CN200994038Y - Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system - Google Patents

Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system Download PDF

Info

Publication number
CN200994038Y
CN200994038Y CN 200620170812 CN200620170812U CN200994038Y CN 200994038 Y CN200994038 Y CN 200994038Y CN 200620170812 CN200620170812 CN 200620170812 CN 200620170812 U CN200620170812 U CN 200620170812U CN 200994038 Y CN200994038 Y CN 200994038Y
Authority
CN
China
Prior art keywords
radio
laser
plc
frequency
stepping motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 200620170812
Other languages
Chinese (zh)
Inventor
高允贵
胡浩
丁义国
李向阳
顾鸿璋
朱永祥
牟文智
张龙华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIANGSU XINCHAO GROUP CO Ltd
Original Assignee
JIANGSU XINCHAO GROUP CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIANGSU XINCHAO GROUP CO Ltd filed Critical JIANGSU XINCHAO GROUP CO Ltd
Priority to CN 200620170812 priority Critical patent/CN200994038Y/en
Application granted granted Critical
Publication of CN200994038Y publication Critical patent/CN200994038Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Lasers (AREA)

Abstract

The utility model relates to an automatic adjustment device for the variable capacitors of the matching system of a radio-frequency slab CO<2> laser. The device comprises variable capacitor C(1) and C(2), an inductor L, a coaxial cable (8), a radio-frequency slab CO<2> laser, a radio-frequency source (1), a microwave detector (2), a small signal amplifying circuit (3), a PLC (4) and a stepping motor (5). The anodes of the variable capacitors C(1) and C(2) are connected with the inductor L, the anode of the variable capacitor C(1) is connected with the 500-ohim coaxial cable, and the anode of the variable capacitor C(2) is connected with the electrode of the radio-frequency slab CO<2> laser, thus forming a pi-shaped network resistance match (6). The coaxial cable is connected with the output terminal of the radio-frequency source, and the refraction power monitoring end of the inverse directional coupler of the radio-frequency source is connected with the input terminal of the microwave detector. The output terminal of the microwave detector is connected with the input terminal of the small signal amplifying circuit, the output terminal of the small signal amplifying circuit is connected with the PLC, the PLC is connected with the controller of the stepping motor, and the stepping motor is connected with the variable capacitor C(2). The utility model enables the radio-frequency slab CO<2> laser to start smoothly and discharge stably.

