CN102916102A - Optoelectronic component - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
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Abstract
一种光电元件,包含:一半导体叠层,包含:一第一半导体层、一主动层、及一第二半导体层;一第一电极与第一半导体层电性连接;一第二电极与第二半导体层电性连接,其中第一电极与第二电极有一最小距离D1;一第三电极形成在部分第一电极之上且与第一电极电性连接;及一第四电极形成在部分第一电极之上及部分第二电极之上且与第二电极电性连接,其中第三电极与第四电极有一最小距离D2,且第三电极与第四电极的最小距离D2小于第一延伸电极及第二电极的最小距离D1。本发明的光电元件具有较高的光摘出效率。
A photoelectric element comprises: a semiconductor stack, comprising: a first semiconductor layer, an active layer, and a second semiconductor layer; a first electrode electrically connected to the first semiconductor layer; a second electrode electrically connected to the second semiconductor layer, wherein the first electrode and the second electrode have a minimum distance D1; a third electrode formed on a portion of the first electrode and electrically connected to the first electrode; and a fourth electrode formed on a portion of the first electrode and a portion of the second electrode and electrically connected to the second electrode, wherein the third electrode and the fourth electrode have a minimum distance D2, and the minimum distance D2 between the third electrode and the fourth electrode is less than the minimum distance D1 between the first extension electrode and the second electrode. The photoelectric element of the present invention has a higher light extraction efficiency.
Description
技术领域 technical field
本发明是关于一种可增进光摘出效率的光电元件结构。The present invention relates to a photoelectric element structure capable of improving light extraction efficiency.
背景技术 Background technique
发光二极体是半导体元件中一种被广泛使用的光源。相较于传统的白炽灯泡或萤光灯管,发光二极体具有省电及使用寿命较长的特性,因此逐渐取代传统光源而应用于各种领域,如交通号志、背光模组、路灯照明、医疗设备等产业。Light-emitting diodes are a widely used light source in semiconductor components. Compared with traditional incandescent light bulbs or fluorescent tubes, light-emitting diodes have the characteristics of energy saving and long service life, so they gradually replace traditional light sources and are used in various fields, such as traffic signs, backlight modules, street lights Lighting, medical equipment and other industries.
随着发光二极体光源的应用与发展对于亮度的需求越来越高,如何增加其发光效率以提高其亮度,便成为产业界所共同努力的重要方向。With the application and development of light-emitting diode light sources, the demand for brightness is getting higher and higher. How to increase its luminous efficiency to improve its brightness has become an important direction for the industry to work together.
第1图描述了现有技术中用于半导体发光元件的LED封装10:包括由封装体11封装的半导体LED晶片12,其中半导体LED晶片12具有一p-n接面13,封装体11通常是热固性材料,例如环氧树脂(epoxy)或者热塑胶材料。半导体LED晶片12透过一焊线(wire)14与两导电架15、16连接。因为环氧树脂(epoxy)在高温中会有劣化(degrading)现象,因此只能在低温环境运作。此外,环氧树脂(epoxy)具很高的热阻(thermalresistance),使得第一图的结构只提供了半导体LED晶片12高阻值的热散逸途径,而限制了LED 10的低功耗应用。Figure 1 depicts an
发明内容 Contents of the invention
有鉴于此,本发明提出一覆晶(flip chip)式光电元件结构。In view of this, the present invention proposes a flip chip photoelectric element structure.
