CN103028840B - Laser output adjusting device and method - Google Patents
Laser output adjusting device and method Download PDFInfo
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- CN103028840B CN103028840B CN201210361905.2A CN201210361905A CN103028840B CN 103028840 B CN103028840 B CN 103028840B CN 201210361905 A CN201210361905 A CN 201210361905A CN 103028840 B CN103028840 B CN 103028840B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
Abstract
The present invention relates to Laser output adjusting device and method.Laser output adjusting device comprises: laser portion (100), generates laser beam (10); Optics portion (200), provides the path of laser beam (10) process; Processing department (300), makes the laser beam (10) through optics portion (200) be irradiated to substrate (20); First determination part (400), is arranged between laser portion (100) and optics portion (200), measures the output energy being created on the laser beam (10) of laser portion (100); Second determination part (500), is arranged at the inside of optics portion (200), measures the output energy of the laser beam (10) through optics portion (200); Control part (600), receive the output signal of the laser beam (10) that the first determination part (400) and the second determination part (500) measure, and pass the signal to laser portion (100), to adjust the output energy of the laser beam (10) being created on laser portion (100).
Description
Technical field
The present invention relates to a kind of Laser output adjusting device and method.Be specially, by being measured the laser beam generated in laser portion by the first determination part and the second determination part, the Laser output adjusting device that can easily adjust the output energy of the laser beam be radiated on substrate and method.
Background technology
In recent years, along with flat display devices, especially in the increase of demand and the trend of maximization of liquid crystal display (LCD), the speed that its level of application, size increase and resolution ratio increases is also in quickening, and for enhancing productivity and realizing cheapization of price, at simplified manufacturing technique with improve in earning rate and paid a lot of effort.The basic structure of liquid crystal display, by the upper substrate being formed with black matrix", color filter film and common electrode, and be formed with the lower basal plate of pixel region, pixel electrode, switch element and circuit, and the liquid crystal be filled between described upper substrate and following substrate formed.
This structure constituent formed in lower basal plate, cause the bad phenomenon such as broken string or short circuit occurring circuit in a manufacturing process, and the maximization of area is shown with image component, this defect also gets more and more, therefore, for improving quality and the stability of liquid crystal display, need repairing (Repair) technology can eliminating these defects.
The repairing technique always got most of the attention is, possesses the extension wire repaired, when there is defect, connect extension wire to the method for repairing that breaks, if but when repairing circuit is long, signal level can reduce because of line resistance value, thus have a negative impact to the acting characteristic of liquid crystal panel.
Therefore, more welcome is recently the repairing circuit method using laser induced chemical vapor depostion method.Namely, substantially be adopt when finding defect, utilize laser to cut off a certain position of rejected region, and deposit repairing circuit by chemical vapour deposition technique and form the method for pattern, or when circuit breaking, by laser induced chemical vapor depostion method (Laser CVD) plated metal, thus make the mode that the line electricity of disconnection connects, and then complete repairing work.The advantage of this laser induced chemical vapor depostion method method for repairing and mending is, can immediately at broken string position shape growing metal circuit by the expected during broken string, and its repair technology is simple, and can carry out the various repairing works comprising grating circuit and data circuit.And laser induced chemical vapor depostion method not only can repair the defect of substrate, also can be used for the depositing operation of microfine circuit.
With reference to Fig. 1, in existing laser induced chemical vapor depostion method device, the laser beam 10 generated in laser portion 100, through optics portion 200, being irradiated in the process of substrate 20 from processing department 300, is measured its output valve by processing department analyzer 310.But when laser beam 10 exports the phenomenon generation of energy minimizing, be then difficult to judge to cause laser beam 10 to export the position of energy minimizing.In addition, also existence is difficult to the difficult problem output energy of the laser beam of minimizing being readjusted desirable strength.
In addition, except laser induced chemical vapor depostion method device, to the general laser aid cutting off the bad circuit that is short-circuited and repair defect, and irradiate the high pixel of after the defect pixel of display makes its dim spot, defect being repaired with laser and repair (HPR) device etc., the accurate laser output intensity kept desired by user, guaranteeing in process replicability and stability, particularly important.
