CN102944193A - Device and method for measuring phase and luminous intensity of splitting grating sub light beam array - Google Patents
Device and method for measuring phase and luminous intensity of splitting grating sub light beam array Download PDFInfo
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- CN102944193A CN102944193A CN201210444533XA CN201210444533A CN102944193A CN 102944193 A CN102944193 A CN 102944193A CN 201210444533X A CN201210444533X A CN 201210444533XA CN 201210444533 A CN201210444533 A CN 201210444533A CN 102944193 A CN102944193 A CN 102944193A
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Abstract
The invention discloses a device and a method for measuring the phase and luminous intensity of a beam-splitting grating sub light beam array. The method is characterized in that incident laser which is sent out by a laser is split into two paths through a first beam splitter; one path of transmission light is collimated and expanded into a plane wave through a first collimation and expansion device, vertically irradiates onto a beam-splitting grating which is positioned on a front focal surface of a Fourier lens, is reflected by a first reflecting mirror, is then reflected by a second light splitter, and finally enters a charge coupled device (CCD) camera; and the other path of reflected light is reflected by a second reflecting mirror, passes through an optical switch firstly, then passes through an optical phase delayer, is changed into planer reference light after passing a second collimation and expansion device, transmits through a second beam splitter and vertically irradiates into the CCD camera. The CCD camera collects the intensity distribution of a light field and transmits the data to a computer to be processed. When the optical switch is switched on, the phase of the beam-splitting grating sub light beam array can be obtained through a phase shifting interferometry; and when the optical switch is switched off, the distribution of the splitting grating sub light beam array can be directly obtained.
Description
Technical field
The present invention relates to position phase and luminous intensity measurement system, particularly a kind of position of beam-splitting optical grating beamlet array mutually and measuring device of light intensity and method, it can measure the phase relation between each order of diffraction of beam-splitting optical grating beamlet array time, also can obtain the light distribution of each order of diffraction time simultaneously.
Background technology
In numerous technical fields such as optical fiber communication, photometry calculation, image processing and optical disc storage, often require the input of single light signal is transformed into the output of many signals, the optical beam splitting device can be realized above-mentioned requirements.The method that realizes optical beam-splitter is a lot, and the beam-splitting optical grating based on the Fraunhofer diffraction principle design (referring to H.Dammann, K.
high-efficiency in-line multiple imaging by means of multiple phaseholograms[J] .Opt.Commun., 1971,3 (5): 312-315 and L.A.Romero, and F.M.Dickey, " Theory of optimal beam splitting by phase gratings.I.One-dimensional gratings; " J.Opt.Soc.Am.A 24,2280-2295 (2007) .) because efficiency is high, the beam distribution homogeneity is not subject to the advantages such as incident intensity distribution influence to become one of the most effective beam splitting device at present.
Traditional beam-splitting optical grating, incident field can be divided into to isocandela or there is beamlet array that certain light intensity distributes (referring to S.X.Li, G.Yu, C.Y.Zheng, and Q.F.Tan, " Quasi-Dammann grating withproportional intensity array spots; " Opt.Lett.33,2023-2025 (2008)), only limit to the light intensity (light intensity uniformity or the consistance distributed with required certain light intensity) of beamlet array for the discussion of beam splitting effect, and be not worth and discuss mutually for the position of beamlet array.The development of technology for beam-splitting optical grating beamlet array the position mutually value requirement has also been proposed, for example based on diffraction grating relevant, close intrafascicular (referring to Yan Aimin, Liu Li people, Dai Enwen, Sun Jianfeng. coherent array laser inverse Dammann [Z] .CN101592783, 2009.), the processing of phase compensator is based on phase relation between the phase array of beam-splitting optical grating beamlet position (referring to A.Yan, L.Liu, E.Dai etal..Simultaneous beam combination and aperture filling of coherent laser arrays byconjugate Dammann gratings[J] .Opt.Lett., 2010, 35 (8): 1251-1253 and D.Pab uf, F.Emaury, S.de Rossi, R.Mercier, G.Lucas-Leclin, and P.Georges, " Coherent beamsuperposition of ten diode lasers with a Dammann grating, " Opt.Lett.35, 1515-1517 (2010)).Need to carry out position mutually and the measurement of light distribution to beam-splitting optical grating beamlet array at present.