本发明揭露一种光电元件,包含:一半导体叠层,包含:一第一半导体层、一主动层、及一第二半导体层;一第一电极与第一半导体层电性连接;一第二电极与第二半导体层电性连接,其中第一电极与第二电极有一最小距离D1;一第三电极形成在部分第一电极之上且与第一电极电性连接;及一第四电极形成在部分第一电极之上及部分第二电极之上且与第二电极电性连接,其中第三电极与第四电极有一最小距离D2,且第三电极与第四电极的最小距离D2小于第一延伸电极及第二电极的最小距离D1。The invention discloses a photoelectric element, comprising: a semiconductor stack, including: a first semiconductor layer, an active layer, and a second semiconductor layer; a first electrode electrically connected to the first semiconductor layer; a second The electrodes are electrically connected to the second semiconductor layer, wherein the first electrode and the second electrode have a minimum distance D1; a third electrode is formed on part of the first electrode and is electrically connected to the first electrode; and a fourth electrode is formed On part of the first electrode and part of the second electrode and electrically connected to the second electrode, wherein the third electrode and the fourth electrode have a minimum distance D2, and the minimum distance D2 between the third electrode and the fourth electrode is smaller than the first electrode A minimum distance D1 between the extension electrode and the second electrode.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,而可依照说明书的内容予以实施,并且为了让本发明的上述和其它目的、特征和优点能够更明显易懂,以下特举较佳实施例,并配合附图,详细说明如下。The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the following preferred embodiments are specifically cited below, and are described in detail as follows in conjunction with the accompanying drawings.
附图说明 Description of drawings
图1是现有的发光元件结构图。Fig. 1 is a structural diagram of a conventional light-emitting element.
图2A-2D,2F-2H是本发明第一实施例的发光元件上视图。2A-2D, 2F-2H are top views of the light-emitting element of the first embodiment of the present invention.
图2E是本发明第一实施例的发光元件剖面图。FIG. 2E is a cross-sectional view of the light emitting element of the first embodiment of the present invention.
图3A-3D是本发明第二实施例的发光元件上视图。3A-3D are top views of a light emitting element according to a second embodiment of the present invention.
具体实施方式 Detailed ways
为了使本发明的叙述更加详尽与完备,请参照下列描述并配合图2A至图3C的图示。如图2A~图2H所例示,依据本发明第一实施例的光电元件的上视图如下:如图2A所示,本发明第一实施例的光电元件包含一基板100,一第一半导体层101、一第一电极102及一自第一电极102沿伸出来的第一延伸电极103。在第一半导体层101之上形成一主动层(未显示)与一第二半导体层(未显示),并在第二半导体层(未显示)之上形成一第二电极104。In order to make the description of the present invention more detailed and complete, please refer to the following description together with the illustrations in FIG. 2A to FIG. 3C . As illustrated in Figures 2A to 2H, the top view of the optoelectronic element according to the first embodiment of the present invention is as follows: As shown in Figure 2A, the optoelectronic element of the first embodiment of the present invention includes a
