CN102944519B - Optical system and method for measuring thermal physical property parameters of solid - Google Patents
Optical system and method for measuring thermal physical property parameters of solid Download PDFInfo
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Abstract
The invention provides an optical system and a method for measuring thermal physical property parameters of a solid. The optical system comprises a heating laser production assembly, a detection laser production assembly, a beam combining element, a beam split element, a heating laser receiving assembly, a sample test assembly and a detection laser receiving assembly. The method uses a signal modulating photo-thermal reflection method and belongs to a frequency domain method, and compared with time domain methods of ultrashort pulse laser pumping detection methods and the like, the method has the advantages that mechanical moving components are absent, the measuring system is relatively simple, and light path adjustment is more convenient.
Description
Technical field
The present invention relates to the photothermal reflectance measuring technique of utilizing periodic modulation heating and continuous laser to survey, relate in particular to a kind of optical system and method for measuring solid thermal physical parameter.
Background technology
Membraneous material applies to the fields such as microelectronics, photoelectron, micro-manufacture widely, and these slightly/nano parts will produce high heat flow density in the time of work, and hot stack will directly have influence on work efficiency and the reliability of such devices.Solve above-mentioned micro-/nano parts heat dissipation problem is very urgent, this need to form above-mentioned micro-/the membraneous material thermophysical property of nano parts, especially thermal conductivity, interface resistance etc. accurately characterize, to disclose its thermotransport mechanism.3 ω methods are conventional membraneous material thermophysical property measurement method, but its need to be on testing sample weld metal thin slice/silk, belong to and damage detection technique.
Super short pulse laser pumping probe method is a kind of novel solid thermal physical parameter measuring method.Fig. 1 is the light path schematic diagram that prior art is measured the optical system of solid thermal physical parameter.As shown in Figure 1, this optical system comprises: laser instrument 1 is exported pulse laser; The first wave plate 2 (1/2nd wave plates) makes laser polarization direction rotation; Laser beam is divided into mutually perpendicular two bundles in polarization direction by the first light-splitting device 3; Electrooptic modulator 4 is to laser beam modulation; Electrooptic modulator driver 5 sends modulation signal for electrooptic modulator 4; The first catoptron 6 receives and reflection lasering beam; Laser beam, by the first condenser lens 7, frequency-doubling crystal 8 and the second condenser lens 9, produces second harmonic; The first optical filter 10 filtering incoherent lights; Beam expander 11 expands lasing beam diameter; The second catoptron 12 receives and reflection lasering beam; Electric control displacement platform 14 moves forward and backward; After laser beam is reflected by directional light catoptron 13, by the second wave plate 15 (1/2nd wave plates), laser polarization direction rotates; Laser beam is divided into mutually perpendicular two bundles in polarization direction by the second light-splitting device 16; Laser beam sees through the 3rd wave plate 17 (quarter-wave plate) vertical incidence sample surfaces, and Bing Yuan returns on road and again passes through the 3rd wave plate 17, realizes polarization direction 90 degree and changes; The laser beam of different wave length is closed bundle by cold mirror 18; Condenser lens 19 is the sample surfaces on fixed adjustment frame 20 by laser irradiation; Electro-optical detector 23 receives the laser beam that sees through the second optical filter 21 and the 3rd condenser lens 22; The signal of electro-optical detector 23 is transported to filter amplifier 24.Pumping light and detection light use the femtosecond pulse of different wave length, be combined into beam of laser by cold mirror, before arriving detector, pumping light and detection light uses the pumping light having after the high optical filter filtering frequency multiplication of selecting permeability, thereby avoid the interference of pumping light to signal, realize the measurement of precise and high efficiency; Utilize the effectively impact of filtering high-frequency harmonic of filter amplifier, the accuracy that effectively improves signal.
The different displacement of electric control displacement platform is corresponding survey light and and pumping light between different time delay, the modulation signal comparison that filter amplifier output signal and electrooptic modulator driver provide, obtain phase signal, the phase signal under different time delay is the measurement data of experiment gained.
But for the light path system of the measurement solid thermal physical parameter shown in Fig. 1, its electric control displacement platform belongs to mechanical moving element, precisely control more difficult; And times frequency module being made up of the first condenser lens, frequency-doubling crystal and the second condenser lens, the efficiency of conllinear focusing difficulty, frequency multiplication is not high.
