CN102950087A - Coating device - Google Patents
Coating device Download PDFInfo
- Publication number
- CN102950087A CN102950087A CN2012101940335A CN201210194033A CN102950087A CN 102950087 A CN102950087 A CN 102950087A CN 2012101940335 A CN2012101940335 A CN 2012101940335A CN 201210194033 A CN201210194033 A CN 201210194033A CN 102950087 A CN102950087 A CN 102950087A
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- Prior art keywords
- coating liquid
- mentioned
- nozzle
- scanning direction
- supply pipe
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- 238000000576 coating method Methods 0.000 title claims abstract description 203
- 239000011248 coating agent Substances 0.000 title claims abstract description 201
- 239000007788 liquid Substances 0.000 claims abstract description 180
- 239000000758 substrate Substances 0.000 claims description 78
- 230000010355 oscillation Effects 0.000 claims description 48
- 230000002745 absorbent Effects 0.000 claims description 32
- 239000002250 absorbent Substances 0.000 claims description 32
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- 239000012530 fluid Substances 0.000 abstract 4
- 230000001629 suppression Effects 0.000 abstract 2
- 230000005489 elastic deformation Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 28
- 230000000694 effects Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000010408 film Substances 0.000 description 7
- 239000007921 spray Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- CHLICZRVGGXEOD-UHFFFAOYSA-N 1-Methoxy-4-methylbenzene Chemical compound COC1=CC=C(C)C=C1 CHLICZRVGGXEOD-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229940077398 4-methyl anisole Drugs 0.000 description 1
- 239000002635 aromatic organic solvent Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Landscapes
- Coating Apparatus (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Pipe Accessories (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The present invention provides a coating device, being able to coat the coated liquid evenly by maintaining the flow of the coated liquid constantly even in the situation of delivering the coated liquid to the nozzle during reciprocating movement through a flexible coated fluid supply pipe.A pressure change absorption mechanism (70) has a pressure absorption part (71) and a flow suppression part (72); the pressure absorption part (71) is resin-made soft tube (73), through the coating fluid supply pipe (64) coating fluid pressure changes and produce elastic deformation to make coating liquid for volume change. In addition, the flow suppression part (72) is formed by resin-made hard tubes (74) which has smaller trottling hole thickness and has smaller inner diameter than the inner diameter of the coated fluid supply pipe (64) and the soft tube(73).
Description
Technical field
The present invention relates to organic EL display glass substrate, liquid crystal indicator glass substrate, PDP(Plasma Display Panel: the applying device of plasma display panel) using the coating of substrates coating liquids such as substrate or use in semiconductor manufacturing apparatus mask substrate with glass substrate, used for solar batteries substrate, Electronic Paper.
Background technology
For example, make to use the organic EL(Electro Luminescence of macromolecule: electroluminescent) during the organic EL display of the driven with active matrix mode of material, successively glass substrate is carried out following operation: form TFT(Thin Film Transistor: the thin film transistor (TFT)) operation of circuit; Formation is as the ITO(Indium Tin Oxide of anode: the indium tin oxide) operation of electrode; Form the operation of spaced walls; Coating contains the operation of the free-flowing material of hole transporting material; By heat treated, form the operation of hole transporting layer; Coating contains the operation of the free-flowing material of organic EL Material; By heating, form the operation of organic EL layer; Form the operation of negative electrode; The operation that encapsulates by forming dielectric film.
As when making such organic EL display, apply the free-flowing material that contains hole transporting material, the known following device of applying device that contains the coating liquids such as free-flowing material of organic EL Material at substrate: by making a plurality of nozzles of continuous ejection coating liquid, move with respect to substrate along main scanning direction and sub scanning direction, come the area of application on substrate to be striated ground coating liquid coating.
In addition, patent documentation 1 has proposed following structure, as making the applicator head with a plurality of nozzles adopt slide block in the applicator head travel mechanism that main scanning direction moves back and forth, this slide block cooperates with the guide portion of extending along main scanning direction, and between this slide block and guide portion, spray air, support with the contactless state directed section.In this patent documentation 1 described applying device, by air supply pipe to the slide block air supply.In addition, by the flexible coating liquid supply pipe that is connected with the coating liquid reservoir, supply with coating liquid to a plurality of nozzles that are installed in the applicator head on this slide block.
Patent documentation 1:JP JP 2009-131735 communique.
