CN102922130A - Transmission-type scanning galvanometer - Google Patents
Transmission-type scanning galvanometer Download PDFInfo
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- CN102922130A CN102922130A CN 201210388795 CN201210388795A CN102922130A CN 102922130 A CN102922130 A CN 102922130A CN 201210388795 CN201210388795 CN 201210388795 CN 201210388795 A CN201210388795 A CN 201210388795A CN 102922130 A CN102922130 A CN 102922130A
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Abstract
The invention belongs to the field of laser processing and discloses a transmission-type scanning galvanometer. According to the transmission-type scanning galvanometer, a flat optical element is arranged in a light path and used for translating light beams; the light beam translation displacement is changed by changing an angle between a normal of the flat optical element and incident light beams, the aim of controlling the transmission direction of the laser space is achieved, particularly two or more than two flat optical elements can be selected to be connected in series and are orthogonally arranged, the emergent light beams can make complex motion, and the transmission-type scanning galvanometer is particularly applied to the fields of special processing of laser milling, cutting, drilling and the like.
Description
Technical field
The invention belongs to field of laser processing, particularly the fields such as laser milling, cutting and boring.
Background technology
The rotary mirror type scanning system, its operation principle is that the laser of will derive from resonator is by expanding, become the reflection of two stepper motor driven speculums of 90 ° of installations through the space, focus on rear output action in processing on the object by the F-theta field lens, the rotation of speculum makes the laser action point on the working face mobile at X, Y-axis respectively, two minute surface co-operatings make laser can be on working face accomplish linear and various movement of curve.
The vibration mirror scanning process technology is identical with the rotary mirror type scanning system, and this typical control system has adopted a pair of mirror of turning back.Different is, the stepper motor that drives this cover eyeglass is replaced by servomotor, in this cover control system, the use of position sensor and the mentality of designing of negative feedback loop have further guaranteed the precision of system, and the sweep speed of whole system and repetitive positioning accuracy reach a new level.The vibration mirror scanning type labelling head mainly is made of XY scanning mirror, field lens, galvanometer and computer-controlled mark software etc.Its operation principle be with laser beam incident to two speculums (scanning mirror), the reflection angle of speculum computerizeds control, these two speculums can be respectively along X, Y axis scanning, thereby reach the deflection of laser beam, make have certain power density the Laser Focusing point on the mark material by required requirement campaign, thereby stay permanent mark at material surface.
Make a general survey of above technology, all be based on speculum and be installed on the electric machine main shaft, laser incident angle on speculum changes, and the return laser beam angle of reflection changes thereupon, thereby reaches the purpose of control laser beam space transmission.This technology when carrying out the control of very meticulous laser beam space orientation, has limitation, is subject to the restriction of galvanometer motor precision and galvanometer Control card precision.
Summary of the invention
The invention provides a kind of transmission-type scanning galvanometer, concrete scheme is as follows:
A kind of transmission-type scanning galvanometer is characterized in that: comprise planar optics element and scanning galvanometer;
Described planar optics element is arranged on the described scanning galvanometer;
Incident beam is by described planar optics element, adjusts the shift offset of incident beam and outgoing beam through surface normal and the angle of laser beam axis of described planar optics element, and the orientation is transmitted in the space of controlling light beam.
Preferably, the quantity of described planar optics element is two or more, with its series connection quadrature setting, or selects a planar optics element to use separately.
Preferably, described planar optics element is arranged on the electric machine main shaft of described scanning galvanometer.
The scope of the angle [alpha] that preferably, forms between the surface normal of described planar optics element and the beam optical axis is extremely positive 15 degree of negative 15 degree.
Preferably, the surface of described planar optics element process grinding and polishing, and be coated with anti-reflection film, and the corresponding wide angle of incidence anti-reflection film of optional plating.
Preferably, described planar optics element is dull and stereotyped quartz glass or dull and stereotyped sapphire.
