CN102944519A - Optical system and method for measuring thermal physical property parameters of solid - Google Patents
Optical system and method for measuring thermal physical property parameters of solid Download PDFInfo
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Abstract
The invention provides an optical system and a method for measuring thermal physical property parameters of a solid. The optical system comprises a heating laser production assembly, a detection laser production assembly, a beam combining element, a beam split element, a heating laser receiving assembly, a sample test assembly and a detection laser receiving assembly. The method uses a signal modulating photo-thermal reflection method and belongs to a frequency domain method, and compared with time domain methods of ultrashort pulse laser pumping detection methods and the like, the method has the advantages that mechanical moving components are absent, the measuring system is relatively simple, and light path adjustment is more convenient.
Description
Technical field
The present invention relates to utilize the photothermal reflectance measuring technique of periodic modulation heating and continuous laser detection, relate in particular to a kind of optical system and method for measuring the solid thermal physical parameter.
Background technology
Membraneous material applies to the fields such as microelectronics, photoelectron, little manufacturing widely, and this slightly/nano parts the time will produce high heat flow density in work, hot stack will directly have influence on work efficiency and the reliability of such devices.Solve above-mentioned little/the nano parts heat dissipation problem is very urgent, this need to form above-mentioned little/the membraneous material thermophysical property of nano parts, especially thermal conductivity, interface resistance etc. accurately characterize, in order to disclose its thermotransport mechanism.3 ω methods are membraneous material thermophysical property measurement method commonly used, but its need to be on testing sample weld metal thin slice/silk, belong to and diminish detection technique.
The super short pulse laser pumping probe method is a kind of novel solid thermal physical parameter measuring method.Fig. 1 is the light path synoptic diagram that prior art is measured the optical system of solid thermal physical parameter.As shown in Figure 1, this optical system comprises: laser instrument 1 output pulse laser; The first wave plate 2 (1/2nd wave plates) makes the laser polarization direction rotation; The first light-splitting device 3 is divided into mutually perpendicular two bundles in polarization direction with laser beam; 4 pairs of laser beam modulations of electrooptic modulator; Electrooptic modulator driver 5 is that electrooptic modulator 4 sends modulation signal; The first catoptron 6 receives and reflection lasering beam; Laser beam produces second harmonic by the first condenser lens 7, frequency-doubling crystal 8 and the second condenser lens 9; The first optical filter 10 filtering incoherent lights; Beam expander 11 enlarges lasing beam diameter; The second catoptron 12 receives and reflection lasering beam; Electric control displacement platform 14 moves forward and backward; Laser beam is rear by the second wave plate 15 (1/2nd wave plates) by 13 reflections of directional light catoptron, the laser polarization direction rotation; The second light-splitting device 16 is divided into mutually perpendicular two bundles in polarization direction with laser beam; Laser beam sees through the 3rd wave plate 17 (quarter-wave plate) vertical incidence sample surfaces, and former road returns again by the 3rd wave plate 17, realizes that polarization direction 90 degree change; Cold mirror 18 closes bundle with the laser beam of different wave length; Condenser lens 19 is with the sample surfaces of laser irradiation on fixed adjustment frame 20; Electro-optical detector 23 receives the laser beam that sees through the second optical filter 21 and the 3rd condenser lens 22; The signal of electro-optical detector 23 is transported to filter amplifier 24.Pumping light and detection light use the femtosecond pulse of different wave length, be combined into beam of laser by cold mirror, pumping light after using the optical filter filtering frequency multiplication with high selection permeability before pumping light and the detection light arrival detector, thereby avoid pumping light to the interference of signal, realize the measurement of precise and high efficiency; Utilize the effectively impact of filtering high-frequency harmonic of filter amplifier, the accuracy of Effective Raise signal.
The different displacement of electric control displacement platform is corresponding survey light and and pumping light between different time delay, the modulation signal that filter amplifier output signal and electrooptic modulator driver provide relatively, obtain phase signal, the phase signal under different time delays is the measurement data of experiment gained.