In such applying device, require the uniform film thickness of coating liquid.In order to make the uniform film thickness of coating liquid, need to make from the flow of the coating liquid of nozzle ejection even.
But, under a plurality of nozzles of applicator head and state that the coating liquid reservoir is connected by flexible coating liquid supply pipe, when the nozzle that moves to fast reciprocating is supplied with coating liquid, owing to the coating liquid supply pipe deforms along with nozzle moves, the impact of the inertia force of coating liquid in the coating liquid supply pipe etc., be difficult to make and keep constant from the flow of the coating liquid of nozzle ejection.
Summary of the invention
The present invention proposes in order to address the above problem, its purpose is to provide a kind of applying device, even this applying device is being carried in the situation of coating liquid by flexible coating liquid supply pipe from the coating liquid reservoir to the nozzle that moves back and forth, also the flow of coating liquid can be kept constantly, come equably coating liquid coating.
Technical scheme 1 described invention is a kind of applying device, have: the substrate maintaining part, be used for keeping substrate, nozzle, be used for to the substrate ejection coating liquid that is kept by the aforesaid substrate maintaining part, main scanning direction travel mechanism, be used for said nozzle is moved back and forth along the main scanning direction on the surface that is parallel to substrate, sub scanning direction travel mechanism, be used for the aforesaid substrate maintaining part is moved with respect to said nozzle along sub scanning direction, wherein, above-mentioned sub scanning direction is perpendicular to above-mentioned main scanning direction, and above-mentioned sub scanning direction is parallel to the surface of substrate, flexible coating liquid supply pipe, be used for carrying coating liquid from the coating liquid reservoir to said nozzle, this applying device is characterised in that, also has pressure oscillation absorbing mechanism, this pressure oscillation absorbing mechanism is provided between said nozzle and the above-mentioned coating liquid supply pipe, and forming one with said nozzle moves, this pressure oscillation absorbing mechanism has: the pressure absorbent portion, strain occurs along with the pressure oscillation of the coating liquid of carrying from above-mentioned coating liquid supply pipe, and make thus the change in volume of coating liquid holding part, the flow suppressing portion has the throttle orifice less than the internal diameter of above-mentioned coating liquid supply pipe.
Technical scheme 4 described inventions are characterised in that in technical scheme 2 described inventions, above-mentioned flow suppressing portion is resinous hard tube, and the internal diameter of this hard tube is less than the internal diameter of above-mentioned coating liquid supply pipe and the internal diameter of above-mentioned flexible pipe.
Technical scheme 6 described inventions are a kind of applying device, have: the substrate maintaining part, be used for keeping substrate, nozzle, be used for to the substrate ejection coating liquid that is kept by the aforesaid substrate maintaining part, main scanning direction travel mechanism, be used for said nozzle is moved back and forth along the main scanning direction on the surface that is parallel to substrate, sub scanning direction travel mechanism is used for the aforesaid substrate maintaining part is moved with respect to said nozzle along sub scanning direction, wherein, above-mentioned sub scanning direction is perpendicular to above-mentioned main scanning direction, and the surface that is parallel to substrate, flexible coating liquid supply pipe is used for carrying coating liquid from the coating liquid reservoir to said nozzle; This applying device is characterised in that, also has pressure oscillation absorbing mechanism, this pressure oscillation absorbing mechanism is provided between said nozzle and the above-mentioned coating liquid supply pipe, and forming one with said nozzle moves, this pressure oscillation absorbing mechanism has: the pressure absorbent portion, flexible pipe by wall thickness consists of, strain occurs along with the pressure oscillation of the coating liquid of carrying from above-mentioned coating liquid supply pipe, make thus the change in volume of coating liquid holding part, the flow suppressing portion, internal diameter is less than the internal diameter of above-mentioned coating liquid supply pipe and the internal diameter of above-mentioned flexible pipe, and the resinous hard tube thick by the wall thickness of the above-mentioned flexible pipe of wall ratio consists of.
Technical scheme 7 described inventions are characterised in that, in technical scheme 1 to 6 in each described invention, said nozzle is equipped with a plurality of with the spacing of regulation on above-mentioned sub scanning direction, above-mentioned coating liquid supply pipe and above-mentioned pressure oscillation absorbing mechanism and each nozzle are equipped with a plurality of accordingly, and a plurality of above-mentioned coating liquid supply pipes are connected with the pump that is used for from above-mentioned coating liquid reservoir force feed coating liquid by mass flow controller respectively.
