CN103170271A - Wafer grinding liquid stirring device - Google Patents
Wafer grinding liquid stirring device Download PDFInfo
- Publication number
- CN103170271A CN103170271A CN2012105740215A CN201210574021A CN103170271A CN 103170271 A CN103170271 A CN 103170271A CN 2012105740215 A CN2012105740215 A CN 2012105740215A CN 201210574021 A CN201210574021 A CN 201210574021A CN 103170271 A CN103170271 A CN 103170271A
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- China
- Prior art keywords
- stirring device
- grinding liquid
- agitating device
- silicon chip
- speed
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention relates to a stirring device capable of automatically regulating the speed. The stirring device capable of automatically regulating the speed comprises a barrel body and a stirring device, wherein the stirring device comprises a mixing blade, a motor and a temperature control device; a temperature sensing device of the temperature control device is arranged in the barrel body; and when the temperature of the grinding liquid is overhigh, the stirring speed can be slowed down by automatic adjustment, so that the working efficiency is improved, the manual work is effectively reduced, and the quality of the grinding liquid is guaranteed.
Description
Technical field
The present invention relates to a kind of agitating device, particularly a kind of agitating device of grinding fluid for silicon chip, belong to the technical field that silicon chip is processed.
Background technology
In silicon chip working process, in order to guarantee the designing requirement of silicon chip, require silicon chip to grind.In prior art, to the desired lapping liquid of silicon chip processing, the general employing by hand stirred.It is inhomogeneous that the method easily makes lapping liquid stir on the one hand, manually changes on the other hand operation, and efficient is low, and labor intensity of operating staff is large.
Recently a kind of agitating device occurs, comprised cylindrical shell, agitating device.Although improved efficient, reduced workman's manipulation strength, constant airspeed when this agitating device stirs can't be regulated, and causes energy waste; And lapping liquid is in the high-speed stirred state always, easily heating, thus affect quality.
Summary of the invention
Technical problem to be solved by this invention is but that a kind of agitating device of automatic speed regulation is provided for above drawback.
For solving the problems of the technologies described above, technical scheme of the present invention is:
A kind of agitating device of grinding fluid for silicon chip, comprise paddle, motor, attemperating unit, described attemperating unit comprises temperature sensor, controller, the input of the described controller of output access of described temperature sensor, and the output of described controller is connected with described motor.When the lapping liquid excess Temperature, can automatically regulate the reduction mixing speed, improved operating efficiency, effectively saved manually, guaranteed the quality of lapping liquid.
The agitating device of above-mentioned grinding fluid for silicon chip, wherein, described controller is PLC.
Description of drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is operation principle schematic diagram of the present invention.
The specific embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in the figure, the present invention includes cylindrical shell 1, agitating device 2, wherein, described agitating device comprises paddle 21, motor 22, attemperating unit 23, described paddle 21 1 ends are positioned at cylindrical shell 1, and the other end is connected with the output of described motor 22, and the input of described motor 22 is connected to described attemperating unit 23.Described attemperating unit 23 comprises temperature sensor 231, controller 232, the input of the described controller 232 of output access of described temperature sensor 231, and the output of described controller 232 is connected with described motor 22.
In whipping process, described temperature sensor 231 is placed in cylindrical shell 1, when the lapping liquid excess Temperature, can automatically regulate the reduction mixing speed, has improved operating efficiency, has effectively saved manually, has guaranteed the quality of lapping liquid.
Claims (2)
1. the agitating device of a grinding fluid for silicon chip, comprise paddle, motor, it is characterized in that, also comprise attemperating unit, described attemperating unit comprises temperature sensor, controller, the input of the described controller of output access of described temperature sensor, the output of described controller is connected with described motor.
2. the agitating device of grinding fluid for silicon chip as claimed in claim 1, is characterized in that, described controller is PLC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105740215A CN103170271A (en) | 2012-12-26 | 2012-12-26 | Wafer grinding liquid stirring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105740215A CN103170271A (en) | 2012-12-26 | 2012-12-26 | Wafer grinding liquid stirring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103170271A true CN103170271A (en) | 2013-06-26 |
Family
ID=48630719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105740215A Pending CN103170271A (en) | 2012-12-26 | 2012-12-26 | Wafer grinding liquid stirring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103170271A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201337891Y (en) * | 2009-01-13 | 2009-11-04 | 廊坊燕北畜牧机械集团有限公司 | Liquid and dry powder weighing-proportioning stirring tank |
| CN102068935A (en) * | 2010-10-28 | 2011-05-25 | 镇江市港南电子有限公司 | Stirring device of silicon sheet grinding fluid |
| CN102715850A (en) * | 2012-07-10 | 2012-10-10 | 江苏顺发电器有限公司 | Full-automatic grinding machine |
| CN203155126U (en) * | 2012-12-26 | 2013-08-28 | 镇江市港南电子有限公司 | Stirring device of silicon wafer grinding fluid |
-
2012
- 2012-12-26 CN CN2012105740215A patent/CN103170271A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201337891Y (en) * | 2009-01-13 | 2009-11-04 | 廊坊燕北畜牧机械集团有限公司 | Liquid and dry powder weighing-proportioning stirring tank |
| CN102068935A (en) * | 2010-10-28 | 2011-05-25 | 镇江市港南电子有限公司 | Stirring device of silicon sheet grinding fluid |
| CN102715850A (en) * | 2012-07-10 | 2012-10-10 | 江苏顺发电器有限公司 | Full-automatic grinding machine |
| CN203155126U (en) * | 2012-12-26 | 2013-08-28 | 镇江市港南电子有限公司 | Stirring device of silicon wafer grinding fluid |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130626 |