Yet for the light path system of measurement solid thermal physical parameter shown in Figure 1, its electric control displacement platform belongs to mechanical moving element, and precisely control is difficult; And by times frequency module that the first condenser lens, frequency-doubling crystal and the second condenser lens form, the efficient of conllinear focusing difficulty, frequency multiplication is not high.
Summary of the invention
The technical matters that (one) will solve
For solving above-mentioned one or more problems, the invention provides optical system and the method for a kind of accurate control, measurement solid thermal physical parameter easy to adjust.
(2) technical scheme
According to an aspect of the present invention, provide a kind of optical system of measuring the solid thermal physical parameter.This system comprises: add thermal laser generation component, exploring laser light generation component, close bundle element, beam splitter, heating laser pick-off assembly, sample test assembly and exploring laser light receiving unit; Wherein, by the thermal laser that adds that adds the thermal laser generation component and produce warbled continuous polarization, produced the exploring laser light of continuous polarization by the exploring laser light generation component; This adds thermal laser and exploring laser light closes bundle for being positioned at the Shu Jiguang that closes on A plane after closing the bundle element; This closes Shu Jiguang incident beam splitter, and the composition of polarization direction on the A plane is transmitted through the sample test assembly, and the polarization direction reflexes to heating laser pick-off assembly perpendicular to the composition of this surface level; The polarization direction the A plane close the bundle light component via the sample test assembly after, expose to tested sample surface; Heat sample in the thermal laser that adds of closing in the bundle light component on A plane the polarization direction, and the sample after the heating produces modulating action to exploring laser light; By tested sample surface reflection add thermal laser and the modulation after exploring laser light close Shu Jiguang again via reflexing to the exploring laser light receiving unit by beam splitter behind the sample test assembly; The exploring laser light receiving unit with incident close among the Shu Jiguang add the filtering of thermal laser composition after, obtain the signal of exploring laser light; After heating laser pick-off assembly closes exploring laser light composition filtering among the Shu Jiguang with incident, obtain adding the signal of thermal laser.
According to a further aspect in the invention, a kind of method of utilizing above-mentioned optical system measuring solid thermal physical parameter also is provided, comprise: steps A, utilize optical system to obtain under the different heating Laser Modulation frequencies, produce the exploring laser light signal and produce the signal that adds thermal laser by heating laser pick-off assembly by the exploring laser light receiving unit, all comprise power information and phase information in this exploring laser light signal and the heating laser signal; Step B, under different heating Laser Modulation frequencies, exploring laser light signal and heating laser signal carry out phase differential to be processed, and obtains the phase differential experiment value; Step C composes initial value for the solid thermal physical parameter for the treatment of match; Step D, under different heating Laser Modulation frequencies, according to the theoretical model formula, the phase differential theoretical value under calculating and the phase differential experiment value respective frequencies; Step e is carried out least-squares calculation to the phase differential experiment value under whole heating Laser Modulation frequencies and corresponding phase differential theoretical value, and its least-squares calculation numerical value is as working as time iteration result; Step F, corresponding heat conductivity value, the interface thermal conductance value of record current iteration result; Whether step G, the result who judges this iteration less than the result of previous iteration, if so, and execution in step H, otherwise, execution in step I; Step H, the solid thermal physical parameter value that this iteration result is corresponding detects output data, execution in step J as changing; Step I, the solid thermal physical parameter value that the previous iteration result is corresponding detects output data, execution in step J as changing; Step J judges whether continuous 3 times iteration result less than control accuracy, if so, and execution in step K, otherwise, execution in step L; Step K stops iteration, will be exported by the solid thermal physical parameter value that step H or step I obtain, and flow process finishes; Step L will be increased according to default step-length by the solid thermal physical parameter value that step H or step I obtain or reduce, and determines that by default majorized function its numerical value changes path, execution in step D.
(3) beneficial effect
Can find out from technique scheme, optical system and method that the present invention measures the solid thermal physical parameter have following beneficial effect: the photothermal reflectance method that adopts the signal modulation, belong to frequency domain method, compare with time domain approachs such as super short pulse laser pumping probe methods, do not have mechanical moving element, measuring system is relatively simple, optical path adjusting is more convenient.