According to technical scheme 1 described invention, even carrying in the situation of coating liquid by flexible coating liquid supply pipe to the nozzle that moves back and forth from the coating liquid reservoir, the effect of pressure oscillation absorbing mechanism that can be by having pressure absorbent portion and flow suppressing portion, the flow of coating liquid is kept constant, thereby coating liquid coating equably.
According to technical scheme 2 and 3 described inventions, can make the simple in structure of pressure absorbent portion, in addition, can easily control by the length that changes flexible pipe the pressure oscillation of coating liquid.
According to technical scheme 4 and 5 described inventions, can make the simple in structure of flow suppressing portion, in addition, easily control the pressure oscillation of coating liquid by the length that changes hard tube.
According to technical scheme 6 described inventions, even carrying in the situation of coating liquid by flexible coating liquid supply pipe to the nozzle that moves back and forth from the coating liquid reservoir, the effect of pressure oscillation absorbing mechanism that can be by having pressure absorbent portion and flow suppressing portion, the flow of coating liquid is kept constant, thereby coating liquid coating equably.In addition, can make the simple in structure of pressure absorbent portion and flow suppressing portion, also have, can easily control by the length that changes flexible pipe and hard tube the pressure oscillation of coating liquid.
According to technical scheme 7 described inventions, though in the effect by pump in the situation of a plurality of nozzle force feed coating liquids, also can be constant with keeping from the flow of the coating liquid of each nozzle ejection, thus coating liquid coating equably.
Description of drawings
Fig. 1 is the top view of applying device of the present invention.
Fig. 2 is the front view of applying device of the present invention.
Fig. 3 is near the cutaway view the slide block 31 of applicator head travel mechanism 21.
Fig. 4 is the schematic diagram of the annexation of expression coating liquid reservoir 24 and a plurality of nozzle 23.
Fig. 5 is the skeleton diagram of the pressure oscillation absorbing mechanism 70 of the present invention's the 1st embodiment.
Fig. 6 A is the skeleton diagram of the pressure absorbent portion 71 of the present invention's the 2nd embodiment.
Fig. 6 B is the skeleton diagram of the pressure absorbent portion 71 of the present invention's the 2nd embodiment.
Fig. 7 is the skeleton diagram of the flow suppressing portion 72 of the present invention's the 2nd embodiment.
The specific embodiment
Below, based on the description of drawings embodiments of the present invention.Fig. 1 is the top view of applying device of the present invention, and Fig. 2 is front view.
This applying device is used for coating liquid coating on the glass substrate 100 of rectangle.Specifically, glass substrate 100 coatings that this applying device is used for using at the organic EL display of driven with active matrix mode contain volatile solvent (being in the present embodiment, as a kind of 4-methylanisole of aromatic organic solvent) and as the coating liquid of the organic EL Material of luminescent material.
This applying device has be used to the substrate travel mechanism 11 that glass substrate 100 is moved.As shown in Figure 2, this substrate travel mechanism 11 has the substrate maintaining part 10 that keeps glass substrate 100 from the back side of glass substrate 100.The base station 13 that this substrate maintaining part 10 is moved along a pair of rail 12 and the turntable 14 that is arranged on this base station 13 support.So this substrate maintaining part 10 can along Y-direction shown in Figure 1, move with the surface of glass substrate 100 with paralleling.This Y-direction is that the direction that moves back and forth with following applicator head 20 is the vertical direction of main scanning direction (directions X of Fig. 1).Below, this Y-direction is also referred to as " sub scanning direction ".In addition, this substrate maintaining part 10 can be to rotate centered by (the Z direction of Fig. 1) axle of vertical.
The inside of this substrate maintaining part 10 has heater, and this heater is from downside glass substrate 100.On the surface of this glass substrate 100, for example the arranged with interval with 100～150 μ m is formed with a plurality of the area of application that extend along directions X separately on Y-direction.Described dispensing area for example forms by the spaced walls that arranges along directions X.
In addition, this applying device has pair of right and left shoot part 15, and shoot part 15 is taken the not shown telltale mark that is formed on the glass substrate 100 and detected, and takes the coating track that applicator head 20 forms.Be respectively arranged with the CCD camera at above-mentioned a pair of shoot part 15.In addition, this applying device has pair of right and left test coating objective table 16, and test coating objective table 16 uses when tentatively coating coating track.
