CN102941528A - Aluminum alloy material with high-precision super-smooth surface, polishing disk, polishing agent and polishing method - Google Patents
Aluminum alloy material with high-precision super-smooth surface, polishing disk, polishing agent and polishing method Download PDFInfo
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- CN102941528A CN102941528A CN201210470873XA CN201210470873A CN102941528A CN 102941528 A CN102941528 A CN 102941528A CN 201210470873X A CN201210470873X A CN 201210470873XA CN 201210470873 A CN201210470873 A CN 201210470873A CN 102941528 A CN102941528 A CN 102941528A
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- 238000005498 polishing Methods 0.000 title claims abstract description 194
- 229910000838 Al alloy Inorganic materials 0.000 title claims abstract description 91
- 239000000956 alloy Substances 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000007516 diamond turning Methods 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 9
- -1 polydimethylsiloxane Polymers 0.000 claims abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 6
- 239000004094 surface-active agent Substances 0.000 claims abstract description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 11
- 239000010432 diamond Substances 0.000 claims description 11
- 239000000843 powder Substances 0.000 claims description 11
- 238000007517 polishing process Methods 0.000 claims description 10
- 238000003825 pressing Methods 0.000 claims description 9
- 239000007800 oxidant agent Substances 0.000 claims description 8
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000007514 turning Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
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Abstract
The invention discloses a polishing method for an aluminum alloy material with a high-precision super-smooth surface and further discloses a polishing disk and a polishing agent. The polishing disk comprises a bottom disk body, a polishing pad, a polishing film and a compression piece, wherein the polishing film is coated outside the polishing pad, the compression piece hoops the edge of the polishing film and enables the polishing pad to be closely attached to the lower surface of the bottom disk body, and the polishing pad is made of polydimethylsiloxane (PDMS). The polishing agent is mainly prepared by water, diadust, hydrogen peroxide and a surfactant. The polishing method includes performing primary polishing on the surface of the aluminum alloy material through a single-point diamond turning process and then performing secondary polishing on the surface after the primary polishing through a computer-control optical surface forming process, the polishing disk and the polishing agent. The aluminum alloy material with the high-precision super-smooth surface (the roughness Ra<=2nm and the root-mean-square (RMS) value<=lambda/10) can be obtained according to the polishing disk, the polishing agent and the polishing method.
Description
Technical Field
The invention belongs to the technical field of surface polishing of optical materials, and particularly relates to a polished aluminum alloy material and corresponding polishing equipment, polishing solution and polishing process thereof.
Background
Aluminum alloys have very high reflectivity in the wide spectral range of infrared, visible, and up to ultraviolet, making it a good choice for multispectral imaging applications. In addition, the aluminum alloy has good processing performance, light weight, low price and higher thermal conductivity. Aluminum alloys are also the preferred support material for many optical systems, particularly aerospace applications, and the use of the same aluminum material for both the support structure and the optical components avoids thermal stresses due to different thermal expansion coefficients. However, since aluminum alloys have poor polishing properties and are easily oxidized, it is difficult to obtain a highly precise ultra-smooth surface.
The single-point diamond turning aluminum alloy can obtain a mirror surface with roughness Ra (Ra: contour arithmetic mean deviation) better than 5nm, but periodic turning knife lines are remained on the surface of the aluminum alloy, and the imaging quality is influenced. The single-point diamond turning essentially belongs to generating method processing, the surface precision of the turned aluminum alloy is limited by the movement precision of a lathe and the clamping deformation of a workpiece, and the high-precision surface shape is difficult to obtain. Mechanical chemical polishing (CMP) is a method by which global planarization can be achieved, and NASA Goddard space center, usa mentions in US 6966820B1 that adding ink to the polishing liquid polishes an aluminum mirror to obtain an ultra-smooth surface, but does not achieve fixed-point quantitative removal of material; intel corporation in chinese patent document CN101208399A discloses an aluminum alloy polishing abrasive consisting of a precipitated silica abrasive with a particle size of 100 nm or less and a chelating buffer; the silicon dioxide sol, the oxidant and the self-made chelating agent are used by Liuyuling and the like of Hebei industry university to polish metal alloy, so that a certain effect is achieved; however, the surface quality obtained by the existing aluminum alloy polishing process is still poor, and the polishing precision and the polishing quality are still required to be further improved.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, provides an aluminum alloy material with a high-precision ultra-smooth surface, correspondingly provides a polishing disc which is simple in structure, easy to manufacture and capable of being used for polishing the aluminum alloy material, provides polishing liquid which is simple in formula, easy in obtaining of raw materials, low in cost and capable of being used for polishing the aluminum alloy material, and comprehensively provides the polishing method of the aluminum alloy material, which is simple in process and good in polishing effect.