Description

Radio-frequency (RF) board bar CO 2The automatic regulating equipment of laser matching system variable capacitor
Technical field
The utility model relates to a kind of radio-frequency (RF) board bar CO 2Laser especially relates to a kind of radio-frequency (RF) board bar CO 2The automatic regulating equipment of laser matching system.Belong to the laser technique field.
Background technology
Radio-frequency (RF) board bar CO 2Laser is by two variable capacitance C 1, C 2Constituted the pin network impedance transformer with an inductance L, it is transformed into the coaxial cable 50 Ω characteristic impedances that link to each other with radio-frequency power supply with the plasma impedance of laser, thereby realizes that radio-frequency (RF) energy is from the areflexia transmission of radio frequency source to laser.In china national practical new-type patent application (200610098045.2) " pulse radiation frequency CO slab 2The build-up of luminance of laser, stable discharging method " in, the variable capacitor C of pin network 2After input low duty ratio radio-frequency pulse, laser build-up of luminance and after this, import 50% duty ratio fully loaded radio-frequency pulse energy, the matching system variable capacitor C of laser 2All to be regulated, so that laser stable operation.The utility model has related to this variable capacitor C 2Automatic regulating equipment.
United States Patent (USP) " radio-frequency pumped system ", the patent No. is 4451766 to have narrated a kind of laser radio frequency source of exporting radio-frequency power 100～500W, this radio frequency source uses electronics method fully, utilize feedback circuit to change the voltage of variable capacitance diode, thereby change of the variation of its electric capacity, realized the coupling of laser and radio frequency source with compensate for laser discharge back capacitance.The capacitance of the variable capacitance diode here is 1～2pf, and therefore, the ability of building-out capacitor amount is very limited, can only be used for the radio frequency CO of 10～50W laser power 2On the laser.The maximum of our laser output pulsed laser power reaches 600W.After the laser discharge, the electric capacity the when electric capacity of its plasma does not discharge between the laser pole plate has increased up to a hundred pf, thereby the capacitance compensation of variable capacitance diode method is to the high-power RF CO slab 2The automatic allotment of laser is helpless.
The external network analyzer that also has use based on the large scale integrated circuit technology, measure amplitude and two parameters of phase place of radio-frequency power of the input point of rf (discharge) plasma simultaneously, with the capacitor of its FEEDBACK CONTROL match circuit, thus the coupling of realization radio frequency source and discharge plasma.Though two parameters of amplitude, phase place of the rf (discharge) plasma input point radio-frequency power of measuring are very effective to coupling, measuring instrument is based on the network analyzer of large scale integrated circuit technology, costs an arm and a leg.Laser is as product, and the impedance matching box inside of every laser all is equipped with a network analyzer, will increase cost widely, reduces the competitiveness of product in market.
Summary of the invention
The purpose of this utility model is to provide a kind of radio-frequency (RF) board bar CO that makes 2The radio-frequency (RF) board bar CO of the smooth build-up of luminance of laser, stable discharging 2The automatic regulating equipment of laser matching system variable capacitor.
The purpose of this utility model is achieved in that a kind of radio-frequency (RF) board bar CO 2The automatic regulating equipment of laser matching system variable capacitor is characterized in that: it comprises variable capacitance C 1With C 2, inductance L, coaxial cable, radio-frequency (RF) board bar CO 2Laser, radio frequency source, microwave detector, small signal amplification circuit, PLC and stepping motor are with variable capacitance C 1And C 2Positive pole link to each other with inductance L, with variable capacitance C 1Positive pole link to each other with the coaxial cable of 50 Ω, with variable capacitance C 2Positive pole and radio-frequency (RF) board bar CO 2The electrode of laser links to each other, with variable capacitance C 1And C 2Minus earth, constituted the pin network impedance matching box, coaxial cable is linked to each other with the output of radio frequency source, the reflection power monitoring side of the oriented opposite coupler of radio frequency source is linked to each other with the input of microwave detector, the output of microwave detector links to each other with the input of small signal amplification circuit, the output of small signal amplification circuit links to each other with the analog quantity input of PLC, wherein PLC adopts the PLC of transistor output type to realize pulse output function, the pulse output end of PLC links to each other with the Stepping Motor Control device, and the output axle head of stepping motor connects variable capacitance C 2