Spray the applicator head 20 of coating liquid to the surface of the glass substrate 100 that is kept by substrate maintaining part 10,, move back and forth along the main scanning direction that is parallel to glass substrate 100 surfaces (directions X of Fig. 1) along a pair of guide portion 22 by applicator head travel mechanism 21.On this applicator head 20, the sub scanning direction equal intervals be provided with for continuous a plurality of nozzles 23 of ejection same coating liquid.In Fig. 1 and Fig. 2, for the ease of diagram, only illustrate 5 nozzles 23, but the number of nozzle 23 can more or also can only have one.In addition, as long as dispose nozzle 23 with the spacing of regulation, the interval can not waited.
Fig. 3 is near the cutaway view the slide block 31 of applicator head travel mechanism 21.
On the guiding elements 22 of applicator head travel mechanism 21 shown in Figure 1, can be provided with slidably slide block 31.Be formed with the through hole 32 that guiding elements 22 passes at this slide block 31.As shown in Figure 1, by the included air supply pipe of supply pipe group 26, supply with the air of certain pressures to this slide block 31 from air supply source 25.Therefore, as shown in Figure 3, between the outer peripheral face of the inner peripheral surface of through hole 32 and guiding elements 22, spray air (gas).Among Fig. 3, represent the emission direction of air with the arrow of mark A1.Like this, slide block 31 cooperates with guide portion 22 with contactless state, and can be supported movably along main scanning direction.
With reference to Fig. 1, near the both ends of a pair of guide portion 22, be provided with a pair of belt wheel 33, a pair of belt wheel 33 can be to be rotated centered by the axle of Z direction.Be wound with the Timing Belt 34 of ring-type at above-mentioned a pair of belt wheel 33.One end of slide block 31 is fixed on this Timing Belt 34.On the other hand, the other end at slide block 31 is fixed with above-mentioned applicator head 20.Therefore, by the driving by not shown motor, make Timing Belt 34 clockwise or rotate in the counterclockwise, thus make applicator head 20 to-directions X or+directions X moves back and forth.At this moment, because by the effect of above-mentioned gas, can slide block 31 be supported in guide portion 22 with contactless state, so can make applicator head 20 at a high speed and move back and forth smoothly.
In this applying device, this applicator head travel mechanism 21 is for to make applicator head 20 along the main scanning direction travel mechanism that main scanning direction moves, and substrate travel mechanism 11 is for making substrate maintaining part 10 along sub scanning direction travel mechanism that sub scanning direction moves.In this applying device, by the mobile end of each applicator head 20 along main scanning direction, glass substrate 100 is moved along sub scanning direction, come the area of application coating liquid coating on the surface of glass substrate 100.In addition, when applicator head 20 is carried out main scanning, be subjected to liquid section 17,18 near finish the action of accelerating or slowing down, above glass substrate 100, applicator head 20 for example moves with the constant speed of per second 3～5m.
Fig. 4 is expression coating liquid reservoir 24 shown in Figure 1 and the schematic diagram of the annexation between a plurality of nozzle 23.
Above-mentioned coating liquid reservoir 24 is connected with the independent pump 61 that is used for the force feed coating liquid.This pump 61 is connected with a plurality of mass flow controllers 62 by branched pipe.The a plurality of nozzles that on applicator head 20, arrange in the mode in the sub scanning direction equal intervals, by as the pressure oscillation absorbing mechanism 70 of characteristic of the present invention, above-mentioned flexible coating liquid supply pipe 64, electromagnetic switch valve 63, be connected with mass flow controller 62 separately.
In addition, each nozzle 23 and pressure oscillation absorbing mechanism 70 are arranged on the applicator head 20, and a plurality of nozzles 23 and pressure oscillation absorbing mechanism 70 become one, and move back and forth at main scanning direction.
