CN103041660A - Chamber airflow control system and method - Google Patents
Chamber airflow control system and method Download PDFInfo
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- CN103041660A CN103041660A CN2012105564904A CN201210556490A CN103041660A CN 103041660 A CN103041660 A CN 103041660A CN 2012105564904 A CN2012105564904 A CN 2012105564904A CN 201210556490 A CN201210556490 A CN 201210556490A CN 103041660 A CN103041660 A CN 103041660A
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Abstract
The invention discloses the technical field of semiconductor manufacturing and particularly relates to a chamber airflow control system and a method. The chamber airflow control system comprises a PCC (Program-Controlled Computer) controller and at least one chamber control unit, wherein the chamber control unit comprises a pressure sensor, a fan filter, a state detection unit connected with the fan filter, a data processing unit connected with the pressure sensor, the fan filter and the state detection unit and a data transmission unit connected with the data processing unit. The chamber airflow control system and the method have the beneficial effect that gas pressure in a chamber can be controlled in real time, so that the gas pressure in the chamber is maintained within a set value.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly a kind of chamber jet system and method.
Background technology
In the silicon wafer cleaning process, the airflow homogeneity of cleaning equipment chamber interior directly affects cleaning quality, and the existence of air whirl can cause molecule to assemble, and increases molecule at the deposition probability of silicon chip surface, pollutes silicon chip.At present, most manufacturers adopts fan filter that the gas flow of chamber interior is controlled, according to the SEMI standard, the laminar flow stability of chamber interior is weighed in employing apart from the gas flow uniformity at 150mm place, fan filter screen pack below, the control laminar winds is according to certain flow velocity perpendicular flow in microenvironment, eliminate the local gathering of molecule, keep the microenvironment lustration class.
Along with the silicon wafer cleaning process integrated level improves constantly, the index request of silicon chip surface molecule is stricter, and the control accuracy of chamber interior microenvironment quality is more accurate.Simultaneously, multi-chamber cleans the research and development main flow that is designed to current cleaning equipment, and is consistent apart from the requirement of silicon chip differing heights laminar condition for guaranteeing silicon chip in the uniformity of the cleaning quality of different chamber inside, stable.Generally, the microenvironment flow quality of Whole Equipment can be by to the odds ratio of the wind speed of any point on a certain height cross section and mean wind speed, control air motion vector and vertical direction angle are less than 14 °, and error shows that namely the Whole Equipment microenvironment keeps laminar flow in 20%.The conventional fan filter is independently controlled corresponding chamber air-flow, laminar condition between the different chamber does not have the interactive adjustment function, particularly in the technical process, manipulator impact on laminar flow when the different chamber internal motion can not get good control, directly cause molecule to be assembled, have a strong impact on the cleaning performance of silicon chip, finally cause the decline of product quality.
Summary of the invention
The technical problem that (one) will solve
The technical problem to be solved in the present invention is: how a kind of system and method for real-time control chamber indoor air flow is provided, makes the air-flow in the chamber remain on set condition.
(2) technical scheme
For solving the problems of the technologies described above, the invention provides a kind of chamber jet system, it is characterized in that, this system comprises:
At least one chamber control module is used for according to the control instruction of PCC controller the gas pressure of chamber being controlled, and connects by netting twine between the described chamber control module;
Be connected the PCC controller that the chamber control module connects, be used for receiving the data of described chamber and to described chamber control module sending controling instruction.
Described chamber control module comprises:
Pressure sensor is used for measuring the inside and outside gas pressure difference of chamber, and described gas pressure difference is sent to data processing unit;
Fan filter is for the rotating speed of controlling the fan of described fan filter according to described control instruction;
Be connected the state detection unit that fan filter connects, for detection of and the rotary speed data of fan that sends described fan filter to data processing unit;
The data processing unit that is connected with described pressure sensor, fan filter and state detection unit is used for the data that receive are carried out preliminary treatment and sent to data transmission unit;
Be connected the data transmission unit that data processing unit connects, be used for the data of described data processing unit output with are connected the next data transmission unit that data that data transmission unit sends send to the PCC controller or be connected with this data transmission unit.
The chamber control module of described PCC controller and the head end of the chamber control module that is connected or the chamber control module of tail end connect.