Description of drawings
Fig. 1 is the light path synoptic diagram that prior art is measured the optical system of solid thermal physical parameter;
Fig. 2 is the light path synoptic diagram according to the measurement solid thermal physical parameter optical system of the embodiment of the invention;
Fig. 3 is the process flow diagram according to the measurement solid thermal physical parameter method of the embodiment of the invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Need to prove that in accompanying drawing or instructions description, similar or identical part is all used identical figure number.The implementation that does not illustrate in the accompanying drawing or describe is form known to a person of ordinary skill in the art in the affiliated technical field.In addition, although this paper can provide the demonstration of the parameter that comprises particular value, should be appreciated that parameter need not definitely to equal corresponding value, but can in acceptable error margin or design constraint, be similar to corresponding value.In addition, the direction term of mentioning in following examples, such as " on ", D score, 'fornt', 'back', " left side ", " right side " etc., only be direction with reference to the accompanying drawings.Therefore, the direction term of use is to illustrate not to be to limit the present invention.
For Fig. 1, it is the accompanying drawing that prior art is measured solid thermal physical property optical system, and the figure number of institute's mark is only for reference among its figure, does not include the present invention in and uses.For making things convenient for those skilled in the art that the present invention is understood, at first main element involved in the present invention is numbered explanation, specific as follows shown in:
10-heats laser module; 20-exploring laser light assembly;
30-closes the bundle element; The 40-beam splitter;
50-heating laser pick-off assembly; 60-sample test assembly;
70-sample retaining element; 80-exploring laser light receiving unit;
The 11-signal modulator; 12-the first laser instrument;
13-the first wave plate; 14-the first catoptron;
The 21-second laser; 22-the second wave plate;
23-the second catoptron; 51-the first optical filter;
52-the first photodetector; 61-the 3rd wave plate;
The 62-object lens; The 81-condenser lens;
82-the second optical filter; 83-the second photodetector.
In one exemplary embodiment of the present invention, provide a kind of optical system of measuring the solid thermal physical parameter.As shown in Figure 2, this system comprises: add thermal laser generation component 10, exploring laser light generation component 20, close and restraint element 30, beam splitter 40, heating laser pick-off assembly 50, sample test assembly 60, sample retaining element 70, exploring laser light receiving unit 80 and data handling component (not shown).By the thermal laser that adds that adds the warbled continuous polarization of thermal laser generation component 10 generations, produced the exploring laser light of continuous polarization by exploring laser light generation component 20; This adds thermal laser and exploring laser light closes bundle for being positioned at the Shu Jiguang that closes of surface level after closing bundle element 30; This closes Shu Jiguang incident beam splitter 40, and the polarization direction is transmitted through sample test assembly 60 at the composition of this surface level, and the polarization direction reflexes to heating laser pick-off assembly 50 perpendicular to the composition of this surface level; The polarization direction this surface level close the bundle light component via sample test assembly 60 after, expose to the tested sample surface on the sample retaining element 70, add thermal laser sample heated, the sample after the heating produces modulating action to exploring laser light; The Shu Jiguang that closes that adds the exploring laser light after thermal laser and the modulation by the tested sample surface reflection on the sample retaining element 70 reflexes to exploring laser light receiving unit 80 via behind the sample test assembly 60 by beam splitter 40 again; Exploring laser light receiving unit 80 with incident add in thermal laser and the exploring laser light add the filtering of thermal laser composition after, obtain the signal of exploring laser light; Heating laser pick-off assembly 50 with incident add exploring laser light composition filtering in thermal laser and the exploring laser light after, obtain adding the signal of thermal laser; Data handling component is produced the exploring laser light signal and is produced the signal that adds thermal laser by heating laser pick-off assembly 80 by the modulating frequency that adds thermal laser, exploring laser light receiving unit 50, is back-calculated to obtain the thermal physical property parameter of tested sample according to theoretical model.