The utility model is installed a microwave detector in the directional coupler reflection power monitoring side of radio-frequency power supply, uses the variable capacitor of the detecting circuit feedback drive stepping motor rotary laser match circuit that is directly proportional with reflection power and reaches coupling.The utility model need not to use complicated network analyzer, also need not the phase parameter of reflection power, just can mechanically change the electric capacity of laser match circuit variable capacitor, has realized that the impedance of complete solid state pulse radio frequency source and laser is mated automatically.Simplify device, reduced measurement parameter, reduced cost widely, increased the market competitiveness of laser.
Obviously the utility model also is different from the automatic matching method that United States Patent (USP) 4451766 is realized in the electronics mode purely.In the high-power RF CO slab 2In the automatic coupling of laser, United States Patent (USP) 4451766 can't resolve the compensation of high capacitance, and the utility model has just showed vitality.In the automatic coupling of the pulse radiation frequency source of peak power 8kW and laser was used, through long-time running checking, the utility model was easy, reliable, the practicable adaptation Automatic adjustment method of of high-power RF laser.
Description of drawings
Fig. 1 is a circuit block diagram of the present utility model.
Fig. 2 is that low duty ratio build-up of luminance of the present utility model is regulated flow chart.
Fig. 3 is that flow chart is regulated in 50% duty ratio full power operation of the present utility model.
Among the figure: radio frequency source 1, microwave detector 2, small signal amplification circuit 3, PLC4, stepping motor 5, impedance matching box 6, radio-frequency (RF) board bar CO 2Laser 7, coaxial cable 8, variable capacitance C 1And C 2, inductance L.
Embodiment:
The utility model relates to a kind of radio-frequency (RF) board bar CO 2The automatic regulating equipment of the variable capacitor of laser matching system, its structure as shown in Figure 1, mainly by radio frequency source 1, microwave detector 2, small signal amplification circuit 3, PLC4, stepping motor 5, impedance matching box 6, radio-frequency (RF) board bar CO 2Laser 7, coaxial cable 8, variable capacitance C 1And C 2Form with inductance L.With variable capacitance C 1And C 2Positive pole link to each other with inductance L, with variable capacitance C 1Positive pole link to each other with the coaxial cable 8 of 50 Ω, with variable capacitance C 2Positive pole and radio-frequency (RF) board bar CO 2The electrode of laser 7 links to each other, with variable capacitance C 1And C 2Minus earth, constituted pin network impedance matching box 6, the output of coaxial cable 8 with radio frequency source 1 linked to each other, the reflection power monitoring side of the oriented opposite coupler of radio frequency source 1 is linked to each other with the input of microwave detector 2, the output of microwave detector 2 links to each other with the input of small signal amplification circuit 3, the output of small signal amplification circuit 3 links to each other with the analog quantity input of PLC4, wherein PLC4 will adopt the PLC of transistor output type to realize pulse output function, can not select the PLC of types such as relay output or controllable silicon output for use, the pulse output end of PLC4 links to each other with the controller of stepping motor 5, and the output axle head of stepping motor 5 connects variable capacitance C 2
The utility model uses the microwave detector of the oriented opposite coupler that is connected radio frequency source to detect RF-reflective power, and through small signal amplification circuit amplification shaping, the analog signal of 0～5V of its output is as input variable, the PLC that adopts transistor-type is as master controller, as executive component, remove the variable capacitor C of control group adaptation with stepping motor 2Rotation, thus make RF-reflective power keep minimum and reach coupling; Under the situation of the different duty ratio radio-frequency pulse energy of radio frequency source input, adopt different rotary speeies to remove to regulate variable capacitor C 2, and in rotation, record adds up the anglec of rotation at any time in the PLC program, when radio frequency source was closed the radio-frequency pulse energy, according to the accumulative total anglec of rotation of record, PLC exported the opposite spin instruction automatically and goes rotating stepper motor to make C 2Be back to the state starting point.
