CN102944808B - Mass production co-testing method - Google Patents

Mass production co-testing method Download PDF

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Publication number
CN102944808B
CN102944808B CN201210507580.4A CN201210507580A CN102944808B CN 102944808 B CN102944808 B CN 102944808B CN 201210507580 A CN201210507580 A CN 201210507580A CN 102944808 B CN102944808 B CN 102944808B
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diode
test
volume production
test method
output voltage
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CN201210507580.4A
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CN102944808A (en
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王磊
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Shanghai Huahong Grace Semiconductor Manufacturing Corp
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Shanghai Huahong Grace Semiconductor Manufacturing Corp
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Abstract

The invention discloses a mass production co-testing method which comprises the following steps of: testing a simulation output voltage signal by using an electric bridge and a window comparator, wherein the electric bridge is used for measuring digital signals, the current is pulled and filled by using the electric bridge, and the window comparator is used for acquiring a test result, so that the condition that whether the mass production passes the test is judged according to the test result of the window comparator. The invention provides the mass production co-testing method for realizing the rapid mass production test of simulation output voltage signals by simply using the electric bridge (used for measuring digital signals) and the window comparator; and moreover, under the condition that the simulation output voltage signal test with a load is carried out, by utilizing the mass production co-testing method, the simulation output voltage signal test with the load is rapidly realized under the condition that no precise measuring unit needs to be configured for each pin, and the mass production co-testing method can be implemented and can be used for carrying out the test under the condition of multi-point test, and therefore, a great deal of testing time is saved.