By the effect of pump 61, the coating liquid that is stored in coating liquid reservoir 24 is pressed to mass flow controller 62.Then, this coating liquid has been adjusted flow in mass flow controller 62 after, by electromagnetic switch valve 63 and flexible coating liquid supply pipe 64, be sent to pressure oscillation absorbing mechanism 70.At this moment, since applicator head 20 move back and forth at high speed the coating liquid supply pipe 64 of generation distortion, act on the impact of the inertia force etc. of the coating liquid in the coating liquid supply pipe 64, make the pressure oscillation of the coating liquid of carrying by coating liquid supply pipe 64, be difficult to flow is kept constant.Therefore, in pressure oscillation absorbing mechanism 70, absorb the pressure oscillation of this coating liquid, make from the constant flow of the coating liquid of each nozzle 23 ejections.
The structure of this pressure oscillation absorbing mechanism 70 then, is described.Fig. 5 is the skeleton diagram of the pressure oscillation absorbing mechanism 70 of the 1st embodiment of the present invention.
This pressure oscillation absorbing mechanism 70 has pressure absorbent portion 71 and flow suppressing portion 72.At this, pressure absorbent portion 71 is made of the resinous flexible pipe 73 of thin-walled, by along with strain is carried out in the pressure oscillation of the coating liquid of carrying from coating liquid supply pipe 64, makes the change in volume of coating liquid holding part.In addition, flow suppressing portion 72 is made of less than the resinous hard tube 74 that the internal diameter of the internal diameter of coating liquid supply pipe 64 and flexible pipe 73 namely has the heavy wall of less throttle orifice internal diameter.Flexible pipe 73 is connected with coating liquid supply pipe 64 by connector 75.In addition, hard tube 74 is connected with nozzle 23 by connector 77.And flexible pipe 73 is connected with hard tube and is connected by connector 76.
Consist of the flexible pipe 73 of pressure absorbent portion 71, for example by outer through be about 1.5mm, internal diameter is the PFA(tetrafluoroethene of 1.0mm) body of system consists of.Strain occurs along with the pressure oscillation of the coating liquid of carrying from coating liquid supply pipe 64 in this flexible pipe 73, is the change in volume of coating liquid holding part thereby make the internal diameter of this flexible pipe 73.Therefore, this flexible pipe 73 is made of the tubular element with flexibility and flexible thin-walled.As this flexible pipe 73, for strain suitably, preferred outer through be about 1mm～3mm, preferably internal diameter is about 0.5mm～2.5mm.
On the other hand, the hard tube 74 that consists of flow suppressing portion 72 is made of through the body that is about 1.5mm, internal diameter is the fluorine-type resin system about 0.1mm outer.This hard tube 74 has the little caliber as small throttle orifice, brings into play the function that suppresses flow.Therefore, this hard tube 74 is made of the tubular element of harder heavy wall.As this hard tube 74, in order to have the function as small throttle orifice, preferred outer through being about 1mm～3mm, preferred internal diameter is about 0.05mm～0.2mm.In addition, as long as this hard tube 74 can be kept the function as small throttle orifice, also can be to have flexibility and the flexible pipe of regulation.Here said hard finger hardness is greater than the hardness of flexible pipe 73.
In having the pressure oscillation absorbing mechanism 70 of this spline structure, absorb in two stages from the pressure oscillation of the coating liquid of coating liquid supply pipe 64 conveyings by pressure absorbent portion 71 and flow suppressing portion 72, thereby can make from the constant flow of the coating liquid of each nozzle 23 ejections.
That is, for the flexible pipe 73 that consists of pressure absorbent portion 71, at the pressure rise of the coating liquid that is supplied to nozzle 23 from coating liquid supply pipe 64 time, flexible pipe 73 expands and its internal diameter becomes large, and is large thereby the volume of coating liquid holding part becomes.On the other hand, at the pressure drop of the coating liquid that is supplied to nozzle 23 from coating liquid supply pipe 64 time, flexible pipe 73 shrinks and its internal diameter diminishes, thus the volume of coating liquid holding part reduces.Like this, can absorb the pressure oscillation of coating liquid.
On the other hand, for the hard tube 74 that consists of flow suppressing portion 72, the effect by as the pipe with small pipe diameter of small throttle orifice absorbs the pressure oscillation of coating liquid.That is, when the internal diameter of the stream of coating liquid returned to original internal diameter again after a certain value diminishes, the mean flow rate of the coating liquid by herein reverted to original speed after temporarily becoming fast speed.At this moment, the pressure loss of the coating liquid that flows in pipeline that causes owing to the friction between coating liquid and the pipeline inner wall is with square being directly proportional of the flow velocity of coating liquid.Therefore, by small throttle orifice is set, can come the absorption pressure change by the pressure loss in pipeline.Therefore, for this hard tube 74, can absorb the pressure oscillation of coating liquid, make from the constant flow of the coating liquid of each nozzle 23 ejections.