Concrete control method is as follows:
The radio-frequency pulse of step 1, radio frequency source input duty cycle≤20%, the laser build-up of luminance, the sampling period T that microwave detector RF-reflective power is set is 300ms, each sampling period T nOnce sampling RF-reflective performance number Pr n, and with a last sampling period T N-1Sampled value Pr N-1Make comparisons.Stepping motor is with the positive modulation joint of 60 °/s speed variable capacitor C simultaneously 2, this moment Pr N-1＞Pr n, RF-reflective power is and reduces trend, and stepping motor continues with the positive modulation joint of 60 °/s speed variable capacitor C 2Until Pr N-1＜Pr n, illustrating that at this moment RF-reflective power has passed through minimum point and has been increase tendency, stepping motor is then regulated variable capacitor C with the counter-rotating of 15 °/s speed 2Make the RF-reflective power reduction, if occur Pr once more N-1＜Pr n, stepping motor is then again with the positive modulation joint of 15 °/s speed variable capacitor C 2Make the RF-reflective power reduction.If adjusting RF-reflective power in the process that reduces, can not reach the condition of stopping the rotation and occur the situation that reflection power increases once more, then stepping motor is then regulated C with the counter-rotating of 15 °/s speed 2, reflection is reduced once more.Make in the process of RF-reflective power reduction with low speed rotation at stepping motor, no matter C 2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr 1=Pr N-1-Pr n, if RF-reflective power reduction amount Δ Pr 1＜setting reflection power decrease δ 1, δ wherein 1Value according to actual needs degree of regulation determine that as 3 etc., then stepping motor stops the rotation, regulate and finish; If reflection power decrease Δ Pr 1＞setting reflection power decrease δ 1, stepping motor continues to regulate C with current speed and direction 2Until Δ Pr 1＜δ 1Regulating variable capacitor C 2Make in the process of coupling of plasma impedance of laser, the RF-reflective performance number has shown as minimizing one pole value curve, and therefore, in case increase tendency occurs, opposite spin more at once just can make the RF-reflective performance number remain near the minimum value.Its flow process is shown in Fig. 2.
Step 2, radio frequency source are imported 50% duty ratio full power radio-frequency pulse, and the sampling period T that microwave detector RF-reflective power is set is 100ms, each sampling period T mOnce sampling RF-reflective performance number Pr m, and with a last sampling period T M-1Sampled value Pr M-1Make comparisons.Stepping motor is regulated variable capacitor C with the counter-rotating of 5 °/s speed simultaneously 2, this moment Pr M-1＞Pr m, RF-reflective power is and reduces trend, and stepping motor continues to regulate C with the counter-rotating of 5 °/s speed 2Until Pr M-1＜Pr m, RF-reflective power is increase tendency, and stepping motor is then with the positive modulation joint of 5 °/s speed C 2Thereby make the RF-reflective power reduction make Pr M-1＞Pr m, if occur Pr once more M-1＜Pr m, stepping motor is then regulated C with the counter-rotating of 5 °/s speed again 2Make the RF-reflective power reduction.In the process of RF-reflective power reduction, no matter C 2Be just to change or reverse, get RF-reflective power reduction amount Δ Pr 2=Pr M-1-Pr m, if reflection power decrease Δ Pr 2＜setting reflection power decrease δ 2, δ wherein 2Value according to actual needs degree of regulation determine that as 2 etc., then stepping motor stops the rotation, getting current RF-reflective power is minimum RF-reflective power P r Min, this time regulate and finish; If reflection power decrease Δ Pr 2＞setting reflection power decrease δ 2, stepping motor continues to regulate C with current speed and direction 2Until Δ Pr 2＜δ 2At input full power radio-frequency pulse, regulate variable capacitor C 2Make the coupling of the plasma impedance of laser need a time, the RF-reflective performance number has shown as minimizing one pole value curve in this process, therefore, in case increase tendency occurs, opposite spin more at once just can make the RF-reflective performance number remain near the minimum value.In laser stable operation process, get minimum RF-reflective power recruitment Δ Pr Min=current RF-reflective power-minimum RF-reflective power P r Min, in case Δ Pr appears Min＞setting RF-reflective power permissible value δ Prmin, δ wherein PrminValue according to actual needs degree of regulation determine, as 8 etc., then start stepping motor once more and regulate.Its flow process is shown in Fig. 3.
Above regulating step is finished by the PLC Automatic Program.