The object of the invention is to single or a plurality of planar optics elements are together in series, adjust the shift offset of incident beam and outgoing beam by changing planar optics element surface normal and the angle of beam optical axis, reach and control the purpose that the orientation is transmitted in the light beam space.
This laser scanning methods is suitable for the meticulous Laser Processing of high accuracy, but its scanning breadth is very limited, and the configurable reflective galvanometer in back or platform kinematic system realize processing on a large scale.
The operation principle of transmission-type scanning galvanometer of the present invention is as follows: incident laser enters the planar optics element, through light refraction, the Laser Transmission direction is changed into deflecting light beams, then change outgoing beam into, the rotary main shaft that the planar optics element can wind perpendicular to the scanning galvanometer of paper carries out the angle rotation, therefore, deflecting light beams and outgoing beam transmission direction all change.Outgoing beam is parallel with incident beam in theory, and offset displacement amount and planar optics element are relevant around thickness and light refractive index that the rotary main shaft of scanning galvanometer carries out the number of degrees of angle rotation and planar optics element.
Use technical scheme of the present invention, compare with existing galvanometer technology, have following advantage and good effect:
(1) the present invention proposes to adopt the planar optics element that light beam is transmitted control, and incident beam and outgoing beam are directional light in theory, and this is different from the galvanometer that traditional employing reflection type optical element consists of.
(2) the present invention proposes to adopt the planar optics element that laser beam is transmitted control, the incident beam that the unit angle variation of planar optics element surface normal and beam optical axis angle causes and the translation side-play amount of outgoing beam are very little, are very suitable for high-precision laser transmission control;
(3) the present invention proposes single or a plurality of planar optics elements are connected, and the planar optics element is fixed on the electric machine main shaft, can realize very easily the motion control of laser high-precision complicated track.
Description of drawings
Fig. 1 is that embodiment 1 incident light is by the schematic diagram of planar optics element;
Fig. 2 is the apparatus structure schematic diagram of embodiment 1 stainless sheet steel laser drill;
Fig. 3 is the apparatus structure schematic diagram of embodiment 2 ceramic lasers boring;
Fig. 4 is the apparatus structure schematic diagram of embodiment 3 hyperfine marks.
The specific embodiment
Describe the present invention in detail below in conjunction with accompanying drawing and specific embodiment, be used for explaining the present invention in this illustrative examples of the present invention and explanation, but not as a limitation of the invention.
Embodiment 1:
Fig. 1 is the schematic diagram of incident light by the planar optics element in the transmission-type scanning galvanometer of the present invention, and Fig. 2 is the apparatus structure schematic diagram of stainless sheet steel laser drill, by Fig. 1 and Fig. 2 as can be known:
Incident light is as follows by the principle of planar optics element: incident beam 1 enters planar optics element 2, and through light refraction, the beam Propagation direction is changed into deflecting light beams 4, then obtains outgoing beam 5.The rotary main shaft 3 that planar optics element 2 can wind perpendicular to the scanning galvanometer of paper carries out the angle rotation, and deflecting light beams 4 and outgoing beam 5 all can change thereupon changing.
On the theory, outgoing beam 5 is parallel with incident beam 1, and offset displacement amount and planar optics element 2 wind rotary main shaft 3 perpendicular to the scanning galvanometer of paper, and to carry out thickness and the light refractive index of the angle rotation number of degrees and planar optics element relevant.
Light path flow process in the apparatus structure of whole stainless sheet steel laser drill is as follows: incident beam 11 obtains the first light beam 14 behind the first quartzy plate glass 12, described the first light beam 14 obtains the second light beam 18 through the second quartzy plate glass 17, described the second light beam 18 obtains the 3rd light beam 111 through the first reflecting optics 112 of galvanometer, described the 3rd light beam 111 obtains the 4th light beam 115 through the second reflecting optics 110 of galvanometer, described the 4th light beam 115 focuses on through heart focus lamp 116 far away, obtain focused beam 117, described focused beam 117 directly acts on workpiece to be processed 118.
