CN102068935A - Stirring device of silicon sheet grinding fluid - Google Patents
Stirring device of silicon sheet grinding fluid Download PDFInfo
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- CN102068935A CN102068935A CN 201010523537 CN201010523537A CN102068935A CN 102068935 A CN102068935 A CN 102068935A CN 201010523537 CN201010523537 CN 201010523537 CN 201010523537 A CN201010523537 A CN 201010523537A CN 102068935 A CN102068935 A CN 102068935A
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- motor
- agitating device
- stirring
- grinding fluid
- stirring device
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Abstract
The invention provides a stirring device of a silicon sheet grinding fluid, which comprises a cylinder body and a stirring device, wherein the stirring device comprises a stirring blade, a motor and a frequency changer, one end of the stirring blade is positioned in the cylinder body and the other end is connected with the output end of the motor, and the input end of the motor is connected with the frequency changer. Because the stirring device comprises the stirring blade, the motor and the frequency changer, one end of the stirring blade is positioned in the cylinder body and the other end is connected with the output end of the motor, and the input end of the motor is connected with the frequency changer, the speed of the stirring blade can be regulated, the stirring can be switched between high speed and low speed, electric energy can be saved and the long-time high-speed stirring is avoided to ensure that the grinding liquid is degraded due to high temperature.
Description
Technical field
The present invention relates to a kind of agitating device, particularly a kind of agitating device of grinding fluid for silicon chip belongs to the silicon chip machining technology.
Background technology
In the silicon chip working process,, grind silicon chip in order to guarantee the designing requirement of silicon chip.In the prior art, silicon chip is processed desired lapping liquid, the general employing by hand stirred.It is inhomogeneous that this method makes lapping liquid stir on the one hand easily, on the other hand, manually changes operation, and efficient is low, and labor intensity of operating staff is big.
In order to solve the problems of the technologies described above, recently, a kind of agitating device has appearred, comprise cylindrical shell, agitating device, agitating device comprises drive motors and paddle, and paddle one end is positioned at cylindrical shell, and the other end links to each other with the output of drive motors.This agitating device though improved efficient, reduced workman's manipulation strength, has improved the quality of lapping liquid, and when this agitating device stirred, mixing speed was constant, can't regulate as required, causes the waste of electric energy; And when lapping liquid is in high-speed stirred always, heating easily, thus influence quality.
Summary of the invention
Technical problem to be solved by this invention provides the agitating device of the adjustable grinding fluid for silicon chip of a kind of mixing speed, and this device is the saves energy source greatly, and simple in structure.
In order to solve the problems of the technologies described above, the agitating device of a kind of grinding fluid for silicon chip of the present invention, comprise cylindrical shell, agitating device, described agitating device comprises paddle, motor, frequency converter, and described paddle one end is positioned at cylindrical shell, the other end links to each other with the output of described motor, and the input of described motor is connected to described frequency converter.
The agitating device of above-mentioned a kind of grinding fluid for silicon chip wherein, also comprises air flow stirring apparatus, and described air flow stirring apparatus comprises air nozzle, is positioned at the air inlet on the cylindrical shell, and described air nozzle one end of stating communicates with air inlet, and the other end is connected to source of the gas.
The present invention can realize following beneficial effect:
1, because described agitating device comprises paddle, motor, frequency converter, described paddle one end is positioned at cylindrical shell, the other end links to each other with the output of described motor, and the input of described motor is connected to described frequency converter, can regulate the speed of paddle, stirring can be regulated by high low speed mutually, but saves energy not only, and avoided because of long-time high-speed stirred, and make lapping liquid because of pyrometamorphism.
2, make the stirring of lapping liquid more even by air flow stirring apparatus owing to also comprising, and improved the stirring efficiency of lapping liquid.
Description of drawings
Fig. 1 is a structural representation of the present invention.
The specific embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in the figure, in order to solve the problems of the technologies described above, the agitating device of a kind of grinding fluid for silicon chip of the present invention, comprise cylindrical shell 1, agitating device 2, described agitating device 2 comprises paddle 21, motor 22, frequency converter 23, described paddle 21 1 ends are positioned at cylindrical shell 1, and the other end links to each other with the output of described motor 22, and the input of described motor 22 is connected to described frequency converter 23.Because described agitating device comprises frequency converter, can regulate the speed of paddle 21, stirring can be regulated by high low speed mutually, but saves energy not only and has been avoided long-time high-speed stirred, makes lapping liquid Yin Gaowen and influences quality.
In order to improve the stirring efficiency of lapping liquid, can on cylindrical shell, establish air flow stirring apparatus 3, described air flow stirring apparatus 3 comprises air nozzle 31, be positioned at 32 mouthfuls of air inlets on the cylindrical shell 1, and described air nozzle 31 1 ends of stating communicate with air inlet, and the other end is connected to source of the gas 33.Owing to also comprise making the stirring of lapping liquid more even by air flow stirring apparatus, and improved the stirring efficiency of lapping liquid.
Here description of the invention and application is illustrative, is not to want that therefore, the present invention is not subjected to the restriction of present embodiment with scope restriction of the present invention in the above-described embodiments, and the technical scheme that any employing equivalence replacement obtains is all in the scope of protection of the invention.
Claims (2)
1. the agitating device of a grinding fluid for silicon chip comprises cylindrical shell, agitating device, it is characterized in that described agitating device comprises paddle, motor, frequency converter, described paddle one end is positioned at cylindrical shell, and the other end links to each other with the output of described motor, and the input of described motor is connected to described frequency converter.
2. a kind of agitating device of grinding fluid for silicon chip according to claim 1, it is characterized in that, also comprise air flow stirring apparatus, described air flow stirring apparatus comprises air nozzle, is positioned at the air inlet on the cylindrical shell, described air nozzle one end of stating communicates with air inlet, and the other end is connected to source of the gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010523537 CN102068935A (en) | 2010-10-28 | 2010-10-28 | Stirring device of silicon sheet grinding fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010523537 CN102068935A (en) | 2010-10-28 | 2010-10-28 | Stirring device of silicon sheet grinding fluid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102068935A true CN102068935A (en) | 2011-05-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010523537 Pending CN102068935A (en) | 2010-10-28 | 2010-10-28 | Stirring device of silicon sheet grinding fluid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102068935A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102363331A (en) * | 2011-06-27 | 2012-02-29 | 镇江市港南电子有限公司 | Mortar jet flow device for cutting silicon chip |
| CN103170271A (en) * | 2012-12-26 | 2013-06-26 | 镇江市港南电子有限公司 | Wafer grinding liquid stirring device |
-
2010
- 2010-10-28 CN CN 201010523537 patent/CN102068935A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102363331A (en) * | 2011-06-27 | 2012-02-29 | 镇江市港南电子有限公司 | Mortar jet flow device for cutting silicon chip |
| CN103170271A (en) * | 2012-12-26 | 2013-06-26 | 镇江市港南电子有限公司 | Wafer grinding liquid stirring device |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110525 |