CN102978574A - Evaporation boat for depositing metal alumium film through vacuum thermal evaporation - Google Patents
Evaporation boat for depositing metal alumium film through vacuum thermal evaporation Download PDFInfo
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- CN102978574A CN102978574A CN2012105363271A CN201210536327A CN102978574A CN 102978574 A CN102978574 A CN 102978574A CN 2012105363271 A CN2012105363271 A CN 2012105363271A CN 201210536327 A CN201210536327 A CN 201210536327A CN 102978574 A CN102978574 A CN 102978574A
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Abstract
The invention belongs to the vacuum coating technical field and relates to the improvement of an evaporation boat structure for depositing a metal alumium film through vacuum thermal evaporation. The evaporation boat comprises a cylindrical evaporation crucible with the upper end opened, a circular buffer platform arranged surround the upper end of the cylindrical evaporation crucible, and a cylindrical anti-overflow barrier layer arranged above the periphery of the circular buffer platform. Compared with the traditional alumium evaporation boat, the circular buffer platform and the cylindrical anti-overflow barrier layer on the top are added in the evaporation boat provided by the invention. During thermal deposition, the overflowing high-temperature alumium solution is blocked by the cylindrical anti-overflow barrier layer on the top and cooled on the circular buffer platform; and the alumium solution is prevented from infiltrating into a metal heating element to form an alloy and further to damage the metal heating element. The evaporation boat provided by the invention is capable of obviously prolonging the service life of the metal heating element, thereby reducing the replacement frequency of the metal heating element, improving the production takt and reducing the production cost.
Description
Technical field
The invention belongs to technical field of vacuum plating, relate to a kind of evaporation boat for vacuum thermal evaporation metal refining aluminium film.
Background technology
Metallic film near ultraviolet, can see region of ultra-red and have very high reflectivity, the application in the fields such as electronics and microelectronics industry, the energy, information science is more and more extensive.The vacuum thermal evaporation deposition technique is a kind of method for preparing metallic film commonly used.This method has that equipment is simple, simple process, low cost and other advantages.The evaporation source that metallic film can adopt refractory metal silk, evaporation of metal boat or METAL HEATING PROCESS body and ceramic evaporation boat to form obtains by thermal evaporation deposition plating technology under vacuum condition.The material of wire, evaporation of metal boat and METAL HEATING PROCESS body can adopt the metallic substance such as dystectic tantalum, molybdenum, tungsten; The material of evaporation boat adopts the materials such as graphite, boron nitride, aluminum oxide usually.
Vacuum thermal evaporation deposition of aluminum film is widely used in the electrode of opto-electronic device.The metallic aluminium film can adopt the heat deposition preparation under vacuum condition such as tungsten filament, tungsten boat, tantalum boat.But formed hot metal aluminum solutions can infiltrate the formation alloy mutually with refractory metal in the heat-processed, and then the METAL HEATING PROCESS body is damaged, thereby shortens the work-ing life of METAL HEATING PROCESS body.Simultaneously, this metallic aluminium film that directly is difficult to obtain the big area high uniformity with the method for refractory metal heat deposition metallic aluminium film.Therefore this method is not suitable for large-scale commercial production.Large-scale commercial production extensively adopts the heating source that is comprised of refractory metal heating member and ceramic evaporation boat as evaporation source at present, and the aluminum evaporation boat that adopts is generally columniform ceramic crucible.Under vacuum heating conditions, metallic aluminium melts first and forms the hot metal aluminum solutions, and then distillation forms aluminium steam, and the arrival substrate surface also is collected, and at last cooling forms the metallic aluminium film.If adopt traditional cylindrical crucible, in the process of heating evaporation, part hot metal aluminum solutions can go out along the sidewall excessive (climbing) of crucible, arrives on the metallic heating body.The hot metal aluminum solutions can infiltrate the formation alloy mutually with refractory metal, thereby the METAL HEATING PROCESS body is damaged.The formation of this metal alloy is the topmost reason of destroying the METAL HEATING PROCESS body.Use the evaporation boat of this traditional structure, generally only have 30-50 time the work-ing life of METAL HEATING PROCESS body.Cause and need frequent METAL HEATING PROCESS body short work-ing life, thereby reduced productive temp, improved production cost.