The described second quartzy plate glass 17 is installed on the electric machine main shaft 16 of the first motor 15 of galvanometer.
The first reflecting optics 112 of described galvanometer is installed on the electric machine main shaft 113 of the second motor 114 of galvanometer.
The second reflecting optics 110 of described galvanometer is installed on No. two electric machine main shafts 19 of the second motor 114 of galvanometer.
Described workpiece to be processed 118 is 0.2 millimeter thickness stainless sheet steel.
The focal length of the camera lens of described heart focus lamp 116 far away is 100 millimeters.
Described focused beam 117(laser) relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor are less than 1.1, and hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode, pulse recurrence frequency 100 KHzs.
Described incident beam 11 is 5 millimeters incident beam-expanding collimation light beam for diameter, wavelength 532 nanometers, and incident beam 11 and the first light beam 14 place air refractions calculate by 1.
The rotating shaft 13 of the described first quartzy plate glass 12 also is the main shaft of galvanometer motor.
The refractive index of the described first quartzy plate glass 12 is 1.45, thickness 3mm, the 532nm anti-reflection film is all plated on its two sides, can wind rotating shaft 13 rotations perpendicular to the first quartzy plate glass 12 of paper, change so that the angle [alpha] of the normal of the described first quartzy plate glass 12 and incident beam 11 is 0～10 degree, change so that the first light beam 14 obtains corresponding shift offset 0～0.86mm with respect to described incident beam 11.
Conventional reflective vibration mirror scanning 50mm scope, present embodiment transmission-type scanning 0.86mm scope, its positional precision is the former 58 times, for very meticulous Laser Processing, the latter controls just simple a lot.
The described second quartzy plate glass 17 is identical with the first quartzy plate glass 12, but its rotating shaft (electric machine main shaft 16 of the first motor 15) and rotating shaft 13 spatial vertical, and direction is parallel to paper; Described electric machine main shaft 16 control the described second quartzy plate glass 17 change so that described the second light beam 18 obtains corresponding shift offset 0～0.86mm with respect to described the first light beam 14 so that the angle [alpha] of the described second quartzy plate glass 17 normals and described the first light beam 14 is 0～10 degree variation.
The motion of the described second quartzy plate glass 17 and the first quartzy plate glass 11 has directly determined the movement locus of described the second light beam 18, and the range of movement of present embodiment the second light beam 18 is the square of 0.86mm * 0.86mm.
In order to obtain large-scale Laser Processing, described the second light beam 18 enters traditional reflective galvanometer scanning system.
Two reflecting optics, first reflecting optics 112 of galvanometer matches with the second reflecting optics 110, hole of every completion of processing, just Focal Point Shift is arrived next position, laser is black out in this jump procedure, described the first reflecting optics 112 and the second reflecting optics 110 lock motionless again, this moment Laser output, motion control the second light beam 18 by the second quartzy plate glass 17 and the first quartzy plate glass 12 repeats picture circular motion, draw 180 microns of circular diameters, described focused beam 117 can get out in the relevant position 200 micron diameter through holes (20 microns of focus spot diameters), by this method, can get out needed via-hole array at described workpiece to be processed 118.
In fact by good wide region incidence angle anti-reflection film coating technique, can change so that the angle [alpha] of the normal of the first quartzy plate glass 12 and incident beam 11 is positive and negative 15 degree; The angle [alpha] of the second quartzy plate glass 17 normals and described the first light beam 14 is that positive and negative 15 degree change, and can strengthen to a certain extent sweep limits like this when guaranteeing precision.
The range of work of described heart focus lamp 116 far away is still limited after all, if the processing breadth is large not enough, in fact can also place described workpiece to be processed 118 on the mobile platform, can realize large-scale Laser Processing like this.