Summary of the invention
Therefore, the present invention is intended to the various problems solving the existence of above-mentioned prior art, and object is to provide in a kind of deposition at laser and repair technology, makes the output energy of laser beam remain consistent Laser output adjusting device and method.
In addition, the present invention also aims to, provide a kind of and easily can identify the Laser output adjusting device and the method that cause laser beam to export the laser aid part that energy reduces.
In addition, the bright object of we is also, provides a kind of when Laser Processing, the Laser output adjusting device that can measure the output energy of laser beam in real time and method.
Further, the object of the invention is to, when providing a kind of output energy of laser beam in process to occur abnormal, automatically can adjust the output energy of laser beam, to strengthen Laser output adjusting device and the method for reliability of technology and stability.
For achieving the above object, the feature of Laser output adjusting device provided by the invention is, comprising: laser portion, generates laser beam; Optics portion, provide above-mentioned laser beam the path of process; Processing department, makes laser beam irradiation through above-mentioned optics portion on substrate; First determination part, is arranged between above-mentioned laser portion and above-mentioned optics portion, for being determined at the output energy of the laser beam that above-mentioned laser portion generates; Second determination part, is arranged in above-mentioned optics portion, for measuring the output energy of the laser beam through above-mentioned optics portion; Control part, receives the output signal of the laser beam measured by above-mentioned first determination part and above-mentioned second determination part, pass the signal to above-mentioned laser portion, thus adjustment is at the output energy of the laser beam of above-mentioned laser portion generation.
In addition, for achieving the above object, the feature of Laser output method of adjustment of the present invention is, generate laser beam laser portion and provide laser beam process path optics portion between the first determination part is set, and the output signal of the laser beam generated in above-mentioned laser portion will measured on the first determination part, be sent to above-mentioned laser portion with the output signal of the laser beam through above-mentioned optics portion measured at the second determination part being arranged at inside, above-mentioned optics portion, thus adjustment is at the output energy of the laser beam of above-mentioned laser portion generation.
As mentioned above, the effect of structure provided by the invention is: in the technique of carry out utilizing laser depositing, repairing, the output energy of desired laser beam can be made to remain consistent.
In addition, effect of the present invention is also: easily can determine the laser aid part causing laser beam to export energy minimizing,
In addition, effect of the present invention is also: when Laser Processing, can measure the output energy of laser beam in real time.
In addition, effect of the present invention is also: when the output energy of laser beam occurs abnormal in technique, automatically can adjust the output energy of laser beam, and then strengthen the reliability and stability of technique.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing laser output device.
Fig. 2 is the structural representation of the Laser output adjusting device shown in embodiments of the invention.
Fig. 3 for shown in one embodiment of the invention on the first determination part to the schematic diagram that the output energy of laser beam measures.
Fig. 4 for shown in one embodiment of the invention on the second determination part to the schematic diagram that the output energy of laser beam measures.
Fig. 5 is the schematic diagram of the diffusion of the laser beam on scatterer shown in one embodiment of the invention.Reference numeral:
10,11,12,12 ': laser beam
20: substrate
100: laser portion
200: optics portion
300: processing department
310: processing department analyzer
400: the first determination parts
410: the first beam splitters
420: overlay
500: the second determination parts
510: the second beam splitters
520: scatterer
530: charge-coupled device (CCD)
600: control part
Detailed description of the invention
Below, the enforceable specific embodiment of the present invention will be illustrated and with reference to accompanying drawing, invention will be described in detail.For enabling industry personnel fully implement the present invention, will be described in detail these embodiments.Though various embodiment of the present invention is different, do not repel each other.Such as, given shape described here, ad hoc structure is relevant to an embodiment with characteristic, and without departing from the spirit and scope of the present invention, also can be embodied by other embodiment.In addition, the position of the discrete structure part separately in disclosed embodiment or configuration, also can change without departing from the spirit and scope of the present invention.Therefore, aftermentioned detailed description the meaning of indefinite, as long as rationally illustrate, scope of the present invention is then only defined in all scopes and additional claim that the content advocated with its claim is equal to.Reference label multi-angle similar on accompanying drawing, is identical in fact, has similar function in other words, and for simplicity, also likely can show the length of accompanying drawing illustrated embodiment, area, thickness and form turgidly.
