CN102931283B - 一种高效晶体硅太阳电池背面钝化的方法 - Google Patents
一种高效晶体硅太阳电池背面钝化的方法 Download PDFInfo
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- CN102931283B CN102931283B CN201210457016.6A CN201210457016A CN102931283B CN 102931283 B CN102931283 B CN 102931283B CN 201210457016 A CN201210457016 A CN 201210457016A CN 102931283 B CN102931283 B CN 102931283B
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CN102931283B true CN102931283B (zh) | 2014-12-10 |
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Families Citing this family (9)
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CN103981508A (zh) * | 2014-04-25 | 2014-08-13 | 武汉新芯集成电路制造有限公司 | 一种氮氧化硅渐变抗反射薄膜及其制备工艺 |
CN107464857A (zh) * | 2017-08-18 | 2017-12-12 | 常州亿晶光电科技有限公司 | 一种降低perc电池片衰减的镀膜工艺方法 |
CN108493760A (zh) * | 2018-04-10 | 2018-09-04 | 青岛海信宽带多媒体技术有限公司 | 一种Si3N4/SiON复合膜、激光器芯片及制备方法 |
CN108660436A (zh) * | 2018-05-18 | 2018-10-16 | 上海华虹宏力半导体制造有限公司 | 氮化硅反应炉的吹扫方法 |
CN109103093A (zh) * | 2018-07-16 | 2018-12-28 | 横店集团东磁股份有限公司 | 一种太阳能多晶电池片的镀膜工艺 |
CN110429020A (zh) * | 2019-06-28 | 2019-11-08 | 湖南红太阳光电科技有限公司 | 一种管式pecvd设备制备非晶硅薄膜的方法 |
CN110752273B (zh) * | 2019-10-30 | 2022-07-01 | 无锡尚德太阳能电力有限公司 | 应用在多晶硅片上简化的背面钝化电池工艺 |
CN112382696B (zh) * | 2020-10-15 | 2022-05-10 | 山西潞安太阳能科技有限责任公司 | 一种新型晶硅SiON双面电池背钝化工艺 |
CN112713216B (zh) * | 2020-12-30 | 2022-07-08 | 江苏润阳世纪光伏科技有限公司 | 一种太阳能电池的层叠减反射膜的制备方法 |
Citations (1)
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CN101894888A (zh) * | 2010-07-16 | 2010-11-24 | 山东力诺太阳能电力股份有限公司 | 一种掩膜阻挡背面扩散的太阳能电池制作工艺 |
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US20070137692A1 (en) * | 2005-12-16 | 2007-06-21 | Bp Corporation North America Inc. | Back-Contact Photovoltaic Cells |
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CN101894888A (zh) * | 2010-07-16 | 2010-11-24 | 山东力诺太阳能电力股份有限公司 | 一种掩膜阻挡背面扩散的太阳能电池制作工艺 |
Non-Patent Citations (2)
Title |
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PECVD技术淀积硅pn结太阳电池的双层抗反射膜;原小杰等;《半导体技术》;19891231(第04期);全文 * |
原小杰等.PECVD技术淀积硅pn结太阳电池的双层抗反射膜.《半导体技术》.1989,(第04期), * |
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Effective date of registration: 20170519 Address after: 214203 No. 20 Wen Zhuang Road, Yixing Economic Development Zone, Jiangsu, Wuxi Patentee after: Eastern link photovoltaic (Jiangsu) Co., Ltd. Address before: 214203 Wuxi City, Yixing Province Economic Development Zone, Wen Zhuang Road, No. 6, No. Patentee before: Yixing Magi Solar Technology Co., Ltd., Dongfang Electric Corporation |
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Address after: 214203 No. 20 Wen Zhuang Road, Yixing Economic Development Zone, Jiangsu, Wuxi Patentee after: Huansheng photovoltaic (Jiangsu) Co., Ltd Address before: 214203 No. 20 Wen Zhuang Road, Yixing Economic Development Zone, Jiangsu, Wuxi Patentee before: Eastern link photovoltaic (Jiangsu) Co., Ltd. |