Embodiment 2:
Fig. 3 is the apparatus structure schematic diagram of ceramic laser boring, as shown in Figure 3, present embodiment is to increase by 2 dimension planar optics element moving components on the basis of embodiment 1 again, light path flow process in the apparatus structure of ceramic laser boring is as follows: initial incident beam 21 obtains the first light beam 24 through the first dull and stereotyped quartz glass 22, the first light beam 24 obtains the second light beam 28 through the second dull and stereotyped quartz glass 27 again, described the second light beam 28 obtains the 3rd light beam 211 through the 3rd dull and stereotyped quartz glass 29, described the 3rd light beam 211 obtains the 4th light beam 215 through Siping City's flag English glass 214, described the 4th light beam 215 obtains the 5th light beam 218 through the first reflecting optics 221 of scanning galvanometer, described the 5th light beam 218 obtains the 6th light beam 222 through the second reflecting optics 227 of scanning galvanometer, described the 6th light beam 222 obtains focused beam 224 through heart focus lamp 223 far away, and described focused beam 224 directly acts on workpiece to be processed 225.
The described first dull and stereotyped quartz glass 22 can be around 23 rotations of the first rotating shaft, and described the first rotating shaft 23 is the main shaft of motor.
The described second dull and stereotyped quartz glass 27 can be around 26 rotations of the second rotating shaft, and described the second rotating shaft 26 is the main shaft of motor 25.
The described the 3rd dull and stereotyped quartz glass 29 can be around 210 rotations of the 3rd rotating shaft, and described the 3rd rotating shaft 210 is the main shaft of motor.
Described Siping City flag English glass 214 can be around 213 rotations of the 4th rotating shaft, and described the 4th rotating shaft 213 is the main shaft of motor 212.
Described workpiece to be processed 225 is 0.3 millimeter thickness alumina ceramic plate.
Described initial incident beam 21 is incident beam-expanding collimation light beam, 5 millimeters of the diameters of light beam, and wavelength 532 nanometers, initial incident beam 21, the first light beam 24, the second light beam 28 and the 3rd light beam 211 place air refractions calculate by 1.
The refractive index of the described the 3rd dull and stereotyped quartz glass 29, Siping City's flag English glass the 214, second quartzy plate glass 27 and the first quartzy plate glass 22 is 1.45, thickness 3mm, and the 532nm anti-reflection film is all plated on the two sides.
Described focused beam 224(laser) relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor are less than 1.1, and hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode, pulse recurrence frequency 100 KHzs.
The described first dull and stereotyped quartz glass 22 can wind the first rotating shaft 23 rotations perpendicular to paper, so that being 0～10 degree, the angle of the normal of the first dull and stereotyped quartz glass 22 and initial incident beam 21 changes, so that the firstth light beam 24 obtains corresponding displacement parallel offset amount 0～0.86mm variation with respect to initial incident beam 21.
The deflection angle of each main shaft of above mentioned galvanometer is all identical.
Conventional reflective vibration mirror scanning 50mm scope, present embodiment transmission-type scanning 0.86mm scope, its positional precision is the former 58 times, for very meticulous Laser Processing, the latter controls just simple a lot.
The second rotating shaft 26 of the described second quartzy plate glass 27 and the first rotating shaft 23 spatial vertical, and direction is parallel to paper.The second rotating shaft 26 control the second quartzy plate glass 27 change so that the second light beam 28 obtains corresponding shift offset 0～0.86mm with respect to the first light beam 24 so that the angle of the surface normal of the second quartzy plate glass 27 and the first light beam 24 is 0～10 degree variation.
The motion of the described first dull and stereotyped quartz glass 22 and the second quartzy plate glass 27 has directly determined the movement locus of the second light beam 28, and the range of movement of the second light beam 28 is the square of 0.86mm * 0.86mm in the present embodiment.
The described the 3rd quartzy plate glass 29 winds the 3rd rotating shaft 210 rotations perpendicular to paper, change so that the angle of the surface normal of the described the 3rd quartzy plate glass 29 and the second light beam 28 is 0～10 degree, change so that the 3rd light beam 211 obtains corresponding shift offset 0～0.86mm with respect to described the second light beam 28.
