CN103041743A - Stirring blade for stirring silicon chip grinding fluid - Google Patents
Stirring blade for stirring silicon chip grinding fluid Download PDFInfo
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- CN103041743A CN103041743A CN2012105790801A CN201210579080A CN103041743A CN 103041743 A CN103041743 A CN 103041743A CN 2012105790801 A CN2012105790801 A CN 2012105790801A CN 201210579080 A CN201210579080 A CN 201210579080A CN 103041743 A CN103041743 A CN 103041743A
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- stirring
- silicon chip
- arc convex
- grinding fluid
- paddle
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a stirring blade for stirring silicon chip grinding fluid, which comprises a stirring blade body. The stirring blade body comprises a connecting part; the edge of the connecting part is uniformly provided with arc convex surfaces; each arc convex surface is provided with a corresponding stirring slice; and the stirring slices are vertically connected with the corresponding arc convex surfaces. In the stirring process, the stirring blade stirs by the arc convex surfaces at the edge of the stirring slices and the stirring slices and longitudinal and transverse stirring is formed, so that not only is the stirring area increased, but also the flow direction of particles is changed, and thus, the particles in the grinding fluid is more uniformly dispersed and the cutting quality of a silicon chip is greatly improved.
Description
Technical field
The present invention relates to a kind of paddle, particularly a kind of agitating device of grinding fluid for silicon chip belongs to the technical field that silicon chip is processed.
Background technology
In the silicon chip working process, in order to guarantee the designing requirement of silicon chip, require silicon chip to grind.In the prior art, silicon chip is processed desired lapping liquid, the general employing by hand stirred.It is inhomogeneous that the method makes lapping liquid stir on the one hand easily, manually changes on the other hand operation, and efficient is low, and labor intensity of operating staff is large.
Recently a kind of agitating device occurs, comprised paddle, shaft, the vertical one that is fixed into described shaft of described paddle, described paddle is lobate member.When the paddle of this structure stirs, the particle in the lapping liquid is concentrated easily to the periphery of cylindrical shell, affected easily the quality of lapping liquid, thereby, greatly reduce the quality that silicon chip cuts.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of paddle for stirring grinding fluid for silicon chip for above drawback, and this paddle is simple in structure, stir, thereby, greatly improved the mixing quality of lapping liquid, thereby, guarantee the quality of silicon chip cutting.
In order to solve the problems of the technologies described above, a kind of paddle for stirring grinding fluid for silicon chip of the present invention, comprise paddle body body, described paddle body comprises the coupling part, the edge of described coupling part evenly is provided with arc convex surface, each described arc convex surface is provided with corresponding stirring piece, and described stirring piece is connected with described arc convex surface is vertical.
The above-mentioned paddle that is used for stirring grinding fluid for silicon chip, wherein, described stirring piece is comprised of some plates, and described plate is parallel to each other is fixed into one.
The above-mentioned paddle that is used for stirring grinding fluid for silicon chip, wherein, the gap between the described adjacent plate is 0.03mm.
Beneficial effect of the present invention:
Because described paddle comprises the coupling part, the edge of described coupling part evenly is provided with arc convex surface, and each described arc convex surface is provided with corresponding stirring piece, and described stirring piece is connected with described arc convex surface is vertical, during stirring, arc convex surface and stirring piece by the stirring piece edge stir, and form vertically with laterally to stir, and have not only increased the stirring area, and change the flow direction of particle, thereby, make the particle dispersion in the lapping liquid more even, greatly improved the cut quality of silicon chip; In addition, described paddle is comprised of some plates, and described plate is parallel to each other is fixed into one, and the gap between the described adjacent plate is 0.03mm, during stirring, particle passes the gap, confiscates with liquid and mixes, thereby, improved the dispersiveness of particle, improved the quality of lapping liquid.
Description of drawings
Fig. 1 is structural representation of the present invention.