Described pressure sensor is Setra 265 differential pressure pick-ups.
Described PCC controller is Bei Jialai PCC programmable computer controller.
Described state detection unit is the CS1030 communication module.
A kind of chamber flow controlling method of air is characterized in that, the method may further comprise the steps:
S1: the gas pressure difference of described pressure sensor acquisition cavity indoor and outdoor also sends to described data processing unit with described gas pressure difference;
S2: described state detection unit gathers the fan speed data of described fan filter, and described fan speed data is sent to described data processing unit;
S3: described data processing unit carries out preliminary treatment to the described gas pressure difference and the described fan speed data that receive, will send to described data transmission unit through pretreated data;
S4: the data that described data transmission unit sends described data processing unit with are connected the data that data transmission unit sends and send to the next data transmission unit that is connected with described data transmission unit; When the chamber control module at described data transmission unit place was the chamber control module of the chamber control module of head end of the chamber control module that is cascaded or tail end, the data that the data that described data transmission unit sends described data processing unit and other data transmission units are sent sent to described PCC controller;
S5: described PCC controller is processed controlled instruction to the data that receive, and described control instruction is sent to described fan filter by described data transmission unit and described data processing unit, controls the rotating speed of the fan of described fan filter.
The cycle of the gas pressure difference of described pressure sensor acquisition cavity indoor and outdoor is 500 milliseconds.
Described PCC controller is processed controlled instruction to the data that receive and is specially:
Described PCC controller receives described gas pressure difference, when the difference of described gas pressure difference and chamber pressure setting value during greater than 0.062Pa, described PCC controller sends control instruction according to described difference and described fan speed data to described fan filter.
(3) beneficial effect
The present invention can in time make a response to the variation of air pressure by the inside and outside gas pressure difference signal of pressure sensor Real-time Collection chamber; The PCC controller sends control instruction according to the chamber pressure difference signal that gathers, and the control fan filter is adjusted the fan wind speed in real time, so that the stable gas pressure in the chamber is in setting value.Be cascaded by netting twine between the chamber control module, the information of all chamber control modules is sent to PCC controller centralized Control, be conducive to the coordination control to gas pressure in the chamber.The present invention can make timely adjustment to the gas pressure in the chamber, and antijamming capability is strong, can make chamber pressure be stabilized in setting value.System of the present invention can be according to the needs flexible configuration of actual chamber.
Description of drawings
Fig. 1 is system's connection layout of the application.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
The present invention relates to a kind of control method of uniform air flow device, be specifically related to the chamber microenvironment airflow homogeneity control in the field of semiconductor manufacture, purpose is to guarantee that molecule the minimizing of the deposition conditions of semiconductor surface, reduces to greatest extent molecule and assembles the pollution that silicon chip surface is caused.
System of the present invention comprises:
1, chamber control module, at least one chamber control module is used for according to the control instruction of PCC controller the gas pressure of chamber being controlled, and connects by netting twine between the described chamber control module, as shown in Figure 1;
(1) pressure sensor is used for measuring the inside and outside gas pressure difference of chamber, and described gas pressure difference is sent to data processing unit; Pressure sensor is selected Setra 265 differential pressure pick-ups: the Model 265Differential Pressure Transducer of Setra company, concrete model is 2651R25WD2BT1C, pressure detecting scope 0-0.25inch W.C. (0-62.271Pa), precision ± 0.1%.The cycle of the gas pressure difference signal of pressure sensor acquisition cavity indoor and outdoor is 500 milliseconds
(2) fan filter is for the rotating speed of controlling the fan of described fan filter according to described control instruction;
(3) state detection unit and is connected fan filter and is connected, for detection of and the rotary speed data of fan that sends described fan filter to data processing unit; State detection unit is selected the CS1030 communication module;
(4) data processing unit is connected with described pressure sensor, fan filter and state detection unit, is used for the data that receive are carried out preliminary treatment and sent to data transmission unit;
(5) data transmission unit, with be connected data processing unit and connect, be used for the data of described data processing unit output with are connected the next data transmission unit that data that data transmission unit sends send to the PCC controller or be connected with this data transmission unit.
