CN105135603A - Cavity airflow control system and method - Google Patents
Cavity airflow control system and method Download PDFInfo
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- CN105135603A CN105135603A CN201510492387.1A CN201510492387A CN105135603A CN 105135603 A CN105135603 A CN 105135603A CN 201510492387 A CN201510492387 A CN 201510492387A CN 105135603 A CN105135603 A CN 105135603A
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Abstract
The invention provides a cavity airflow control system. The cavity airflow control system comprises a plurality of cavities provided with draught fan filtering units, a central monitoring unit, air detection units and power sensors, wherein the power sensors are connected to the draught fan filtering units and is used for detecting the output power of the draught fan filtering units in the cavities and for sending output power data to the central monitoring unit; the air detection unit is used for sending the air status information of the cavities to the central monitoring unit; and the central monitoring unit is used for processing the information of the air detection units and the power sensors and for sending control commands to the draught fan filtering units for controlling the output power of the draught fan filtering units in the cavities so as to change the flow direction of air. The invention also provides a cavity airflow control method. The cavity airflow control method realizes the function of causing air to flow to the cavities with small ventilation volume from the cavities with large ventilation volume and achieves the technical effects of reducing the quality risk of products produced in the cavities and increasing the yield rate of the products.
Description
Technical field
The present invention relates to a kind of control system, particularly a kind of chamber airflow control system and method.
Background technology
Along with to the miniaturization of product or the requirement of high-precision refinement, in a lot of industry headed by electron trade, electric utility, in order to maintain product quality, need to construct the manufacturing environment with the air purity more high-grade than general environment.Generally speaking, such manufacturing environment is referred to as dust free room or dustless compartment etc.
Generally speaking, in dustless compartment or dust free room, be referred to as FFU (FanFilterUnits: blower fan filtering unit).FFU unlatching can cause the pressure increase in equipment, in equipment, air-flow externally flows, and cause the air pressure in different chamber different because other factors such as FFU possibility brand and quantity etc. are different, just there will be other chambers of air flow direction in equipment, from the angle of producing, do not wish to occur, in the chambers of fine particle inflow residing for precision equipment such as the dust in air-flow, because tiny of dust etc. can enter in precision equipment along with air-flow, to cause great risk to the quality of product.
Secondly in production process, a usual surrounding not only equipment around accurate equipment, the flowing of air-flow can be subject to the impact of the FFU at many equipment places, because the FFU of each equipment works alone, the mutual function without feedback regulation, thus the uncontrollability that flows to of the air-flow in chamber residing for each equipment is increased.
Summary of the invention
The object of the present invention is to provide a kind of blower fan filtering unit power output that can adjust each chamber in time, thus the chamber airflow control system of the flow direction of air-flow in chamber residing for real-time monitoring equipment.
Another object of the present invention is to the method for operating that a kind of above-mentioned chamber airflow control system is provided.
To achieve these goals, embodiment of the present invention provides following technical scheme:
The invention provides a kind of chamber airflow control system, comprise multiple chamber being provided with blower fan filtering unit, central monitoring unit, gas detection cell and power sensor, described power sensor is connected with described blower fan filtering unit, for detecting the power output of blower fan filtering unit in described each chamber and being sent to described central monitoring unit, described gas detection cell is used for the gaseous state information of described chamber to be sent to described central monitoring unit, the information of described gas detection cell and described power sensor processes by described central monitoring unit, and to described blower fan filtering unit sending controling instruction, control the power output of blower fan filtering unit in described chamber to change gas flow.
Wherein, described gas detection cell is baroceptor, for detecting the air pressure difference of described gas to chamber, and be sent to described central monitoring unit, central monitoring unit controls the power output of blower fan filtering unit in described chamber, makes the pressure that gas flows out described chamber be greater than the pressure that gas flows into described chamber.
Wherein, described gas detection cell is wind transducer, for detecting the flow direction of the gas of described chamber, and be sent to described central monitoring unit, central monitoring unit controls the power output of blower fan filtering unit in described chamber, makes the pressure that gas flows out described chamber be greater than the pressure that gas flows into described chamber.
Wherein, described wind transducer is located at the intersection of adjacent described chamber.