Summary of the invention
The object of the present invention is to provide a kind of position phase of beam-splitting optical grating beamlet array and measurement mechanism and the method for light intensity, this device can be measured position phase and the light intensity of beam-splitting optical grating beamlet array, can from position phase and light intensity two aspects, be estimated beam-splitting optical grating simultaneously.
Technical solution of the present invention is as follows:
A kind of position phase of beam-splitting optical grating beamlet array and the measurement mechanism of light intensity, its characteristics are that its formation comprises: the incident laser that laser instrument sends is divided into transmitted light and reflected light through the first beam splitter: described transmitted light is after the first collimator and extender device collimates and expands into plane wave, vertical irradiation is positioned at the beam-splitting optical grating to be measured of fourier lense front focal plane, after the first mirror reflects, again through the second spectroscope reflection, finally enter the CCD camera, described CCD camera is positioned at the back focal plane of described fourier lense, and this CCD camera is connected with computing machine; Described reflected light is after the second mirror reflects, and first by photoswitch, then, by optical phase delay device, then by after the second collimator and extender device, becoming the plane reference light, the described CCD camera of the second spectroscope vertical incidence is crossed in transmission.
Utilize the measurement mechanism of above-mentioned beam-splitting optical grating beamlet array position phase and light intensity to carry out position mutually and the measuring method of light intensity, its characteristics are that the method comprises the following steps:
1. beam-splitting optical grating to be measured is placed in to described fourier lense front focal plane;
2. open photoswitch, two-way light is interfered at described CCD camera receiving plane, adjusts described optical phase delay device travel(l)ing phase
i=1,2,3,4 wherein, four interference image data of CCD collected by camera also are transferred in computing machine and save as respectively I
1, I
2, I
3, I
4;
3. computing machine is according to following formula
calculate the position phase of corresponding beam-splitting optical grating beamlet array
4. when measuring beam-splitting optical grating beamlet array light intensity, close photoswitch, the light intensity data of described CCD collected by camera is the distribution of the light intensity of beam-splitting optical grating beamlet array to be measured.
Technique effect of the present invention:
The present invention proposes beam-splitting optical grating beamlet array position is measured mutually first, measurement mechanism and the method for a kind of beam-splitting optical grating beamlet array position phase and light intensity have been provided, it can measure the phase relation between each order of diffraction of beam-splitting optical grating beamlet array time, also can obtain the relative light intensity of each order of diffraction time simultaneously.
The accompanying drawing explanation
The block diagram that Fig. 1 is beam-splitting optical grating beamlet array position phase of the present invention and measuring device of light intensity;
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but should not limit the scope of the invention with this.
First consult Fig. 1, Fig. 1 is beam-splitting optical grating beamlet array position phase of the present invention and measuring device of light intensity block diagram.The incident laser that laser instrument 1 sends is divided into transmitted light and reflected light two-way through the first beam splitter 2: road transmitted light vertical irradiation after the first collimator and extender device 3 is positioned at the beam-splitting optical grating 4 of fourier lense 5 front focal planes, after fourier lense 5 conversion, described beam-splitting optical grating 4 and CCD camera 8 are placed on respectively the front and back focal plane of fourier lense 5.Through the first catoptron 6 reflection, then reflex to through the second beam splitter 7 parallel with the first catoptron the CCD camera 8 Zhong，Zhe road light that are positioned at the fourier lense back focal plane and can obtain at fourier lense 5 back focal planes the optical field distribution of each order of diffraction time of beam-splitting optical grating 4;
When measuring beam-splitting optical grating 4 beamlet array position phase times, an other road reflected light of the first beam splitter 2 is after second catoptron 9 reflections parallel with the first beam splitter, by photoswitch, 10(now opens), then by optical phase delay device 11, then rear as the plane reference light by the second collimator and extender device 12, the second beam splitter 7 is crossed in transmission, finally impinges perpendicularly on CCD camera 8 and the light field interference of beam-splitting optical grating 4 each orders of diffraction of obtaining with first via light time; Optical phase delay device 11 moves four phase places
cCD camera 8 gathers four two-way interference of light light fields, and is transferred in computing machine 13 and saves as respectively I
1, I
2, I
3, I
4, and according to formula
calculate the position phase of beam-splitting optical grating 4 at the beamlet array of fourier lense 5 back focal planes
When measuring beam-splitting optical grating 4 beamlet light distribution, the photoswitch 10 in the second tunnel light path is closed, and now there is no reference light, and the light distribution that CCD camera 8 collects is the light distribution of beam-splitting optical grating 4 beamlet arrays.