Below respectively each components/elements is elaborated.
Add thermal laser generation component 10
Add thermal laser generation component 10 for generation of the thermal laser that adds of the continuous polarization of modulating through signal.As shown in Figure 1, this adds the thermal laser generation component and comprises: signal modulator 11, it can be digital signal generator, be used for modulation the first laser instrument, its modulating frequency is controlled by outer computer, modulation frequency range is determined jointly by signal modulator 11 and data handling component, can be that 50kHz is to 20MHz; The first laser instrument 12 is semiconductor laser, is used under the modulation of signal modulator 11, and output wavelength is the continuous polarization laser of 830nm, and its power is 170mW; The first wave plate 13 is 1/2nd wave plates, for the horizontal polarization composition of the continuous polarization laser of regulating 12 outputs of the first laser instrument and the ratio of vertical polarization composition; The first laser mirror 14, its reflectivity be greater than 99%, its reflecting surface with see through the first wave plate 13 add thermal laser angle at 45 °, be used for closing bundle element 30 with after 90 ° of the adding laser deflections of incident with 45° angle incident.
Exploring laser light generation component 20
Exploring laser light generation component 20 is for generation of the exploring laser light of continuous polarization, and the wavelength of this exploring laser light is different from the wavelength that adds thermal laser, and power is much smaller than the heating laser power.As shown in Figure 1, this adds thermal laser generation component 20 and comprises: second laser 21, be semiconductor laser, and being used for output wavelength is the exploring laser light of 635nm, its power 6mW; The second wave plate 22 is 1/2nd wave plates, for the horizontal polarization composition of the continuous polarization laser of regulating second laser 21 outputs and the ratio of vertical polarization composition; The second laser mirror 23, its reflectivity be greater than 99%, and its reflecting surface and the exploring laser light angle at 45 ° that sees through the second wave plate 22 are used for closing bundle element 30 with after 90 ° of the exploring laser light deflections of incident with 45° angle incident.
Beam splitter 40
Beam splitter 40 is Amici prism.By this Amici prism, close adding in thermal laser and the exploring laser light behind the bundle, the polarization direction is transmitted through the sample test assembly at the composition of this surface level, and the polarization direction reflexes to heating laser pick-off assembly perpendicular to the composition of this surface level; By sample surfaces reflection add thermal laser and exploring laser light reflexes to the exploring laser light receiving unit.
Heating laser pick-off assembly 50
Heating laser pick-off assembly 50 for after the exploring laser light composition filtering that adds thermal laser and exploring laser light with incident, obtains adding the signal of thermal laser.This heating laser pick-off assembly 50 comprises: the first optical filter 51 and the first photodetector 52.Wherein:
The first optical filter 51 is used for the exploring laser light composition that Shu Jiguang is closed in filtering incident, and its transmitance for the exploring laser light of 635nm wavelength is 10
-7To 10
-9
The first photodetector 52, for detection of closing the signal that adds thermal laser among the Shu Jiguang, it can be high speed PIN diode, avalanche diode, photomultiplier, or charge-coupled image sensor, the response time is less than 10ns.Wherein, can comprise in this signal: the information such as power (amplitude), phase place.
Through beam splitter 40 transmissions add thermal laser and exploring laser light close Shu Jiguang through sample test assembly 60 after with the sample retaining element on tested sample surface action, by the sample surfaces reflection add thermal laser and exploring laser light is incident to beam splitter 40 again via sample test assembly 60.
This sample test assembly 60 comprises: quarter-wave plate 61 and object lens 62.Wherein object lens 62 adopt achromatic objective, 100 times of enlargement factors, and focal length is 2mm.Incident close twice of Shu Jiguang through behind the quarter-wave plate 61,90 ° of its change of polarized direction.
Add thermal laser sample is heated, the sample after the heating produces modulating action to exploring laser light; The Shu Jiguang that closes that adds the exploring laser light after thermal laser and the modulation by the tested sample surface reflection on the sample retaining element 70 reflexes to exploring laser light receiving unit 80 via behind the sample test assembly 60 by beam splitter 40 again.