Summary of the invention
(1) technical matters that will solve
For solving above-mentioned one or more problems, the invention provides a kind of optical system and the method for accurate control, measurement solid thermal physical parameter easy to adjust.
(2) technical scheme
According to an aspect of the present invention, provide a kind of optical system of measuring solid thermal physical parameter.This system comprises: add thermal laser generation component, exploring laser light generation component, close bundle element, beam splitter, heating laser pick-off assembly, sample test assembly and exploring laser light receiving unit; Wherein, by the thermal laser that adds that adds the warbled continuous polarization of thermal laser generation component generation, produced the exploring laser light of continuous polarization by exploring laser light generation component; This adds thermal laser and exploring laser light closes bundle for being positioned at the Shu Jiguang that closes of A plane after closing bundle element; This closes Shu Jiguang incident beam splitter, and polarization direction is transmitted through sample test assembly at the composition of A plane, and polarization direction reflexes to heating laser pick-off assembly perpendicular to the composition of this surface level; Polarization direction A plane close bundle light component via sample test assembly after, expose to tested sample surface; Heat sample in the thermal laser that adds of closing in bundle light component of A plane polarization direction, and the sample after heating produces modulating action to exploring laser light; By tested sample surface reflection add thermal laser and modulation after exploring laser light close Shu Jiguang again via reflexing to exploring laser light receiving unit by beam splitter after sample test assembly; Adding after the filtering of thermal laser composition in Shu Jiguang, is closed in incident by exploring laser light receiving unit, obtains the signal of exploring laser light; Heating laser pick-off assembly closes incident after the exploring laser light composition filtering in Shu Jiguang, obtains adding the signal of thermal laser.
According to a further aspect in the invention, a kind of method of utilizing above-mentioned optical system measuring solid thermal physical parameter is also provided, comprise: steps A, utilize optical system to obtain under different heating Laser Modulation frequencies, produce exploring laser light signal and produce by heating laser pick-off assembly the signal that adds thermal laser by exploring laser light receiving unit, in this exploring laser light signal and heating laser signal, all comprise power information and phase information; Step B, under different heating Laser Modulation frequencies, exploring laser light signal and heating laser signal carry out phase differential processing, obtain phase differential experiment value; Step C, composes initial value to the solid thermal physical parameter for the treatment of matching; Step D, under different heating Laser Modulation frequencies, according to theoretical model formula, the phase differential theoretical value under calculating and phase differential experiment value respective frequencies; Step e, carries out least-squares calculation to the phase differential experiment value under whole heating Laser Modulation frequencies and corresponding phase differential theoretical value, and its least-squares calculation numerical value is as working as time iteration result; Step F, records heat conductivity value corresponding to current iteration result, interface thermal conductance value; Step G, judges whether the result of this iteration is less than the result of previous iteration, if so, and execution step H, otherwise, execution step I; Step H, detects output data, execution step J using solid thermal physical parameter value corresponding this iteration result as changing; Step I, detects output data, execution step J using solid thermal physical parameter value corresponding previous iteration result as changing; Step J, judges whether that the iteration result of continuous 3 times is less than control accuracy, if so, and execution step K, otherwise, execution step L; Step K, stops iteration, and the solid thermal physical parameter value being obtained by step H or step I is exported, and flow process finishes; Step L, increases according to default step-length the solid thermal physical parameter value being obtained by step H or step I or reduce, and determines that its numerical value changes path, execution step D by the majorized function of presetting.
(3) beneficial effect
Can find out from technique scheme, optical system and method that the present invention measures solid thermal physical parameter have following beneficial effect: the photothermal reflectance method that adopts signal modulation, belong to frequency domain method, compare with time domain approachs such as super short pulse laser pumping probe methods, there is no mechanical moving element, measuring system is relatively simple, optical path adjusting is more convenient.
Brief description of the drawings
Fig. 1 is the light path schematic diagram that prior art is measured the optical system of solid thermal physical parameter;
Fig. 2 is according to the light path schematic diagram of the measurement solid thermal physical parameter optical system of the embodiment of the present invention;
Fig. 3 is according to the process flow diagram of the measurement solid thermal physical parameter method of the embodiment of the present invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
It should be noted that, in accompanying drawing or instructions description, similar or identical part is all used identical figure number.The implementation that does not illustrate in accompanying drawing or describe is form known to a person of ordinary skill in the art in affiliated technical field.In addition, although the demonstration of the parameter that comprises particular value can be provided herein, should be appreciated that, parameter is without definitely equaling corresponding value, but can in acceptable error margin or design constraint, be similar to corresponding value.In addition, the direction term of mentioning in following examples, for example " on ", D score, 'fornt', 'back', " left side ", " right side " etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is to be not used for limiting the present invention for illustrating.