At this, the effect that the flow change is reduced of flow suppressing portion 72 is better than the effect that the flow change is reduced of pressure absorbent portion 71 usually, if but exceedingly lose pressure in flow suppressing portion 72, but then have the little problem of discharging jet quantitative change of coating liquid.On the other hand, for pressure absorbent portion 71, be not so good as flow suppressing portion 72 although suppress the effect of flow change, but can not make the discharging jet quantitative change little.Therefore, in the present embodiment, by in pressure absorbent portion 71, having reduced to remove remaining flow change by flow suppressing portion 72 again after the flow change, thereby the flow of coating liquid is kept constant, come equably coating liquid coating.
At this moment, in the present embodiment, because pressure absorbent portion 71 is made of flexible pipe 73, it is simple in structure, in addition, can by the length of change flexible pipe 73, easily control the pressure oscillation of coating liquid.Equally, in the present embodiment, because flow suppressing portion 72 is made of hard tube 74, it is simple in structure, also has, and can by the length of change hard tube 74, easily control the pressure oscillation of coating liquid.
Other embodiment of pressure absorbent portion 71 then, is described.Fig. 6 A and Fig. 6 B are the skeleton diagrams of the pressure absorbent portion 71 of the present invention's the 2nd embodiment.
The pressure absorbent portion 71 of the 2nd embodiment comprises: stream 82, one ends of coating liquid are communicated with coating liquid supply pipe 64, and the other end is communicated with nozzle 23 sides; Chamber 81 is formed with peristome at its sidepiece, and has the reservoir 83 of coating liquid; Film 84 is arranged on the peristome of chamber 81, can carry out strain.In this pressure absorbent portion 71, can pass through the effect of the film 84 of elastically deformable, absorb the pressure oscillation of coating liquid.
That is, when the pressure rise of the coating liquid that is supplied to nozzle 23 time, as shown in Figure 6A, film 84 expands, and it is large that coating liquid reservoir 83 volumes become, when the pressure drop of the coating liquid that is supplied to nozzle 23 time, shown in Fig. 6 B, film 84 is recessed, the smaller volume of coating liquid reservoir 83.Like this, in this pressure absorbent portion 71, can absorb the pressure oscillation of coating liquid.
Therefore, the pressure absorbent portion 71 shown in Fig. 6 A and Fig. 6 B is arranged between coating liquid supply pipe 64 and the flow suppressing portion 72, replaces pressure absorbent portion 71 shown in Figure 5, the flow of coating liquid can be kept constant, thereby coating liquid coating equably.
Other embodiment of flow suppressing portion 72 then, is described.Fig. 7 is the skeleton diagram of the flow suppressing portion 72 of the present invention's the 2nd embodiment.
Therefore, by flow suppressing portion 72 shown in Figure 7 is arranged between pressure absorbent portion 71 and the nozzle 23, replace flow suppressing portion 72 shown in Figure 5, the flow of coating liquid can be kept constant, thereby coating liquid coating equably.
In having the applying device of above structure, in the time will beginning coating liquid coating, begin glass substrate 100 most and be maintained on the substrate maintaining part 10.Then, detect the telltale mark that is formed on the glass substrate 100 by shoot part 15, substrate maintaining part 10 is moved or rotate according to this testing result, glass substrate 100 is configured in the coating starting position that represents with solid line among Fig. 1.Under this state, begin a plurality of nozzles 23 ejection coating liquids on the applicator head 20, and by applicator head travel mechanism 21 applicator head 20 is moved along main scanning direction.
Then, surface from from a plurality of nozzles 23 to glass substrate 100 continues the ejection coating liquid with constant flow respectively, and, applicator head 20 with constant speed along the main scanning direction continuous moving, at the coating liquid of a plurality of wire zone coating striated of the area of application of glass substrate 100.At this moment, because in the pressure oscillation absorption machine 70 with pressure absorbent portion 71 and flow suppressing portion 72, absorb the pressure oscillation of coating liquid, so can make from the constant flow of the coating liquid of each nozzle 23 ejections.