Exploring laser light receiving unit 80
Exploring laser light receiving unit 80, be used for incident add thermal laser and exploring laser light add the filtering of thermal laser composition after, obtain the signal of exploring laser light.This exploring laser light receiving unit 80 comprises: condenser lens 81, the second optical filter 82 and the second photodetector 83.Wherein:
The second optical filter 82, after being used for filtering and focusing on close Shu Jiguang add the thermal laser composition, its transmitance that adds thermal laser for the 830nm wavelength is 10
-7To 10
-9
The second photodetector 83, for detection of the signal that closes exploring laser light among the Shu Jiguang, it can be high speed PIN diode, avalanche diode, photomultiplier, or charge-coupled image sensor, the response time is less than 10ns.Wherein, can comprise in this signal: the information such as power (amplitude), phase place.
The signal that utilizes above-mentioned heating laser pick-off assembly and exploring laser light receiving unit to obtain can calculate and obtain the solid thermal physical parameter.Compare with the time domain approach such as super short pulse laser pumping probe method, the optical system that the present invention measures the solid thermal physical parameter does not have mechanical moving element, and measuring system is relatively simple, optical path adjusting is more convenient.
Based on above-mentioned optical system, the present invention also provides a kind of method of measuring the solid thermal physical parameter, the method is according under different signal modulator angular frequencies, produce the exploring laser light signal and produced the phase differential of the signal that adds thermal laser by heating laser pick-off assembly by the exploring laser light receiving unit, match obtains the thermal physical property parameter of tested sample, comprises the interface thermal conductance of thermal conductivity, storeroom etc.
In one exemplary embodiment of the present invention, as shown in Figure 3, the method comprises:
Steps A, utilize above-mentioned optical system, obtain under different heating Laser Modulation frequencies and produce the signal that adds thermal laser by exploring laser light receiving unit generation exploring laser light signal with by heating laser pick-off assembly, all comprise power information and phase information in this exploring laser light signal and the heating laser signal;
Step B under different heating Laser Modulation frequencies, carries out the phase differential processing to exploring laser light signal and heating laser signal, obtains the phase differential experiment value;
Step C composes initial value for thermal conductivity, the interface thermal conductance for the treatment of match;
Step D, under different heating Laser Modulation frequencies, according to the theoretical model formula, the phase differential theoretical value under calculating and the phase differential experiment value respective frequencies;
Wherein, Q
0, Q
1Be respectively the power that adds thermal laser and exploring laser light, γ is the luminous reflectivity on tested sample surface, and l is integration variable, R
0, R
1Be respectively the waist radius when adding thermal laser and exploring laser light generation, ω is the angular frequency of modulation signal; φ be the exploring laser light that receives of exploring laser light receiving unit and heating laser pick-off assembly receive add phase differential theoretical value between the thermal laser.C, D are 2 * 2 material thermal physical property parameter matrix
Corresponding parameter:
If certain layer,
If the interface,
Wherein,
ρ, c, k, d are respectively certain layer density, quality thermal capacitance, thermal conductivity, thickness, and G is the interface thermal conductance, and i is imaginary unit, the number of plies of j for counting from swashing light incident side.
In addition, about the concrete meaning of above-mentioned material thermal physical property parameter, see list of references 1[J.Zhuet al.J.Appl.Phys.108 for details, 094315 (2010))].
Step e is carried out least-squares calculation to the phase differential experiment value under whole heating Laser Modulation frequencies and corresponding phase differential theoretical value, and its least-squares calculation numerical value is as working as time iteration result;
Step F, corresponding heat conductivity value, the interface thermal conductance value of record current iteration result is and works as suboptimal data;
Whether step G, the result who judges this iteration less than the result of previous iteration, if so, and execution in step H, otherwise, execution in step I;
Step H, the heat conductivity value that this iteration result is corresponding, interface thermal conductance value detect output data, execution in step J as changing;
Step I, the heat conductivity value that the previous iteration result is corresponding, interface thermal conductance value detect output data, execution in step J as changing;
Step J, judge whether continuous 3 times iteration result less than control accuracy (such as 10
-6), if so, execution in step K, otherwise, execution in step L;
Step K stops iteration, will be exported by heat conductivity value, interface thermal conductance value that step H or step I obtain, and flow process finishes;
Step L will be increased according to default step-length by heat conductivity value, the interface thermal conductance value that step H or step I obtain or reduce, and determines that by default majorized function its numerical value changes path, execution in step D.