For Fig. 1, it is the accompanying drawing that prior art is measured solid thermal physical property optical system, and in its figure, the figure number of institute's mark is only for reference, does not include the present invention in and uses.The present invention is understood for convenience of those skilled in the art, first main element involved in the present invention is numbered to explanation, specific as follows shown in:
10-heats laser module; 20-exploring laser light assembly;
30-closes bundle element; 40-beam splitter;
50-heating laser pick-off assembly; 60-sample test assembly;
70-sample retaining element; 80-exploring laser light receiving unit;
11-signal modulator; 12-the first laser instrument;
13-the first wave plate; 14-the first catoptron;
21-second laser; 22-the second wave plate;
23-the second catoptron; 51-the first optical filter;
52-the first photodetector; 61-the 3rd wave plate;
62-object lens; 81-condenser lens;
82-the second optical filter; 83-the second photodetector.
In one exemplary embodiment of the present invention, provide a kind of optical system of measuring solid thermal physical parameter.As shown in Figure 2, this system comprises: add thermal laser generation component 10, exploring laser light generation component 20, close and restraint element 30, beam splitter 40, heating laser pick-off assembly 50, sample test assembly 60, sample retaining element 70, exploring laser light receiving unit 80 and data handling component (not shown).By the thermal laser that adds that adds thermal laser generation component 10 and produce warbled continuous polarization, produced the exploring laser light of continuous polarization by exploring laser light generation component 20; This adds thermal laser and exploring laser light closes bundle for being positioned at the Shu Jiguang that closes of surface level after closing bundle element 30; This closes Shu Jiguang incident beam splitter 40, and polarization direction is transmitted through sample test assembly 60 at the composition of this surface level, and polarization direction reflexes to heating laser pick-off assembly 50 perpendicular to the composition of this surface level; Polarization direction this surface level close bundle light component via sample test assembly 60 after, expose to the tested sample surface on sample retaining element 70, add thermal laser sample heated, the sample after heating produces modulating action to exploring laser light; By the tested sample surface reflection on sample retaining element 70 add thermal laser and modulation after exploring laser light close Shu Jiguang again via reflexing to exploring laser light receiving unit 80 by beam splitter 40 after sample test assembly 60; Exploring laser light receiving unit 80, by the adding after the filtering of thermal laser composition in thermal laser and exploring laser light that add of incident, obtains the signal of exploring laser light; Heating laser pick-off assembly 50 adds after the exploring laser light composition filtering in thermal laser and exploring laser light incident, obtains adding the signal of thermal laser; Data handling component is produced exploring laser light signal and is produced by heating laser pick-off assembly 80 signal that adds thermal laser by the modulating frequency, the exploring laser light receiving unit 50 that add thermal laser, is back-calculated to obtain the thermal physical property parameter of tested sample according to theoretical model.
Below respectively each components/elements is elaborated.
Add thermal laser generation component 10
Add the add thermal laser of thermal laser generation component 10 for generation of the continuous polarization through signal modulation.As shown in Figure 1, this adds thermal laser generation component and comprises: signal modulator 11, it can be digital signal generator, be used for modulating the first laser instrument, its modulating frequency is by outer computer control, modulation frequency range is determined jointly by signal modulator 11 and data handling component, can be that 50kHz is to 20MHz; The first laser instrument 12, is semiconductor laser, under the modulation in signal modulator 11, and the continuous polarization laser that output wavelength is 830nm, its power is 170mW; The first wave plate 13, is 1/2nd wave plates, for the horizontal polarization composition of continuous polarization laser and the ratio of vertical polarization composition that regulate the first laser instrument 12 to export; The first laser mirror 14, its reflectivity is greater than 99%, its reflecting surface with see through the first wave plate 13 add thermal laser angle at 45 °, for by the adding after 90 ° of laser deflections of incident, close bundle element 30 with 45° angle incident.