Below, for making to possess the technical staff of general knowledge in the technical field of the invention, the present invention can both be implemented easily, being described with reference to the accompanying drawings most preferred embodiment of the present invention.
Laser output adjusting device provided by the present invention is not limited to the dim spot metallization processes etc. of defect repair process, depositing operation and defective pixel of the patterning process of substrate, circuit deposition or circuit cut-out etc., industry personnel, in all spectra using laser output device, can be applied to it according to ability.Below, to use Laser output adjusting device provided by the present invention in laser induced chemical vapor depostion method technique, be illustrated.
The formation of Laser output adjusting device:
Fig. 2 is the structural representation of the Laser output adjusting device shown in embodiments of the invention.
With reference to Fig. 2, the laser output device shown in embodiments of the invention is by laser portion 100, and optics portion 200, processing department 300, the first determination part 400, second determination part 500 and control part 600 are formed.
Laser portion 100 generates laser beam 10, such as, can generate Nd:YAG laser or diode laser and be irradiated in optics portion 200.In addition, laser portion 100 receives the signal transmitted by control part 600, adjusts the output of the laser beam 10 generated.
In addition, such as, laser portion 100 can utilize several laser beams to enhance productivity, and this is well-known technology, therefore does not elaborate in this description.The number of the laser beam used in the present embodiment can carry out various variation according to the size of substrate size.In addition, the wavelength of all laser beams can be identical, also can use the laser beam of different wave length by process conditions.In addition, laser beam can send from respective laser generator (not shown), also can utilize suitable optical system (not shown) and generate several laser beams by a laser generator.
Optics portion 200 is arranged between laser portion 100 and processing department 300, can provide the path of laser beam 10 processes.In addition, focused laser beam 10 is to form focus.At this moment, according to focus strength, angle, focusing efficiency etc., likely utilize one or several optical system (not shown).
Processing department 300 can make to be irradiated on substrate 20 through the laser beam 10 in optics portion 200.Laser beam 10 is irradiated to substrate 20 from processing department 300, can repair the defect of substrate 20, can also carry out the deposition of microfine circuit at the irradiated site of the laser light velocity.
First determination part 400 is arranged between laser portion 100 and optics portion 200.First determination part 400 can to being created on laser portion 100 and the output energy being irradiated to the laser beam in optics portion 200 measures, and it can comprise the one be transformed into by luminous energy in the components of photo-electric conversion of electric energy, i.e. photodiode (photo diode).
Second determination part 500 can be arranged at the inside in optics portion 200.Second determination part 500 to through optics portion 200 and the output energy being irradiated to the laser beam 10 in processing department 300 measure, and the first determination part 400 is same, also can comprise photodiode.
Control part 600 receives the output signal of the laser beam 10 of the first determination part 400 and the second determination part 500 mensuration, to receive output signal analyze, thus for adjustment laser portion 100 generate laser beam 10 output energy and send signal to laser portion 100.
Control part 600 also comprises display part (not shown), and it can to the output signal of the laser beam received from the first determination part 400 and the second determination part 500, and the signal sent to laser portion 100 carries out quantizing and processes and shown.In addition, also can comprise data input part (not shown), this data input part is used for from using the user of laser adjusting device to receive desired laser beam output valve.Control part 600 is preferably a kind of carries out computing, input export the device of the such as computer of data.
The mensuration of Laser output energy:
Fig. 3 for shown in embodiments of the invention on the first determination part 400 to the schematic diagram that the output energy of laser beam 11 measures.
The first determination part 400 shown in one embodiment of the invention, before the laser beam 10 being created on laser portion 100 is irradiated to optics portion 200, can directly measure the output energy of laser beam 10.