In this step, default step-length can be the 0.5-5% of current heat conductivity value, interface thermal conductance value; Majorized function can be lsqcurvefit function, fminsearch function or other functions well known in the art.
Need to prove, more than adopt the method for two-parameter match to obtain simultaneously heat conductivity value and interface thermal conductance value, certainly, also can determine above-mentioned one of them be under the prerequisite of definite value, obtained another concrete numerical value by the mode of one-parameter match.According to description above, those skilled in the art are easy to expect the computing method of being correlated with no longer repeat herein.
Need to prove that above-mentioned definition to each element is not limited in various concrete structures or the shape of mentioning in the embodiment, those of ordinary skill in the art can replace simply to it with knowing, for example:
(1) adds all right other angle incident laser catoptrons of thermal laser or exploring laser light;
(2) light path of system can be at surface level, and the selection level face is just for the ease of regulating among the embodiment;
(3) condenser lens just plays convection light and is incident to the effect of photodetector photosensitive region, and in heating laser pick-off assembly, increasing or removing condenser lens does not affect measurement result;
(4) first and second photodetectors can be high speed PIN diode, avalanche diode, photomultiplier, or charge-coupled image sensor.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (14)
1. an optical system of measuring the solid thermal physical parameter is characterized in that, comprising: add thermal laser generation component, exploring laser light generation component, close bundle element, beam splitter, heating laser pick-off assembly, sample test assembly and exploring laser light receiving unit; Wherein,
By the thermal laser that adds that adds the thermal laser generation component and produce warbled continuous polarization, produced the exploring laser light of continuous polarization by the exploring laser light generation component; This adds thermal laser and exploring laser light closes bundle for being positioned at the Shu Jiguang that closes on A plane after closing the bundle element;
This closes Shu Jiguang incident beam splitter, and the composition of polarization direction on the A plane is transmitted through the sample test assembly, and the polarization direction reflexes to heating laser pick-off assembly perpendicular to the composition of this surface level; The polarization direction the A plane close the bundle light component via the sample test assembly after, expose to tested sample surface;
Heat sample in the thermal laser that adds of closing in the bundle light component on A plane the polarization direction, and the sample after the heating produces modulating action to exploring laser light; By tested sample surface reflection add thermal laser and the modulation after exploring laser light close Shu Jiguang again via reflexing to the exploring laser light receiving unit by beam splitter behind the sample test assembly;
The exploring laser light receiving unit with incident close among the Shu Jiguang add the filtering of thermal laser composition after, obtain the signal of exploring laser light; After heating laser pick-off assembly closes exploring laser light composition filtering among the Shu Jiguang with incident, obtain adding the signal of thermal laser.
2. optical system according to claim 1 is characterized in that, described close the bundle element be cold mirror;
Described cold mirror for its plane, place angle at 45 ° incident add the thermal laser total transmissivity; For with the total reflection of its plane, place angle incident at 45 ° exploring laser light, thereby realize adding thermal laser and exploring laser light closes bundle for being positioned at the Shu Jiguang that closes on A plane.
3. optical system according to claim 2 is characterized in that, the described thermal laser generation component that adds comprises:
Signal modulator;
The first laser instrument is semiconductor laser, is used for exporting continuous polarization laser under the modulation of signal modulator;
The first wave plate is 1/2nd wave plates, for the horizontal polarization composition of the continuous polarization laser of regulating the output of the first laser instrument and the ratio of vertical polarization composition; And
The first laser mirror, its reflecting surface with see through the first wave plate add thermal laser angle at 45 °, be used for closing the bundle element with after 90 ° of the adding laser deflections of incident with 45° angle incident.