Conventional reflective vibration mirror scanning 50mm scope, present embodiment transmission-type scanning 0.86mm scope, its positional precision is the former 58 times, for very meticulous Laser Processing, the latter controls just simple a lot.
The described the 4th quartzy plate glass 214 is identical with the 3rd quartzy plate glass 29, but its 4th rotating shaft 213 and the 3rd rotating shaft 210 spatial vertical, and direction is parallel to paper; Described the 4th rotating shaft 213 control the described the 4th quartzy plate glass 214 change so that described the 4th light beam 215 obtains corresponding shift offset 0～0.86mm with respect to described the 3rd light beam 211 so that the angle of the surface normal of the described the 4th quartzy plate glass 214 and described the 3rd light beam 211 is 0～10 degree variation.
The motion of the described the 4th quartzy plate glass 214 and the 3rd quartzy plate glass 29 has directly determined the movement locus of described the 4th light beam 215, and present embodiment the 4th light beam 215 is the square of 0.86mm * 0.86mm with respect to the range of movement of the second light beam 28.
The described first dull and stereotyped quartz glass 22, the second dull and stereotyped quartz glass 27, the 3rd quartzy plate glass 29 and the 4th quartzy plate glass 214 carry out the comprehensive angle motion control, the movement locus of the 4th light beam 215 will enrich complicated very much so, for example, the described first dull and stereotyped quartz glass 22 and the second dull and stereotyped quartz glass 27 aggregate motions, so that the second light beam 28 is done 50 microns circular motion of diameter, linear velocity 10 mm/second, the rotating speed of the second light beam 28 are 63.7 circles/seconds; So that the 4th light beam 215 is done 175 microns circular motion of diameter with respect to the second light beam 28, linear velocity 5 mm/second, relative rotation speed is 8 revolutions per seconds.Comprehensively described, the movement locus of the 4th light beam 215 is 175 micron diameter circular motion (revolution) and the resultant motion track of doing the circular motion (rotation) of 50 micron diameters around 175 microns circumference of diameter.Another kind of situation, if the motion rotating speed of the second light beam 28 is 10 circles/second, the 4th light beam 215 is 100 circles/seconds with respect to the rotating speed of the second light beam 28, the biosynthesis locus of the 4th light beam 215 at this time is a series of filling circles, forms the filling circle ring area.The biosynthesis locus referential is Laser Processing sample 225.
In order to obtain large-scale Laser Processing, the 4th light beam 215 enters traditional reflective galvanometer scanning system.
Traditional reflective galvanometer scanning system is with embodiment 1.
Two reflecting optics, first reflecting optics 221 of galvanometer matches with the second reflecting optics 217, hole of every completion of processing, just Focal Point Shift is arrived next position, laser is the black out state in the handoff procedure, described the first reflecting optics 221 and the second reflecting optics 217 lock motionless again, by the circular motion of the described first dull and stereotyped quartz glass 22 and second dull and stereotyped quartz glass 27 controls the second light beam 28, the circular motion speed of the second light beam 28 is 10 circles/seconds, 50 microns of circle diameters; Control the 4th light beam 215 with respect to the circular motion of the second light beam 28,175 microns of circular diameters by the described the 3rd quartzy plate glass 29 and the 4th quartzy plate glass 214; Described focused beam 224 can get out 200 micron diameter through holes in the relevant position, by this method, can get out needed via-hole array at described workpiece to be processed 225.
Described the first reflecting optics 221 is installed on the main shaft 219 of motor 220.
On the main shaft 216 that described the second reflecting optics 217 is installed in.
The range of work of described heart focus lamp 223 far away is still limited after all, if the processing breadth is large not enough, in fact can also place described workpiece to be processed 225 on the mobile platform, can realize large-scale Laser Processing like this.