On the one hand, shown in other embodiments, the output energy of laser beam 10 can at the first determination part 400 indirectly testing.Shown in Fig. 3, the output energy of laser beam 10 is reflected by beam splitter (beamsplitter) 410 and overlay 420, and indirectly at the schematic diagram that the first determination part 400 measures.
With reference to Fig. 3, between laser portion 100 and optics portion 200, be provided with the first beam splitter 410.
First beam splitter 410 can be separated the laser beam 10 through the first beam splitter 410.Namely a part for laser beam 10 is reflected by the first beam splitter 410, and remainder is then irradiated to optics portion 200 by original path.If to be separated and excessive by the output energy of the laser beam 11 reflected through the first beam splitter 410, the output energy of the laser beam 10 then technique used will be too small, do not reach the object that the present invention keeps laser beam 10 consistent all the time, if through to be separated and the output energy of the laser beam 11 reflected is too small, when then laser beam 11 being measured on the first analyzer 400, error range can become large, therefore, be the best time through being separated and the output energy of the laser beam 11 reflected accounts for all export energy 1% to 2%.
In addition, between laser portion 100 and optics portion 200, except the first determination part 400 and the first beam splitter 410, also may comprise overlay 420.Overlay 420 makes to be separated and the laser beam 11 reflected reflexes on the first determination part 400 again through the first beam splitter 410, and then makes the output energometry of the first determination part 400 pairs of laser beams 11 become easy.As long as the material of overlay 420 can the material of reflect beams of laser light 11, can use by without stint.For to be described better in Fig. 3, illustrate overlay 420 and cover the part of open side, but the area covered can utilize form and different according to invention.
Fig. 4 for shown in embodiments of the invention on the second determination part 500 to the schematic diagram that the output energy of laser beam 12 measures.
As shown in Figure 4, second determination part 500 of one embodiment of the invention can directly to being irradiated to optics portion 200 from laser portion 100 and output energy through the laser beam 10 in optics portion 200 measures.
In addition, according to other embodiments, the output energy of laser beam 10 can carry out indirect determination by the second determination part 500.Fig. 4 shows, and the output of laser beam 10, after the second beam splitter 510 reflects, carries out the schematic diagram of indirect determination through scatterer 520 at the second determination part 500.
With reference to Fig. 4, in optics portion 200, be provided with the second beam splitter 510.
Second beam splitter 510 can be separated the laser beam 10 by the second beam splitter 510.That is, fraction of laser light light beam 10 is reflected by the second beam splitter 510, and remainder is irradiated in processing department 300 through optics portion 200 by original path.If to be separated by the second beam splitter 510 and the output energy of the laser beam 12 reflected is excessive, the output energy of the laser beam 10 that technique uses will be too small, do not reach the object that maintenance laser beam 11 of the present invention is consistent all the time like this, if through to be separated and the output energy of the laser beam 12 reflected is too small, when then laser beam being measured on the first analyzer 500, error range can become large, therefore, preferably separated and output energy that the is laser beam 12 of reflection accounts for and all exports 1% to 2% of energy.
In addition, between the second determination part 500 and the second beam splitter 510, namely in the side of the second analyzer 500, scatterer (diffuser) 520 can be installed.The inside in optics portion 200 can be provided with charge-coupled device (CCD:charge coupled device) 530, be mapped to charge-coupled device 530 for preventing the laser beam 12 being separated to the second determination part 500 from the second beam splitter 510 from reflexing to the surface of the second determination part 500, scatterer 520 is installed.In addition, the effect of scatterer 520 is, more critically can measure the output energy of laser beam 12.
Fig. 5 is the schematic diagram of the diffusion of the laser beam on scatterer of one embodiment of the invention.