Described laser instrument 1 is necessary for the laser instrument that can produce beam-splitting optical grating 4 operation wavelengths.
The related description of described beam-splitting optical grating to be measured 4 is as follows:
Beam-splitting optical grating 4 to be measured is a kind of diffraction optical elements that a branch of incident light can be divided into to the beam array of concrete certain light distribution and have periodicity amplitude transmittance function.Its amplitude transmittance can be written as:
Wherein, T
gfor the transmittance function of whole grating, t
gfor the amplitude transmittance function in single cycle, Tx
,t
yfor grating at x, the cycle on the y direction.Its (m, n) level Fourier spectrum is
c
mnfor plural number, its value determines by transmittance function of beam-splitting optical grating, the light intensity that square is beam-splitting optical grating (m, the n) order of diffraction time of its absolute value, and the position that its argument value is beam-splitting optical grating (m, the n) order of diffraction time is value mutually.
The present invention propose first to its position mutually value measured, and provided a kind of measuring method, the method can be measured mutually value and a light intensity value of array of light spots simultaneously.The detailed derivation of the present invention's formula used is as follows:
Suppose that beam-splitting optical grating 4 in the field distribution of the spectrum of fourier lense 5 back focal planes (CCD camera 8 faces) is
a wherein
g,
be respectively amplitude and the position phase of beam-splitting optical grating 4 beamlet arrays.Reference light in the optical field distribution of 8, CCD camera is
wherein
for the phase shift that optical phase delay device 10 produces, a
r,
be respectively amplitude and the position phase of reference light.Optical field distribution after two light are relevant is U
all=U
g+ U
r, light distribution is:
Optical phase delay device 10 is mobile four position phases respectively:
i=1,2,3,4.CCD camera 8 gather four images and preserve respectively I
1, I
2, I
3, I
4.
According to the trigonometric function relation,
Through simple operation
Finally can obtain:
Thus, we have obtained the computing formula that beam-splitting optical grating 4 beamlet array positions distribute mutually.
The measurement of now take be applicable to the 632.8nm wavelength 5 * 5 beam splitting Darman raster beamlet arrays position mutually value and light intensity value be specific embodiment, further description the present invention, but should not limit the scope of the invention with this.
5 * 5 beam splitting Darman rasters can be divided into the beam of laser of incident 632.8nm aplanatic 5 * 5 dot matrix, and its corresponding order of diffraction time is (m, n), and wherein m, n are respectively m=-2, and-1,0,1,2; N=-2 ,-1,0,1,2; These 25 orders of diffraction time have identical light distribution, and table 1 is the inferior notional phase values of these 25 orders of diffraction.
The helium-neon laser that the wavelength of laser instrument is 632.8nm.Its light sent is divided into two-way through the first beam splitter: transmitted light path is after collimator and extender mirror collimator and extender becomes directional light, vertical irradiation is placed on 5 * 5 beam splitting Darman rasters of fourier lense front focal plane, after the fourier lense conversion, reflex to the second beam splitter through the first reflective mirror, and by the second beam splitter reflection in the CCD camera, and the optical field distribution Fourier spectrum Ug that is 5 * 5 beam splitting Darman rasters
;when the position of measuring 5 * 5 beam splitting Darman raster beamlet arrays is worth mutually, open photoswitch, through the light of the first beam splitter reflection, the second mirror reflects through being parallel to each other with it, after photoswitch, cross optical phase delay device, then after the second collimator and extender mirror collimator and extender as plane reference light U
r, seeing through the second beam splitter, the spectrum of the beam-splitting optical grating obtained with first via light is interfered mutually at CCD camera receiving plane (back focal plane of fourier lense).
Optical phase delay device 10 is mobile four position phases respectively:
i=1,2,3,4.CCD camera 8 gather four images and preserve respectively I
1, I
2, I
3, I
4.Finally according to formula
the position that obtains 5*5 beam-splitting optical grating beamlet array distributes mutually.