Description

Volume production simultaneous test method
Technical field
The present invention relates to field tests, it is more particularly related to a kind of efficient volume production simultaneous test method.
Background technology
In circuit design with manufacture process, need to test wafer, nude film or circuit in a large number.It is raw in high-volume In the case of electricity production road, need to carry out volume production test.
Specifically, the analog output voltage signal to be tested under bringing onto load for example can be run in circuit test (for example The output of stabilivolt) or need to carry out the situation of open-short circuit (OPEN/SHORT is tested, O/S tests).Wherein, open short circuit Whether test is exactly test open circuit and short circuit, be exactly specifically to test where an electronic device should connect to connect, such as It is exactly to open a way that fruit does not connect, if it is exactly short circuit that should not be connected to where connecting.Field is manufactured in wafer, short circuit is opened Test can be used to test pad (PAD) on probe and wafer whether good contact.
Typically, in order to carry out the analog output voltage signal testing under parallel bringing onto load, need for each pin configuration One precision measurement unit, but, one precision measurement unit of each pin configuration needs to spend higher cost, and general Test device will not carry out the configuration of such costliness.If tester is not one precision measurement unit of each pin configuration, The analog output voltage signal testing under parallel bringing onto load cannot then be carried out;Like this, successively each pin can only be entered Analog output voltage signal testing under row bringing onto load;Thus, test is needed when there are a large amount of nude films (die), will expend a large amount of Time.
For above-mentioned situation and it is similar with above-mentioned situation in the case of, then cannot realize that quick volume production is surveyed in a simple manner decoupled Examination.
Accordingly, it is desirable to be able to provide a kind of technical scheme for realizing quick volume production test in a simple manner decoupled.For example, it is desirable to energy A kind of simulation realized in the case where being one precision measurement unit of each pin configuration under quick bringing onto load is enough provided The technical scheme of output voltage signal test.
The content of the invention
The technical problem to be solved is for there is drawbacks described above in prior art, there is provided one kind can with Plain mode realizes the volume production simultaneous test method of the quick volume production test of analog output voltage signal.
In order to realize above-mentioned technical purpose, according to the present invention, there is provided a kind of volume production simultaneous test method, which includes:Volume production is same Survey method, which includes:Carry out test simulation output voltage signal using the electric bridge and window comparator for measuring digital signal; Sink current is drawn wherein using electric bridge, is used to obtain test result using window comparator, such that it is able to according to window comparator Test result judge whether by test;Wherein, electric bridge include the first diode, the second diode, the 3rd diode and 4th diode, wherein, the input of the first diode and the second diode is connected, the 3rd diode and the 4th diode it is defeated Go out end to be connected, the first diode is connected to the input of the 4th diode, and the outfan of the second diode is connected to the three or two pole The input of pipe;Wherein, the junction point between the first diode and the second diode is connected to the first sink current, the second diode Device under test is connected to the junction point between the 3rd diode;Junction point connection between 3rd diode and the 4th diode To the second sink current;Junction point between 4th diode and the first diode is connected to reference voltage.
Preferably, the numerical value of the numerical value and second reference voltage of first reference voltage is determined according to test.
Preferably, according to test determine according to test determine the size of the reference voltage, first sink current it is big It is little, and second sink current size.
Preferably, the analog output voltage signal under the volume production simultaneous test method is used for open-short circuit or bringing onto load.
Preferably, the volume production simultaneous test method is used to load the voltage tester for driving.
Preferably, the volume production simultaneous test method is used for the load driving force test of stabilivolt.
Preferably, when the potential of the connection end of device under test is less than the second reference voltage, test result represents test crash; When the potential of the connection end of device under test is more than the first reference voltage, test result represents test crash;When the company of device under test The potential at end is connect not less than the second reference voltage and during no more than the first reference voltage, test result test passes through.
The invention provides a kind of can come real with the electric bridge and window comparator that are simply to measure digital signal The volume production simultaneous test method of the quick volume production test of existing analog output voltage signal.And, the analog output voltage under bringing onto load In the case of signal testing, volume production simultaneous test method of the invention need not be one precision measurement unit of each pin configuration In the case of realize under quick bringing onto load analog output voltage signal testing, can perform in the case of multi-point sampler parallel Test, thereby saving the substantial amounts of testing time.
Description of the drawings
With reference to accompanying drawing, and by reference to detailed description below, it will more easily have more complete understanding to the present invention And its adjoint advantages and features is more easily understood, wherein:
Fig. 1 schematically shows volume production simultaneous test method according to embodiments of the present invention.
Fig. 2 schematically shows the tool that the test result of volume production simultaneous test method according to embodiments of the present invention judges Body example.
It should be noted that accompanying drawing is used to illustrate the present invention, and the unrestricted present invention.It is in accompanying drawing, same or like Element indicates same or like label.
Specific embodiment
In order that present disclosure is more clear and understandable, with reference to specific embodiments and the drawings in the present invention Appearance is described in detail.
Although precision measurement unit can accurately measure analog output voltage signal explicit value, in many situations Under (such as in the case of the output measurement of stabilivolt), without the need for the exact value of measure analog output voltage signal, and only need survey Whether amount analog output voltage signal is processed in qualified scope.Thus, the present inventor is proposed by prior art Simple structure for measuring the electric bridge and window comparator of digital signal realizing the fast rate of analog output voltage signal Produce test.
Specifically, Fig. 1 schematically shows volume production simultaneous test method according to embodiments of the present invention.
Specifically, for example, the volume production simultaneous test method according to embodiments of the present invention shown in Fig. 1 can be used for test probe with The connection between pad on wafer.
But, the analog output voltage signal testing under open-short circuit or bringing onto load is all an example, Volume production simultaneous test method according to embodiments of the present invention shown in Fig. 1 is actually available for various efficient volume production tests, for example, lead to The voltage tester for needing load to drive, load driving force test of such as stabilivolt etc. are can be additionally used in often.
More specifically, as shown in figure 1, volume production simultaneous test method according to embodiments of the present invention includes:Using for measuring The electric bridge and window comparator of digital signal carrys out test simulation output voltage signal;Sink current is drawn wherein using electric bridge, is made It is used to obtain test result with window comparator, such that it is able to be judged whether by surveying according to the test result of window comparator Examination.
Wherein, electric bridge includes the first diode D1, the second diode D2, the 3rd diode D3 and the 4th diode D4. Wherein, the input of the first diode D1 and the second diode D2 is connected, the output of the 3rd diode D3 and the 4th diode D4 End is connected, and the first diode D1 is connected to the input of the 4th diode D4, and the outfan of the second diode D2 is connected to the 3rd The input of diode D3.
Wherein, the junction point between the first diode D1 and the second diode D2 is connected to the first sink current IOL, and the two or two Junction point between pole pipe D2 and the 3rd diode D3 is connected to device under test DUT1;3rd diode D3 and the 4th diode D4 Between junction point be connected to the second sink current IOH;Junction point between 4th diode D4 and the first diode D1 is connected to Reference voltage V REF.
Thus, the output electricity of device under test DUT1 is can control by controlling the first sink current IOL and the second sink current IOH The size of stream or input current.More specifically, wherein, when reference voltage V REF less than device under test DUT1 output voltage When, the outside output currents of device under test DUT1;When output voltage of reference voltage V REF more than device under test DUT1, electric current stream To device under test DUT1.
Wherein, the big rootlet of the size of reference voltage V REF, the size of the first sink current IOL and the second sink current IOH Depending on test case.For example, in the case of shown in Fig. 1, the size of the first sink current IOL and the second sink current IOH Size causes device under test DUT1 that the electric current of -100uA is input into the second diode D2.
Window comparator includes first comparator M1 and the second comparator M2.Wherein, the anti-phase input of first comparator M1 The positive input of end and the second comparator M2 is connected to device under test DUT1;The positive input connection of first comparator M1 To the first reference voltage VOH, the inverting input of the second comparator M2 is connected to the second reference voltage VOL, and wherein first Reference voltage VOH is more than the second reference voltage VOL.
Wherein, the concrete numerical value of the concrete numerical value of the first reference voltage VOH and the second reference voltage VOL is according to test feelings Depending on condition.For example, if it is considered to output voltage values then judge before the 1.6V to 1.9V analog output voltage signal be it is qualified, Then the first reference voltage VOH can be set to 1.9V, the second reference voltage VOL is set to into 1.6V.
Thus, window comparator obtains test result according to the output result of first comparator M1 and the second comparator M2 VoutComp。
Fig. 2 schematically shows the tool that the test result of volume production simultaneous test method according to embodiments of the present invention judges Body example.
As shown in Fig. 2 in this example, when the potential of the connection end of device under test DUT1 is less than the second reference voltage VOL, Test result VoutComp for (1,0), represent test crash F1;And, when the potential of the connection end of device under test DUT1 is more than First reference voltage VOH, test result VoutComp for (0,1), represent test crash F2;Only when the company of device under test DUT1 The potential at end is connect not less than the second reference voltage VOL and during no more than the first reference voltage VOH, test result VoutComp is (1,1), thus represent test by P.
Thus, embodiments provide it is a kind of can be simply to measure digital signal electric bridge and window Comparator is realizing the volume production simultaneous test method of the quick volume production test of analog output voltage signal.
And, in the case of the analog output voltage signal testing under bringing onto load, volume production according to embodiments of the present invention In the case where being one precision measurement unit of each pin configuration, simultaneous test method realizes that the simulation under quick bringing onto load is defeated Go out voltage signal test, concurrent testing can be performed in the case of multi-point sampler, the substantial amounts of testing time is thereby saving.
Furthermore, it is necessary to explanation, unless stated otherwise or points out, term " first " otherwise in description, " the Two ", description such as " 3rd " is used only for each component in differentiation description, element, step etc., rather than for representing each Logical relation or ordering relation between component, element, step etc..
Although it is understood that the present invention is disclosed as above with preferred embodiment, but above-described embodiment being not used to Limit the present invention.For any those of ordinary skill in the art, under without departing from technical solution of the present invention ambit, Many possible variations and modification are made to technical solution of the present invention using the technology contents of the disclosure above all, or is revised as With the Equivalent embodiments of change.Therefore, every content without departing from technical solution of the present invention, according to the technical spirit pair of the present invention Any simple modification made for any of the above embodiments, equivalent variations and modification, still fall within the scope of technical solution of the present invention protection It is interior.