The present invention also provides a kind of chamber flow controlling method of air, and the method comprises the following steps:
Gas detection cell gathers gaseous state information in each chamber and described gaseous state information is sent to described central monitoring unit;
Power sensor gathers blower fan filtering unit power output data, and described blower fan filtering unit power output data are sent to described central monitoring unit;
Central monitoring unit carries out pretreatment to the described gaseous state information received and described blower fan filtering unit power output data, and sending controling instruction gives described blower fan filtering unit;
Described blower fan filtering unit obtains control instruction, controls the power output of described blower fan filtering unit, gas flow and object gas is flowed to identical.
Wherein, described gas detection cell gathers the cycle of gaseous state information in each chamber is 500 milliseconds.
Wherein, described gaseous state information is the air pressure difference of the gas of each chamber.
Wherein, described gaseous state information is the flow direction of the gas of each chamber.
Wherein, described central monitoring unit carries out pretreatment and obtains control instruction and be specially: increase gas and flow out the blower fan filtering unit power output of chamber and/or reduce the blower fan filtering unit power output that gas flows into chamber.
Wherein, described central monitoring unit carries out pretreatment and obtains control instruction and be specially: first increase the blower fan filtering unit power output that gas flows out chamber, controls object and then reduces when power output reaches maximum and do not reach the blower fan filtering unit power output that gas flows into chamber.
Embodiment of the present invention tool has the following advantages or beneficial effect:
The present invention is by arranging gas-detecting device at each chamber, and the status information of each gas to chamber by detecting, the method of each chamber blower fan filtering unit power output of real-time adjustment, to change the ventilation volume of each chamber, realize airflow direction is flowed to the little chamber of ventilation volume function by the chamber that ventilation volume is large, reach the quality risk reducing the product produced in chamber, the technique effect improving product yield.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the chamber airflow control system schematic diagram of first embodiment of the invention;
Fig. 2 is the chamber airflow control system schematic diagram of second embodiment of the invention;
Fig. 3 is chamber flow controlling method of air flow chart of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Refer to Fig. 1, the chamber airflow control system of embodiment of the present invention mainly comprises central monitoring unit 11, gas detection cell 12, blower fan filtering unit 13 and power sensor 14.
Blower fan filtering unit 13 (FFU, FanFilterUnits) there is pressure fan (scheming not shown), the air of cleaning is supplied to chamber 24 via HEPA filter (scheming not shown) (HighEfficiencyParticulateAirfilter: the sub-filter of High Efficiency Particulate Air).Blower fan filtering unit 13 makes clean air flow in chamber 24 from the whole surface of chamber 24 ceiling, prevents external particle from entering the inside of chamber 24 from the outside of chamber 24 by such ventilation.
Power sensor 14 is located on each blower fan filtering unit 13.Power sensor 14 measures the power consumption of blower fan filtering unit 13, thus measures blower fan filtering unit power output, and its measured value is sent in central monitoring unit 11 by power sensor 14.
Blower fan filtering unit 13 is also connected with central monitoring unit 11.Central monitoring unit 11 exports control instruction, controls the duty (being the starting of had pressure fan and the power output of stopping and change blower fan filtering unit 13) of each blower fan filtering unit 13.
In a specific embodiment, gas detection cell 12 can be baroceptor, and its measured value (value of air pressure) for measuring the atmospheric pressure value of each chamber 24 inside, and is sent to central monitoring unit 11 by baroceptor.
As a preferred technical scheme, described baroceptor should be arranged on the intersection near two adjacent chamber, to detect the difference of two adjacent chamber pressure.
Central monitoring unit 11 calculates based on the measured value of power sensor 14, gas detection cell 12, obtain the optimum output power of blower fan filtering unit, and export control instruction to control the power output of multiple blower fan filtering unit 13, thus change the ventilation volume of each chamber 24, and then change the flow direction of gas.Concrete, the power output of blower fan filtering unit 13 is larger, and the ventilation volume of chamber 24 is larger, and airflow direction flows to the little chamber of ventilation volume by the chamber that ventilation volume is large.