Exploring laser light generation component 20
Exploring laser light generation component 20 is for generation of the exploring laser light of continuous polarization, and the wavelength of this exploring laser light is different from the wavelength that adds thermal laser, and power is much smaller than heating laser power.As shown in Figure 1, this adds thermal laser generation component 20 and comprises: second laser 21 is semiconductor laser, the exploring laser light that is 635nm for output wavelength, its power 6mW; The second wave plate 22, is 1/2nd wave plates, for the horizontal polarization composition of continuous polarization laser and the ratio of vertical polarization composition that regulate second laser 21 to export; The second laser mirror 23, its reflectivity is greater than 99%, and its reflecting surface and the exploring laser light angle at 45 ° that sees through the second wave plate 22, for by after 90 ° of the exploring laser light deflections of incident, close bundle element 30 with 45° angle incident.
Close bundle element 30
Closing bundle element 30 is cold mirror, for the 830nm wavelength of its place plane angle at 45 ° incident add thermal laser total transmissivity; For with the exploring laser light total reflection of the 635nm wavelength of its place plane angle at 45 ° incident, thereby make to add thermal laser and exploring laser light closes bundle, realize conllinear and add hot-probing.
Beam splitter 40
Beam splitter 40 is Amici prism.By this Amici prism, close adding in thermal laser and exploring laser light after bundle, polarization direction is transmitted through sample test assembly at the composition of this surface level, and polarization direction reflexes to heating laser pick-off assembly perpendicular to the composition of this surface level; Reflected by sample surfaces add thermal laser and exploring laser light reflexes to exploring laser light receiving unit.
Heating laser pick-off assembly 50
Heating laser pick-off assembly 50, for by after the exploring laser light composition filtering that adds thermal laser and exploring laser light of incident, obtains adding the signal of thermal laser.This heating laser pick-off assembly 50 comprises: the first optical filter 51 and the first photodetector 52.Wherein:
The first optical filter 51, closes the exploring laser light composition of Shu Jiguang for filtering incident, its transmitance for the exploring laser light of 635nm wavelength is 10
-7to 10
-9.
The first photodetector 52, for detection of closing the signal that adds thermal laser in Shu Jiguang, it can be high speed PIN diode, avalanche diode, photomultiplier, or charge-coupled image sensor, the response time is less than 10ns.Wherein, in this signal, can comprise: the information such as power (amplitude), phase place.
Sample test assembly 60
Through beam splitter 40 transmissions add thermal laser and exploring laser light close Shu Jiguang after sample test assembly 60 with sample retaining element on tested sample surface action, reflected by sample surfaces add thermal laser and exploring laser light via sample test assembly 60 back into being incident upon beam splitter 40.
This sample test assembly 60 comprises: quarter-wave plate 61 and object lens 62.Wherein object lens 62 adopt achromatic objective, 100 times of enlargement factors, and focal length is 2mm.Incident close twice of Shu Jiguang after quarter-wave plate 61,90 ° of its change of polarized direction.
Sample retaining element 70
Sample retaining element 70 is fixed adjustment frame, for adjusting and fix the orientation of tested sample, guarantees to close the bundle tested sample of laser vertical incident surface, and the former road of Shu Jiguang of closing of reflection is returned, and is incident to sample test assembly 60.
Add thermal laser sample is heated, the sample after heating produces modulating action to exploring laser light; By the tested sample surface reflection on sample retaining element 70 add thermal laser and modulation after exploring laser light close Shu Jiguang again via reflexing to exploring laser light receiving unit 80 by beam splitter 40 after sample test assembly 60.
Exploring laser light receiving unit 80
Exploring laser light receiving unit 80, for by incident add the adding after the filtering of thermal laser composition of thermal laser and exploring laser light, obtain the signal of exploring laser light.This exploring laser light receiving unit 80 comprises: condenser lens 81, the second optical filter 82 and the second photodetector 83.Wherein:
Condenser lens 81, for focusing on the Shu Jiguang that closes of incident.Difference as requested, the focal length of this condenser lens 81 can be for 10mm be to 300mm.
The second optical filter 82, after focusing on for filtering close Shu Jiguang add thermal laser composition, its transmitance that adds thermal laser for 830nm wavelength is 10
-7to 10
-9.
The second photodetector 83, for detection of the signal that closes exploring laser light in Shu Jiguang, it can be high speed PIN diode, avalanche diode, photomultiplier, or charge-coupled image sensor, the response time is less than 10ns.Wherein, in this signal, can comprise: the information such as power (amplitude), phase place.
