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CN103028840A - Device for adjusting laser output and method thereof - Google Patents

Device for adjusting laser output and method thereof Download PDF

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CN103028840A
CN103028840A CN 201210361905 CN201210361905A CN103028840A CN 103028840 A CN103028840 A CN 103028840A CN 201210361905 CN201210361905 CN 201210361905 CN 201210361905 A CN201210361905 A CN 201210361905A CN 103028840 A CN103028840 A CN 103028840A
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unit
laser
output
beam
measuring
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CN 201210361905
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Chinese (zh)
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CN103028840B (en )
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郑薰
尹星进
金俊来
李伦在
金铉洙
池泳洙
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灿美工程股份有限公司
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Abstract

The present invention relates to a device for adjusting laser output and a method thereof, wherein the device for adjusting laser output comprises a laser unit (100) generating laser beam (10); an optical unit (200) providing a laser beam path (10); a machining unit (300) irradiating the laser beam passing through the optical unit (200) to a substrate (20); a first measuring unit (400) arranged between the laser unit (100) and the optical unit (200) and used for measuring the output energy of the laser beam (10) of the laser unit (100); a second measuring unit (500) arranged inside the optical unit (200) and measuring the output energy of the laser beam (10) passing through the optical unit (200); a control unit (600) receiving the output signals of the laser beam measured by the first measuring unit (400) and the second measuring unit (500) and transmitting the signals to the laser unit (100), in order to adjust the output energy of the laser beam (10) generated at the laser unit (100).

Description

激光输出调整装置及方法技术领域[0001] 本发明涉及一种激光输出调整装置及方法。 Laser output adjusting device and method Technical Field [0001] The present invention relates to an apparatus and method for adjusting the laser output. 具体为,通过由第一测定部和第二测定部对在激光部生成的激光光束进行测定,可容易地对照射在基板上的激光光束的输出能量进行调整的激光输出调整装置及方法。 Specifically, by adjusting the laser output measuring apparatus and method for a first portion and a second portion for measuring the laser beam generated by the laser measuring unit, the output energy can be easily irradiated with laser beam on a substrate for adjusting. 背景技术[0002] 近年来,随着平板显示器装置,尤其是在液晶显示器(LCD)的需求的增加和大型化的趋势,其应用程度、尺寸增大及分辨率增加的速度也在加快,且为提高生产效率并实现价格的低廉化,在简化制造工艺和提高收益率方面付出了很多努力。 [0002] In recent years, a flat panel display device, in particular an increase in the demand trends and large liquid crystal display (LCD), the extent of the application, and the size is increased to increase the resolution also accelerating the speed, and in order to improve production efficiency and a cost reduction of price, in terms of simplifying the manufacturing process and improve the yield paid a lot of effort. 液晶显示器的基本结构, 由形成有黑色矩阵、彩色滤光膜和共同电极的上部基板,及形成有像素区域、像素电极、开关元件和线路的下部基板,以及填充于所述上部基板和下述基板之间的液晶所构成。 The basic structure of a liquid crystal display, the black matrix is ​​formed, the upper substrate color filter and a common electrode, and a pixel region is formed, a lower substrate having a pixel electrode, a switching element and wiring, and the upper substrate and filled in the following a liquid crystal between the substrates formed. [0003] 这种在下部基板上形成的结构组成成分,导致在制造工艺中出现线路的断线或短路等不良现象,且随图像元件显示面积的大型化,这种缺陷也越来越多,因此,为提高液晶显示器的质量和稳定性,需要可消除这些缺陷的修补(R印air)技术。 [0003] This structure is formed on the lower substrate composition, resulting in a disconnection or short circuit and the like undesirable phenomenon in the manufacturing process, and the display element with the image size of the area, more and more of such defect, Therefore, to improve the quality and stability of the liquid crystal display, a need to eliminate these drawbacks repair (R AIR printing) technology. [0004] 一直备受瞩目的修补技术是,具备修补用的备用线路,在发生缺陷时,连接备用线路对断线进行修补的方法,但若修补线路过长时,信号水平会因线路电阻值而降低,从而对液晶面板的动作特性产生不利影响。 [0004] been highly anticipated repair technique is provided for repairing a backup line, when the defect occurs, the spare line pair connected to a method of repairing the disconnection, but if the line is too long repair time, the signal level due to line resistance value It is reduced, thereby adversely affecting the operation characteristics of the liquid crystal panel. [0005] 因此,最近较受欢迎的是使用激光化学气相沉积法的修补线路法。 [0005] Therefore, recently more popular method is to use a laser repair line chemical vapor deposition method. 即,基本上是采用在发现缺陷时,利用激光来切断缺陷部位的某一部位,并通过化学气相沉积法来沉积修补线路并形成图案的方法,或是在线路断线时,通过激光化学气相沉积法(Laser CVD)沉积金属,从而使断开的线路电连接的方式,进而完成修补作业。 That is, which is basically a defect is found at the site, using a laser to cut the defect site, and repair line deposited by chemical vapor deposition and a method for forming a pattern, or when the line disconnection by laser chemical vapor depositing a metal deposition method (Laser CVD), thereby electrically disconnecting the line connections, thereby completing the repair work. 这种激光化学气相沉积法修补方法的优点在于,断线时可立即在断线部位按所期望的形状生长金属线路,其修补工艺简单,且可进行包括光栅线路和数据线路在内的各种修补作业。 The advantage of this method of repairing a laser chemical vapor deposition in that immediately shape as desired growth of the metal lines, in which the process is simple repair broken when disconnected portion, and may include a variety of raster and data lines, including repair work. 