Summary of the invention
For hot metal aluminum solutions and the METAL HEATING PROCESS body that solves evaporation boat existence of the prior art forms the technical problem that alloy damages heating member, the present invention proposes a kind of evaporation boat for vacuum thermal evaporation metal refining aluminium film.
In order to solve the problems of the technologies described above, technical scheme of the present invention is specific as follows:
A kind of evaporation boat for vacuum thermal evaporation metal refining aluminium film comprises: the cylindrical evaporation crucible that the upper end is uncovered; This evaporation boat also comprises:
Be arranged at the peripheral circular buffer platform in described cylindrical evaporation crucible upper end;
Be arranged at the cylindrical anti-spilled blocking layer of top, described circular buffer platform periphery.
In technique scheme, the diameter of described cylindrical evaporation crucible is 10-20 mm.
In technique scheme, the height of described cylindrical evaporation crucible is 10-50 mm.
In technique scheme, the diameter of described circular buffer platform is than large 10 mm of described cylindrical evaporation crucible.
In technique scheme, the height on described cylindrical anti-spilled blocking layer is 2-10 mm.
In technique scheme, the material on described cylindrical evaporation crucible, described circular buffer platform and described cylindrical anti-spilled blocking layer is graphite, boron nitride or aluminum oxide.
In technique scheme, the thickness on described cylindrical evaporation crucible, described circular buffer platform and described cylindrical anti-spilled blocking layer is respectively 0.5-2 mm.
Beneficial effect of the present invention:
Evaporation boat for vacuum thermal evaporation metal refining aluminium film of the present invention, owing to be provided with the cylindrical anti-spilled blocking layer in circular buffer platform and top, and only bottom cylindrical evaporation crucible is heated in the evaporative process, the temperature on circular buffer platform and cylindrical anti-spilled blocking layer, top is well below bottom cylindrical evaporation crucible, the hot metal aluminum solutions that excessive (climbing) goes out will be stopped by cylindrical anti-spilled blocking layer, top and cool off in circular buffer platform, thereby prevent that metallic aluminium solution from spilling on the external metallization heating member, establishment the destruction that the formation alloy causes the METAL HEATING PROCESS body because hot metal aluminum solutions and METAL HEATING PROCESS body interact, but thereby the work-ing life of significant prolongation metal tantalum heating member, reduce the replacement frequency of metal tantalum heating member, improve productive temp, reduce production costs.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Fig. 1 is the structural representation of the evaporation boat for vacuum thermal evaporation metal refining aluminium film of the present invention.
Fig. 2 is structural representation frontview (a), vertical view (b) and the sectional view (c) of the evaporation boat for vacuum thermal evaporation metal refining aluminium film of the present invention.
Reference numeral is expressed as among the figure:
11-cylindrical evaporation crucible; The circular buffer platform of 12-; The cylindrical anti-spilled blocking layer of 13-.
Embodiment
The structure of the evaporation boat for vacuum thermal evaporation metal refining aluminium film of the present invention comprises: the cylindrical anti-spilled blocking layer in bottom cylindrical evaporation crucible, circular buffer platform and top.Evaporation boat for vacuum thermal evaporation metal refining aluminium film of the present invention, the material of aluminum evaporation boat is aluminum oxide, graphite or boron nitride.The thickness of evaporation boat is 0.5-2 mm; The diameter of bottom cylindrical evaporation crucible is 10-20 mm, highly is 10-50 mm; The diameter of circular buffer platform is than large 10 mm of bottom cylindrical evaporation boat; The height on cylindrical anti-spilled blocking layer, top is 2-10 mm.