With reference to Fig. 5, be separated by the second beam splitter 510 and the laser beam 12 reflect when through scatterer 520, scatterer 520 is inner fully spread 12 ' after, be irradiated on the surface of the second determination part 500.Because laser beam 10 is separated by the second separator 510 and reflects, therefore, laser beam 12 has less output energy, likely occurs evaluated error, but be distributed in widely on the surface of the second determination part 500 through the laser beam 12 ' of scatterer 520, thus the degree of accuracy of mensuration can be improved.
The size of scatterer 520 preferably makes according to the size of the second determination part 500, to cover the side of the second determination part 500 completely.In addition, the material of scatterer 520 can be vitreous silica (fused silica, FS).Vitreous silica has excellent optical property and resisting laser damage, therefore, is widely used as based on the optical component in the optical system of laser.The one or both sides of scatterer 520 can be processed into every 1mm and have 240 sand (grit), so in use, can be more obvious to the diffusion effect of laser beam 12.
In addition, preferred scatterer 520 is installed into the side of the second determination part 500 is that predetermined angular A tilts.On the side of the second determination part 500, under directly installing the situation (when predetermined angular A is 0 °) of scatterer 520, laser beam 12 on the surface at scatterer 520 slightly reflects and is transferred on charge-coupled device 530.For preventing the generation of this phenomenon, scatterer 520 to be preferably installed into the second determination part 500 side in being greater than 0 ° and the angle A being less than 45 ° tilts, and more preferably tilts 20 °.If scatterer 520 is installed with the angle A more than 45 °, likely to reduce at the output energy of laser beam 12 that the second determination part 500 measures through scatterer 520.
The adjustment of Laser output energy:
Below, the process that laser output device provided by the present invention adjusts Laser output energy is in real time illustrated.
The user of Laser output adjusting device can in the data input part of control part 600 (not shown), and input will be irradiated to the output valve of the laser beam 10 on substrate 20.Laser portion 100 generates and irradiates the laser beam 10 consistent with the output valve that user inputs.
Before laser beam 10 is irradiated to optics portion 200, can be measured output energy by the first determination part 400.At this moment, if the output energy of the laser beam 11 measured by the first determination part is less than the output energy of the laser beam 10 that user inputs, namely do not generate the laser light velocity with the output energy equivalence of the laser beam set on laser beam 100, and then can determine that problem has appearred in laser portion 100.Therefore, after control part 600 compares the output energy of the laser beam 11 that the first determination part 400 measures and the output energy presetting (user inputs) laser beam 10, if the output energy of laser beam 11 is less than the output energy of laser beam 10, control part 600 display part (not shown) display laser portion 100 exist abnormal while, improve the output energy of the laser beam 10 generated in laser portion 100, with the output energy coincidence of the output energy being adjusted to the laser beam 11 that the first determination part 400 measures with the laser beam 10 preset.On the one hand, if be provided with the first beam splitter 410 further, 1% to 2% of the output energy of laser beam 10 can reflex on the first determination part 400, and therefore, control part 600 should consider this point, then does computing.
Lift an example explanation, what user inputted is the energy that laser beam 10 exports 100J, but what measure on the first determination part 400 is the energy that laser beam 11 only possesses 90J, control part 600 display part (not shown) upper display laser portion 100 exist abnormal while, to laser portion 100 transmission signal, make laser beam 10 export the energy of 110J, Row sum-equal matrix of going forward side by side makes the laser beam 11 that the first determination part 400 measures possess the energy of 100J.
Next, the laser beam 10 through optics portion 200, before exposing to substrate 20 by processing department 300, is measured output energy by the second determination part 500.At this moment, if the output energy of the laser beam 12 measured on the second determination part 500 is less than the laser beam 10 that user inputs, then think that laser beam 10 exports energy and reduces when through optics portion 200, can determine that problem has appearred in the laser beam path of inside, optics portion 200.Namely control part 600 receives the signal of the first determination part 400 and the second determination part 500, when the output energy of the laser beam 11 measured on the first analyzer 400 and the output energy coincidence of the laser beam 10 preset, and when on the second determination part 500, the output energy of the laser beam 12 of mensuration is less than the output energy of the laser beam 10 preset, should be that laser portion 100 does not exist exception, and there is exception in optics portion 200, therefore, the upper display light department of the Chinese Academy of Sciences 200 of the display part (not shown) of control part 600 exist abnormal while, improve the output energy of the laser beam 10 generated in laser portion 100, and the output energy being adjusted to the laser beam 12 measured on the second analyzer 500 and the output energy coincidence of laser beam 10 preset.In addition, if be provided with the second beam splitter 510 further, because only having 1% to 2% to reflex on the second determination part 500 in the output energy of laser beam 10, control part 600 need consider that this point does computing again.