4. optical system according to claim 2 is characterized in that, the modulating frequency of described signal modulator between 50kHz between the 20MHz.
5. optical system according to claim 2 is characterized in that, described exploring laser light generation component comprises:
Second laser is semiconductor laser, is used for exporting the exploring laser light of continuous polarization;
The second wave plate is 1/2nd wave plates, for the horizontal polarization composition of the continuous polarization laser of regulating second laser output and the ratio of vertical polarization composition; And
The second laser mirror, its reflecting surface and the exploring laser light angle at 45 ° that sees through the second wave plate are used for closing the bundle element with after 90 ° of the exploring laser light deflections of incident with 45° angle incident.
6. optical system according to claim 1 is characterized in that, described beam splitter is Amici prism.
7. optical system according to claim 1 is characterized in that, described sample test assembly comprises:
Quarter-wave plate is used at every turn 45 ° of change of polarized direction that closes Shu Jiguang through it; And
Object lens, being used for will be through the polarization direction of quarter-wave plate the closing the bundle light component and focus to sample of A plane, and will by tested sample surface reflection add thermal laser and modulate after the Shu Jiguang that closes of exploring laser light again be transmitted through described quarter-wave plate.
8. optical system according to claim 1 is characterized in that, described heating laser pick-off assembly comprises:
The first optical filter is used for the exploring laser light composition that Shu Jiguang is closed in filtering incident; And
The first photodetector, for detection of closing the signal that adds thermal laser among the Shu Jiguang, wherein, this signal comprises: the information of power and/or phase place.
9. optical system according to claim 1 is characterized in that, described exploring laser light receiving unit comprises:
The second optical filter, what be used for that filtering incident closes Shu Jiguang adds the thermal laser composition; And
The second photodetector, for detection of the signal that closes exploring laser light among the Shu Jiguang, wherein, this signal comprises: the information of power and/or phase place.
10. optical system according to claim 9 is characterized in that, described exploring laser light receiving unit also comprises:
Focus lamp is positioned at before the light path of described the second optical filter, is used for the Shu Jiguang that closes of incident is focused on, and the Shu Jiguang that closes after the focusing enters described the second optical filter.
11. a method of utilizing each described optical system measuring solid thermal physical parameter in the claim 1 to 10 is characterized in that, comprising:
Steps A, utilize described optical system to obtain under the different heating Laser Modulation frequencies, produce the exploring laser light signal and produce the signal that adds thermal laser by heating laser pick-off assembly by the exploring laser light receiving unit, all comprise power information and phase information in this exploring laser light signal and the heating laser signal;
Step B, under different heating Laser Modulation frequencies, exploring laser light signal and heating laser signal carry out phase differential to be processed, and obtains the phase differential experiment value;
Step C composes initial value for the solid thermal physical parameter for the treatment of match;
Step D, under different heating Laser Modulation frequencies, according to the theoretical model formula, the phase differential theoretical value under calculating and the phase differential experiment value respective frequencies;
Step e is carried out least-squares calculation to the phase differential experiment value under whole heating Laser Modulation frequencies and corresponding phase differential theoretical value, and its least-squares calculation numerical value is as working as time iteration result;
Step F, corresponding heat conductivity value, the interface thermal conductance value of record current iteration result;
Whether step G, the result who judges this iteration less than the result of previous iteration, if so, and execution in step H, otherwise, execution in step I;
Step H, the solid thermal physical parameter value that this iteration result is corresponding detects output data, execution in step J as changing;
Step I, the solid thermal physical parameter value that the previous iteration result is corresponding detects output data, execution in step J as changing;
Step J judges whether continuous 3 times iteration result less than control accuracy, if so, and execution in step K, otherwise, execution in step L;
Step K stops iteration, will be exported by the solid thermal physical parameter value that step H or step I obtain, and flow process finishes; And
Step L will be increased according to default step-length by the solid thermal physical parameter value that step H or step I obtain or reduce, and determines that by default majorized function its numerical value changes path, execution in step D.