The present invention is further described below in conjunction with drawings and Examples, but the invention is not restricted to these embodiment.
Embodiment 1
Evaporation boat as depicted in figs. 1 and 2.The evaporation boat material is boron nitride, adopts the method preparation of chemical vapour deposition.The thickness of boron nitride ceramics is 1 mm; The diameter of the cylindrical evaporation crucible 11 of bottom is 10 mm, highly is 30 mm; The diameter of circular buffer platform 12 is 20 mm; The height on the cylindrical anti-spilled blocking layer 13 at top is 5 mm.
Result of implementation: 10
-7Under the Torr vacuum tightness, adopt the metal tantalum heating member that the present embodiment evaporation boat is heated, about 5 gram metal aluminum strips of at every turn packing in the evaporation boat, evaporation boat remains without aluminum strip behind each heating evaporation.Under this experiment condition, reach more than 200 times the work-ing life of metal tantalum heating member.
Embodiment 2
The present invention selects evaporation boat shown in Figure 1.The evaporation boat material is graphite.The thickness of graphite is 2 mm; The diameter of bottom cylindrical evaporation crucible 11 is 20 mm, highly is 10 mm; The diameter of circular buffer platform 12 is 30 mm; The height on cylindrical anti-spilled blocking layer 13, top is 2 mm.
Result of implementation: 10
-7Under the Torr vacuum tightness, adopt the metal tantalum heating member that the present embodiment evaporation boat is heated, about 5 gram metal aluminum strips of at every turn packing in the evaporation boat, evaporation boat remains without aluminum strip behind each heating evaporation.Under this experiment condition, reach more than 200 times the work-ing life of metal tantalum heating member.
Embodiment 3
The present invention selects evaporation boat shown in Figure 1.The evaporation boat material is aluminum oxide, and the thickness of alumina layer is 0.5 mm; The diameter of bottom cylindrical evaporation crucible 11 is 15 mm, highly is 50 mm; The diameter of circular buffer platform 12 is 35 mm; The height on cylindrical anti-spilled blocking layer 13, top is 10 mm.
Result of implementation: 10
-7Under the Torr vacuum tightness, adopt the metal tantalum heating member that the present embodiment evaporation boat is heated, about 5 gram metal aluminum strips of at every turn packing in the evaporation boat, evaporation boat remains without aluminum strip behind each heating evaporation.Under this experiment condition, reach more than 200 times the work-ing life of metal tantalum heating member.
Obviously, above-described embodiment only is for example clearly is described, and is not the restriction to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here need not also can't give all embodiments exhaustive.And the apparent variation of being extended out thus or change still are among the protection domain of the invention.
Claims (7)
1. an evaporation boat that is used for vacuum thermal evaporation metal refining aluminium film comprises: the cylindrical evaporation crucible (11) that the upper end is uncovered; It is characterized in that this evaporation boat also comprises:
Be arranged at the peripheral circular buffer platform (12) in described cylindrical evaporation crucible (11) upper end;
Be arranged at the cylindrical anti-spilled blocking layer (13) of the peripheral top of described circular buffer platform (12).
2. evaporation boat according to claim 1 is characterized in that, the diameter of described cylindrical evaporation crucible (11) is 10-20 mm.
3. evaporation boat according to claim 1 is characterized in that, the height of described cylindrical evaporation crucible (11) is 10-50 mm.
4. evaporation boat according to claim 1 is characterized in that, the diameter of described circular buffer platform (12) is than large 10 mm of described cylindrical evaporation crucible (11).
5. evaporation boat according to claim 1 is characterized in that, the height on described cylindrical anti-spilled blocking layer (13) is 2-10 mm.
6. the described evaporation boat of any one is characterized in that according to claim 1-5, and the material on described cylindrical evaporation crucible (11), described circular buffer platform (12) and described cylindrical anti-spilled blocking layer (13) is graphite, boron nitride or aluminum oxide.