Then, applicator head 20 move to represent with double dot dash line among Fig. 1 and Fig. 2 be subjected to liquid section 18 position of readiness in opposite directions, the cause coating liquid forms the pattern of striated.When applicator head 20 moved to position of readiness, substrate travel mechanism 11 was driven, and glass substrate 100 moves along sub scanning direction with substrate maintaining part 10.At this moment, in applicator head 20, from a plurality of nozzles 23 to being subjected to continuously ejection coating liquid of liquid section 18.
Continue above action, until the coating that needs action is finished.Then, when glass substrate 100 moves to the coating end position, stop from a plurality of nozzle 23 ejection coating liquids, applying device is to the release of glass substrate 100 coating liquid coatings.The glass substrate 100 that coating is through with is moved to other applying devices etc., by the coating liquid of other 2 colors of this applying device coating except coated coating liquid.Then, behind the working procedure of coating that glass substrate 100 is stipulated, make organic El device with other assembling parts.
In addition, in the above-described embodiment, in coating liquid supply pipe 64 1 sides pressure absorbent portion 71 is set, in nozzle 23 1 sides flow suppressing portion 72 is set, but can arranges on the contrary.That is, in coating liquid supply pipe 64 1 sides flow suppressing portion 72 is set, arranges in the situation of pressure absorbent portion 71 in nozzle 23 1 sides, also can make from the constant flow of the coating liquid of each nozzle 23 ejections.
Claims (7)
1. applying device,
Have:
The substrate maintaining part is used for keeping substrate,
Nozzle is used for to the substrate ejection coating liquid that is kept by the aforesaid substrate maintaining part,
Main scanning direction travel mechanism is used for said nozzle is moved back and forth along the main scanning direction on the surface that is parallel to substrate,
Sub scanning direction travel mechanism is used for the aforesaid substrate maintaining part is moved with respect to said nozzle along sub scanning direction, and wherein, above-mentioned sub scanning direction is perpendicular to above-mentioned main scanning direction, and is parallel to the surface of substrate,
Flexible coating liquid supply pipe is used for carrying coating liquid from the coating liquid reservoir to said nozzle;
This applying device is characterised in that,
Also have pressure oscillation absorbing mechanism, this pressure oscillation absorbing mechanism is provided between said nozzle and the above-mentioned coating liquid supply pipe, and moves with said nozzle formation one,
This pressure oscillation absorbing mechanism has:
Strain occurs along with the pressure oscillation of the coating liquid of carrying from above-mentioned coating liquid supply pipe in the pressure absorbent portion, makes thus the change in volume of coating liquid holding part,
The flow suppressing portion has the throttle orifice less than the internal diameter of above-mentioned coating liquid supply pipe.
2. applying device according to claim 1 is characterized in that, above-mentioned pressure absorbent portion is made of resinous flexible pipe.
3. applying device according to claim 2 is characterized in that, the outer warp of above-mentioned resinous flexible pipe is 1mm～3mm, and the internal diameter of above-mentioned resinous flexible pipe is 0.5mm～2.5mm.
4. applying device according to claim 2 is characterized in that, above-mentioned flow suppressing portion is resinous hard tube, and the internal diameter of this hard tube is less than the internal diameter of above-mentioned coating liquid supply pipe and the internal diameter of above-mentioned flexible pipe.
5. applying device according to claim 4 is characterized in that, the outer warp of above-mentioned hard tube is 1mm～3mm, and the internal diameter of above-mentioned hard tube is 0.05mm～0.2mm.
6. applying device,
Have:
The substrate maintaining part is used for keeping substrate,
Nozzle is used for to the substrate ejection coating liquid that is kept by the aforesaid substrate maintaining part,
Main scanning direction travel mechanism is used for said nozzle is moved back and forth along the main scanning direction on the surface that is parallel to substrate,
Sub scanning direction travel mechanism is used for the aforesaid substrate maintaining part is moved with respect to said nozzle along sub scanning direction, and wherein, above-mentioned sub scanning direction is perpendicular to above-mentioned main scanning direction, and is parallel to the surface of substrate,
Flexible coating liquid supply pipe is used for carrying coating liquid from the coating liquid reservoir to said nozzle;
This applying device is characterised in that,
Also have pressure oscillation absorbing mechanism, this pressure oscillation absorbing mechanism is provided between said nozzle and the above-mentioned coating liquid supply pipe, and moves with said nozzle formation one,
This pressure oscillation absorbing mechanism has:
The pressure absorbent portion is made of the flexible pipe of wall thickness, along with the pressure oscillation of the coating liquid of carrying from above-mentioned coating liquid supply pipe strain occurs, and makes thus the change in volume of coating liquid holding part,
Flow suppressing portion, internal diameter be less than the internal diameter of above-mentioned coating liquid supply pipe and the internal diameter of above-mentioned flexible pipe, and be made of the thick resinous hard tube of the wall thickness of the above-mentioned flexible pipe of wall ratio.
