF-reflective power is set is 100ms, each sampling period T
mOnce sampling RF-reflective performance number Pr
m, and with a last sampling period T
M-1Sampled value Pr
M-1Make comparisons.Stepping motor is regulated variable capacitor C with the counter-rotating of 5 °/s speed simultaneously
2, this moment Pr
M-1＞Pr
m, RF-reflective power is and reduces trend, and stepping motor continues to regulate C with the counter-rotating of 5 °/s speed
2Until Pr
M-1＜Pr
m, RF-reflective power is increase tendency, and stepping motor is then with the positive modulation joint of 5 °/s speed C
2Thereby make the RF-reflective power reduction make Pr
M-1＞Pr
m, if occur Pr once more
M-1＜Pr
m, stepping motor is then regulated C with the counter-rotating of 5 °/s speed again
2Make the RF-reflective power reduction.In the process of RF-reflective power reduction, no matter C
2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr
2=Pr
M-1-Pr
m, if reflection power decrease Δ Pr
2＜setting reflection power decrease δ
2, δ wherein
2Value according to actual needs degree of regulation determine that as 2 etc., then stepping motor stops the rotation, getting current RF-reflective power is minimum RF-reflective power P r
Min, this time regulate and finish; If reflection power decrease Δ Pr
2＞setting reflection power decrease δ
2, stepping motor continues to regulate C with current speed and direction
2Until Δ Pr
2＜δ
2At input full power radio-frequency pulse, regulate variable capacitor C
2Make the coupling of the plasma impedance of laser need a time, the RF-reflective performance number has shown as minimizing one pole value curve in this process, therefore, in case increase tendency occurs, opposite spin more at once just can make the RF-reflective performance number remain near the minimum value.In laser stable operation process, get minimum RF-reflective power recruitment Δ Pr
Min=current RF-reflective power-minimum RF-reflective power P r
Min, in case Δ Pr appears
Min＞setting RF-reflective power permissible value δ
Prmin, δ wherein
PrminValue according to actual needs degree of regulation determine, as 8 etc., then start stepping motor once more and regulate.Its flow process is shown in Fig. 3.
Above regulating step is finished by the PLC Automatic Program.
Claims (2)
1, a kind of radio-frequency (RF) board bar CO
2The automatic regulating equipment of laser matching system variable capacitor is characterized in that: it comprises variable capacitance C
1With C
2, inductance L, coaxial cable (8), radio-frequency (RF) board bar CO
2Laser (7), radio frequency source (1), microwave detector (2), small signal amplification circuit (3), PLC (4) and stepping motor (5) are with variable capacitance C
1And C
2Positive pole link to each other with inductance L, with variable capacitance C
1Positive pole link to each other with the coaxial cable (8) of 50 Ω, with variable capacitance C
2Positive pole and radio-frequency (RF) board bar CO
2The electrode of laser (7) links to each other, with variable capacitance C
1And C
2Minus earth, constituted pin network impedance matching box (6), the output of coaxial cable (8) with radio frequency source (1) linked to each other, the reflection power monitoring side of the oriented opposite coupler of radio frequency source (1) is linked to each other with the input of microwave detector (2), the output of microwave detector (2) links to each other with the input of small signal amplification circuit (3), the output of small signal amplification circuit (3) links to each other with the analog quantity input of PLC (4), wherein PLC (4) adopts the PLC of transistor output type to realize pulse output function, the pulse output end of PLC (4) links to each other with the controller of stepping motor (5), and the output axle head of stepping motor (5) connects variable capacitance C
2
2, a kind of radio-frequency (RF) board bar CO as claimed in claim 1
2The Automatic adjustment method of laser matching system variable capacitor is characterized in that: the concrete regulating step of this method is as follows:
The radio-frequency pulse of step 1, radio frequency source input duty cycle≤20%, the laser build-up of luminance, the sampling period T that microwave detector RF-reflective power is set is 200～00ms, each sampling period T
nOnce sampling RF-reflective performance number Pr
n, and with a last sampling period T
N-1Sampled value Pr
N-1Make comparisons, stepping motor is with the positive modulation joint of 50～70 °/s speed variable capacitor C simultaneously
2, this moment Pr
N-1＞Pr
n, RF-reflective power is and reduces trend, and stepping motor continues with the positive modulation joint of 50～70 °/s speed variable capacitor C
2Until Pr
N-1＜Pr
n, illustrating that at this moment RF-reflective power has passed through minimum point and has been increase tendency, stepping motor is then regulated variable capacitor C with the counter-rotating of 10～20 °/s speed
2Make the RF-reflective power reduction, if occur Pr once more
N-1＜Pr
n, stepping motor is then again with the positive modulation joint of 10～20 °/s speed variable capacitor C
2Make the RF-reflective power reduction, if adjusting RF-reflective power in the process that reduces, can not reach the condition of stopping the rotation and occur the situation that reflection power increases once more, then stepping motor is then regulated C with the counter-rotating of 10～20 °/s speed
2, reflection is reduced once more, make in the process of RF-reflective power reduction with low speed rotation at stepping motor, no matter C
2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr
1=Pr
N-1-Pr
n, if RF-reflective power reduction amount Δ Pr
1＜setting reflection power decrease δ
1, then stepping motor stops the rotation, and regulates and finishes; If reflection power decrease Δ Pr
1＞setting reflection power decrease δ