而且,激光化学气相沉积法不仅可修补基板的缺陷,还可用于微细线路的沉积工艺。 Further, the laser chemical vapor deposition of a substrate not only to remedy defects, may also be used in fine-line deposition process. [0006] 参照图1,现有的激光化学气相沉积法装置中,在激光部100生成的激光光束10经过光学部200,在从加工部300照射到基板20的过程中,由加工部测定器310对其输出值进行测定。 [0006] Referring to FIG. 1, a conventional laser chemical vapor deposition apparatus, the laser unit 100 generates the laser beam 10 through the optical portion 200, in the course of processing from the irradiation unit 300 to the substrate 20, by the processing unit measuring instrument 310 measured value of its output. 但激光光束10输出能量减少的现象发生时,则很难判断造成激光光束10输出能量减少的部位。 However, when the laser beam 10 to reduce the output power of the phenomenon, it is difficult to cause the laser beam 10 is determined to reduce the energy output portion. 另外,还存在难以将减少的激光光束的输出能量重新调整所需强度的难题。 Further, it is difficult to reduce the output power of the laser beam to re-adjust the desired intensity problems. [0007] 另外,除了激光化学气相沉积法装置之外,对切断发生短路的不良线路对缺陷进行修补的一般激光装置,及用激光照射显示器的缺陷像素使其暗点化后对缺陷进行修补的高像素修补(HPR)装置等来说,准确保持使用者所期望的激光输出强度,在确保工艺可再现性和稳定性方面,尤为重要。 [0007] Further, in addition to the laser chemical vapor deposition apparatus, disconnection of short-circuit failure occurred the defect of conventional laser repair apparatus, so that the dark pixel and the defect repairing attunement laser irradiation defect of the display high-resolution devices patch (the HPR), the accuracy desired by the user holding the laser output intensity, to ensure process reproducibility and stability, is particularly important. 发明内容[0008] 因此,本发明旨在解决上述现有技术存在的各种问题,目的在于提供一种在激光的沉积和修补工艺中,使激光光束的输出能量始终保持一致的激光输出调整装置及方法。 [0008] Accordingly, the present invention aims to solve the various problems of the prior art described above, it aims to provide a laser output adjusting means in the deposition process and the repair of the laser, the laser beam output power remains the same and methods. [0009] 此外,本发明的目的还在于,提供一种能够容易识别出造成激光光束输出能量减少的激光装置组成部分的激光输出调整装置及方法。 [0009] Further, the object of the present invention is to provide an apparatus capable of easily identifying the cause and the method of reducing the output energy of the laser beam of the laser output of the laser part of the adjustment means. [0010] 另外,本方明的目的还在于,提供一种在激光加工时,可实时对激光光束的输出能量进行测定的激光输出调整装置及方法。 [0010] Further, the present object is further characterized by Masaaki, to provide a laser processing, in real time on the output energy of the laser beam is a laser output adjusting device and method of determination. [0011] 还有,本发明的目的在于,提供一种在工艺中激光光束的输出能量出现异常时,可自动调整激光光束的输出能量,以增强工艺可靠性和稳定性的激光输出调整装置及方法。 [0011] Still another object of the present invention to provide an abnormal output energy of the laser beam in the process, it can automatically adjust the output energy of the laser beam, the laser output adjusting means to enhance the reliability and stability of the process and method. [0012] 为达到上述目的,本发明提供的激光输出调整装置的特点在于,包括:激光部,生成激光光束;光学部,提供上述激光光束所经过的路径;加工部,使经过上述光学部的激光光束照射到基板上;第一测定部,设置于上述激光部与上述光学部之间,用于测定在上述激光部生成的激光光束的输出能量;第二测定部,设置于上述光学部内,用于测定经过上述光学部的激光光束的输出能量;控制部,接收由上述第一测定部和上述第二测定部测定的激光光束的输出信号,将信号传送到上述激光部,从而调整在上述激光部生成的激光光束的输出能量。 [0012] To achieve the above object, the characteristics of the laser output adjusting device of the present invention is provided, comprising: a laser unit to generate a laser beam; an optical unit, providing a path of the laser light beam passes; a processing unit, so that through the optical portion irradiating a laser beam onto the substrate; a first measurement unit, provided between the laser unit and the optical unit for measuring the output energy of the laser unit generates a laser beam; a second measurement portion provided in the optical unit, for measuring the output energy of the laser beam through the optical unit; a control unit, receives the laser beam measured by the first measuring portion and the second portion of the measurement output signal, the signal is transmitted to the laser unit, thereby adjusting the above energy of the laser output unit generates a laser beam. [0013] 另外,为达到上述目的,本发明的激光输出调整方法的特点在于,在生成激光光束的激光部和提供激光光束所经过的路径的光学部之间设置第一测定部,并将在第一测定部上测定的在上述激光部生成的激光光束的输出信号,和在设置于上述光学部内部的第二测定部所测定的经过上述光学部的激光光束的输出信号发送至上述激光部,从而调整在上述激光部生成的激光光束的输出能量。 [0013] Further, to achieve the above object, the laser output adjusting feature of the invention the method is characterized in that the first measurement portion is provided between the laser unit generates laser beam and the optical path of the laser beam portion to provide elapsed, and in measuring the first measurement unit is transmitted to the laser unit of the laser unit generates a laser beam output signals, and the output signal of the optical portion through the laser beam in the second measurement portion is provided inside the optical unit is measured to adjust the output energy of the laser beam generated by the laser unit. [0014] 如上所述,本发明提供的结构的效果在于:在利用激光进行沉积、修补的工艺中, 可使所期望的激光光束的输出能量始终保持一致。 [0014] As described above, the effect of the structure of the present invention provides that: in a process using a laser deposition, in repair, make a desired output power of the laser beam is always consistent. [0015] 此外,本发明的效果还在于:可容易地确定出造成激光光束输出能量减少的激光装置组成部分,[0016] 另外,本发明的效果还在于:在激光加工时,可实时对激光光束的输出能量进行测定。 [0015] In addition, the effect of the present invention is: can readily determine the cause of the laser beam output power reduction component of the laser apparatus, [0016] Further, the effect of the present invention is: In the laser processing, real-time laser the output energy of the beam is measured. [0017] 此外,本发明的效果还在于:工艺中激光光束的输出能量出现异常时,可自动调整激光光束的输出能量,进而增强工艺的可靠性和稳定性。 [0017] Further, the effect of the invention is further characterized by: the abnormality in the output energy of the laser beam process, it can automatically adjust the output energy of the laser beam, thereby enhancing the reliability and stability of the process. 附图说明[0018] 图1为现有的激光输出装置的示意图。 BRIEF DESCRIPTION [0018] FIG. 1 is a schematic diagram of a conventional laser output device. [0019] 图2为本发明的实施例所示的激光输出调整装置的结构示意图。 Schematic structural diagram of the laser output adjusting device of embodiment [0019] FIG. 2 of the present invention shown in FIG. [0020] 图3为本发明的一实施例所示的在第一测定部上对激光光束的输出能量进行测定的示意图。 A schematic diagram for measuring a first measurement unit on the output energy of the laser beam to an embodiment illustrated in [0020] FIG. 3 of the present invention. [0021] 图4为本发明的一实施例所示的在第二测定部上对激光光束的输出能量进行测定的示意图。 A schematic diagram for measuring the second measurement unit on the output energy of the laser beam to an embodiment illustrated in [0021] FIG. 4 of the present invention. [0022]图5为本发明的一实施例所示的在散射器上的激光光束扩散的示意图。 Laser light scattering device in an embodiment shown in [0022] FIG. 5 is a schematic view of the beam spread of the invention. 附图标记:[0023] 10、11、12、12,:激光光束[0024] 20 :基板[0025] 100 :激光部[0026] 200 :光学部[0027] 300 :加工部[0028] 310 :加工部测定器[0029] 400 :第一测定部[0030] 410 :第一射束分离器[0031] 420 :覆盖板[0032] 500 :第二测定部[0033] 510 :第二射束分离器[0034] 520 :散射器[0035] 530 :电荷耦合器(CXD)[0036] 600 :控制部具体实施方式[0037] 下面,将举例说明本发明可实施的特定实施例并参照附图,对发明作以详细说明。 Reference numerals: [0023] 10,11,12,12 ,: laser beam [0024] 20: substrate [0025] 100: laser unit [0026] 200: Optical unit [0027] 300: processing unit [0028] 310: The first measurement unit [0030] 410:: [0029] processing unit 400 measuring a first beam splitter [0031] 420: cover plate [0032] 500: second measurement unit [0033] 510: The second beam splitter is [0034] 520: diffuser [0035] 530: charge coupled device (CXD) [0036] 600: control section DESCRIPTION oF eMBODIMENTS [0037] Hereinafter, specific embodiments will be exemplified embodiment of the present invention with reference to the accompanying drawings, of the invention will be described in detail. 为使本行业人员能够充分实施本发明,将对这些实施例作以详细说明。 For the industry to take full embodiment of the present invention, these embodiments will be described in detail. 本发明的各种实施例虽有所不同,但相互之间并不排斥。 Various embodiments of the present invention, though they are different, but not mutually exclusive. 例如,这里所记载的特定形状,特定结构和特性与一实施例相关,且在不脱离本发明精神和范围的情况下,也可由其他的实施例来体现。 For example, specific shapes, specific structural and characteristics described herein associated with one embodiment, and without departing from the spirit and scope of the invention, other embodiments can also be embodied. 另外, 各自公开的实施例中的个别结构组成部分的位置或配置,在不脱离本发明精神和范围的情况下也可进行变动。 Further, each disclose the location or configuration of the individual components of the structure of the embodiment, without departing from the spirit and scope of the present invention may also fluctuates. 因此,后述详细说明并无限定之意,只要合理说明,本发明的范围则仅限定于与其权利要求所主张的内容等同的所有范围以及附加的权利要求。 Thus, not described in detail later defined meaning, as long as reasonable, the scope of the present invention is limited only the appended claims, and all ranges in its claims content equivalent to the claimed requirements. 附图上相似的参照标号多角度而言,其实是相同的,或者说具有相似的功能,且为方便起见,也有可能会夸张地表现附图所示实施例的长度、面积、厚度及形态。 On the drawings like reference numerals multi-perspective, in fact, it is the same, or that have similar functions, and for convenience, may also be made bigger length, area, thickness and shape of the embodiment shown in the figures. [0038] 下面,为使具备本发明所属技术领域内一般知识的技术人员,都能够轻而易举地实施本发明,结合附图详细说明本发明的最佳实施例。 [0038] Next, in order to enable the skilled in the art comprising the present invention general knowledge in the art, can easily implement the present invention, in conjunction with the drawings, preferred embodiments of the present invention will be described. [0039] 本发明所提供的激光输出调整装置并不限定于基板的图形化工艺、线路沉积或线路切断等的缺陷修补工艺、沉积工艺和不合格像素的暗点化工艺等,本行业人员在使用激光输出装置的所有领域内,可根据能力对其加以应用。 [0039] The laser output adjusting device of the present invention provides a patterning process is not limited to the substrate, the line deposition or the like defect repair line disconnection process, the deposition process and the defective pixel dark attunement process or the like, personnel in the industry all areas using a laser output device, may be used in accordance with its capacity. 以下,以在激光化学气相沉积法工艺上使用本发明所提供的激光输出调整装置为例,加以说明。 Hereinafter, an example using a laser output adjustment apparatus according to the present invention is provided on the laser chemical vapor deposition process, it will be described. [0040] 激光输出调整装置的构成:[0041] 图2为本发明的实施例所示的激光输出调整装置的结构示意图。 Schematic structural diagram of the laser output adjusting means [0041] FIG. 2 of the present embodiment of the invention shown in: [0040] The configuration of the laser output adjusting means. [0042] 参照图2,本发明的实施例所示的激光输出装置由激光部100,光学部200,加工部300,第一测定部400,第二测定部500和控制部600构成。 Laser output device [0042] Referring to FIG. 2, the embodiment shown of the present invention is composed of a laser unit 100, optical unit 200, a processing unit 300, a first measurement portion 400, a second measuring section 500 and a control unit 600. [0043] 激光部100生成激光光束10,例如可生成Nd = YAG激光或二极管激光并照射到光学部200上。 [0043] The laser unit 100 generates the laser beam 10, for example, may generate laser Nd = YAG or diode laser and irradiated onto the optical portion 200. 此外,激光部100接收由控制部600传送的信号,对生成的激光光束10的输出进行调整。 Further, the laser unit 100 receives, for generating a laser output beam 10 is adjusted by the control signal transmission section 600. [0044] 此外,例如,激光部100可利用若干个激光光束提高生产效率,这是众所周知的技术,故在本说明书内不做详细说明。 [0044] Further, for example, the laser unit 100 may utilize a plurality of laser beams to improve production efficiency, it is well known in the art, and therefore are not described in detail in this specification. 本实施例中使用的激光光束的个数可根据基板尺寸的大小进行各种变动。 The number of the laser beam used in the present embodiment may be variously changes according to the size of the substrate size. 另外,所有的激光光束的波长可相同,也可按工艺条件来使用不同波长的激光光束。 Further, the wavelength of the laser beam may be all the same, the process conditions can also be used laser beams of different wavelengths. 此外,激光光束可从各自的激光发生器(无图示)发出,也可利用合适的光学系(无图示)并由一个激光发生器生成若干个激光光束。 Further, the laser beam may be emitted from the respective laser light generator (not shown), may also be generated by a laser generator using a plurality of laser beam suitable optical system (not shown). [0045] 光学部200设置于激光部100和加工部300之间,可提供激光光束10所经过的路径。 [0045] The optical portion 200 is provided between the laser section 100 and processing section 300, may provide a path through which the laser beam 10. 另外,聚焦激光光束10以形成焦点。 Further, a focused laser beam to form a focal point 10. 这时,根据聚焦强度,角度,聚焦效率等,有可能利用一个或若干个光学系(无图示)。 In this case, according to the focus intensity, angle, focus efficiency, it is possible to use one or several optical system (not shown). [0046] 加工部300可使经过光学部200的激光光束10照射到基板20上。 [0046] The processing unit 300 allows the laser beam through the optical unit 200 is irradiated onto the substrate 2010. 激光光束10 从加工部300照射到基板20上,可修补基板20的缺陷,还能在激光光速的照射部位进行微细线路的沉积。 Irradiating the laser beam 10 from processing unit 300 to the substrate 20, the substrate 20 can be repaired defect, it can be deposited in a fine-line portion of the laser irradiation of light. [0047] 第一测定部400设置于激光部100与光学部200之间。 [0047] The first measurement portion 400 is disposed between the laser unit 100 and the optical portion 200. 第一测定部400可对生成在激光部100且照射到光学部200上的激光光束的输出能量进行测定,其可包括将光能变换成电能的光电变换元件中的一种,即光电二极管(photo diode)。 The first measuring section 400 to be generated in the laser irradiated portion and the laser beam 100 on the portion 200 of the optical output power measured, which may include one photoelectric conversion element converting light energy into electrical energy, i.e. a photodiode ( photo diode). [0048] 第二测定部500可设置于光学部200的内部。 [0048] The second measuring section 500 may be provided inside the optical unit 200. 第二测定部500对经过光学部200 并照射到加工部300上的激光光束10的输出能量进行测定,和第一测定部400同样,还可包括光电二极管。 The second elapsed measuring section 500 and the optical portion 200 to the output energy of the laser beam is irradiated on the workpiece 10 is measured 300, and a first measuring section 400 similarly also comprises a photodiode. [0049] 控制部600接收第一测定部400和第二测定部500测定的激光光束10的输出信号,对接收的输出信号进行分析,从而为调整在激光部100生成的激光光束10的输出能量而向激光部100发送信号。 [0049] The control unit 600 receives a first signal measurement unit 400 and outputs a second measurement portion 500 measures the laser beam 10, the received output signal is analyzed, so as to adjust the energy output of the laser beam generated by the laser 100 10 It transmits a signal to the laser unit 100. [0050] 控制部600还包括显示部(无图示),其可对从第一测定部400和第二测定部500接收到的激光光束的输出信号,和向激光部100发送的信号进行数值化处理并予以显示。 [0050] The control unit 600 further includes a display unit (not shown), the output signal may be received from the laser 400 and the second measurement portion 500 to the first portion of the measurement beam, and the numerical signal transmission unit 100 to the laser processing and displaying them. 另外,还可包括数据输入部(无图示),该数据输入部用于从使用激光调整装置的使用者接收所期望的激光光束输出值。 In addition, further includes a data input unit (not shown), the data input unit for receiving from a user a desired adjustment using a laser beam output value of the laser apparatus. 控制部600优选是一种可进行运算、输入并输出数据的诸如计算机的装置。 The control unit 600 preferably calculates an input device such as a computer and a data output. [0051] 激光输出能量的测定:[0052] 图3为本发明的实施例所示的在第一测定部400上对激光光束11的输出能量进行测定的示意图。 Measuring the laser output energy [0051]: Example [0052] FIG. 3 is a schematic view of the present invention will be measured on the output energy of the laser beam 11 is shown in the first measurement section 400. [0053] 本发明的一实施例所示的第一测定部400,在生成于激光部100的激光光束10照射到光学部200之前,可直接对激光光束10的输出能量进行测定。 Measuring a first embodiment of a portion [0053] of the present invention illustrated embodiment 400, prior to generating the laser irradiation unit 10 of the laser beam 100 to the optical unit 200 may output energy of the laser beam 10 is measured directly. [0054] 一方面,依照其他实施例所示,激光光束10的输出能量可在第一测定部400间接测试。 [0054] In one aspect, in accordance with other embodiments, the output energy of the laser beam 10 a first measurement portion 400 may be in an indirect test. 图3所示的是,激光光束10的输出能量被射束分离器(beam splitter) 410和覆盖板420反射,而间接地在第一测定部400测定的示意图。 Shown in FIG. 3, the output energy of the laser beam 10 is a beam splitter (beam splitter) 420, and a reflective cover plate 410, 400 in a schematic view of indirectly measuring the first measurement portion. [0055] 参照图3,激光部100和光学部200之间设置有第一射束分离器410。 [0055] Referring to FIG 3, the laser unit is provided with a first beam splitter 100 and the optical portion 410 between the 200. [0056] 第一射束分离器410可对经过第一射束分离器410的激光光束10进行分离。 [0056] The first beam splitter 410 may be a laser beam 410 passes through the first beam splitter 10 is separated. 即激光光束10的一部分通过第一射束分离器410被反射,其余部分则按原来的路径而照射到光学部200。 That portion of the laser beam 10 through the first beam splitter 410 is reflected, the rest of the press original irradiated to the optical path portion 200. 若经第一射束分离器410分离并被反射的激光光束11的输出能量过大,则工艺上所使用的激光光束10的输出能量就会过小,达不到本发明保持激光光束10始终一致的目的,若经分离并反射的激光光束11的输出能量过小,则在第一测定器400上对激光光束11进行测定时,误差范围会变大,因此,经分离并反射的激光光束11的输出能量占全部输出能量的1%至2%时为最佳。 If the output of the laser beam 11 is separated by the first beam splitter 410 and reflected too much energy, the output energy of the laser beam 10 used in the process will be too small, not always up to 10 of the present invention keep the laser beam the same purpose, if the output energy and the separated reflected laser beam 11 is too small, when the laser beam 11 is measured, the error becomes larger in a first range measurement device 400, therefore, separated and the reflected laser beam optimum energy output 11 accounts of all 1-2% of the output energy. [0057] 另外,在激光部100和光学部200之间,除了第一测定部400和第一射束分离器410外,还可能包括覆盖板420。 [0057] Further, between the laser unit 100 and the optical portion 200, in addition to the first measurement section 400 and a first beam splitter 410, but it may also include a cover plate 420. 覆盖板420使经第一射束分离器410分离并反射的激光光束11再次反射到第一测定部400上,进而使第一测定部400对激光光束11的输出能量测定变得容易。 That the cover plate 420 through the first beam splitter 410 and separated again reflected laser beam 11 reflected on the first measurement portion 400, and thus the output energy of the laser beam 11 in the first measurement section 400 can be easily measured. 覆盖板420的材质只要是可以反射激光光束11的材质,即可不加限制地使用。 Cover plate 420 as long as the material can reflect a laser beam 11 of a material can be used without limitation. 图3中为更好地进行说明,图示了覆盖板420只覆盖开放侧面的一部分,但覆盖的面积可根据发明的利用形态而不同。 FIG 3 will be described for better illustrating the cover portion 420 covers the open sides of the plate, but the area can be covered according to the invention using different forms. [0058] 图4为本发明的实施例所示的在第二测定部500上对激光光束12的输出能量进行测定的示意图。 A schematic view of a second measurement in the measuring section 500 on the output energy of the laser beam 12 in the embodiment shown in [0058] FIG. 4 of the present invention. [0059] 如图4所示,本发明一实施例的第二测定部500可直接对从激光部100照射到光学部200并经过光学部200的激光光束10的输出能量进行测定。 [0059] As shown in FIG 4, the present invention is a second embodiment of the measurement portion 500 may be measured directly and through the output portion of the optical energy of the laser beam 200 of laser beam 10 is irradiated to the optical portion 100 from portion 200. [0060] 另外,根据其他实施例,激光光束10的输出能量可由第二测定部500来间接测定。 [0060] Further, according to other embodiments, the output energy of the laser beam 10 may be an indirect measurement of the second measurement section 500. 图4显示的是,激光光束10的输出经第二射束分离器510反射后,经过散射器520并在第二测定部500进行间接测定的示意图。 FIG. 4 shows, the 510 reflection of the laser beam output by the second beam splitter 10, passing through the diffuser 520 and schematic measured indirectly in the second measurement portion 500. [0061] 参照图4,光学部200内设有第二射束分离器510。 [0061] Referring to FIG 4, the optical unit 200 equipped with a second beam splitter 510. [0062] 第二射束分离器510可对通过第二射束分离器510的激光光束10进行分离。 [0062] The second beam splitter 510 may be separated by the laser beam of the second beam splitter 510 10. 即, 部分激光光束10被第二射束分离器510反射,其余部分按原来的路径经过光学部200而照射到加工部300上。 That is, part 10 is reflected by the second beam splitter 510 a laser beam, the rest of the unit 200 through the optical path by the original is irradiated on the processing unit 300. 若被第二射束分离器510分离并反射的激光光束12的输出能量过大, 工艺上所使用的激光光束10的输出能量就会过小,这样达不到本发明的保持激光光束11 始终一致的目的,若经分离并反射的激光光束12的输出能量过小,则在第一测定器500上对激光光束进行测定时,误差范围会变大,因此,优选被分离并反射的激光光束12的输出能量占全部输出能量的1%至2%。 If they are separated from the second beam splitter 510 and the reflected laser beam output 12 becomes excessive, the output energy of the laser beam 10 on the process used will be too small, so that 11 of the present invention can not always keep the laser beam the same purpose, if the output energy and the separated reflected laser beam 12 is too small, when the laser beam was measured, the error becomes larger in a first range measurement device 500, therefore, it is preferably separated and reflected laser beam output energy accounts for 12% to 2% of the total. 1 output energy. [0063] 另外,在第二测定部500和第二射束分离器510之间,即在第二测定器500的侧面可安装散射器(diffuser) 520。 [0063] Further, between the second measurement portion 500 and a second beam splitter 510, i.e. the side of the second measuring device 500 may be installed diffuser (diffuser) 520. 光学部200的内部可设置有电荷耦合器(CCD :charge coupled device)530,为防止从第二射束分离器510分离到第二测定部500的激光光束12 反射到第二测定部500的表面而被射到电荷耦合器530,安装散射器520。 Inside the optical portion 200 may be provided with a charge coupled device (CCD: charge coupled device) 530, 510 to prevent the separation from the second beam splitter 12 reflects the laser beam to a second measurement portion 500 to the surface 500 of the second measurement unit is incident on CCD 530, the diffuser 520 is mounted. 另外,散射器520 的作用在于,可更精密地测定激光光束12的输出能量。 In addition, the role of the diffuser 520 is that the output energy of the laser beam can be determined more precisely 12. [0064]图5为本发明一实施例的在散射器上的激光光束扩散的示意图。 [0064] FIG. 5 is a schematic example of a laser beam on the diffuser, a diffusion of the embodiment of the present invention. [0065] 参照图5,被第二射束分离器510分离并反射的激光光束12在经过散射器520时, 在散射器520内部充分扩散12'后,照射到第二测定部500的表面上。 