The benefit of this processing mode of present embodiment is, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that keep simultaneously the long depth of focus of gauss laser and Gaussian distribution light intensity, needing to be very suitable for the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and control is very simple.Adopt traditional reflective galvanometer to process switching, no longer participate in the even Fast Filling scanning of the action of boring ring cutting or small scope, the working (machining) efficiency that also improves.
Embodiment 3:
Fig. 4 is the apparatus structure schematic diagram of hyperfine mark, as shown in Figure 4, the whole system of the device of hyperfine mark includes the first motor 39, the 3rd quartzy plate glass 38, electric machine main shaft 310, the 3rd light beam 311, static focus mirror 312, focused beam 313 and the workpiece to be processed 314 of irradiating light beam 31, the first quartzy plate glass 32, the first light beam 34, the second quartzy plate glass 35, the second light beam 37, galvanometer.
The described first quartzy plate glass 32 can be rotated around its first rotary main shaft 33 perpendicular to paper.
The described second quartzy plate glass 35 can be rotated around its second rotary main shaft 36 perpendicular to paper.
Described the first rotary main shaft 33 and the second rotary main shaft 36 are the main shaft of motor.
Described workpiece to be processed 314 is 0.2 millimeter thickness silicon crystal unit.
Described incident beam 31 is incident beam-expanding collimation light beam, 5 millimeters of the diameters of light beam, wavelength 532 nanometers.
Described incident beam 31, the first light beam 34, the second light beam 37 and the 3rd light beam 311 place air refractions calculate by 1.
The described first quartzy plate glass 32 thickness 5mm, the thickness 3mm of the described second quartzy plate glass 35 and the 3rd quartzy plate glass 38, refractive index is 1.45, and the 532nm anti-reflection film is all plated on the two sides; The described first quartzy plate glass 32 can wind the first rotary main shaft 33 rotations perpendicular to paper, change so that the angle of the surface normal of the first quartzy plate glass 32 and incident beam 31 is 0～10 degree, change so that the first light beam 34 obtains corresponding shift offset 0～1.4mm with respect to incident beam 31.
The described second quartzy plate glass 35 is around its second rotary main shaft 36 rotations perpendicular to paper, change so that the angle of the surface normal of the second quartzy plate glass 35 and the first light beam 34 is 0～10 degree, change so that the second light beam 37 obtains corresponding shift offset 0～0.86mm with respect to the first light beam 34.
Conventional reflective vibration mirror scanning 50mm scope, present embodiment transmission-type scanning 0.86mm scope, its positional precision is the former 58 times, for very meticulous Laser Processing, the latter controls just simple a lot.
The described the 3rd quartzy plate glass 38 is identical with the first quartzy plate glass 32, but its rotating shaft (electric machine main shaft 310 of the first motor 39 of galvanometer) and the second rotating shaft 36 spatial vertical, and direction is parallel to paper.
Described electric machine main shaft 310 controls the described the 3rd quartzy plate glass 38, change so that the angle of the surface normal of the 3rd quartzy plate glass 38 and the second light beam 37 is 0～10 degree, change so that the 3rd light beam 311 obtains corresponding shift offset 0～0.86mm with respect to the second light beam 37.
The motion of the described second quartzy plate glass 35 and the 3rd quartzy plate glass 38 has directly determined the movement locus of the 3rd light beam 311, and present embodiment the 3rd light beam 311 is the square of 0.86mm * 0.86mm with respect to the range of movement of the first light beam 34.
Described focus lamp 312 focal length 60mm, described focused beam 313 wavelength 532 nanometers, laser power 1W, pulse recurrence frequency 30KHz.
The described first quartzy plate glass 32, the second quartzy plate glass 35 and the 3rd quartzy plate glass 38 carry out integrated motion control.The described second quartzy plate glass 35 and the 3rd quartzy plate glass 38 are used for control focused beam 313 and carry out the character marking, 15 microns of stroke live widths, word is high 100 microns, the complete character of every marking, the first quartzy plate glass 32 switches to another regional marking character late with focused beam 313, and handoff procedure laser is in the black out state.