12. method according to claim 11 is characterized in that, the theoretical model formula among the described step D is:
Wherein, Q
0, Q
1Be respectively the power that adds thermal laser and exploring laser light, γ is the luminous reflectivity on tested sample surface, and l is integration variable, R
0, R
1Be respectively the waist radius that adds thermal laser and exploring laser light, Z represents the signal that data handling component obtains, and ω is the angular frequency of modulation signal; φ be the exploring laser light that receives of exploring laser light receiving unit and heating laser pick-off assembly receive add phase differential theoretical value between the thermal laser, C, D are 2 * 2 material thermal physical property parameter matrix
Corresponding parameter.
13. method according to claim 11 is characterized in that, among the described step L, default step-length is the 0.5-5% of current solid thermal physical parameter value; Described majorized function is lsqcurvefit function or fminsearch function.
14. each described method in 13 is characterized in that described solid thermal physical parameter is thermal conductivity, and/or the interface thermal conductance according to claim 11.
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| CN108107008A (en) * | 2017-12-11 | 2018-06-01 | 南京大学 | A kind of time domain heat reflection spectral measurement system |
| CN110243759A (en) * | 2019-06-13 | 2019-09-17 | 中国科学院电工研究所 | It can be seen that photothermal reflectance temperature measuring equipment |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1632527A (en) * | 2004-12-28 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | Transmissive and reflective film absorption measurement method and device for thermal lens |
| CN101832821A (en) * | 2010-04-02 | 2010-09-15 | 浙江理工大学 | Method and device for measuring laser wavelength based on bound wavelength |
| CN203037569U (en) * | 2012-11-20 | 2013-07-03 | 中国科学院工程热物理研究所 | Optical system for measuring thermophysical parameter of solid |
-
2012
- 2012-11-20 CN CN201210476747.5A patent/CN102944519B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1632527A (en) * | 2004-12-28 | 2005-06-29 | 中国科学院上海光学精密机械研究所 | Transmissive and reflective film absorption measurement method and device for thermal lens |
| CN101832821A (en) * | 2010-04-02 | 2010-09-15 | 浙江理工大学 | Method and device for measuring laser wavelength based on bound wavelength |
| CN203037569U (en) * | 2012-11-20 | 2013-07-03 | 中国科学院工程热物理研究所 | Optical system for measuring thermophysical parameter of solid |
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| CN108107008A (en) * | 2017-12-11 | 2018-06-01 | 南京大学 | A kind of time domain heat reflection spectral measurement system |
| CN110836876A (en) * | 2018-08-15 | 2020-02-25 | 浙江大学 | Super-resolution microscopy method and system based on saturated pumping-stimulated radiation detection |
| CN110836876B (en) * | 2018-08-15 | 2021-05-14 | 浙江大学 | Super-resolution microscopy method and system based on saturated pumping-stimulated radiation detection |
| CN110243759A (en) * | 2019-06-13 | 2019-09-17 | 中国科学院电工研究所 | It can be seen that photothermal reflectance temperature measuring equipment |
| CN110243759B (en) * | 2019-06-13 | 2021-07-09 | 中国科学院电工研究所 | Visible light heat reflection temperature measuring device |
| CN113834783A (en) * | 2021-09-18 | 2021-12-24 | 王红珍 | Device and method for detecting semiconductor electronic device |
| CN113885218A (en) * | 2021-09-27 | 2022-01-04 | 北京航空航天大学 | High-power laser heating method for alkali metal gas chamber for atomic inertia measurement |
| CN113885218B (en) * | 2021-09-27 | 2023-11-17 | 北京航空航天大学 | High-power laser heating method for alkali metal gas chamber for atomic inertial measurement |
| CN114252476A (en) * | 2021-12-14 | 2022-03-29 | 华中科技大学 | Optical device and method for measuring in-plane thermal conductivity of submillimeter-level sample |
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