CN103022254A - 一种渐变折射率减反膜太阳能电池及其制备方法 - Google Patents
一种渐变折射率减反膜太阳能电池及其制备方法 Download PDFInfo
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- CN103022254A CN103022254A CN2012105629909A CN201210562990A CN103022254A CN 103022254 A CN103022254 A CN 103022254A CN 2012105629909 A CN2012105629909 A CN 2012105629909A CN 201210562990 A CN201210562990 A CN 201210562990A CN 103022254 A CN103022254 A CN 103022254A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 58
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 58
- 239000010703 silicon Substances 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000009792 diffusion process Methods 0.000 claims abstract description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 5
- 230000003667 anti-reflective effect Effects 0.000 claims description 74
- 238000002161 passivation Methods 0.000 claims description 27
- 239000004411 aluminium Substances 0.000 claims description 12
- 238000000137 annealing Methods 0.000 claims description 12
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 10
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- 238000002310 reflectometry Methods 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000003595 mist Substances 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 14
- 229910004205 SiNX Inorganic materials 0.000 description 12
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 235000008216 herbs Nutrition 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 239000005360 phosphosilicate glass Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- -1 hexafluorosilicic acid Chemical compound 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103208564A (zh) * | 2013-04-11 | 2013-07-17 | 浙江正泰太阳能科技有限公司 | 一种晶体硅太阳能电池的制备方法 |
CN104051570A (zh) * | 2014-06-09 | 2014-09-17 | 山东力诺太阳能电力股份有限公司 | 一种太阳能电池的制作方法 |
CN104505429A (zh) * | 2014-11-21 | 2015-04-08 | 广东爱康太阳能科技有限公司 | 一种应用于晶硅太阳能电池的光刻工艺 |
CN106684158A (zh) * | 2015-11-10 | 2017-05-17 | 北京卫星环境工程研究所 | 高发电效率空间太阳电池结构 |
CN107275190A (zh) * | 2017-06-30 | 2017-10-20 | 韩华新能源(启东)有限公司 | 一种在半导体衬底上制备双层氮化硅薄膜的方法 |
CN109243969A (zh) * | 2018-08-31 | 2019-01-18 | 常州亿晶光电科技有限公司 | 管式pecvd氮化硅渐变膜工艺 |
CN109545710A (zh) * | 2018-09-29 | 2019-03-29 | 东方日升新能源股份有限公司 | 一种降低折射率的镀膜方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022135A (zh) * | 2007-02-09 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | 硅太阳能电池减反射薄膜 |
CN102534547A (zh) * | 2011-12-16 | 2012-07-04 | 合肥晶澳太阳能科技有限公司 | 一种晶体硅太阳电池的渐变减反射氮化硅薄膜的制备工艺 |
CN202616239U (zh) * | 2012-02-28 | 2012-12-19 | 常州天合光能有限公司 | 一种低损伤高钝化的太阳能电池 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022135A (zh) * | 2007-02-09 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | 硅太阳能电池减反射薄膜 |
CN102534547A (zh) * | 2011-12-16 | 2012-07-04 | 合肥晶澳太阳能科技有限公司 | 一种晶体硅太阳电池的渐变减反射氮化硅薄膜的制备工艺 |
CN202616239U (zh) * | 2012-02-28 | 2012-12-19 | 常州天合光能有限公司 | 一种低损伤高钝化的太阳能电池 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103208564A (zh) * | 2013-04-11 | 2013-07-17 | 浙江正泰太阳能科技有限公司 | 一种晶体硅太阳能电池的制备方法 |
CN103208564B (zh) * | 2013-04-11 | 2016-01-20 | 浙江正泰太阳能科技有限公司 | 一种晶体硅太阳能电池的制备方法 |
CN104051570A (zh) * | 2014-06-09 | 2014-09-17 | 山东力诺太阳能电力股份有限公司 | 一种太阳能电池的制作方法 |
CN104505429A (zh) * | 2014-11-21 | 2015-04-08 | 广东爱康太阳能科技有限公司 | 一种应用于晶硅太阳能电池的光刻工艺 |
CN106684158A (zh) * | 2015-11-10 | 2017-05-17 | 北京卫星环境工程研究所 | 高发电效率空间太阳电池结构 |
CN107275190A (zh) * | 2017-06-30 | 2017-10-20 | 韩华新能源(启东)有限公司 | 一种在半导体衬底上制备双层氮化硅薄膜的方法 |
CN109243969A (zh) * | 2018-08-31 | 2019-01-18 | 常州亿晶光电科技有限公司 | 管式pecvd氮化硅渐变膜工艺 |
CN109545710A (zh) * | 2018-09-29 | 2019-03-29 | 东方日升新能源股份有限公司 | 一种降低折射率的镀膜方法 |
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