After [0065] Referring to Figure 5, separated by the second beam splitter 510 and the reflected laser beam passing through the diffuser 12 at 520, 520 in a sufficiently diffused inside the diffuser 12 'is irradiated onto the measurement surface of the second portion 500 of the . 因激光光束10被第二分离器510分离和反射,因此,激光光束12具有较小的输出能量,有可能出现测定误差, 但经过散射器520的激光光束12'广泛地分布在第二测定部500的表面上,从而可提高测定的准确度。 10 are separated by 510 and the laser beam reflected by the second splitter, and therefore, the laser beam 12 having a small output power, measurement errors may occur, but after the laser beam 12 of the diffuser 520 'are widely distributed in the second measurement portion upper surface 500, thereby improving measurement accuracy. [0066] 散射器520的尺寸优选根据第二测定部500的大小而制作,以完全覆盖第二测定部500的侧面。 [0066] The size of the diffuser 520 is preferably produced according to the size of the second measurement section 500, so as to completely cover the side surface portion 500 of the second measurement. 另外,散射器520的材质可为熔融石英(fused silica,FS)。 Further, the diffuser 520 may be made of fused silica (fused silica, FS). 熔融石英具有优异的光学性质及抗激光损伤性,因此,作为基于激光的光学系统中的光学构件而被广泛使用。 Fused silica has excellent optical properties and resistance to laser damage resistance, and therefore, as an optical member of the laser-based optical systems are widely used. 将散射器520的一面或两面可加工成每Imm有240沙(grit),这样在使用时,对激光光束12的扩散效果会更加明显。 The diffuser 520 can be processed into one or both surfaces of each sand Imm 240 (Grit), so that in use, will become more apparent diffusion effect of the laser beam 12. [0067] 另外,优选散射器520被安装成与第二测定部500的侧面呈规定角度A倾斜。 [0067] Further, the diffuser 520 is preferably mounted to the side surface 500 of the second measurement unit A is inclined a predetermined angle. 在第二测定部500的侧面上,直接安装散射器520的情况(规定角度A为0°时)下,激光光束12在散射器520表面上轻微反射并被传到电荷耦合器530上。 On the side portion 500 of the second measurement, the scattering is directly mounted 520 (when the predetermined angle A is 0 °), the laser beam 12 reflected and transmitted light on the CCD 530 on the surface of the diffuser 520. 为防止这种现象的发生,散射器520优选被安装成与第二测定部500侧面呈大于0°且小于45°的角度A倾斜,更优选倾斜20°。 To prevent this phenomenon, the diffuser 520 is preferably mounted to the second side surface shape measurement portion 500 and greater than 0 ° and smaller than the inclination angle A of 45 °, more preferably inclined 20 °. 散射器520若以超过45°的角度A安装,经过散射器520且在第二测定部500 测定的激光光束12的输出能量有可能会减少。 In terms of scattering than 520 A mounting angle of 45 °, passing through the diffuser 520 and it is possible in the output energy of the laser beam 500 measured by the second measurement unit 12 is reduced. [0068] 激光输出能量的调整:[0069] 以下,对本发明所提供的激光输出装置实时调整激光输出能量的过程加以说明。 [0068] adjusting the laser output energy is: [0069] Hereinafter, the laser output device of the present invention provides real-time adjustment of output energy of the laser process will be described. [0070] 激光输出调整装置的使用者可在控制部600的数据输入部(无图示)上,输入将要照射到基板20上的激光光束10的输出值。 [0070] User device may adjust the laser output to the data input unit (not shown) of the control unit 600, the input to the output value of the laser beam irradiated to the substrate 20 on 10. 在激光部100上生成并照射与使用者输入的输出值一致的激光光束10。 Generating the laser irradiation part 100 and the user input coincides with the output value of the laser beam 10. [0071] 在激光光束10照射到光学部200之前,可由第一测定部400对输出能量进行测定。 Before [0071] In the laser beam 10 is irradiated to the optical unit 200, the first measuring section 400 may output energy was measured. 这时,若由第一测定部测定的激光光束11的输出能量小于使用者输入的激光光束10的输出能量,即没有生成与在激光光束100上设定的激光光束的输出能量相当的激光光速, 进而可确定激光部100出现了问题。 At this time, if the output energy of the laser beam measured by the first measuring portion 11 is smaller than the laser beam 10 output energy input by the user, i.e., does not generate the laser beam on the laser beam 100 set laser output energy corresponding to the speed of light and further the laser unit 100 may determine there is a problem. 因此,控制部600对第一测定部400上所测定的激光光束11的输出能量与预先设定(使用者输入的)激光光束10的输出能量进行比较后,若激光光束11的输出能量小于激光光束10的输出能量,在控制部600的显不部(无图不)显不激光部100存在异常的同时,提高在激光部100生成的激光光束10的输出能量,以调整至第一测定部400上测定的激光光束11的输出能量与预先设定的激光光束10的输出能量一致。 Thus, the control unit 600 on the output energy of the laser beam 400 measured by the first measurement unit 11 after the laser beam with a predetermined output power (user input) 10 compares the output energy of the laser beam when the laser 11 is less than output energy beam 10, while no significant abnormality in section 600 of the control unit (FIG no no) laser portion 100 is not significant, increase in the output energy of the laser beam generated by the laser unit 10 is 100 to adjust to the first measurement section the output energy of the laser beam 11 is measured with the laser beam 400 on a predetermined uniform output energy 10. 一方面,若进一步设有第一射束分离器410,激光光束10的输出能量的1%至2%会反射到第一测定部400上,因此,控制部600应考虑这一点,再做运算。 In one aspect, if further provided with a first beam splitter 410, the output energy of the laser beam 10 is 1 to 2% will be reflected on the first measuring section 400, therefore, the control unit 600 should take this into account, do arithmetic . [0072] 举一例说明,使用者输入的是激光光束10输出100J的能量,但在第一测定部400 上测定的是激光光束11只具备90J的能量,控制部600在显示部(无图示)上显示激光部100存在异常的同时,向激光部100传送信号,使激光光束10输出IlOJ的能量,并进行调整使第一测定部400上测定的激光光束11具备100J的能量。 [0072] give one example, the user input is the output 10 of the laser beam energy of 100J, but measured in the first measuring section 400 is provided with the laser beam 11 the energy of 90J, the display unit 600 (not shown control unit on the display) while there is an abnormality of the laser unit 100, 100 transmits a signal to the laser unit, the laser beam 10 IlOJ energy output, and adjust the laser beam 11 having the energy of 100J measured in the first measurement section 400. [0073] 接下来,经过光学部200的激光光束10在通过加工部300照射至基板20之前,通过第二测定部500对输出能量进行测定。 [0073] Next, the optical portion 200 by laser beam 10 prior to processing by the irradiation unit 300 to the substrate 20, measured by the second measuring section 500 output energy. 这时,如果在第二测定部500上测定的激光光束12的输出能量小于使用者所输入的激光光束10,则认为是激光光束10在经过光学部200 时输出能量减少,可确定光学部200内部的激光光束路径出现了问题。 At this time, if the output energy of the laser beam on the measurement of the second measurement unit 500 is smaller than the laser beam 12 input by the user 10, the laser beam 10 is considered to be when passing through the optical unit 200 outputs the energy reduction, the optical portion 200 may be determined the laser beam path inside there is a problem. 即控制部600接收第一测定部400和第二测定部500的信号,当在第一测定器400上测定的激光光束11的输出能量与预先设定的激光光束10的输出能量一致,而第二测定部500上测定的激光光束12 的输出能量小于预先设定的激光光束10的输出能量时,应是激光部100不存在异常,而光学部200有异常,因此,在控制部600的显示部(无图示)上显示光学部200存在异常的同时,提高在激光部100生成的激光光束10的输出能量,并调整至在第二测定器500上测定的激光光束12的输出能量与预先设定的激光光束10的输出能量一致。 I.e., control unit 600 receives the signal from the first measurement and the second measurement portion 400 of portion 500, when the same output energy of the laser beam measured in the first measurement device 400 and the laser beam 11 is preset energy 10, while the first measuring the output energy of the laser beam 500 on the two measuring portion 12 is less than the output energy of the laser beam 10 is set in advance, the laser portion 100 should be no abnormality exists, and the optical portion 200 is abnormal, and therefore, the display control unit 600 there is an abnormality of the optical portion 200 on the display unit (not shown) while increasing the output energy of the laser beam 100 generated by the laser unit 10, and adjusted to the laser beam in a second measuring device 500 measures the output energy of advance 12 consistent output of the laser beam 10 set energy. 另外,若进一步设有第二射束分离器510,因激光光束10的输出能量中仅有1%至2%反射到第二测定部500 上,控制部600需考虑这一点再做运算。 Further, when further provided with a second beam splitter 510, due to the output energy of the laser beam 10 is only 1-2% is reflected onto the second measuring section 500, the control unit 600 to consider that do arithmetic. [0074] 举一例说明,使用者输入的是激光光束10输出100J的能量,但在第一测定部400 上测定的是激光光束11具备100J的能量,而第二测定部500上测定的激光光束12只具备90J的能量,则控制部600在显示部(无图示)上显示激光部100无异常而光学部200有异常的同时,向激光部100传送信号,使激光光束10输出IlOJ的能量,从而调整至第二测定部500上测定的激光光束12具备100J的能量。 [0074] give one example, the user input is the output 10 of the laser beam energy of 100J, but measured in the first measuring section 400 is provided with the laser beam 11 100J of energy, measured on the second measurement section 500 of the laser beam 90J 12 includes energy, the control unit 600 display unit 100 of the laser 200 without abnormal abnormal while the optical portion 100 transmits a signal to the laser unit, the laser beam 10 IlOJ energy output on a display unit (not shown) , to adjust to the laser beam 500 measured on the second measurement unit 12 includes 100J of energy. [0075] 如上所述,本发明在使用激光的工艺上,可实时测定激光输出能量,使所期望的激光光束输出能量始终保持一致,且更加容易地确定出导致问题发生的激光装置组成部分, 并自动调整激光光束的输出能量,有效加强工艺的可靠性和稳定性。 [0075] As described above, in the process of the present invention using a laser, the laser output energy can be determined in real time, so that a desired output power of the laser beam is always consistent, and easier to determine the part of the laser device causing the problem occurs, and automatically adjust the energy output of the laser beam, effective to enhance the reliability and stability of the process. [0076] 综上所述,结合最佳实施例及附图而作以详细说明,但并不以此为限,凡具备本发明所属技术领域内一般知识的技术人员,均可在不脱离本发明精神的范围内,进行各种变形和变动。 [0076] As described above, in conjunction with the preferred embodiments and the accompanying drawings to be described in detail, but are not limited to, who have the skill in the art within the art to which this invention is of general knowledge, available without departing from the present within the spirit of the present invention, various modifications and variations. 这些变形例和变动例均被看作包含在本发明及权利要求范围之内。 Such modifications and variations are considered embodiments of the present invention and included within the scope of the claims.

Claims (12)

1. 一种激光输出调整装置,其特征在于,包括: 激光部,生成激光光束; 光学部,提供所述激光光束经过的路径; 加工部,使经过所述光学部的激光光束照射到基板上; 第一測定部,设置于所述激光部与所述光学部之间,測定生成于所述激光部的激光光束的输出能量; 第二測定部,设置于所述光学部的内部,测定经过所述光学部的激光光束的输出能量; 控制部,接收由所述第一測定部和所述第二測定部測定的激光光束的输出信号,将信号传送到所述激光部,从而调整生成于所述激光部的激光光束的输出能量。 A laser output adjustment apparatus comprising: a laser unit to generate a laser beam; an optical unit providing a path of said laser beam passes; processing unit, so that a laser beam is irradiated onto the substrate through the optical portion ; measuring a first portion disposed between the laser unit and the optical unit, said laser beam generated in the measurement portion of the laser output power; a second measurement section, is provided inside the optical unit, after measurement the output energy of the laser beam of the optical portion; a control unit, receives the laser beam measured by the first measuring portion and the second portion of the measurement output signal, the signal is transmitted to the laser unit so as to generate adjusted the output energy of the laser beam of the laser unit.