2, PCC controller and is connected the chamber control module and is connected, and is used for receiving the data of described chamber and to described chamber control module sending controling instruction.The chamber control module of described PCC controller and the head end of the chamber control module that is connected or the chamber control module of tail end connect.The PCC controller is selected Bei Jialai PCC programmable computer controller: B﹠amp is adopted in design; The x20 Series PC C of R company, processor is X20CP1485-1.
The present invention includes following steps:
S1: the gas pressure difference of described pressure sensor acquisition cavity indoor and outdoor also sends to described data processing unit with described gas pressure difference; The cycle of the gas pressure difference of described pressure sensor acquisition cavity indoor and outdoor is 500 milliseconds.
S2: described state detection unit gathers the fan speed data of described fan filter, and described fan speed data is sent to described data processing unit;
S3: described data processing unit carries out preliminary treatment to the described gas pressure value and the described fan speed data that receive, will send to described data transmission unit through pretreated data;
S4: the data that described data transmission unit sends described data processing unit with are connected the data that data transmission unit sends and send to the next data transmission unit that is connected with described data transmission unit; When the chamber control module at described data transmission unit place was the chamber control module of the chamber control module of head end of the chamber control module that is cascaded or tail end, the data that the data that described data transmission unit sends described data processing unit and other data transmission units are sent sent to described PCC controller;
S5: described PCC controller is processed controlled instruction to the data that receive, and is specially:
Described PCC controller receives described gas pressure difference, and when the difference of described gas pressure value and chamber pressure setting value during greater than 0.062Pa, described PCC controller sends control instruction according to described difference and described fan speed data to described fan filter.
Described control instruction sends to described fan filter by described data transmission unit and described data processing unit, controls the rotating speed of the fan of described fan filter.
The invention is characterized in a plurality of chamber control modules connected in series by netting twine, as shown in Figure 1, pressure sensor feedback cavity indoor and outdoor gas pressure difference, by the wind speed of the fan of PCC controller centralized Control fan filter, the real-time integral layer current mass of holding chamber Indoor Micro.Set the control node of chamber control module, the node number of chamber control module is realized by the Aircare address selector, can realize at most 125 chamber control module series connection.The PCC controller adopts Bei Jialai PCC programmable computer controller.State detection unit is the CS1030 communication module, and the CS1030 communication module is resolved the status signal of fan filter.The gas pressure difference that detection chambers is inside and outside.Pressure sensor is selected Setra 265 differential pressure pick-ups, introduce Setra 265 differential pressure pick-ups by flexible pipe, when the monitoring point changed greater than 0.062Pa, the PCC controller sent the rotating speed that control instruction is adjusted the fan of fan filter, regulates corresponding chamber gas pressure.The scan period of Setra 265 differential pressure pick-ups is 500 milliseconds, satisfies requirement of real-time control.Different chamber all has pressure sensor, and unified the detection by the PCC controller analyzed, and realizes centralized Control.
1. the present invention is connected in series with a plurality of chamber control modules, adopts the centralized Control method, monitors simultaneously the operational factor of a plurality of chamber inner blower filters, coordinates the laminar flow uniformity of the whole microenvironment of each chamber interior, keeps the air current flow between the chamber stable;
2. the different chamber control module is connected by netting twine, and convenient expansion has very strong versatility, has remedied the defective that lacks the communication extended capability between the multi fan controller;
3. the present invention can reduce partial electrical layout complexity, saves the electrical traces space, is conducive to the design of chamber microenvironment, and the pollution for the reduction molecule causes silicon chip reaches higher lustration class to chamber interior and required positive effect.
Above embodiment only is used for explanation the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; in the situation that do not break away from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (9)
1. a chamber jet system is characterized in that, this system comprises:
At least one chamber control module is used for according to the control instruction of PCC controller the gas pressure of chamber being controlled, and connects by netting twine between the described chamber control module;
Be connected the PCC controller that the chamber control module connects, be used for receiving the data of described chamber and to described chamber control module sending controling instruction.