In order to solve the technical problems, the technical scheme provided by the invention is that the aluminum alloy material with a high-precision ultra-smooth surface has the roughness Ra of less than or equal to 2nm and the surface shape RMS (root mean square) value of less than or equal to lambda/10.
As a general technical concept, the invention further provides a polishing disk for polishing the aluminum alloy material, the polishing disk comprises a base plate, a polishing pad, a polishing film and a pressing piece, the polishing pad is located below the base plate, the polishing film is coated outside the polishing pad, the pressing piece hoops the edge of the polishing film and enables the polishing pad to be tightly close to the lower surface of the base plate, the polishing pad is made of viscoelastic material polydimethylsiloxane rubber (the thickness of the polishing pad is preferably 8 mm-15 mm), and the polishing film is made of damping flannelette for polishing (the thickness of the polishing film is preferably 0.5 mm-1 mm).
As a general technical concept, the invention also provides a polishing solution for polishing the aluminum alloy material, which is mainly prepared from the following components in percentage by volume:
93 to 95 percent of water
2 to 3 percent of diamond micro powder
1 to 2 percent of oxidant and
1% -2% of a surfactant; (preferably, ionic surfactants such as higher fatty acid salts and the like)
The oxidant is hydrogen peroxide solution with the mass concentration of 20-30%.
In the polishing solution, the pH of the polishing solution is preferably controlled to be 8 to 9 (generally, it is preferable to adjust the pH of the polishing solution by adding ammonia water or dilute sulfuric acid).
In the polishing liquid, the average particle size of the diamond fine powder is preferably 0.5 to 1 μm. The volume ratio of the water to the diamond micro powder is preferably 100: 1-30: 1.
As a general technical concept, the present invention also provides a polishing method of an aluminum alloy material having a high-precision ultra-smooth surface, comprising the steps of:
(1) preparing an aluminum alloy material to be polished, and firstly polishing the surface of the aluminum alloy material by adopting a conventional single-point diamond turning process to obtain a rough processed aluminum alloy surface;
(2) and (2) carrying out secondary polishing on the rough aluminum alloy surface obtained after the step (1) by adopting a computer-controlled optical surface forming process (CCOS), wherein a polishing tool adopted for the secondary polishing is the polishing disc, a polishing solution used in the secondary polishing process is the polishing solution, in the secondary polishing process, firstly, computer-controlled optical surface forming process software is used for calculating the processing residence time of each point on the rough aluminum alloy surface according to the removal function of the polishing disc and the initial surface shape of the rough aluminum alloy surface, and then, a numerical control system is used for controlling the polishing disc to finish the secondary polishing on the rough aluminum alloy surface according to a set polishing path and the processing residence time input in advance.
By adopting the polishing method, the ultra-smooth aluminum alloy material surface with the roughness Ra value superior to 2nm can be obtained, the aim of fixed-point and quantitative finishing of the aluminum alloy material surface shape can be achieved, and the RMS value of the finished aluminum alloy material surface shape is superior to lambda/10. The aluminum alloy material which can be processed by the polishing method comprises common 6061 aluminum alloy or 7075 aluminum alloy material and the like, and has no special requirements on the shape and the size of the aluminum alloy material.
In the secondary polishing process of the above polishing method, the polishing pressure is preferably not more than 0.04MPa, and the rotation speed of the polishing disk is preferably not more than 100 rpm.
The polishing method is mainly based on the following working principle: the polishing method adopts a combined polishing scheme of two-time polishing superposition, namely the high-precision ultra-smooth aluminum alloy material surface shape is obtained by trimming the surface shape after single-point diamond turning by means of the CCOS technology, and the CCOS technology can trim the surface shape after single-point diamond turning, mainly because the CCOS technology is a method capable of quantitatively removing optical materials, and the material removal amount is in direct proportion to the polishing pressure according to preston's theoremPSpeed, velocityVAnd polishing timetNamely: Δ =K·PVtWhereinKIs a constant; polishing the surface of a relatively large optical workpiece (e.g., an aluminum alloy material) by a relatively small polishing pad, and then standing at a high point for a relatively long time and at a low pointThe time is relatively short, so that the shape of the material surface can be gradually converged to higher precision.