此外,如图2B所示,形成在第二半导体层1012之上的第二电极104’也包含至少一延伸自第二电极104’的第二延伸电极1041。在一实施例中,至少一第二延伸电极1041可形成在两条第一延伸电极103之间。在一实施例中,也可于未被第二电极104与第二延伸电极1041覆盖的第二半导体层1012之上选择性地形成一反射层(未显示),以增加反射效率。其中,上述第一延伸电极103与第二延伸电极1041依不同设计,可为一弧形或弯曲形状。In addition, as shown in FIG. 2B , the second electrode 104' formed on the
接着延续图2A,如图2C所示,以一第一绝缘层105覆盖部分的第二电极104及部分的第一延伸电极103,使第一电极102、部分的第一延伸电极103及部分的第二电极104裸露出来。其中可定义一第一延伸电极103及第二电极104的最小距离D1。其中第一延伸电极103及第二电极104的最小距离D1可介于10~50μm、或10~40μm、或10~30μm、或10~20μm、或10~15μm。Then continue to FIG. 2A, as shown in FIG. 2C, a first
最后,如图2D所示一第三电极106可形成在第一电极102、第一延伸电极103及第一绝缘层105之上,并与第一电极102、第一延伸电极103电性连接。一第四电极107可形成在第二电极104及部分第一绝缘层105之上,并与第二电极104电性连接。Finally, as shown in FIG. 2D , a
其中第三电极106可包含至少一第一平面区1061及至少一第一凸出部1062:第一平面区1061可大致呈一长方型结构,至少一第一凸出部1062可延伸自第一平面区1061且覆盖未被第一平面区1061覆盖的裸露出的第一延伸电极103。Wherein the
第四电极107可包含至少一第二平面区1071及至少一第二凸出部1072:第二平面区1071可大致呈一长方型结构,至少一第二凸出部1072可延伸自第二平面区1071且覆盖未被第二平面区1071覆盖的部分第一绝缘层105。其中第一凸出部1062与第二凸出部1072可定义出一最小距离D2。其中第一凸出部1062与第二凸出部1072的最小距离D2可介于1~10μm、或2~10μm、或4~10μm、或6~10μm、或8~10μm。The
在本实施例中,上述第一凸出部1062与第二凸出部1072可尽量靠近,以增加第一延伸电极103被覆盖的区域并减少第一绝缘层105未被覆盖的面积,以增加第三电极106与第一延伸电极103的接触面积而增加电性可信度,并可减少第一绝缘层105裸露的面积,进而增加反射面积,而将光线反射以增加正向出光。In this embodiment, the
在一实施例中,为达到上述的功能,第一凸出部1062与第二凸出部1072的最小距离D2应尽可能最小化,且第一凸出部1062与第二凸出部1072的最小距离D2距离可小于第一延伸电极103及第二电极104的最小距离D1。In one embodiment, in order to achieve the above functions, the minimum distance D2 between the
在一实施例中,第一延伸电极103未被第三电极106与第四电极107覆盖的面积小于第一延伸电极103总面积的2%、或1.8%、或1.5%、或1.3%、或1%、或0.8%。In one embodiment, the area of the first extended
如图2E所示,是显示本实施例图2D中虚线位置的剖面示意图,包含一基板100,形成在基板100之上的一第一半导体层101、一主动层1011与一第二半导体层1012,及分别形成在第一半导体层101及第二半导体层1012上的第一电极102与第二电极104。如上述说明,先以第一绝缘层105分隔开第一电极102与第二电极104,并在第一电极102与第二电极104之上分别形成第三电极106与第四电极107。As shown in FIG. 2E, it is a schematic cross-sectional view showing the dotted line position in FIG. 2D of this embodiment, including a
如图2F所示,在一实施例中,也可形成一第二绝缘层108覆盖上述第一凸出部1062与第二凸出部1072及部分的第一延伸电极103及部分的第一绝缘层105,藉以避免由于第一凸出部1062与第二凸出部1072的最小距离D2的缩小所造成的短路风险。As shown in FIG. 2F , in one embodiment, a second insulating layer 108 can also be formed to cover the
如图2G所示,在一实施例中,可分别形成一第一焊垫(bondingpad)109及一第二焊垫110于第三电极106及第四电极107之上。第一焊垫109及一第二焊垫110可大致呈一长方型结构,并定义一第一焊垫109及一第二焊垫110的最小距离D3。在一实施例中,第一凸出部1062与第二凸出部1072的最小距离D2距离可小于第一焊垫109及一第二焊垫110的最小距离D3,其中第一焊垫109及一第二焊垫110的最小距离D3可介于40μm~600μm、或60μm~600μm、或80μm~600μm、或100μm~600μm、或150μm~600μm、或200μm~600μm、或250μm~600μm、或300μm~600μm、或350μm~600μm、或400μm~600μm、或450μm~600μm、或500μm~600μm、或550μm~600μm。As shown in FIG. 2G , in one embodiment, a first bonding pad (bonding pad) 109 and a
