CN102956426A - Extraction inhibiting surge protector - Google Patents
Extraction inhibiting surge protector Download PDFInfo
- Publication number
- CN102956426A CN102956426A CN2011102411527A CN201110241152A CN102956426A CN 102956426 A CN102956426 A CN 102956426A CN 2011102411527 A CN2011102411527 A CN 2011102411527A CN 201110241152 A CN201110241152 A CN 201110241152A CN 102956426 A CN102956426 A CN 102956426A
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- printed board
- head screw
- top cover
- voltage
- base
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Abstract
An extraction inhibiting surge protector comprises a base (1), cross countersunk screws (2), PCB (printed circuit board) supports (3), semi-circular screws (4), an insulating cylinder (5), high-voltage resistors (6), high-voltage diodes (7), a printed board (8), a semi-circular screw (9), an electrode (10), a spring (11), a bolt conduit (12), a top cover (13) and a high-voltage connector (14). The extraction inhibiting surge protector is characterized in that the base (1) is connected with the top cover (13) through the cross countersunk screws (2) and the insulating cylinder (5), the PCB supports (3) are connected with the printed board (8) through the semi-circular screws (4) and then are fixed on the base (1), the high-voltage resistors (6) and the high-voltage diodes (7) are welded on the printed board (8) through the semi-circular screws (4), the electrode (10) is connected with the printed board (8) through the semi-circular screw (9), and the high-voltage connector (14) is mounted on the top cover (13). The specification explains the operating principle of the extraction inhibiting surge protector in detail and gives a specific embodiment.
Description
Technical field
The present invention relates to a kind of inhibition surge protective device of drawing, relate to especially and a kind ofly draw the inhibition surge protective device for ion implantor.
Background technology
Along with the semiconductor device integrated level is more and more higher, semiconductor manufacturing equipment becomes increasingly complex, and requires also more and more higher to ionogenic line.In semiconductor fabrication process equipment ion implantor, Ion Source Extracted System is one of whole set equipment critical component, its determine ion source system the educt beaming flow size, draw energy size, educt beaming flow quality and beam stability energy.Yet adopted three electrode extraction systems in many ion sources, these three electrodes are called respectively positive electrode, negative electrode and ground electrode.Draw inhibition and namely be added in electric field between negative electrode and ground electrode, it can reduce the space charge effect of ion beam greatly, can also regulate the angle of divergence of drawing ion beam.
Summary of the invention
For the requirement of existing semiconductor technology intermediate ion implanter equipment development, the present invention has designed a kind of for the protection of ion source of ion implanter extraction system with absorb and draw the discharging current device that suppresses electrode.
The present invention is achieved through the following technical solutions:
A kind of inhibition surge protective device of drawing comprises: base (1), crossed countersunk head screw (2), PCB prop up part (3), half button head screw (4), insulating cylinder (5), high-tension resistive (6), high-voltage diode (7), printed board (8), half button head screw (9), electrode (10), spring (11), latch conduit (12), top cover (13) and high-tension connector (14).
Wherein said base (1) links to each other with insulating cylinder (5) by described crossed countersunk head screw (2) with described top cover (13); Wherein said PCB props up part (3) and links to each other with printed board (8) by described half button head screw (4), is fixed on the base (1) again; Wherein said high-tension resistive (6) and high-voltage diode (7) directly are welded in the printed board (8); Wherein said electrode (10) links to each other with printed board (8) by half button head screw (9); Wherein said high-tension connector (14) is installed on the top cover (13); Described spring (11) is fixed on the electrode (10).
Described high-tension resistive welds by the mode of parallel connection between (6), and described high-voltage diode (7) links to each other according to the mode of load needs by series connection.Connect with high-voltage diode (7) between wherein said high-tension resistive (6).
Patent of the present invention has following remarkable advantage:
1. the structure stable connection is reliable, the good characteristics of performance;
2. the structure attended operation is convenient, guarantees the reliability and stability of long-term work;
3. the resistance of described high-tension resistive (6) can increase or reduce as the case may be; The increase that the withstand voltage scope of described high-voltage diode (7) can be suitable or the reverse breakdown voltage that reduces quantity and the raising of high-voltage diode or reduce single high-voltage diode satisfy the demand of load.
Description of drawings
The invention will be described further below in conjunction with the drawings and specific embodiments, but not as the restriction to patent of the present invention.
Fig. 1 draws the profile that suppresses surge protective device;
Fig. 2 draws the schematic diagram that suppresses a kind of execution mode of surge protective device.
Embodiment
The invention will be described further below in conjunction with the specific embodiment of accompanying drawing, should be appreciated that, these descriptions all are illustrative, the invention is not restricted to this.Scope of the present invention is only limited by the scope of claims.
A kind of inhibition surge protective device of drawing has been shown among Fig. 1, and it comprises: base (1), crossed countersunk head screw (2), PCB prop up part (3), half button head screw (4), insulating cylinder (5), high-tension resistive (6), high-voltage diode (7), printed board (8), half button head screw (9), electrode (10), spring (11), latch conduit (12), top cover (13) and high-tension connector (14).
Wherein said base (1) links to each other with insulating cylinder (5) by described crossed countersunk head screw (2) with described top cover (13); Wherein said PCB props up part (3) and links to each other with printed board (8) by described half button head screw (4), is fixed on the base (1) again; Wherein said high-tension resistive (6) and high-voltage diode (7) directly are welded in the printed board (8); Wherein said electrode (10) links to each other with printed board (8) by half button head screw (9); Wherein said high-tension connector (14) is installed on the top cover (13); Described spring (11) is fixed on the electrode (10), is used for increasing and the contact area of drawing the inhibition output line.