7. the described evaporation boat of any one is characterized in that according to claim 1-5, and the thickness on described cylindrical evaporation crucible (11), described circular buffer platform (12) and described cylindrical anti-spilled blocking layer (13) is respectively 0.5-2 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2012105363271A CN102978574A (en) | 2012-12-12 | 2012-12-12 | Evaporation boat for depositing metal alumium film through vacuum thermal evaporation |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012105363271A CN102978574A (en) | 2012-12-12 | 2012-12-12 | Evaporation boat for depositing metal alumium film through vacuum thermal evaporation |
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| CN102978574A true CN102978574A (en) | 2013-03-20 |
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| CN2012105363271A Pending CN102978574A (en) | 2012-12-12 | 2012-12-12 | Evaporation boat for depositing metal alumium film through vacuum thermal evaporation |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104668504A (en) * | 2013-11-30 | 2015-06-03 | 中国科学院金属研究所 | Casting forming equipment and process for amorphous alloy component |
| CN104668503A (en) * | 2013-11-30 | 2015-06-03 | 中国科学院金属研究所 | Amorphous alloy member cast forming device and process |
| CN110835272A (en) * | 2019-12-05 | 2020-02-25 | 山东国晶新材料有限公司 | Preparation method of split type conductive ceramic boat |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2318232Y (en) * | 1997-10-06 | 1999-05-12 | 冶金部西南地质勘查局成都大西南工业公司 | Refractory metal evaporation boat |
| CN101003888A (en) * | 2006-01-21 | 2007-07-25 | 鸿富锦精密工业（深圳）有限公司 | Equipment of coating by vaporization |
| WO2010024713A1 (en) * | 2008-08-26 | 2010-03-04 | Закрытое акционерное общество "Научное и технологическое оборудование" | Crucible for evaporating aluminium in the molecular beam epitaxy process |
| US20100147220A1 (en) * | 2003-07-31 | 2010-06-17 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation container and vapor deposition apparatus |
| CN102071398A (en) * | 2009-11-20 | 2011-05-25 | 上海广电电子股份有限公司 | Metal evaporation crucible |
-
2012
- 2012-12-12 CN CN2012105363271A patent/CN102978574A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2318232Y (en) * | 1997-10-06 | 1999-05-12 | 冶金部西南地质勘查局成都大西南工业公司 | Refractory metal evaporation boat |
| US20100147220A1 (en) * | 2003-07-31 | 2010-06-17 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation container and vapor deposition apparatus |
| CN101003888A (en) * | 2006-01-21 | 2007-07-25 | 鸿富锦精密工业（深圳）有限公司 | Equipment of coating by vaporization |
| WO2010024713A1 (en) * | 2008-08-26 | 2010-03-04 | Закрытое акционерное общество "Научное и технологическое оборудование" | Crucible for evaporating aluminium in the molecular beam epitaxy process |
| CN102071398A (en) * | 2009-11-20 | 2011-05-25 | 上海广电电子股份有限公司 | Metal evaporation crucible |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104668504A (en) * | 2013-11-30 | 2015-06-03 | 中国科学院金属研究所 | Casting forming equipment and process for amorphous alloy component |
| CN104668503A (en) * | 2013-11-30 | 2015-06-03 | 中国科学院金属研究所 | Amorphous alloy member cast forming device and process |
| CN104668503B (en) * | 2013-11-30 | 2017-05-31 | 中国科学院金属研究所 | A kind of non-crystaline amorphous metal component casting equipment and technique |
| CN104668504B (en) * | 2013-11-30 | 2017-06-16 | 中国科学院金属研究所 | Non-crystaline amorphous metal component casting equipment and technique |
| CN110835272A (en) * | 2019-12-05 | 2020-02-25 | 山东国晶新材料有限公司 | Preparation method of split type conductive ceramic boat |
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Application publication date: 20130320 |