The technical program also can be used for the micro-markings of jewelry such as diamond.
Among above-described embodiment 1, embodiment 2 and the embodiment 3, all planar optics elements can also be selected dull and stereotyped sapphire, and grinding and polishing can be passed through in its surface, and is coated with anti-reflection film, and the corresponding wide angle of incidence anti-reflection film of optional plating.
Among above-described embodiment 1, embodiment 2 and the embodiment 3, in the time of the mutual spatial vertical of rotary main shaft of planar optics element, also need in theory vertically with beam optical axis, the alignment error in actual the use can be proofreaied and correct by control software and be got final product.
Above-described embodiment 1, embodiment 2 and embodiment 3 are three typical application of the present invention, and in fact its application of principle is not limited to top described situation, such as processing bellmouth even blind hole etc. at transparent material or hard brittle material.
In a word, the present invention proposes a kind of transmission-type vibration mirror scanning galvanometer, and its important feature is: place light path to be used for light beam translation the planar optics element; The angle that changes planar optics element surface normal and incident beam changes the purpose that the light beam translation displacement reaches the control Laser Transmission; Especially two or more planar optics element series connection quadrature is placed, can be allowed outgoing beam carry out very complicated motion, be particularly suitable for some special manufacture fields; Two optical surface plating wide-angle anti-reflection film better effects if of planar optics element.
More than technical scheme that the embodiment of the invention is provided be described in detail, used specific case herein principle and the embodiment of the embodiment of the invention are set forth, the explanation of above embodiment is only applicable to help to understand the principle of the embodiment of the invention; Simultaneously, for one of ordinary skill in the art, according to the embodiment of the invention, all will change on the specific embodiment and range of application, in sum, this description should not be construed as limitation of the present invention.
Claims (6)
1. a transmission-type scanning galvanometer is characterized in that: comprise planar optics element and scanning galvanometer;
Described planar optics element is arranged on the described scanning galvanometer;
Incident beam is by described planar optics element, adjusts the shift offset of incident beam and outgoing beam through surface normal and the angle of laser beam axis of described planar optics element, and the orientation is transmitted in the space of controlling light beam.
2. transmission-type scanning galvanometer according to claim 1 is characterized in that the quantity of described planar optics element is two or more, with its series connection quadrature setting.
3. transmission-type scanning galvanometer according to claim 1 and 2 is characterized in that described planar optics element is arranged on the electric machine main shaft of described scanning galvanometer.
4. transmission-type scanning galvanometer according to claim 1 and 2, it is characterized in that the angle [alpha] that forms between the surface normal of described planar optics element and the beam optical axis for negative 15 degree to positive 15 degree.
5. transmission-type scanning galvanometer according to claim 1 and 2 is characterized in that the surface of described planar optics element through grinding and polishing, and is coated with anti-reflection film.
6. transmission-type scanning galvanometer according to claim 1 and 2 is characterized in that described planar optics element is dull and stereotyped quartz glass or dull and stereotyped sapphire.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201210388795 CN102922130A (en) | 2012-10-12 | 2012-10-12 | Transmission-type scanning galvanometer |
| CN 201320098197 CN203265914U (en) | 2012-10-12 | 2013-03-04 | Large-breadth micropore high-speed hole-drilling system |
| CN201310068726.4A CN103203552B (en) | 2012-10-12 | 2013-03-04 | A kind of large format micropore high speed drilling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201210388795 CN102922130A (en) | 2012-10-12 | 2012-10-12 | Transmission-type scanning galvanometer |
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|---|---|
| CN102922130A true CN102922130A (en) | 2013-02-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201210388795 Pending CN102922130A (en) | 2012-10-12 | 2012-10-12 | Transmission-type scanning galvanometer |
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Application publication date: 20130213 |