Lift an example explanation, what user inputted is the energy that laser beam 10 exports 100J, but what measure on the first determination part 400 is the energy that laser beam 11 possesses 100J, and the laser beam 12 that the second determination part 500 measures only possesses the energy of 90J, then control part 600 without exception and optics portion 200 of display part (not shown) upper display laser portion 100 have abnormal while, to laser portion 100 transmission signal, make laser beam 10 export the energy of 110J, thus be adjusted to the energy that the laser beam 12 that the second determination part 500 measures possesses 100J.
As mentioned above, the present invention is in the technique using laser, can the real time measure Laser output energy, make desired laser beam export energy and remain consistent, and determine the laser aid part causing problem to occur more easily, and automatically adjust the output energy of laser beam, the reliability and stability of effective strengthening process.
In sum, be described in detail in conjunction with most preferred embodiment and accompanying drawing, but not as limit, all technical staff possessing general knowledge in the technical field of the invention, all without departing from the spirit of the scope of the invention, can carry out various distortion and variation.These variation and variation example are all counted as being included within the present invention and right.
Claims (10)
1. a Laser output adjusting device, is characterized in that, comprising:
Laser portion, generates laser beam;
Optics portion, provides the path of described laser beam process;
Processing department, makes laser beam irradiation through described optics portion on substrate;
First determination part, is arranged between described laser portion and described optics portion, measures the output energy being created on the laser beam in described laser portion;
Second determination part, is arranged at the inside in described optics portion, measures the output energy of the laser beam through described optics portion;
Control part, receives the output signal of the laser beam measured by described first determination part and described second determination part, pass the signal to described laser portion, thus adjustment is created on the output energy of the laser beam in described laser portion,
Be provided with scatterer in the side of described second determination part, described scatterer is installed into, with the side of the second determination part in being greater than 0 ° and being less than the angular slope of 45 °.
2. Laser output adjusting device according to claim 1, is characterized in that:
When the output energy of the laser beam measured by described first determination part is less than the output energy of the laser beam preset, show while described laser portion goes wrong at described control part, the output energy of the laser beam being created on described laser portion is adjusted, the output energy of laser beam measured to make described first determination part and the output energy coincidence of the described laser beam preset
When the output energy of laser beam measured by described first determination part and the output energy coincidence of the described laser beam preset, and the data of laser beam measured by described second determination part be less than described in preset the output energy of laser beam time, show while described optics portion goes wrong at described control part, the output energy of the laser beam being created on described laser portion is adjusted, the output energy of laser beam measured to make described second determination part and the output energy coincidence of the described laser beam preset.
3. Laser output adjusting device according to claim 1, is characterized in that, also comprise:
First beam splitter, this first beam splitter is installed between described laser portion and described optics portion, for separating of the laser beam being created on described laser portion.
4. Laser output adjusting device according to claim 3, is characterized in that:
The laser beam that described first beam splitter is separated accounts for 1% to 2% of the output energy of the laser beam being created on described laser portion.
5. Laser output adjusting device according to claim 3, is characterized in that, also comprise:
Overlay, for reflexing to described first determination part by the isolated laser beam of described first beam splitter.
6. Laser output adjusting device according to claim 1, is characterized in that, also comprise:
Second beam splitter, it is inner that this second beam splitter is arranged at described optics portion, and be separated the laser beam through described optics portion.
7. Laser output adjusting device according to claim 6, is characterized in that:
The laser beam that described second beam splitter is separated accounts for 1% to 2% of the output energy of the laser beam through described optics portion.