The signal that utilizes above-mentioned heating laser pick-off assembly and exploring laser light receiving unit to obtain, can calculate and obtain solid thermal physical parameter.Compare with the time domain approach such as super short pulse laser pumping probe method, the optical system that the present invention measures solid thermal physical parameter does not have mechanical moving element, and measuring system is relatively simple, optical path adjusting is more convenient.
Based on above-mentioned optical system, the present invention also provides a kind of method of measuring solid thermal physical parameter, the method is according under different signal modulator angular frequencies, produce exploring laser light signal and produced the phase differential of the signal that adds thermal laser by heating laser pick-off assembly by exploring laser light receiving unit, matching obtains the thermal physical property parameter of tested sample, comprises the interface thermal conductance of thermal conductivity, storeroom etc.
In one exemplary embodiment of the present invention, as shown in Figure 3, the method comprises:
Steps A, utilize above-mentioned optical system, obtain under different heating Laser Modulation frequencies and produce exploring laser light signal and produce by heating laser pick-off assembly the signal that adds thermal laser by exploring laser light receiving unit, in this exploring laser light signal and heating laser signal, all comprise power information and phase information;
Step B, under different heating Laser Modulation frequencies, carries out phase differential processing to exploring laser light signal and heating laser signal, obtains phase differential experiment value;
Step C, gives thermal conductivity, the interface thermal conductance tax initial value for the treatment of matching;
Step D, under different heating Laser Modulation frequencies, according to theoretical model formula, the phase differential theoretical value under calculating and phase differential experiment value respective frequencies;
Wherein, Q
0, Q
1be respectively the power that adds thermal laser and exploring laser light, γ is the luminous reflectivity on tested sample surface, and l is integration variable, R
0, R
1be respectively the waist radius while adding thermal laser and exploring laser light generation, the angular frequency that ω is modulation signal; φ be the exploring laser light that receives of exploring laser light receiving unit and heating laser pick-off assembly receive add the phase differential theoretical value between thermal laser.C, D are 2 × 2 material thermal physical property parameter matrix
Corresponding parameter:
If certain layer,
If interface,
Wherein,
ρ, c, k, d are respectively density, quality thermal capacitance, thermal conductivity, the thickness of certain layer, and G is interface thermal conductance, and i is imaginary unit, and j is the number of plies of counting from swashing light incident side.
In addition,, about the concrete meaning of above-mentioned material thermal physical property parameter, refer to list of references 1[J.Zhuet al.J.Appl.Phys.108,094315 (2010))].
Step e, carries out least-squares calculation to the phase differential experiment value under whole heating Laser Modulation frequencies and corresponding phase differential theoretical value, and its least-squares calculation numerical value is as working as time iteration result;
Step F, records heat conductivity value corresponding to current iteration result, interface thermal conductance value, is and works as suboptimal data;
Step G, judges whether the result of this iteration is less than the result of previous iteration, if so, and execution step H, otherwise, execution step I;
Step H, detects output data, execution step J using heat conductivity value corresponding this iteration result, interface thermal conductance value as changing;
Step I, detects output data, execution step J using heat conductivity value corresponding previous iteration result, interface thermal conductance value as changing;
Step J, judges whether that the iteration result of continuous 3 times is less than control accuracy (as 10
-6), if so, execution step K, otherwise, execution step L;
Step K, stops iteration, and the heat conductivity value, the interface thermal conductance value that are obtained by step H or step I are exported, and flow process finishes;
Step L, increases the heat conductivity value being obtained by step H or step I, interface thermal conductance value or reduce according to default step-length, determines that its numerical value changes path, execution step D by the majorized function of presetting.
In this step, default step-length can be the 0.5-5% of current heat conductivity value, interface thermal conductance value; Majorized function can be lsqcurvefit function, fminsearch function or other functions well known in the art.
It should be noted that, the method for the two-parameter matching of above employing has obtained heat conductivity value and interface thermal conductance value simultaneously, certainly, also can determine under above-mentioned one of them prerequisite that is definite value, is obtained another concrete numerical value by the mode of one-parameter matching.According to description above, those skilled in the art are easy to expect relevant computing method, no longer repeat herein.