The specific embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in the figure, in order to solve the problems of the technologies described above, a kind of paddle for stirring grinding fluid for silicon chip of the present invention, comprise paddle body 1, during use, the lower end that is fixed on described shaft 2 that the paddle body is vertical, described paddle body 1 comprises coupling part 11, the edge of described coupling part 11 evenly is provided with arc convex surface 3, and each described arc convex surface 3 is provided with corresponding stirring piece 4, described stirring piece 4 and described 3 vertical connections of arc convex surface.Angle β between the adjacent arc convex surface is 120 °.Described stirring piece 4 is comprised of some plates 41, and described plate 41 is parallel to each other is fixed into one, and the gap α between the described adjacent plate 41 is 0.03mm.Coupling part 11 is round member, because described paddle body 1 comprises coupling part 11, the edge of described coupling part 11 evenly is provided with arc convex surface 3, each described arc convex surface is provided with corresponding stirring piece, described stirring piece is connected with described arc convex surface is vertical, during stirring, arc convex surface and stirring piece by the stirring piece edge stir, form vertically with laterally and stir, not only increase the stirring area, and changed the flow direction of particle, thereby, make the particle dispersion in the lapping liquid more even, greatly improved the cut quality of silicon chip; In addition, described stirring piece is comprised of some plates, and described plate is parallel to each other is fixed into one, and the gap between the described adjacent plate is 0.03mm, during stirring, particle passes the gap, confiscates with liquid and mixes, thereby, improved the dispersiveness of particle, improved the quality of lapping liquid.
Claims (3)
1. paddle that be used for to stir grinding fluid for silicon chip, comprise paddle body body, it is characterized in that, described paddle body comprises the coupling part, the edge of described coupling part evenly is provided with arc convex surface, each described arc convex surface is provided with corresponding stirring piece, and described stirring piece is connected with described arc convex surface is vertical.
2. the paddle for stirring grinding fluid for silicon chip as claimed in claim 1 is characterized in that described stirring piece is comprised of some plates, and described plate is parallel to each other is fixed into one.
3. the paddle for stirring grinding fluid for silicon chip as claimed in claim 2 is characterized in that the gap between the described adjacent plate is 0.03mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105790801A CN103041743A (en) | 2012-12-27 | 2012-12-27 | Stirring blade for stirring silicon chip grinding fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105790801A CN103041743A (en) | 2012-12-27 | 2012-12-27 | Stirring blade for stirring silicon chip grinding fluid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103041743A true CN103041743A (en) | 2013-04-17 |
Family
ID=48054740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105790801A Pending CN103041743A (en) | 2012-12-27 | 2012-12-27 | Stirring blade for stirring silicon chip grinding fluid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103041743A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1681090A1 (en) * | 2005-01-17 | 2006-07-19 | Balcke-Dürr GmbH | Apparatus and method for mixing of a fluid flow in a flow channel |
| CN202036961U (en) * | 2011-04-12 | 2011-11-16 | 浙江大学 | Wing-section axial-flow type stirrer |
| CN202199310U (en) * | 2011-08-02 | 2012-04-25 | 佛山市运通晨塑料助剂有限公司 | High-speed stirrer blade device |
| CN102836669A (en) * | 2012-09-13 | 2012-12-26 | 宁德新能源科技有限公司 | Stirring paddle |
| CN203002309U (en) * | 2012-12-27 | 2013-06-19 | 镇江市港南电子有限公司 | Stirring blade for stirring silicon wafer grinding fluid |
-
2012
- 2012-12-27 CN CN2012105790801A patent/CN103041743A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1681090A1 (en) * | 2005-01-17 | 2006-07-19 | Balcke-Dürr GmbH | Apparatus and method for mixing of a fluid flow in a flow channel |
| CN202036961U (en) * | 2011-04-12 | 2011-11-16 | 浙江大学 | Wing-section axial-flow type stirrer |
| CN202199310U (en) * | 2011-08-02 | 2012-04-25 | 佛山市运通晨塑料助剂有限公司 | High-speed stirrer blade device |
| CN102836669A (en) * | 2012-09-13 | 2012-12-26 | 宁德新能源科技有限公司 | Stirring paddle |
| CN203002309U (en) * | 2012-12-27 | 2013-06-19 | 镇江市港南电子有限公司 | Stirring blade for stirring silicon wafer grinding fluid |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130417 |