Specifically, when needing to control another chamber of the air flow direction B in chamber A, the pressure values detected is transported in central monitoring unit 11 by the baroceptor be in two chambers; Meanwhile, in two chambers, the output power information of the blower fan filtering unit 13 of correspondence is sent in central monitoring unit 11 by power sensor 14.Computing is carried out based on each gas to chamber pressure values and blower fan filtering unit output power value in central monitoring unit 11.When in air pressure < chamber B in chamber A during air pressure, central monitoring unit 11 is then needed to export the power output of blower fan filtering unit 13 in control instruction increase chamber A, to increase in chamber A air quantity of taking a breath, until chamber A air pressure > chamber B air pressure.If now power sensor 14 detects that the power output of blower fan filtering unit 13 in chamber A reaches maximum, then central monitoring unit 11 exports the power output that control instruction reduces blower fan filtering unit 13 in chamber B, make air quantity reduction of taking a breath in chamber B, until chamber A air pressure > chamber B air pressure, make the air flow direction chamber B in chamber A.
Be understandable that, the air-flow that can also be controlled multiple chamber 24 by chamber airflow control system 100 of the present invention keeps stable, namely by regulating the power output of the blower fan filtering unit 13 of each chamber, the pressure of each chamber being consistent substantially, reducing the exchange of air-flow.
By detecting the atmospheric pressure state in each chamber 24, atmospheric pressure value information is sent in central monitoring unit 11 to judge the flow direction of air-flow, and by power sensor 14, the output power value of each blower fan filtering unit 13 is transported to central monitoring unit 11, central monitoring unit 11 is through data operation, export control instruction and control multiple blower fan filtering unit 13, to change the ventilation air quantity of each chamber 24, airflow direction is made to flow to the little chamber of ventilation volume by the chamber that ventilation volume is large, reach the object of oriented control each chamber 24 air-flow, whole process has feedback function, make whole control procedure more accurate.
Further, refer to Fig. 2, in another embodiment of the present invention, gas detection cell 12 is except can be except baroceptor, still can wind transducer, for detecting the air flow direction of each chamber, now, only need to arrange a wind transducer at the intersection of two adjacent chamber.
Apparent, in other embodiments also can the combination of wind transducer and baroceptor.
Further, central monitoring unit 11 has input part 11a, operational part 11b and FFU control part 11c.Input part 11a receives the measured value of above-mentioned various sensor.The calculating that calculating part 11b utilizes the measurement value being input to input part 11a to put rules into practice, FFU control part 11c, based on being input to the information (measured value of each sensor) of input part 11a, the result of calculation etc. of calculating part 11b, carrys out control FFU22.
In addition, central monitoring unit 11 such as can be realized by personal computer, also can be realized by special controller.Such as, adopt PCC controller, further preferably, Bei Jialai PCC programmable computer controller can be adopted: design adopts the x20 Series PC C of B & R company, and processor is X20CP1485-1.But be not limited to this, as long as have the device of above-mentioned functions, without particular limitation of the hardware configuration of central monitoring unit 11.
Be described above the structure composition of chamber airflow control system of the present invention, next introduce the control method of this control system.
Refer to Fig. 3, first control method comprises the following steps:, as shown in step S1: gas detection cell gather gaseous state information in each chamber and by as described in gaseous state information send to as described in central monitoring unit; Then as shown in step s 2: power sensor gathers blower fan filtering unit power output data, and described blower fan filtering unit power output data are sent to described central monitoring unit; Then as shown in step S3: central monitoring unit to receive as described in gaseous state information and as described in blower fan filtering unit power output data carry out pretreatment, and sending controling instruction give described blower fan filtering unit; As shown in step s 4: described blower fan filtering unit obtains control instruction, controls the power output of described blower fan filtering unit finally.
Concrete, the status information collecting each chamber indoor gas is the atmospheric pressure value of gas, in control method of the present invention, by gathering each chamber internal gas pressure value, the air pressure difference of each chamber is obtained after central monitoring unit 11 computing, obtain each chamber blower fan filtering unit power output data simultaneously, to regulate the blower fan filtering unit power output of each chamber, the chamber blower fan filtering unit power output that gas flows out chamber is made to be greater than the blower fan filtering unit power output that gas flows into chamber, thus make airflow direction flow to the little chamber of ventilation volume by the chamber that ventilation volume is large.In whole control procedure, air pressure is continued to monitor, make whole control procedure have feedback function, more accurate, timely to the adjustment of air flow direction.
Preferred further, in the process regulating each chamber blower fan filtering unit power output, select to increase the blower fan filtering unit power output that gas flows out chamber, the blower fan filtering unit power output of chamber is flowed out with through reaching maximum when power sensor monitors gas, if now, when also not reaching the effect of gas outflow, then reduce the blower fan filtering unit power output that gas flows into chamber.