It should be noted that, the above-mentioned definition to each element is not limited in various concrete structures or the shape in embodiment, mentioned, and those of ordinary skill in the art can know simply and replace it, for example:
(1) add all right other angle incident laser catoptrons of thermal laser or exploring laser light;
(2) light path of system can be at surface level, and in embodiment, selection level face is just for the ease of regulating;
(3) condenser lens just plays convection light and is incident to the effect of photodetector photosensitive region, and in heating laser pick-off assembly, increasing or removing condenser lens does not affect measurement result;
(4) first and second photodetectors can be high speed PIN diode, avalanche diode, photomultiplier, or charge-coupled image sensor.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (14)
1. an optical system of measuring solid thermal physical parameter, is characterized in that, comprising: add thermal laser generation component, exploring laser light generation component, close bundle element, beam splitter, heating laser pick-off assembly, sample test assembly and exploring laser light receiving unit; Wherein,
By the thermal laser that adds that adds the warbled continuous polarization of thermal laser generation component generation, produced the exploring laser light of continuous polarization by exploring laser light generation component; This adds thermal laser and exploring laser light closes bundle for being positioned at the Shu Jiguang that closes of A plane after closing bundle element;
This closes Shu Jiguang incident beam splitter, and polarization direction is transmitted through sample test assembly at the composition of A plane, and polarization direction reflexes to heating laser pick-off assembly perpendicular to the composition of this A plane; Polarization direction A plane close bundle light component via sample test assembly after, expose to tested sample surface;
Heat sample in the thermal laser that adds of closing in bundle light component of A plane polarization direction, and the sample after heating produces modulating action to exploring laser light; By tested sample surface reflection add thermal laser and modulation after exploring laser light close Shu Jiguang again via reflexing to exploring laser light receiving unit by beam splitter after sample test assembly;
Adding after the filtering of thermal laser composition in Shu Jiguang, is closed in incident by exploring laser light receiving unit, obtains the signal of exploring laser light; Heating laser pick-off assembly closes incident after the exploring laser light composition filtering in Shu Jiguang, obtains adding the signal of thermal laser.
2. optical system according to claim 1, is characterized in that, described in close bundle element be cold mirror;
Described cold mirror for its place plane angle at 45 ° incident add thermal laser total transmissivity; For with the total reflection of its place plane angle incident at 45 ° exploring laser light, add thermal laser and exploring laser light and close bundle for being positioned at the Shu Jiguang that closes of A plane thereby realize.
3. optical system according to claim 2, is characterized in that, described in add thermal laser generation component and comprise:
Signal modulator;
The first laser instrument, is semiconductor laser, under the modulation of signal modulator, exports continuous polarization laser;
The first wave plate, is 1/2nd wave plates, for regulating the horizontal polarization composition of continuous polarization laser and the ratio of vertical polarization composition of the first laser instrument output; And
The first laser mirror, its reflecting surface with see through the first wave plate add thermal laser angle at 45 °, for by the adding after 90 ° of laser deflections of incident, close bundle element with 45° angle incident.
4. optical system according to claim 2, is characterized in that, the modulating frequency of described signal modulator between 50kHz between 20MHz.
5. optical system according to claim 2, is characterized in that, described exploring laser light generation component comprises:
Second laser, is semiconductor laser, for exporting the exploring laser light of continuous polarization;
The second wave plate, is 1/2nd wave plates, for regulating the horizontal polarization composition of continuous polarization laser and the ratio of vertical polarization composition of second laser output; And
The second laser mirror, its reflecting surface and the exploring laser light angle at 45 ° that sees through the second wave plate, for by after 90 ° of the exploring laser light deflections of incident, close bundle element with 45° angle incident.
6. optical system according to claim 1, is characterized in that, described beam splitter is Amici prism.
7. optical system according to claim 1, is characterized in that, described sample test assembly comprises:
Quarter-wave plate, at every turn to 45 ° of the change of polarized direction that closes Shu Jiguang through it; And
Object lens, for the polarization direction through quarter-wave plate is focused to sample at the bundle light component that closes of A plane, and will again be transmitted through described quarter-wave plate by the Shu Jiguang that closes that adds the exploring laser light after thermal laser and modulation of tested sample surface reflection.
8. optical system according to claim 1, is characterized in that, described heating laser pick-off assembly comprises:
The first optical filter, closes the exploring laser light composition of Shu Jiguang for filtering incident; And
The first photodetector, for detection of closing the signal that adds thermal laser in Shu Jiguang, wherein, this signal comprises: the information of power and/or phase place.
9. optical system according to claim 1, is characterized in that, described exploring laser light receiving unit comprises:
The second optical filter, that closes Shu Jiguang for filtering incident adds thermal laser composition; And
The second photodetector, for detection of the signal that closes exploring laser light in Shu Jiguang, wherein, this signal comprises: the information of power and/or phase place.
