CN102912419A - Zone-melting furnace upper shaft with water cooling function - Google Patents
Zone-melting furnace upper shaft with water cooling function Download PDFInfo
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- CN102912419A CN102912419A CN2012103493124A CN201210349312A CN102912419A CN 102912419 A CN102912419 A CN 102912419A CN 2012103493124 A CN2012103493124 A CN 2012103493124A CN 201210349312 A CN201210349312 A CN 201210349312A CN 102912419 A CN102912419 A CN 102912419A
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- main shaft
- inner core
- melting furnace
- spindle
- water
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Abstract
The invention relates to non-metal crystal manufacturing equipment, and aims to provide a zone-melting furnace upper shaft with a water cooling function. The zone-melting furnace upper shaft comprises a cylindrical spindle and a hanging tray; the spindle is hollow, an upper end cover is arranged at the upper end of the spindle, and a spindle inner core is arranged at the lower end of the spindle; the bottom edge of the spindle inner core is connected with the bottom edge of the spindle, and a main body of the spindle inner core extends into the spindle and is in close fit with the inner wall of the spindle; the bottom of the spindle inner core is closed by a lower end cover, a sheath mandrel penetrates through the center of the lower end cover, one end of the sheath mandrel is connected to the center of the spindle inner core, and the other end of the sheath mandrel is connected to the center of the hanging tray; and a water inlet channel and a water outlet channel are arranged on the upper end cover, the water inlet channel or the water outlet channel is connected with a steel water pipe, and the other end of the steel water pipe extends to the upper end of the spindle inner core. The zone-melting furnace upper shaft is provided with an excellent water cooling system, stable movement of the upper shaft can be guaranteed, influence of fusion of polycrystalline materials to the temperature of the upper shaft during crystal pulling can be effectively reduced, and a sealing part is protected.
Description
Technical field
The invention relates to a kind of nonmetal crystal producing apparatus, particularly axle on a kind of zone melting furnace that possesses the water cooling function.
Background technology
Zone melting furnace is a kind of novel monocrystalline silicon growing furnace, and it utilizes coil heats polysilicon bar, makes it partial melting, and uses the single crystal seed welding from the below, makes monocrystalline thereby draw.Axle is the transmission rig of polycrystal rotation, lifting on the zone melting furnace, and body of heater is an annular seal space, and high voltage protective gas is filled in inside, and the drive system of upper axle is positioned at the body of heater outside, and therefore upper axle rotation, up-and-down movement have proposed very high requirement to the stopping property of axle and body of heater.The sealing member of current employing all requires the temperature can not be too high, otherwise will impact sealing effectiveness, even damage sealing member, and zone melting furnace when work, the fusing polysilicon can be a large amount of to ambient radiation heat, cause the axle temperature degree to raise, may damage sealing member, therefore an effective water-cooling system is very necessary to upper axle.
Summary of the invention
Main purpose of the present invention is to overcome deficiency of the prior art, and axle on a kind of zone melting furnace with good water-cooling system is provided.For solving the problems of the technologies described above, solution of the present invention is:
Axle on a kind of zone melting furnace that possesses the water cooling function is provided, comprises cylindric main shaft, and the bridging dish, described main shaft is hollow form, and upper end cover is established in its upper end, and the main shaft inner core is established in its bottom; The base of main shaft inner core and the base of main shaft join, its main part stretch to main shaft inner and and the inwall of main shaft between closely cooperate; The bottom of main shaft inner core is sealed by lower end cover, and a sheath mandrel passes the lower end cover center, and one is connected to the center of main shaft inner core, and the other end then is connected to the center of bridging dish; Described upper end cover is provided with water entry and water exit, and water entry or water exit and a water flowing steel pipe join, and the other end of water flowing steel pipe extends to main shaft inner core upper end.
As further improvement, sheathed set nut on the described sheath mandrel, the sheath mandrel between set nut and lower end cover arranges ceramic sheath.
As further improvement, described main shaft inner core upper end is provided with a boss, its upper end and the hole of all offering intercommunication all around, and wherein the hole of upper end and the end of described water flowing steel pipe join.
As further improvement, described bridging dish is fixedly connected with by screw thread with the sheath mandrel.
As further improvement, described sheath mandrel is fixedly connected with by key or holding screw with the main shaft inner core.
As further improvement, establish sealing-ring between the inwall of described main shaft inner core main part and main shaft.
As further improvement, the described water entry upper end cover outside that is connected with water exit connects respectively water service hose.
As further improvement, the external diameter of described main shaft is 80 ~ 160 millimeters, and its internal diameter is 50 ~ 80 millimeters.