8. Laser output adjusting device according to claim 1, is characterized in that:
The material of described scatterer is vitreous silica.
9. adopt a Laser output method of adjustment for the device according to any one of claim 1-8, it is characterized in that:
Control part is sent to by the output signal being created on the laser beam in described laser portion measured by the first determination part and by the output signal of the laser beam through optics portion of the second determination part mensuration, again signal is sent to described laser portion from described control part, thus the output energy of the laser beam being created on described laser portion is adjusted, wherein, between the laser portion that described first determination part is arranged on generation laser beam and the optics portion in path that laser beam process is provided, it is inner that described second determination part is arranged on described optics portion, be provided with in the side of described second determination part with the side of described second determination part in being greater than 0 ° and being less than the scatterer of the angular slope of 45 °.
10. Laser output method of adjustment according to claim 9, is characterized in that:
When the output energy of the laser beam measured by described first determination part is less than the output energy of the laser beam preset, described control part show described laser portion in-problem while, the laser beam being created on described laser portion is adjusted, to make by the output energy of laser beam of described first determination part mensuration and the output energy coincidence of the described laser beam preset
When the output energy of laser beam measured by described first determination part and the output energy coincidence of the described laser beam preset, and the data of laser beam measured by described second determination part be less than described in preset the output energy of laser beam time, show while described optics portion goes wrong at described control part, the output energy of the laser beam being created on described laser portion is adjusted, the output energy of laser beam measured to make described second determination part and the output energy coincidence of the described laser beam preset.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110098501A KR20130034474A (en) | 2011-09-28 | 2011-09-28 | Device for controlling laser output and method thereof |
| KR10-2011-0098501 | 2011-09-28 |
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| Publication Number | Publication Date |
|---|---|
| CN103028840A CN103028840A (en) | 2013-04-10 |
| CN103028840B true CN103028840B (en) | 2015-11-04 |
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| CN201210361905.2A Active CN103028840B (en) | 2011-09-28 | 2012-09-25 | Laser output adjusting device and method |
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| KR (1) | KR20130034474A (en) |
| CN (1) | CN103028840B (en) |
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| CN113649694B (en) * | 2021-08-12 | 2024-02-27 | 武汉逸飞激光股份有限公司 | Welding method for cylindrical battery current collector |
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| US6067306A (en) * | 1997-08-08 | 2000-05-23 | Cymer, Inc. | Laser-illuminated stepper or scanner with energy sensor feedback |
| CN1596492A (en) * | 2001-11-30 | 2005-03-16 | 西默股份有限公司 | Timing control for two-chamber gas discharge laser system |
| US6970492B2 (en) * | 2002-05-17 | 2005-11-29 | Lambda Physik Ag | DUV and VUV laser with on-line pulse energy monitor |
| CN1886872A (en) * | 2003-11-26 | 2006-12-27 | Tcz股份有限公司 | Laser thin film poly-silicon annealing system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6618403B2 (en) * | 2000-03-16 | 2003-09-09 | Lambda Physik Ag | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser |
| US7217941B2 (en) * | 2003-04-08 | 2007-05-15 | Cymer, Inc. | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source |
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- 2011-09-28 KR KR1020110098501A patent/KR20130034474A/en not_active IP Right Cessation
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6067306A (en) * | 1997-08-08 | 2000-05-23 | Cymer, Inc. | Laser-illuminated stepper or scanner with energy sensor feedback |
| CN1596492A (en) * | 2001-11-30 | 2005-03-16 | 西默股份有限公司 | Timing control for two-chamber gas discharge laser system |
| US6970492B2 (en) * | 2002-05-17 | 2005-11-29 | Lambda Physik Ag | DUV and VUV laser with on-line pulse energy monitor |
| CN1886872A (en) * | 2003-11-26 | 2006-12-27 | Tcz股份有限公司 | Laser thin film poly-silicon annealing system |
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| CN103028840A (en) | 2013-04-10 |
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