In addition, successful application of the above-described polishing method of the present invention also benefits from the unique structure of the above-described polishing disk of the present invention and the unique advantages of the polishing solution. Because the aluminum alloy material polished by the polishing disc is a metal alloy with soft texture, the polished aluminum alloy material cannot scratch the surface of the obtained rough-processed aluminum alloy due to the use of the polishing disc consisting of the soft polydimethylsiloxane rubber and the damping flannelette, and the damping flannelette has the characteristics of fine texture, dense grooves and the like, thereby being beneficial to further improving the quality of the surface of the aluminum alloy material. In the polishing solution used in the polishing method, the diamond micro powder plays a role in cutting, and because the diamond micro powder has small particle size and stable property, the diamond micro powder does not react with aluminum and aluminum oxide and is not easy to agglomerate to form large hard particles, irregular shaping cutting is performed on the surface of the aluminum alloy, and the aluminum alloy material can be effectively removed. In addition, hydrogen peroxide is added into the polishing solution, and because the chemical property of aluminum is very active and is very easy to oxidize, and oxides such as aluminum oxide generated after oxidation are attached to the surface of the aluminum alloy, and the orange peel-shaped polishing defect is very easy to form, the oxidation of the aluminum can be promoted by adding the oxidant hydrogen peroxide into the polishing solution, so that the oxides are promoted to be rapidly separated from the surface of the aluminum alloy, and the polishing efficiency is improved. In addition, in the preferred technical scheme, the pH value of the polishing solution is controlled to be 8-9, so that the polishing solution is in a weakly alkaline mild environment, the polishing is facilitated, and the polishing quality is improved.
Compared with the prior art, the invention has the advantages that:
1. the CCOS technology is applied to the surface polishing of the aluminum alloy material, so that the fixed-point quantitative removal of the aluminum alloy material is realized, and the high-precision aluminum alloy surface shape with the roughness Ra of being better than 2nm and the surface shape RMS value of being better than lambda/10 is obtained;
2. by adopting the improved polishing disk and polishing solution to polish the aluminum alloy material, the directional turning lines left on the surface of the rough-machined aluminum alloy can be effectively removed, and the surface quality after polishing is further improved;
3. the polishing disc disclosed by the invention is simple in structure and easy to manufacture, and a good polishing effect can be obtained by simply replacing corresponding materials;
4. the polishing solution disclosed by the invention is simple in formula, easy in obtaining of raw materials and low in cost, and can be matched with the polishing disc and the polishing process for use, so that the polishing effect of the polishing solution disclosed by the invention can be obviously optimized;
5. the polishing method disclosed by the invention has simple steps, not only provides a twice polishing combination technology combining single-point diamond turning and a CCOS (continuous cavity operating system) technology, but also combines the improvement of a polishing disk and the optimization of components of polishing solution, and obtains an aluminum alloy polished surface with further improved surface quality by using lower process cost and higher polishing efficiency, thereby providing a wide application prospect for the wide application of the aluminum alloy material in the field of optics.
Drawings
FIG. 1 is a schematic view (cross-sectional view along a central axis) of the construction of a polishing pad in an embodiment of the invention.
FIG. 2 is a schematic drawing illustrating the polishing of the polishing pad on the surface of the aluminum alloy material according to the embodiment of the present invention.
FIG. 3 shows the surface shape accuracy measurement result of the rough machined aluminum alloy surface according to the embodiment of the invention.
Fig. 4 is a measurement result of the surface quality (i.e., roughness value) of the rough-machined aluminum alloy surface in the example of the present invention.
FIG. 5 is a characterization graph of the removal function obtained in an embodiment of the present invention.
FIG. 6 is a surface shape accuracy measurement result of the aluminum alloy material after the surface is secondarily polished in the embodiment of the invention.
FIG. 7 is a surface quality measurement result of the aluminum alloy material after the surface is secondarily polished in the embodiment of the invention.
Illustration of the drawings:
1. a polishing disk; 2. a chassis; 3. a polishing pad; 4. polishing the film; 5. a compression member; 6. roughly processing the surface of the aluminum alloy; 7. and (6) polishing the path.
Detailed Description
The invention is further described below with reference to the drawings and specific preferred embodiments of the description, without thereby limiting the scope of protection of the invention.