如图2H所示,在一实施例中,可形成多数个第二焊垫110’于第四电极107之上且不覆盖第一延伸电极103。As shown in FIG. 2H , in one embodiment, a plurality of second pads 110' can be formed on the
上述第一电极102、第一延伸电极103、第二电极104、第三电极106、第四电极107、第一焊垫109及一第二焊垫110、110’的材料可选自:铬(Cr)、钛(Ti)、镍(Ni)、铂(Pt)、铜(Cu)、金(Au)、铝(Al)、钨(W)、锡(Sn)、或银(Ag)等金属材料。The materials of the
如图3A~图3C所例示,依据本发明第二实施例的光电元件的上视图如下:如图3A所示,本发明第二实施例的光电元件包含一基板200,一第一半导体层201、一第一电极202及一自第一电极202延伸出来的第一延伸电极203。之后,在第一半导体层201之上形成一主动层(未显示)与一第二半导体层(未显示),并在第二半导体层(未显示)之上形成一第二电极204,且定义一第一延伸电极203及第二电极204的最小距离D1。其中第一延伸电极203及第二电极204的最小距离D1可介于10~50μm、或10~40μm、或10~30μm、或10~20μm、或10~15μm。As shown in Figures 3A to 3C, the top view of the optoelectronic element according to the second embodiment of the present invention is as follows: As shown in Figure 3A, the optoelectronic element of the second embodiment of the present invention includes a
此外,第二电极204也可包含至少一延伸自第二电极204的第二延伸电极(未显示)。在一实施例中,至少一第二延伸电极(未显示)可形成在两条第一延伸电极203之间。在一实施例中,也可于未被第二电极204与第二延伸电极(未显示)覆盖的第二半导体层(未显示)之上选择性地形成一反射层(未显示),以增加反射效率。其中,上述第一延伸电极203与第二延伸电极(未显示)依不同设计,可为一弧形或弯曲形状。In addition, the
接着,以一第一绝缘层205覆盖部分的第二电极204及部分的第一延伸电极203,使第一电极202、部分的第一延伸电极203及部分的第二电极204裸露出来。Next, a first insulating
最后,一第三电极206可形成在第一电极202、第一延伸电极203及第一绝缘层205之上,并与第一电极202、第一延伸电极203电性连接。至少一第四电极207可形成在第二电极204及部分第一绝缘层205之上,并与第二电极204电性连接。Finally, a
其中第三电极206可为一梳子形状,包含至少一第一平面区2061及至少一第一凸出部2062:第一平面区2061可大致呈一长方型结构,至少一第一凸出部2062可延伸自第一平面区2061且覆盖未被第一平面区2061覆盖的裸露出的第一延伸电极203。在本实施例中,上述第一凸出部2062的平行第一延伸电极203长端的边长大于垂直第一延伸电极203长端的边长。Wherein the
第四电极207可大致呈一长方型结构,覆盖在被第一绝缘层205覆盖的第一延伸电极203之上。其中第一凸出部2062与第四电极207可定义出一最小距离D2。其中第一凸出部2062与第四电极207的最小距离D2可介于1~10μm、或2~10μm、或4~10μm、或6~10μm、或8~10μm。The
在本实施例中,通过将第三电极206设计成为梳子形状且与第一电极202、第一延伸电极203精准对位可达成第三电极206及第四电极207的最小化设计而节省材料成本。In this embodiment, by designing the
在本实施例中,上述第一凸出部2062与第四电极207可尽量靠近,以增加第一延伸电极203被覆盖的区域并减少第一绝缘层205未被覆盖的面积,以增加第三电极206与第一延伸电极203的接触面积而增加电性可信度,并可减少第一绝缘层205裸露的面积,进而增加反射面积,而将光线反射以增加正向出光。In this embodiment, the first protruding
在一实施例中,为达到上述的功能,第一凸出部2062与第四电极207的最小距离D2应尽可能最小化,且第一凸出部2062与第四电极207的最小距离D2距离可小于第一延伸电极203及第二电极204的最小距离D1。In one embodiment, in order to achieve the above functions, the minimum distance D2 between the first protruding
在一实施例中,第一延伸电极203未被第三电极206与第四电极207覆盖的面积小于第一延伸电极203总面积的2%、或1.8%、或1.5%、或1.3%、或1%、或0.8%。In one embodiment, the area of the first
如图3B所示,在一实施例中,也可形成一第二绝缘层208覆盖上述第一凸出部2062与第四电极207及部分的第一延伸电极203及部分的第一绝缘层205,藉以避免由于第一凸出部2062与第四电极207的最小距离D2的缩小所造成的短路风险。As shown in FIG. 3B , in one embodiment, a second insulating