Further, the scan period of baroceptor is 500 milliseconds, meets requirement of real-time control.Different chamber all has pressure sensor, and unification detects analysis by central monitoring unit 11, realizes centralized Control.
Be understandable that, in other embodiments can also by monitoring wind transducer, the air flow direction detecting each chamber reaches the object controlled in real time, and its control method is similar with the pressure detecting each chamber, repeats no more herein.
Above-described embodiment, does not form the restriction to this technical scheme protection domain.The amendment done within any spirit at above-mentioned embodiment and principle, equivalently to replace and improvement etc., within the protection domain that all should be included in this technical scheme.
Claims (10)
1. a chamber airflow control system, it is characterized in that, comprise multiple chamber being provided with blower fan filtering unit, central monitoring unit, gas detection cell and power sensor, described power sensor is connected with described blower fan filtering unit, for detecting the power output of blower fan filtering unit in described each chamber and being sent to described central monitoring unit, described gas detection cell is used for the gaseous state information of described chamber to be sent to described central monitoring unit, the information of described gas detection cell and described power sensor processes by described central monitoring unit, and to described blower fan filtering unit sending controling instruction, control the power output of blower fan filtering unit in described chamber to change gas flow.
2. chamber airflow control system as claimed in claim 1, it is characterized in that, described gas detection cell is baroceptor, for detecting the air pressure difference of described gas to chamber, and be sent to described central monitoring unit, central monitoring unit controls the power output of blower fan filtering unit in described chamber, makes the pressure that gas flows out described chamber be greater than the pressure that gas flows into described chamber.
3. chamber airflow control system as claimed in claim 1, it is characterized in that, described gas detection cell is wind transducer, for detecting the flow direction of the gas of described chamber, and be sent to described central monitoring unit, central monitoring unit controls the power output of blower fan filtering unit in described chamber, makes the pressure that gas flows out described chamber be greater than the pressure that gas flows into described chamber.
4. chamber airflow control system as claimed in claim 3, it is characterized in that, described wind transducer is located at the intersection of adjacent described chamber.
5. a chamber flow controlling method of air, is characterized in that, the method comprises the following steps:
Gas detection cell gathers gaseous state information in each chamber and described gaseous state information is sent to described central monitoring unit;
Power sensor gathers blower fan filtering unit power output data, and described blower fan filtering unit power output data are sent to described central monitoring unit;
Central monitoring unit carries out pretreatment to the described gaseous state information received and described blower fan filtering unit power output data, and sending controling instruction gives described blower fan filtering unit;
Described blower fan filtering unit obtains control instruction, controls the power output of described blower fan filtering unit, gas flow and object gas is flowed to identical.
6. chamber flow controlling method of air as claimed in claim 5, it is characterized in that, the cycle that described gas detection cell gathers gaseous state information in each chamber is 500 milliseconds.
7. chamber flow controlling method of air as claimed in claim 6, it is characterized in that, described gaseous state information is the air pressure difference of the gas of each chamber.
8. chamber flow controlling method of air as claimed in claim 6, it is characterized in that, described gaseous state information is the flow direction of the gas of each chamber.
9. chamber flow controlling method of air as claimed in claim 5, it is characterized in that, described central monitoring unit carries out pretreatment and obtains control instruction and be specially: increase gas and flow out the blower fan filtering unit power output of chamber and/or reduce the blower fan filtering unit power output that gas flows into chamber.
10. chamber flow controlling method of air as claimed in claim 9, it is characterized in that, described central monitoring unit carries out pretreatment and obtains control instruction and be specially: first increase the blower fan filtering unit power output that gas flows out chamber, controls object and then reduces when power output reaches maximum and do not reach the blower fan filtering unit power output that gas flows into chamber.
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| CN201510492387.1A CN105135603A (en) | 2015-08-12 | 2015-08-12 | Cavity airflow control system and method |
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| CN201510492387.1A CN105135603A (en) | 2015-08-12 | 2015-08-12 | Cavity airflow control system and method |
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| CN105135603A true CN105135603A (en) | 2015-12-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109869830A (en) * | 2019-03-01 | 2019-06-11 | 苏州洪昇新能源科技有限公司 | A kind of professional clean room air purging system |
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| JP2004218919A (en) * | 2003-01-14 | 2004-08-05 | Hitachi Plant Eng & Constr Co Ltd | Clean room |
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