Example (b):
an aluminum alloy material having a highly accurate ultra-smooth surface according to the present invention as shown in fig. 6 and 7 has a roughness Ra of 1.563nm and a surface shape RMS value of 0.088 λ.
The aluminum alloy material with the high-precision ultra-smooth surface is obtained by the following polishing method, and specifically comprises the following steps:
1. primary polishing: preparing an aluminum alloy material to be polished, and firstly polishing the surface of the aluminum alloy material by adopting a conventional single-point diamond turning process to obtain a rough processed aluminum alloy surface; measuring the surface shape distribution of the rough machined aluminum alloy surface on a laser interferometer, wherein the measurement result is shown in figure 3; as can be seen from FIG. 3, the rough machined aluminum alloy surface is smoother, but the surface shape precision is lower; in addition, the surface quality of the rough aluminum alloy surface was measured on a white light interferometer (in this example, the measurement of the white light interferometer uses a 10 × lens), the detection range was 0.94mm × 0.7mm, and the detection result is as shown in fig. 4, as can be seen from fig. 4, directional turning lines remained on the rough aluminum alloy surface after single-point diamond turning, and the period d of the lines was equal to the turning feed step δ, that is:
wherein,vthe feeding speed of the cutter is unit mm/s;
is the main shaft rotating speed, unit radian/s; the turning lines belong to medium-frequency error components, so that light can be scattered at a small angle, and imaging quality is influenced.
2. Obtaining a removal function: the aluminum alloy material was polished at a set point under a suitable set of conditions using a polishing pad specifically designed according to the present invention and a polishing solution specifically formulated according to the present invention, to obtain a corresponding removal function as shown in fig. 5. The removal function represents the polishing spot size and the polishing efficiency of the polishing disk of the embodiment, and is an important basis for calculating the residence time in the subsequent steps. In addition, the parameters for modifying the surface shape of the aluminum alloy material in the subsequent secondary polishing must be the same as the parameters used for obtaining the removal function in this step, for example, the parameters of the removal function shown in fig. 5 should be the same as the polishing parameters given in this embodiment.
3. Determining the residence time of the CCOS process: according to the surface shape data of the rough-machined aluminum alloy surface after primary polishing in the step 1 and the removal function obtained in the step 2, utilizing CCOS process software to calculate the machining residence time of each point on the rough-machined aluminum alloy surface for CCOS secondary polishing, and generating a corresponding numerical control code; the principle of calculation is as follows: calculating residual error
The minimum, namely:
whereinSThe surface shape of the material is the initial surface shape,Fin order to remove the function(s),Tto process residence time.
4. And (3) secondary polishing: inputting the numerical control code generated in the step 3 into a numerical control system, scanning the rough machining aluminum alloy surface 6 at different speeds by using a special polishing disc and polishing liquid of the invention under the control of the numerical control system according to a pre-planned polishing path 7 (see figure 2), wherein the polishing pressure is 0.025MPa, the rotating speed of the polishing disc is 100rpm, and finally finishing the secondary polishing process. In order to control the surface quality of the aluminum alloy, if the initial surface shape error of the rough machined aluminum alloy surface is large, the total machining time can be shortenedTThe processing is divided into 2-3 times, because the processing time staying at the same point is too long, the surface quality of the aluminum alloy material can be deteriorated.
And finally, cleaning the surface of the aluminum alloy material obtained after the secondary polishing, detecting the surface shape error and the surface quality of the surface of the aluminum alloy material after the polishing, wherein the detection results are respectively shown in fig. 6 and 7, as can be seen from fig. 6 and 7, the precision of the surface shape after the polishing is greatly improved, the turned knife lines are removed, the roughness is further improved, and finally the aluminum alloy material with the high-precision ultra-smooth surface is obtained.
As shown in fig. 1, the polishing disk used in the above embodiment has a diameter of 20mm, and includes a chassis 2, a polishing pad 3, a polishing film 4, and a pressing member 5 (the pressing member in this embodiment is a pressing ring), where the polishing pad 3 is located below the chassis 2, the polishing film 4 is coated outside the polishing pad 3, the pressing member 5 grips the edge of the polishing film 4 and makes the polishing pad 3 abut against the lower surface of the chassis 2 to form a half-wrapped structure, the polishing pad 3 is made of a viscoelastic material, namely polydimethylsiloxane rubber (the thickness of the polishing pad is 5 mm), and the polishing film 4 is made of damping flannelette for polishing (the thickness of the polishing film is 1 mm).