Described high-tension resistive welds by the mode of parallel connection between (6), and described high-voltage diode (7) links to each other by the mode of series connection.Connect with high-voltage diode (7) between wherein said high-tension resistive (6).The resistance of described high-tension resistive (6) can increase or reduce as the case may be; The increase that the withstand voltage scope of described high-voltage diode (7) also can be suitable or the reverse breakdown voltage that reduces quantity and the raising of high-voltage diode or reduce single high-voltage diode satisfy the demand of load.
Draw in the execution mode schematic diagram that suppresses surge protective device at Fig. 2, high-tension resistive R1, R2, R3, R4 and R5 are in parallel, connect with the resistance after the parallel connection after high-voltage diode D1, D2, D3, D4, D5, D6, D7 and D8 connect successively.It is 500 ohm that high-tension resistive R1, R2, R3, R4 and R5 adopt resistance, and power is that the metalfilmresistor of 12.5W absorbs the discharging current that ion source and extraction system cause because of sparking; It is HDM12 series connection that high-voltage diode D1, D2, D3, D4, D5, D6, D7 and D8 adopt withstand voltage 12KV model, prevents from drawing suppressing voltage breakdown that electrode is cumulative too high because of sparking and drawing and suppress power supply multiplication of voltage part.
The inhibition surge protective device structure stable connection of drawing of the present invention is reliable, and performance is good; Simultaneously structure attended operation is convenient, guarantees the reliability and stability of long-term work, satisfies the requirement of ion implantor high reliability high standard.
Specific embodiment of the present invention elaborates content of the present invention.For persons skilled in the art, any apparent change of without departing from the premise in the spirit of the present invention it being done, perhaps the direct replacement of customary means all consists of the infringement to patent of the present invention, will bear corresponding legal liabilities.
Claims (2)
1. draw the inhibition surge protective device for one kind, comprising: base (1), crossed countersunk head screw (2), PCB prop up part (3), half button head screw (4), insulating cylinder (5), high-tension resistive (6), high-voltage diode (7), printed board (8), half button head screw (9), electrode (10), spring (11), latch conduit (12), top cover (13) and high-tension connector (14).
2. such as claim 1 described a kind of inhibition surge protective device of drawing, it is characterized in that, wherein said base (1) links to each other with insulating cylinder (5) by described crossed countersunk head screw (2) with described top cover (13); Wherein said PCB props up part (3) and links to each other with printed board (8) by half button head screw (4), is fixed on the base (1) again; Wherein said high-tension resistive (6) and high-voltage diode (7) directly are welded in the printed board (8); Described electrode (10) links to each other with printed board (8) by half button head screw (9); Described high-tension connector (14) is installed on the top cover (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011102411527A CN102956426A (en) | 2011-08-22 | 2011-08-22 | Extraction inhibiting surge protector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011102411527A CN102956426A (en) | 2011-08-22 | 2011-08-22 | Extraction inhibiting surge protector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102956426A true CN102956426A (en) | 2013-03-06 |
Family
ID=47765105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011102411527A Pending CN102956426A (en) | 2011-08-22 | 2011-08-22 | Extraction inhibiting surge protector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102956426A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1154421A (en) * | 1995-10-20 | 1997-07-16 | Eni阿斯泰克美国分公司 | Arc control and switching element protection for pulsed DC power supply |
| CN1398505A (en) * | 2000-02-11 | 2003-02-19 | 瓦里安半导体设备联合公司 | Methods and appts. for operating high energy accelerator in low energy mode |
| CN2788509Y (en) * | 2005-04-22 | 2006-06-14 | 北京中科信电子装备有限公司 | Ion source discharge current self-stabilization controller |
| US20090109584A1 (en) * | 2007-10-30 | 2009-04-30 | Polyphaser Corporation | Surge protection circuit for passing dc and rf signals |
| CN101895041A (en) * | 2010-03-23 | 2010-11-24 | 贵州航天电器股份有限公司 | Anti-surge voltage electric connector socket |
| US20110051925A1 (en) * | 2009-08-31 | 2011-03-03 | Qiangsheng Charssen Ge | Method and apparatus for shared positive protection |
-
2011
- 2011-08-22 CN CN2011102411527A patent/CN102956426A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1154421A (en) * | 1995-10-20 | 1997-07-16 | Eni阿斯泰克美国分公司 | Arc control and switching element protection for pulsed DC power supply |
| CN1398505A (en) * | 2000-02-11 | 2003-02-19 | 瓦里安半导体设备联合公司 | Methods and appts. for operating high energy accelerator in low energy mode |
| CN2788509Y (en) * | 2005-04-22 | 2006-06-14 | 北京中科信电子装备有限公司 | Ion source discharge current self-stabilization controller |
| US20090109584A1 (en) * | 2007-10-30 | 2009-04-30 | Polyphaser Corporation | Surge protection circuit for passing dc and rf signals |
| US20110051925A1 (en) * | 2009-08-31 | 2011-03-03 | Qiangsheng Charssen Ge | Method and apparatus for shared positive protection |
| CN101895041A (en) * | 2010-03-23 | 2010-11-24 | 贵州航天电器股份有限公司 | Anti-surge voltage electric connector socket |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification that Application Deemed to be Withdrawn |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130306 |