Claims (5)

1. a kind of volume production simultaneous test method, it is characterised in that include:
Carry out test simulation output voltage signal using the electric bridge and window comparator for measuring digital signal;Wherein using electricity Bridge is used to obtain test result using window comparator, such that it is able to the test result according to window comparator drawing sink current Judge whether by test;
Wherein, electric bridge includes the first diode, the second diode, the 3rd diode and the 4th diode, wherein, the one or two Pole pipe is connected with the input of the second diode, and the outfan of the 3rd diode and the 4th diode is connected, and the first diode connects The input of the 4th diode is connected to, the outfan of the second diode is connected to the input of the 3rd diode;
Wherein, the junction point between the first diode and the second diode is connected to the first sink current, the second diode and the 3rd Junction point between diode is connected to device under test;Junction point between 3rd diode and the 4th diode is connected to second Sink current;Junction point between 4th diode and the first diode is connected to reference voltage.
2. volume production simultaneous test method according to claim 1, it is characterised in that the big of the reference voltage is determined according to test The size of the size and second sink current of little, described first sink current.
3. the volume production simultaneous test method according to one of claim 1 to 2, it is characterised in that the volume production simultaneous test method is used for Analog output voltage signal under open-short circuit or bringing onto load.
4. the volume production simultaneous test method according to one of claim 1 to 2, it is characterised in that the volume production simultaneous test method is used for The voltage tester that load drives.
5. the volume production simultaneous test method according to one of claim 1 to 2, it is characterised in that the volume production simultaneous test method is used for The load driving force test of stabilivolt.
CN201210507580.4A 2012-11-30 2012-11-30 Mass production co-testing method Active CN102944808B (en)

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Cited By (1)

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CN107479432A (en) * 2017-07-11 2017-12-15 北京海光仪器有限公司 Multielement is combined with survey and merges measuring system

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CN108169658A (en) * 2017-12-14 2018-06-15 上海华虹宏力半导体制造有限公司 The output current test circuit and test method of device blocks

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CN1632605A (en) * 2003-12-22 2005-06-29 威宇科技测试封装有限公司 Chip pin open circuit and short circuit tester and method therefor
CN101145780A (en) * 2007-06-01 2008-03-19 中兴通讯股份有限公司 A method and device for testing D/A conversion function of D/A conversion chip
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CN102116792A (en) * 2009-12-31 2011-07-06 国民技术股份有限公司 System and method for testing chip voltage signal

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Publication number Priority date Publication date Assignee Title
CN1632605A (en) * 2003-12-22 2005-06-29 威宇科技测试封装有限公司 Chip pin open circuit and short circuit tester and method therefor
CN101145780A (en) * 2007-06-01 2008-03-19 中兴通讯股份有限公司 A method and device for testing D/A conversion function of D/A conversion chip
CN102116792A (en) * 2009-12-31 2011-07-06 国民技术股份有限公司 System and method for testing chip voltage signal
CN201812005U (en) * 2010-09-11 2011-04-27 中国北车股份有限公司大连电力牵引研发中心 Performance test box and performance test system for analogue input/output (AI/O) module

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Publication number Priority date Publication date Assignee Title
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