如图3C所示,在一实施例中,可分别形成一第一焊垫(bondingpad)209及一第二焊垫210于第三电极206及第四电极207之上。第一焊垫209可包括至少两部分,包含一梳子状的第一区2091形成在上述第三电极206之上及至少一第二区2092形成在两第一延伸电极203之间及第一绝缘层205之上。第二焊垫210可大致呈一长方型结构,并定义一第一焊垫209及一第二焊垫210的最小距离D3,在一实施例中,第一凸出部2062与第四电极207的最小距离D2距离可小于第一焊垫209及一第二焊垫210的最小距离D3。其中第一焊垫209及一第二焊垫210的最小距离D3可介于40μm~600μm、或60μm~600μm、或80μm~600μm、或100μm~600μm、或150μm~600μm、或200μm~600μm、或250μm~600μm、或300μm~600μm、或350μm~600μm、或400μm~600μm、或450μm~600μm、或500μm~600μm、或550μm~600μm。As shown in FIG. 3C , in one embodiment, a first bonding pad (bonding pad) 209 and a
在本实施例中,第一焊垫209的第二区2092未与第一电极202、第一电极延伸部203、第二电极204、第三电极206、第四电极207、第二焊垫210、以及第一焊垫209的第一区2091电性相连,且第二区2092的材料选自导热系数高及反射率高的材料,例如铜(Cu)、铝(Al)、锡(Sn)、金(Au)、铂(Pt)、银(Ag)等导热系数大于50W/ml及反射率大于50%的材料。此设计可使本光电元件于之后的覆晶制程中在承受推力时不会直接拉扯到第一延伸电极203与第三电极206,而可增加元件的强度,减少失效的风险,且使用高导热系数及高反射率材料的特性,使得第二区2092可作为光电元件的散热途径,进而增加反射面积,而将光线反射以增加正向出光。In this embodiment, the
如图3D所示,在一实施例中,可形成多数个第二焊垫210’于第四电极207之上且不覆盖第一延伸电极203。As shown in FIG. 3D , in one embodiment, a plurality of second pads 210' can be formed on the
上述第一电极202、第一延伸电极203、第二电极204、第三电极206、第四电极207、第一焊垫209及一第二焊垫210、210’的材料可选自:铬(Cr)、钛(Ti)、镍(Ni)、铂(Pt)、铜(Cu)、金(Au)、铝(Al)、钨(W)、锡(Sn)、或银(Ag)等金属材料。The materials of the
具体而言,光电元件包含发光二极体(LED)、光电二极体(photodiode)、光敏电阻(photoresister)、雷射(laser)、红外线发射体(infrared emitter)、有机发光二极体(organic light-emitting diode)及太阳能电池(solar cell)中至少其一。基板100、200为一成长及/或承载基础。候选材料可包含导电基板或不导电基板、透光基板或不透光基板。其中导电基板材料其一可为锗(Ge)、砷化镓(GaAs)、铟化磷(InP)、碳化硅(SiC)、硅(Si)、铝酸锂(LiAlO2)、氧化锌(ZnO)、氮化镓(GaN)、氮化铝(AlN)、金属。透光基板材料其一可为蓝宝石(Sapphire)、铝酸锂(LiAlO2)、氧化锌(ZnO)、氮化镓(GaN)、氮化铝(AlN)、玻璃、钻石、CVD钻石、与类钻碳(Diamond-Like Carbon;DLC)、尖晶石(spinel,MgAl2O4)、氧化铝(Al2O3)、氧化硅(SiOX)及镓酸锂(LiGaO2)。Specifically, optoelectronic components include light-emitting diodes (LEDs), photodiodes (photodiodes), photoresistors (photoresisters), lasers (lasers), infrared emitters (infrared emitters), organic light-emitting diodes (organic At least one of light-emitting diode) and solar cell (solar cell). The
上述第一半导体层101、201及第二半导体层(未显示)彼此中至少二个部分的电性、极性或掺杂物相异、或者分别用以提供电子与电洞的半导体材料单层或多层(「多层」是指二层或二层以上,以下同。),其电性选择可以为p型、n型、及i型中至少任意二者之组合。主动层(未显示)是位于第一半导体层101、201及第二半导体层(未显示)之间,为电能与光能可能发生转换或被诱发转换的区域。电能转变或诱发光能者例如为发光二极体、液晶显示器、有机发光二极体;光能转变或诱发电能者例如为太阳能电池、光电二极体。上述第一半导体层101、201、主动层(未显示)及第二半导体层(未显示)其材料包含一种或一种以上的元素选自镓(Ga)、铝(Al)、铟(In)、砷(As)、磷(P)、氮(N)以及硅(Si)所构成群组。The above-mentioned
依据本发明的另一实施例的光电元件是一发光二极体,其发光频谱可以通过改变半导体单层或多层的物理或化学要素进行调整。常用的材料例如为磷化铝镓铟(AlGaInP)系列、氮化铝镓铟(AlGaInN)系列、氧化锌(ZnO)系列等。主动层(未显示)的结构例如为:单异质结构(singleheterostructure;SH)、双异质结构(double heterostructure;DH)、双侧双异质结构(double-side double heterostructure;DDH)、或多层量子井(multi-quantμm well;MQW)。再者,调整量子井的对数也可以改变发光波长。