The polishing solution used in the above embodiment is prepared from the following components in volume fraction:
95% of water;
2% of diamond micro powder; (average particle diameter: 0.5 μm)
2% of an oxidant; and
1% of higher fatty acid sodium.
Wherein the oxidant is hydrogen peroxide solution with the mass concentration of 30%; the pH value of the polishing solution is controlled to be 8-9. The volume ratio of the water to the diamond micro powder is controlled to be 100: 1-30: 1.
Claims (7)
1. The utility model provides an aluminum alloy material with high accuracy super smooth surface which characterized in that: the roughness Ra of the aluminum alloy material is less than or equal to 2nm, and the surface shape RMS value of the aluminum alloy material is less than or equal to lambda/10.
2. A polishing pad useful for polishing the aluminum alloy material of claim 1, the polishing pad comprising a bottom plate, a polishing pad, a polishing film, and a pressing member, the polishing pad being located below the bottom plate, the polishing pad being coated with the polishing film, the pressing member pinching the edge of the polishing film and pressing the polishing pad against the lower surface of the bottom plate, characterized in that: the polishing pad is made of polydimethylsiloxane rubber, and the polishing film is made of damping flannelette for polishing.
3. A polishing solution for polishing the aluminum alloy material of claim 1, which is prepared from the following components in percentage by volume:
93 to 95 percent of water
2 to 3 percent of diamond micro powder
1 to 2 percent of oxidant and
1% -2% of a surfactant;
the oxidant is hydrogen peroxide solution with the mass concentration of 20-30%.
4. The polishing solution according to claim 3, wherein: the pH value of the polishing solution is controlled to be 8-9.
5. The polishing solution according to claim 3 or 4, wherein: the average grain size of the diamond micro powder is 0.5-1 mu m, and the volume ratio of the water to the diamond micro powder is 100: 1-30: 1.
6. A polishing method of an aluminum alloy material with a high-precision ultra-smooth surface comprises the following steps:
(1) preparing an aluminum alloy material to be polished, and firstly polishing the surface of the aluminum alloy material by adopting a conventional single-point diamond turning process to obtain a rough processed aluminum alloy surface;
(2) and (2) carrying out secondary polishing on the rough aluminum alloy surface obtained after the step (1) by adopting a computer-controlled optical surface forming process, wherein a polishing tool adopted for the secondary polishing is a polishing disc as claimed in claim 2, a polishing solution used in the secondary polishing process is a polishing solution as claimed in any one of claims 3 to 5, in the secondary polishing process, firstly, computer-controlled optical surface forming process software is used for calculating the processing residence time of each point on the rough aluminum alloy surface according to the removal function of the polishing disc and the initial surface shape of the rough aluminum alloy surface, and then, a numerical control system is used for controlling the polishing disc to finish the secondary polishing on the rough aluminum alloy surface according to a set polishing path and the processing residence time which are input in advance.
7. The polishing method according to claim 6, characterized in that: in the secondary polishing process, the polishing pressure is not more than 0.04MPa, and the rotating speed of the polishing disc is not more than 100 rpm.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103495929A (en) * | 2013-09-18 | 2014-01-08 | 杭州百木表面技术有限公司 | Grinding and polishing method of metal strip |
| CN103934741A (en) * | 2014-04-01 | 2014-07-23 | 壹埃光学（苏州）有限公司 | Ultra-smooth polishing process with surface roughness reaching 0.1 nanoscale |
| CN104073170A (en) * | 2014-06-24 | 2014-10-01 | 江苏天恒纳米科技股份有限公司 | Special nano slurry for ultraprecise machining of surface of aluminum alloy and preparation method thereof |
| CN109176161A (en) * | 2018-10-18 | 2019-01-11 | 中国人民解放军国防科技大学 | High-surface-quality processing method for aluminum alloy reflector |
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| CN103495929A (en) * | 2013-09-18 | 2014-01-08 | 杭州百木表面技术有限公司 | Grinding and polishing method of metal strip |
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| CN104073170B (en) * | 2014-06-24 | 2015-11-18 | 江苏天恒纳米科技股份有限公司 | A kind of aluminum alloy surface Ultra-precision Turning special-purpose nanometer slurry and preparation method thereof |
| CN109176161A (en) * | 2018-10-18 | 2019-01-11 | 中国人民解放军国防科技大学 | High-surface-quality processing method for aluminum alloy reflector |
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