7. each described applying device in 6 according to claim 1 is characterized in that,
Said nozzle is equipped with a plurality of on above-mentioned sub scanning direction with the spacing of stipulating, above-mentioned coating liquid supply pipe and above-mentioned pressure oscillation absorbing mechanism and each nozzle are equipped with a plurality of accordingly, and,
A plurality of above-mentioned coating liquid supply pipes are connected with the pump that is used for from above-mentioned coating liquid reservoir force feed coating liquid by mass flow controller respectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011183418A JP5798411B2 (en) | 2011-08-25 | 2011-08-25 | Coating device |
| JP2011-183418 | 2011-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102950087A true CN102950087A (en) | 2013-03-06 |
| CN102950087B CN102950087B (en) | 2015-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210194033.5A Expired - Fee Related CN102950087B (en) | 2011-08-25 | 2012-06-13 | Coating device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5798411B2 (en) |
| KR (1) | KR101432361B1 (en) |
| CN (1) | CN102950087B (en) |
| TW (1) | TWI508790B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104841607A (en) * | 2014-02-14 | 2015-08-19 | 斯克林集团公司 | Coating apparatus |
| CN106179871A (en) * | 2014-09-26 | 2016-12-07 | 斯克林集团公司 | Apparatus for coating and cleaning method |
| CN107051767A (en) * | 2016-12-01 | 2017-08-18 | 无锡溥汇机械科技有限公司 | A kind of lithium battery isolation membrane flush coater stock system |
| CN110603103A (en) * | 2017-05-12 | 2019-12-20 | Abb瑞士股份有限公司 | Coating device for coating a component with a coating agent |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101689055B1 (en) * | 2013-09-27 | 2016-12-22 | 주식회사 엘지화학 | Slot die coater for production of electrodes |
| JP6472139B2 (en) * | 2015-06-15 | 2019-02-20 | 富士フイルム株式会社 | Orifice, liquid feeding device using the same, coating device, and optical film manufacturing method |
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2012
- 2012-04-23 TW TW101114333A patent/TWI508790B/en not_active IP Right Cessation
- 2012-06-08 KR KR1020120061535A patent/KR101432361B1/en not_active IP Right Cessation
- 2012-06-13 CN CN201210194033.5A patent/CN102950087B/en not_active Expired - Fee Related
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| JPH08303679A (en) * | 1995-05-09 | 1996-11-22 | Mitsubishi Heavy Ind Ltd | Piping vibration damping coupling |
| JP2004188807A (en) * | 2002-12-11 | 2004-07-08 | Seiko Epson Corp | Device and method for cleaning liquid drop discharging head, liquid drop discharging device, electrooptic device, its manufacturing method and electronic equipment |
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| CN106179871A (en) * | 2014-09-26 | 2016-12-07 | 斯克林集团公司 | Apparatus for coating and cleaning method |
| CN106179871B (en) * | 2014-09-26 | 2019-04-09 | 斯克林集团公司 | Apparatus for coating and cleaning method |
| CN107051767A (en) * | 2016-12-01 | 2017-08-18 | 无锡溥汇机械科技有限公司 | A kind of lithium battery isolation membrane flush coater stock system |
| CN110603103A (en) * | 2017-05-12 | 2019-12-20 | Abb瑞士股份有限公司 | Coating device for coating a component with a coating agent |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101432361B1 (en) | 2014-08-20 |
| TW201309395A (en) | 2013-03-01 |
| KR20130023055A (en) | 2013-03-07 |
| JP2013043137A (en) | 2013-03-04 |
| TWI508790B (en) | 2015-11-21 |
| JP5798411B2 (en) | 2015-10-21 |
| CN102950087B (en) | 2015-06-17 |
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