1, stepping motor continues to regulate C with current speed and direction
2Until Δ Pr
1＜δ
1, regulating variable capacitor C
2Make in the process of coupling of plasma impedance of laser, the RF-reflective performance number has shown as minimizing one pole value curve, and therefore, in case increase tendency occurs, opposite spin more at once just can make the RF-reflective performance number remain near the minimum value;
Step 2, radio frequency source input 40～60% duty ratio full power radio-frequency pulses, the sampling period T that microwave detector RF-reflective power is set is 50～200ms, each sampling period T
mOnce sampling RF-reflective performance number Pr
m, and with a last sampling period T
M-1Sampled value Pr
M-1Make comparisons, stepping motor is regulated variable capacitor C with the counter-rotating of 3～10 °/s speed simultaneously
2, this moment Pr
M-1＞Pr
m, RF-reflective power is and reduces trend, and stepping motor continues to regulate C with the counter-rotating of 3～10 °/s speed
2Until Pr
M-1＜Pr
m, RF-reflective power is increase tendency, and stepping motor is then with the positive modulation joint of 3～10 °/s speed C
2Thereby make the RF-reflective power reduction make Pr
M-1＞Pr
m, if occur Pr once more
M-1＜Pr
m, stepping motor is then regulated C with the counter-rotating of 3～10 °/s speed again
2Make the RF-reflective power reduction, in the process of RF-reflective power reduction, no matter C
2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr
2=Pr
M-1-Pr
m, if reflection power decrease Δ Pr
2＜setting reflection power decrease δ
2, then stepping motor stops the rotation, and getting current RF-reflective power is minimum RF-reflective power P r
Min, this time regulate and finish; If reflection power decrease Δ Pr
2＞setting reflection power decrease δ
2, stepping motor continues to regulate C with current speed and direction
2Until Δ Pr
2＜δ
2,
In laser stable operation process, get minimum RF-reflective power recruitment Δ Pr
Min=current RF-reflective power-minimum RF-reflective power P r
Min, in case Δ Pr appears
Min＞setting RF-reflective power permissible value δ Pr
Min, then start stepping motor once more and regulate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101664236A CN100483870C (en) | 2006-12-25 | 2006-12-25 | Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101664236A CN100483870C (en) | 2006-12-25 | 2006-12-25 | Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1996684A true CN1996684A (en) | 2007-07-11 |
| CN100483870C CN100483870C (en) | 2009-04-29 |
Family
ID=38251663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101664236A Expired - Fee Related CN100483870C (en) | 2006-12-25 | 2006-12-25 | Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system |
Country Status (1)
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|---|---|
| CN (1) | CN100483870C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101640369B (en) * | 2009-08-25 | 2011-05-25 | 深圳市大族激光科技股份有限公司 | Radio-frequency (RF) power supply device |
| CN102638280A (en) * | 2012-04-19 | 2012-08-15 | 汤姆逊广播电视技术(北京)有限公司 | Self-adaption tuning system of middle-wave broadcast transmitting antenna |
| CN102801433A (en) * | 2012-04-19 | 2012-11-28 | 汤姆逊广播电视技术(北京)有限公司 | Method for tuning adaptive matching network of medium wave broadcast transmission antenna |
| CN103797664A (en) * | 2011-08-23 | 2014-05-14 | 相干公司 | Apparatus and method for balancing combined RF power-supplies for driving a CO2 gas-discharge laser |
| CN110768596A (en) * | 2019-11-08 | 2020-02-07 | 北京北方华创微电子装备有限公司 | Position calibration device of stepping motor, radio frequency matcher and semiconductor equipment |
| CN117713733A (en) * | 2024-02-04 | 2024-03-15 | 深圳市广能达半导体科技有限公司 | Matching method, device, equipment and medium based on semi-automatic radio frequency matcher |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1988002936A1 (en) * | 1986-10-14 | 1988-04-21 | Fanuc Ltd | Laser device excited by rf discharge |
| CN1020255C (en) * | 1990-06-13 | 1993-04-14 | 天津大学 | Mier-wave therapeutic apparatus with stable power output |
| CN100362692C (en) * | 2005-05-17 | 2008-01-16 | 华中科技大学 | VHF/UHF electricity-tunable filter |
| CN200994038Y (en) * | 2006-12-27 | 2007-12-19 | 江苏新潮科技集团有限公司 | Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system |
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| CN101640369B (en) * | 2009-08-25 | 2011-05-25 | 深圳市大族激光科技股份有限公司 | Radio-frequency (RF) power supply device |
| CN103797664A (en) * | 2011-08-23 | 2014-05-14 | 相干公司 | Apparatus and method for balancing combined RF power-supplies for driving a CO2 gas-discharge laser |
| CN103797664B (en) * | 2011-08-23 | 2016-05-18 | 相干公司 | For balance drive CO2Equipment and the method for the combination RF power supply of gas discharge laser |
| CN102638280A (en) * | 2012-04-19 | 2012-08-15 | 汤姆逊广播电视技术(北京)有限公司 | Self-adaption tuning system of middle-wave broadcast transmitting antenna |
| CN102801433A (en) * | 2012-04-19 | 2012-11-28 | 汤姆逊广播电视技术(北京)有限公司 | Method for tuning adaptive matching network of medium wave broadcast transmission antenna |
| CN110768596A (en) * | 2019-11-08 | 2020-02-07 | 北京北方华创微电子装备有限公司 | Position calibration device of stepping motor, radio frequency matcher and semiconductor equipment |
| CN110768596B (en) * | 2019-11-08 | 2023-01-17 | 北京北方华创微电子装备有限公司 | Position calibration device of stepping motor, radio frequency matcher and semiconductor equipment |
| CN117713733A (en) * | 2024-02-04 | 2024-03-15 | 深圳市广能达半导体科技有限公司 | Matching method, device, equipment and medium based on semi-automatic radio frequency matcher |
| CN117713733B (en) * | 2024-02-04 | 2024-04-16 | 深圳市广能达半导体科技有限公司 | Matching method, device, equipment and medium based on semi-automatic radio frequency matcher |
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| CN100483870C (en) | 2009-04-29 |
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