Claims (1)

1, a kind of radio-frequency (RF) board bar CO 2The automatic regulating equipment of laser matching system variable capacitor is characterized in that: it comprises variable capacitance C 1With C 2, inductance L, coaxial cable (8), radio-frequency (RF) board bar CO 2Laser (7), radio frequency source (1), microwave detector (2), small signal amplification circuit (3), PLC (4) and stepping motor (5) are with variable capacitance C 1And C 2Positive pole link to each other with inductance L, with variable capacitance C 1Positive pole link to each other with the coaxial cable (8) of 50 Ω, with variable capacitance C 2Positive pole and radio-frequency (RF) board bar CO 2The electrode of laser (7) links to each other, with variable capacitance C 1And C 2Minus earth, constituted pin network impedance matching box (6), the output of coaxial cable (8) with radio frequency source (1) linked to each other, the reflection power monitoring side of the oriented opposite coupler of radio frequency source (1) is linked to each other with the input of microwave detector (2), the output of microwave detector (2) links to each other with the input of small signal amplification circuit (3), the output of small signal amplification circuit (3) links to each other with the analog quantity input of PLC (4), wherein PLC (4) adopts the PLC of transistor output type to realize pulse output function, the pulse output end of PLC (4) links to each other with the controller of stepping motor (5), and the output axle head of stepping motor (5) connects variable capacitance C 2
CN 200620170812 2006-12-27 2006-12-27 Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system Expired - Lifetime CN200994038Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200620170812 CN200994038Y (en) 2006-12-27 2006-12-27 Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200620170812 CN200994038Y (en) 2006-12-27 2006-12-27 Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system

Publications (1)

Publication Number Publication Date
CN200994038Y true CN200994038Y (en) 2007-12-19

Family

ID=38947110

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200620170812 Expired - Lifetime CN200994038Y (en) 2006-12-27 2006-12-27 Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system

Country Status (1)

Country Link
CN (1) CN200994038Y (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100483870C (en) * 2006-12-25 2009-04-29 江苏新潮科技集团有限公司 Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system
CN113075894A (en) * 2021-03-24 2021-07-06 中国科学院空天信息创新研究院 CO based on radio frequency power supply2Intelligent development control system for laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100483870C (en) * 2006-12-25 2009-04-29 江苏新潮科技集团有限公司 Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system
CN113075894A (en) * 2021-03-24 2021-07-06 中国科学院空天信息创新研究院 CO based on radio frequency power supply2Intelligent development control system for laser

Similar Documents

Publication Publication Date Title
CN100483870C (en) Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system
CN103973114B (en) A kind of DC source of power limitation control
CN105048613B (en) A kind of intelligent charger for electric bicycle
CN110988445B (en) Power grid operation data acquisition system
CN101465609B (en) Output power supervisory circuit and control circuit for AC/DC converting circuit
CN100592237C (en) Intelligent switch power source power detection and control device
CN107153137B (en) The monitoring device and method of DCM booster converter inductance and output capacitance
CN107248808B (en) A kind of power converter control circuit of achievable controller parameter Self-tuning System
CN102290998B (en) Method and circuit for controlling power converter to provide output voltage and circuit adjustment
CN101887073A (en) High voltage power supply for direct current characteristics test of zinc oxide arrester
CN102868293A (en) Slope compensating method and device of fixed turn-off time control switch converter
CN200994038Y (en) Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system
CN102882288A (en) Wireless power transmission system and control method thereof
CN201966889U (en) Integrator for optimizing frequency response characteristic of intruding wave recording device of transformer substation
CN104767290B (en) A kind of vicariouss wireless power supply system two close cycles constant output current control method
CN104135085A (en) Frequency tracking and tuning method for sending terminal of wireless power transmission device
CN102347758B (en) Slope compensation and summing circuit with configurable slope
CN105517217B (en) A kind of microcontroller control high-frequency induction heating power
CN103312135A (en) Ripple-reducing noise-suppressing circuit used for adjustable precise direct current large current source and control method
CN106961216B (en) Novel constant exports electric current BUCK circuit
CN107968583A (en) Line loss compensation device, integrated circuit and the Switching Power Supply of Switching Power Supply
CN115021425A (en) Wireless power transmission system with frequency tracking and bridge arm power detection functions
CN205092770U (en) Power management circuit that steps up
CN101483385A (en) Resonance invalidation compensation method and circuit for resonance switch commutator
CN113740609A (en) Self-adaptive current source impedance measuring device and measuring method

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Effective date of abandoning: 20090429

C25 Abandonment of patent right or utility model to avoid double patenting