2.根据权利要求1所述的激光输出调整装置,其特征在于: 当由所述第一測定部測定的激光光束的输出能量小于预先设定的激光光束的输出能量时,在所述控制部显示所述激光部出现问题的同时,对生成于所述激光部的激光光束的输出能量进行调整,以使所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致, 当由所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致,而由所述第二測定部測定的激光光束的数据小于所述预先设定的激光光束的输出能量时,在所述控制部显示所述光学部出现问题的同时,对生成于所述激光部的激光光束的输出能量进行调整,以使所述第二測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致。 The laser output adjustment apparatus according to claim 1, wherein: when the output energy of the laser beam measured by the first measuring portion is smaller than the laser beam of a predetermined output power, the control unit displaying the portion of problems while a laser, for generating a laser beam of the laser output energy portion is adjusted, so that the laser beam energy of the laser beam output of the first measurement portion of the measurement set in advance the same energy output, when the same energy output of the laser beam output power of the laser beam measured by the first measurement unit set in advance, and the data of the laser beam measured by the second measurement unit smaller than when said output energy of the laser beam is set in advance, the display control unit while the optical portion of the problem, and for generating a laser beam of the laser output energy portion is adjusted, so that the second measurement coincidence output energy of the laser beam energy of the laser output beam is measured with the portion previously set.
3.根据权利要求1所述的激光输出调整装置,其特征在于,还包括: 第一射束分离器,该第一射束分离器被安装在所述激光部和所述光学部之间,用于分离生成于所述激光部的激光光束。 The laser output adjustment apparatus according to claim 1, characterized in that, further comprising: a first beam splitter, the first beam splitter is mounted between the laser portion and the optical portion, for separating said laser beam generated in the laser portion.
4.根据权利要求3所述的激光输出调整装置,其特征在于: 所述第一射束分离器分离的激光光束占生成于所述激光部的激光光束的输出能量的1% 至2% o 4. The laser output adjustment apparatus according to claim 3, wherein: said first beam splitter separate laser beams generated in the laser 1% of the laser beam energy output portion to 2% o
5.根据权利要求3所述的激光输出调整装置,其特征在于,还包括: 覆盖板,用于将所述第一射束分离器分离出的激光光束反射到所述第一測定部。 The laser output adjusting device according to claim 3, characterized in that, further comprising: a cover plate for the first beam splitter separating the reflected laser beam to the first measurement unit.
6.根据权利要求1所述的激光输出调整装置,其特征在于,还包括: 第二射束分离器,该第二射束分离器设置于所述光学部内部,并对经过所述光学部的激光光束进行分离。 6. The laser output adjustment apparatus according to claim 1, characterized in that, further comprising: a second beam splitter, the second beam splitter disposed inside the optical unit, the optical unit and through the laser beam is separated.
7.根据权利要求6所述的激光输出调整装置,其特征在于: 所述第二射束分离器分离的激光光束占经过所述光学部的激光光束的输出能量的1%至2%。 7. The laser output adjustment apparatus according to claim 6, wherein: said second beam splitter separate laser beams representing 1-2% of the output energy of the laser-light beam of the optical portion.
8.根据权利要求1所述的激光输出调整装置,其特征在于: 在所述第二測定部的侧面安装有散射器。 The laser output adjustment apparatus according to claim 1, wherein: said second side surface of the measuring portion is attached to the diffuser.
9.根据权利要求8所述的激光输出调整装置,其特征在于: 所述散射器被安装成,与第二測定部的侧面呈大于0°且小于45°的角度傾斜。 9. The laser output adjustment apparatus according to claim 8, wherein: said diffuser is mounted, the inclined side surface of the second measurement unit is greater than 0 ° and an angle less than 45 °.
10.根据权利要求书9所述的激光输出调整装置,其特征在于:所述散射器的材质为熔融石英。 10. The laser output adjusting device usage according to claim 9, wherein: said diffuser is made of fused silica.
11. 一种激光输出调整方法,其特征在干: 将由第一測定部測定的生成于所述激光部的激光光束的输出信号以及由第二測定部測定的经过所述光学部的激光光束的输出信号传送至所述激光部,从而对生成于所述激光部的激光光束的输出能量进行调整,其中,所述第一測定部设置在生成激光光束的激光部与提供激光光束经过的路径的光学部之间,所述第二測定部设置在所述光学部内部。 11. A method for adjusting the laser output, characterized in that the dry: measured by the first measurement unit generates the output signal of the laser beam and the laser unit through the laser measured by the second measurement section of the optical portion of the light beam output signal to the laser unit, thereby generating a laser beam of the laser unit to adjust the output energy, wherein the first measurement portion is provided in the path of the laser unit generates laser beam and providing a laser beam passes through the between the optical portion, said second portion disposed in the interior of the measuring optical unit.
12.根据权利要求11所述的激光输出调整方法,其特征在于: 当由所述第一測定部測定的激光光束的输出能量小于预先设定的激光光束的输出能量时,在所述控制部显示所述激光部存在问题的同时,对生成于所述激光部的激光光束进行调整,以使由所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致, 当由所述第一測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致,而由所述第二測定部測定的激光光束的数据小于所述预先设定的激光光束的输出能量时,在所述控制部显示所述光学部出现问题的同时,对生成于所述激光部的激光光束的输出能量进行调整,以使所述第二測定部測定的激光光束的输出能量与所述预先设定的激光光束的输出能量一致。 12. The laser output adjusting method according to claim 11, wherein: when the output energy of the laser beam measured by the first measuring portion is smaller than the laser beam of a predetermined output power, the control unit simultaneously displaying the problems laser unit, the laser light generated in the portion of the laser beam is adjusted so that the laser beam measured by the first measurement unit output energy of the laser beam with a predetermined light output same energy, the output energy of the laser beam when measured by the first measurement unit and the output energy of the laser beam is set in advance coincide, the data of the laser beam measured by the second measuring portion is smaller than the predetermined setting the output energy of the laser beam, the control of the display unit while the optical portion of problems, for generating a laser beam of the laser output energy portion is adjusted, so that the second measuring unit that measures the output energy of the laser beam coincides with the pre-set laser output energy beam.
CN 201210361905 2011-09-28 2012-09-25 Laser output adjusting device and method CN103028840B (en)

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