The photoelectric element according to another embodiment of the present invention is a light-emitting diode, and its light-emitting spectrum can be adjusted by changing the physical or chemical elements of the semiconductor single layer or multiple layers. Commonly used materials are, for example, aluminum gallium indium phosphide (AlGaInP) series, aluminum gallium indium nitride (AlGaInN) series, zinc oxide (ZnO) series, and the like. The structure of the active layer (not shown) is, for example: single heterostructure (single heterostructure; SH), double heterostructure (double heterostructure; DH), double-side double heterostructure (double-side double heterostructure; DDH), or multiple Layer quantum well (multi-quantμm well; MQW). Furthermore, adjusting the logarithm of the quantum well can also change the emission wavelength.
于本发明的一实施例中,第一半导体层101、201与基板100、200间尚可选择性地包含一缓冲层(buffer layer,图未示)。此缓冲层是介于二种材料系统之间,使基板的材料系统“过渡”至半导体系统的材料系统。对发光二极体的结构而言,一方面,缓冲层是用以降低二种材料间晶格不匹配的材料层。另一方面,缓冲层也可以是用以结合二种材料或二个分离结构的单层、多层或结构,其可选用的材料例如为:有机材料、无机材料、金属、及半导体等;其可选用的结构例如为:反射层、导热层、导电层、欧姆接触(ohmic contact)层、抗形变层、应力释放(stress release)层、应力调整(stress adjustment)层、接合(bonding)层、波长转换层、及机械固定构造等。在一实施例中,此缓冲层的材料可为AlN、GaN,且形成方法可为溅镀(Sputter)或原子层沉积(Atomic Layer Deposition,ALD)。In an embodiment of the present invention, a buffer layer (not shown in the figure) may optionally be included between the
第二半导体层(未显示)上更可选择性地形成一接触层(未显示)。接触层是设置于第二半导体层(未显示)远离主动层(未显示)的一侧。具体而言,接触层可以为光学层、电学层、或其二者之组合。光学层可以改变来自于或进入主动层(未显示)的电磁辐射或光线。在此所称的「改变」是指改变电磁辐射或光的至少一种光学特性,前述特性是包含但不限于频率、波长、强度、通量、效率、色温、演色性(rendering index)、光场(light field)、及可视角(angle of view)。电学层可以使得接触层的任一组相对侧间的电压、电阻、电流、电容中至少其一的数值、密度、分布发生变化或有发生变化的趋势。接触层的构成材料包含氧化物、导电氧化物、透明氧化物、具有50%或以上穿透率的氧化物、金属、相对透光金属、具有50%或以上穿透率的金属、有机质、无机质、萤光物、磷光物、陶瓷、半导体、掺杂的半导体、及无掺杂的半导体中至少其一。于某些应用中,接触层的材料为氧化铟锡、氧化镉锡、氧化锑锡、氧化铟锌、氧化锌铝、与氧化锌锡中至少其一。若为相对透光金属,其厚度约为0.005μm~0.6μm。A contact layer (not shown) is optionally formed on the second semiconductor layer (not shown). The contact layer is disposed on a side of the second semiconductor layer (not shown) away from the active layer (not shown). Specifically, the contact layer may be an optical layer, an electrical layer, or a combination thereof. The optical layer can modify electromagnetic radiation or light from or into the active layer (not shown). "Change" as used herein refers to changing at least one optical characteristic of electromagnetic radiation or light, the aforementioned characteristics including but not limited to frequency, wavelength, intensity, flux, efficiency, color temperature, color rendering (rendering index), light field (light field), and the angle of view (angle of view). The electrical layer can cause the magnitude, density, distribution, or tendency to change of at least one of voltage, resistance, current, and capacitance between any set of opposite sides of the contact layer. The constituent materials of the contact layer include oxides, conductive oxides, transparent