When measuring the light distribution of beam-splitting optical grating beamlet array, the photoswitch in the second tunnel light path is closed, and now there is no reference light, the CCD face can directly obtain beam-splitting optical grating beamlet array light distribution I
g.
Table 15 * 5 beam splitting Darman raster position phase value distribution theory values
| The order of diffraction time | -2 | -1 | 0 | 1 | 2 |
| -2 | -1.8206π | -0.8624π | -0.9103π | -0.9582π | 0 |
| -1 | -0.8624π | 0.0957π | 0.0479π | 0 | 0.9582π |
| 0 | -0.9103π | 0.0479π | 0 | -0.0479π | 0.9103π |
| 1 | -0.9582π | 0 | -0.0479π | -0.0957π | 0.8624 |
| 2 | 0 | 0.9582π | 0.9103π | 0.8624π | 1.8206π |
Claims (2)
1. the position of a beam-splitting optical grating beamlet array mutually and the measurement mechanism of light intensity, it is characterized in that its formation comprises: the incident laser that laser instrument (1) sends is divided into transmitted light and reflected light through the first beam splitter (2): described transmitted light is after the first collimator and extender device (3) collimates and expands into plane wave, vertical irradiation is positioned at the beam-splitting optical grating to be measured (4) of fourier lense (5) front focal plane, after the first catoptron (6) reflection, through the second spectroscope (7), reflect again, finally enter CCD camera (8), described CCD camera (8) is positioned at the back focal plane of described fourier lense (5), this CCD camera (8) is connected with computing machine (13), described reflected light is after the second catoptron (9) reflection, first by photoswitch (10), then by optical phase delay device (11), then, by after the second collimator and extender device (12), becoming the plane reference light, the second spectroscope (7) described CCD camera of vertical incidence (8) is crossed in transmission.
2. utilize the measurement mechanism of beam-splitting optical grating beamlet array position phase claimed in claim 1 and light intensity to carry out position mutually and the measuring method of light intensity, it is characterized in that the method comprises the following steps:
1. beam-splitting optical grating to be measured (4) is placed in to described fourier lense (5) front focal plane;
2. open photoswitch (10), two-way light is interfered at described CCD camera (8) receiving plane, adjusts described optical phase delay device (11) travel(l)ing phase and is respectively
i=1,2,3,4 wherein, described CCD camera (8) gathers respectively the interference image data totally four times and be transferred in computing machine (13) and save as respectively I
1, I
2, I
3, I
4;
3. computing machine (13) utilizes following formula to calculate the position phase of corresponding beam-splitting optical grating (4) beamlet array
4. when measuring beam-splitting optical grating (4) beamlet array light intensity, close photoswitch (10), the light intensity data that described CCD camera (8) gathers is the distribution of the light intensity of beam-splitting optical grating to be measured (4) beamlet array.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113447244A (en) * | 2021-05-22 | 2021-09-28 | 西安电子科技大学 | Adjustable single-mode vortex light beam orbit angular momentum detection method based on holographic grating |
| CN115096177A (en) * | 2022-01-06 | 2022-09-23 | 同济大学 | Device and method for monitoring laser beam combination system beam by using sub-beam position |
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| CN102087503A (en) * | 2011-01-11 | 2011-06-08 | 浙江师范大学 | Double-random-phase optical color image encryption device and method |
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| CN102360091A (en) * | 2011-09-28 | 2012-02-22 | 中国科学院上海光学精密机械研究所 | Equipotential equal light intensity beam splitting Dammam optical grating and manufacturing method thereof |
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| CN101634594A (en) * | 2009-09-01 | 2010-01-27 | 中国科学院上海光学精密机械研究所 | Phase measuring device of beam splitter |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113447244A (en) * | 2021-05-22 | 2021-09-28 | 西安电子科技大学 | Adjustable single-mode vortex light beam orbit angular momentum detection method based on holographic grating |
| CN115096177A (en) * | 2022-01-06 | 2022-09-23 | 同济大学 | Device and method for monitoring laser beam combination system beam by using sub-beam position |
| CN115096177B (en) * | 2022-01-06 | 2023-08-04 | 同济大学 | Device and method for monitoring laser beam combining system beam by sub-beam position |
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