10. optical system according to claim 9, is characterized in that, described exploring laser light receiving unit also comprises:
Focus lamp, before being positioned at the light path of described the second optical filter, focuses on for the Shu Jiguang that closes to incident, and the Shu Jiguang that closes after focusing enters described the second optical filter.
11. 1 kinds are utilized the method for the optical system measuring solid thermal physical parameter described in any one in claim 1 to 10, it is characterized in that, comprising:
Steps A, utilize described optical system to obtain under different heating Laser Modulation frequencies, produce exploring laser light signal and produce by heating laser pick-off assembly the signal that adds thermal laser by exploring laser light receiving unit, in this exploring laser light signal and heating laser signal, all comprise power information and phase information;
Step B, under different heating Laser Modulation frequencies, exploring laser light signal and heating laser signal carry out phase differential processing, obtain phase differential experiment value;
Step C, composes initial value to the solid thermal physical parameter for the treatment of matching;
Step D, under different heating Laser Modulation frequencies, according to theoretical model formula, the phase differential theoretical value under calculating and phase differential experiment value respective frequencies;
Step e, carries out least-squares calculation to the phase differential experiment value under whole heating Laser Modulation frequencies and corresponding phase differential theoretical value, and its least-squares calculation numerical value is as working as time iteration result;
Step F, records heat conductivity value corresponding to current iteration result, interface thermal conductance value;
Step G, judges whether the result of this iteration is less than the result of previous iteration, if so, and execution step H, otherwise, execution step I;
Step H, detects output data, execution step J using solid thermal physical parameter value corresponding this iteration result as changing;
Step I, detects output data, execution step J using solid thermal physical parameter value corresponding previous iteration result as changing;
Step J, judges whether that the iteration result of continuous 3 times is less than control accuracy, if so, and execution step K, otherwise, execution step L;
Step K, stops iteration, and the solid thermal physical parameter value being obtained by step H or step I is exported, and flow process finishes; And
Step L, increases according to default step-length the solid thermal physical parameter value being obtained by step H or step I or reduce, and determines that its numerical value changes path, execution step D by the majorized function of presetting.
12. methods according to claim 11, is characterized in that, the theoretical model formula in described step D is:
Wherein, Q
0, Q
1be respectively the power that adds thermal laser and exploring laser light, γ is the luminous reflectivity on tested sample surface, and l is integration variable, R
0, R
1be respectively the waist radius that adds thermal laser and exploring laser light, Z represents the signal that data handling component obtains, the angular frequency that ω is modulation signal; φ be the exploring laser light that receives of exploring laser light receiving unit and heating laser pick-off assembly receive add the phase differential theoretical value between thermal laser, the material thermal physical property parameter matrix that C, D are 2 × 2
Corresponding parameter.
13. methods according to claim 11, is characterized in that, in described step L, default step-length is the 0.5-5% of current solid thermal physical parameter value; Described majorized function is lsqcurvefit function or fminsearch function.
14. according to claim 11 to the method described in any one in 13, it is characterized in that, described solid thermal physical parameter is thermal conductivity, and/or interface thermal conductance.
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| CN104048915A (en) * | 2014-06-27 | 2014-09-17 | 无锡利弗莫尔仪器有限公司 | Real-time monitoring device and method of optical material and laser interaction process |
| CN108107008B (en) * | 2017-12-11 | 2021-02-23 | 南京大学 | Time domain heat reflection spectrum measuring system |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1632527A (en) * | 2004-12-28 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | Transmissive and reflective film absorption measurement method and device for thermal lens |
| CN101832821A (en) * | 2010-04-02 | 2010-09-15 | 浙江理工大学 | Method and device for measuring laser wavelength based on bound wavelength |
| CN203037569U (en) * | 2012-11-20 | 2013-07-03 | 中国科学院工程热物理研究所 | Optical system for measuring thermophysical parameter of solid |
-
2012
- 2012-11-20 CN CN201210476747.5A patent/CN102944519B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1632527A (en) * | 2004-12-28 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | Transmissive and reflective film absorption measurement method and device for thermal lens |
| CN101832821A (en) * | 2010-04-02 | 2010-09-15 | 浙江理工大学 | Method and device for measuring laser wavelength based on bound wavelength |
| CN203037569U (en) * | 2012-11-20 | 2013-07-03 | 中国科学院工程热物理研究所 | Optical system for measuring thermophysical parameter of solid |
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