2. system according to claim 1 is characterized in that, described chamber control module comprises:
Pressure sensor is used for measuring the inside and outside gas pressure difference of chamber, and described gas pressure difference is sent to data processing unit;
Fan filter is for the rotating speed of controlling the fan of described fan filter according to described control instruction;
Be connected the state detection unit that fan filter connects, for detection of and the rotary speed data of fan that sends described fan filter to data processing unit;
The data processing unit that is connected with described pressure sensor, fan filter and state detection unit is used for the data that receive are carried out preliminary treatment and sent to data transmission unit;
Be connected the data transmission unit that data processing unit connects, be used for the data of described data processing unit output with are connected the next data transmission unit that data that data transmission unit sends send to the PCC controller or be connected with this data transmission unit.
3. system according to claim 1 is characterized in that, the chamber control module of described PCC controller and the head end of the chamber control module that is connected or the chamber control module of tail end connect.
4. system according to claim 2 is characterized in that, described pressure sensor is Setra 265 differential pressure pick-ups.
5. system according to claim 1 is characterized in that, described PCC controller is Bei Jialai PCC programmable computer controller.
6. system according to claim 2 is characterized in that, described state detection unit is the CS1030 communication module.
7. a chamber flow controlling method of air that utilizes one of any described system of claim 1-6 to realize is characterized in that, the method may further comprise the steps:
S1: the gas pressure difference of described pressure sensor acquisition cavity indoor and outdoor also sends to described data processing unit with described gas pressure difference;
S2: described state detection unit gathers the fan speed data of described fan filter, and described fan speed data is sent to described data processing unit;
S3: described data processing unit carries out preliminary treatment to the described gas pressure difference and the described fan speed data that receive, will send to described data transmission unit through pretreated data;
S4: the data that described data transmission unit sends described data processing unit with are connected the data that data transmission unit sends and send to the next data transmission unit that is connected with described data transmission unit; When the chamber control module at described data transmission unit place was the chamber control module of the chamber control module of head end of the chamber control module that is cascaded or tail end, the data that the data that described data transmission unit sends described data processing unit and other data transmission units are sent sent to described PCC controller;
S5: described PCC controller is processed controlled instruction to the data that receive, and described control instruction is sent to described fan filter by described data transmission unit and described data processing unit, controls the rotating speed of the fan of described fan filter.
8. method according to claim 7 is characterized in that, the cycle of the gas pressure difference of described pressure sensor acquisition cavity indoor and outdoor is 500 milliseconds.
9. method according to claim 7 is characterized in that, described PCC controller is processed controlled instruction to the data that receive and is specially:
Described PCC controller receives described gas pressure difference, when the difference of described gas pressure difference and chamber pressure setting value during greater than 0.062Pa, described PCC controller sends control instruction according to described difference and described fan speed data to described fan filter.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210556490.4A CN103041660B (en) | 2012-12-20 | 2012-12-20 | Chamber airflow control system and method |
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| CN201210556490.4A CN103041660B (en) | 2012-12-20 | 2012-12-20 | Chamber airflow control system and method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104174238A (en) * | 2014-07-23 | 2014-12-03 | 中山大洋电机股份有限公司 | Filter net blockage detection method of air supply device and air supply device using same |
| CN105135603A (en) * | 2015-08-12 | 2015-12-09 | 武汉华星光电技术有限公司 | Cavity airflow control system and method |
| CN110797278A (en) * | 2018-08-01 | 2020-02-14 | 北京北方华创微电子装备有限公司 | Pressure control system of microenvironment, control method thereof and semiconductor processing equipment |
| CN111968930A (en) * | 2020-07-02 | 2020-11-20 | 北京烁科精微电子装备有限公司 | Wafer cleaning equipment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111604324A (en) * | 2020-05-15 | 2020-09-01 | 北京北方华创微电子装备有限公司 | Control method of wafer cleaning machine and wafer cleaning machine |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104174238A (en) * | 2014-07-23 | 2014-12-03 | 中山大洋电机股份有限公司 | Filter net blockage detection method of air supply device and air supply device using same |
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| CN105135603A (en) * | 2015-08-12 | 2015-12-09 | 武汉华星光电技术有限公司 | Cavity airflow control system and method |
| CN110797278A (en) * | 2018-08-01 | 2020-02-14 | 北京北方华创微电子装备有限公司 | Pressure control system of microenvironment, control method thereof and semiconductor processing equipment |
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