oxides, oxides with a transmittance of 50% or more, metals, relatively light-transmitting metals, metals with a transmittance of 50% or more, organic matter, and inorganic substances. At least one of materials, phosphors, phosphors, ceramics, semiconductors, doped semiconductors, and undoped semiconductors. In some applications, the material of the contact layer is at least one of indium tin oxide, cadmium tin oxide, antimony tin oxide, indium zinc oxide, zinc aluminum oxide, and zinc tin oxide. If it is a relatively light-transmitting metal, its thickness is about 0.005 μm to 0.6 μm.
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例,但凡是未脱离本发明技术方案内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone familiar with this field Those skilled in the art, without departing from the scope of the technical solution of the present invention, may use the technical content disclosed above to make some changes or modify them into equivalent embodiments with equivalent changes, but as long as they do not depart from the technical solution of the present invention, the Technical Essence Any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solution of the present invention.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105742418A (en) * | 2016-03-18 | 2016-07-06 | 华灿光电股份有限公司 | Light-emitting diode chip and preparation method thereof |
CN108847440A (en) * | 2015-04-22 | 2018-11-20 | 株式会社流明斯 | Light emitting device packaging |
CN110047865A (en) * | 2013-09-03 | 2019-07-23 | 晶元光电股份有限公司 | Light-emitting component with multiple light emitting structures |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020070386A1 (en) * | 1999-12-22 | 2002-06-13 | Krames Michael R. | III-nitride light-emitting device with increased light generating capability |
US20080252212A1 (en) * | 2004-09-09 | 2008-10-16 | Toyoda Gosei Co., Ltd. | Solid state device and light-emitting element |
JP2008288548A (en) * | 2007-04-16 | 2008-11-27 | Toyoda Gosei Co Ltd | Semiconductor light emitting device |
CN102024891A (en) * | 2009-09-18 | 2011-04-20 | 丰田合成株式会社 | Light-emitting element |
-
2012
- 2012-03-23 CN CN201210081404.9A patent/CN102916102B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020070386A1 (en) * | 1999-12-22 | 2002-06-13 | Krames Michael R. | III-nitride light-emitting device with increased light generating capability |
US20080252212A1 (en) * | 2004-09-09 | 2008-10-16 | Toyoda Gosei Co., Ltd. | Solid state device and light-emitting element |
JP2008288548A (en) * | 2007-04-16 | 2008-11-27 | Toyoda Gosei Co Ltd | Semiconductor light emitting device |
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