Compared with prior art, the invention has the beneficial effects as follows:
Axle has good water-cooling system on this kind zone melting furnace; can guarantee the steady of axle motion, the melting polycrystal is protected sealing member to the impact of upper axle temperature degree in the time of also can effectively reducing crystal pulling; the electric heating that the pottery sheath can completely cut off polycrystal and upper axle system contacts, and safe and reliable crystal pulling condition is provided.
Description of drawings
Fig. 1 is structure iron of the present invention.
Reference numeral among the figure is: 1 upper end cover; 2 water service hoses; 3 sealing-rings; 4 main shafts; 5 water flowing steel pipes; 6 main shaft inner cores; 7 set nuts; 8 ceramic sheaths; 9 sheath mandrels; 10 lower end covers; 11 bridging dishes.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described in further detail:
Axle main shaft 4, main shaft inner core 6, upper end cover 1 and the lower end cover 10 of columnar hollow that take all of on the zone melting furnace among Fig. 1, described upper end cover 1 is installed on main shaft 4 upper ends, main shaft inner core 6 is installed on main shaft 4 bottoms, water flowing steel pipe 5 passes upper end cover 1 and arrives main shaft inner core 6 upper ends, pottery sheath 8 is fixed and is packaged in by lower end cover 10 in the hole of main shaft inner core 6 with sheath mandrel 9 usefulness set nuts 7, and bridging dish 11 is drawn together end for 9 times with the sheath mandrel and fixed with screw thread.
Described upper end cover 1 has water entry and water exit, and the water entry place is equipped with water flowing steel pipe 5, and water entry upper end cover 1 outside that is connected with water exit connects respectively water service hose 5.Described main shaft inner core 6 upper ends have the prosopyle of a vertical direction and the posticum that is interconnected of four horizontal directions, and the prosopyle connects water flowing steel pipe 5.The water cooling system of axle adopts Inlet and outlet water all to walk the mode of main shaft 4 inside on the zone melting furnace, the severe environment of main shaft 4 outsides (being that body of heater is inner) High Temperature High Pressure have been avoided, and water channel is without the dead angle, and current can not affect main shaft 4 motions and Caused Vibration etc. uniformly from bottom to top.
The external diameter of described main shaft is 80 ~ 160 millimeters, and its internal diameter is 50 ~ 80 millimeters, and main shaft 4 undersized meetings cause linear deformation large, make bumpy motion, the oversize waste that then can cause material, and the weight increase also is not easy to install.
Described sheath mandrel 9 is connected with main shaft inner core 6 usefulness keys or holding screw, and the needed steady rotation of polycrystal to reach thermally equivalent, improves the stability in melting zone during with the assurance crystal pulling.Described sheath mandrel 9 separates with the ceramic sheath 8 of main shaft inner core 6 usefulness, and ceramic sheath 8 is because good thermal insulation and the insulation characterisitic of pottery, axle on the calorifics of the polysilicon complexity of fusing and electrical state affect below can preventing when crystal pulling.Described main shaft inner core 6 and upper end cover 1 usefulness O shape circle and the sealing of main shaft 4 endoporus.Main shaft 4 rotarily drives main shaft inner core 6, main shaft inner core 6 is connected with ceramic sheath 8 by key or holding screw, guarantee that main shaft inner core 6 and ceramic sheath 8 rotate synchronously, drive again with the fixing sheath mandrel 9 of ceramic sheath 8 and rotate, and then drive bridging dish 11 and polycrystal rotation.
During work, water is inputted from the body water-cooling system through water service hose 2, enter from upper end cover 1 top first, arrive main shaft inner core 6 upper ends through water flowing steel pipe 5, and the shunting by main shaft inner core 6 prosopyles and posticum, water steadying is full of the top from main shaft 4 inner bottom along four direction equably, again by upper end cover 1 water exit to upper end cover 1 side water outlet, final process water service hose 2 links to each other with the body water-cooling system again, upper end cover 1 and main shaft inner core 6 usefulness O shapes circle and the sealing of main shaft 4 endoporus.
The rotation of polycrystal relies on main shaft 4 to rotarily drive main shaft inner core 6, main shaft inner core 6 is connected with ceramic sheath 8 by key or holding screw, thereby drive ceramic sheath 8, drive again the sheath inner core 9 of fixing with ceramic sheath 8, bridging dish 11, polycrystal are rotated.
Certainly; this kind possesses that axle is not limited in above-mentioned embodiment on the zone melting furnace of water cooling function, under enlightenment of the present invention, no matter do any variation in its shape or structure; every have a technical scheme identical or similar with the present invention, all within its protection domain.
Claims (8)
1. axle on the zone melting furnace that possesses the water cooling function comprises cylindric main shaft, and the bridging dish, it is characterized in that, described main shaft is hollow form, and upper end cover is established in its upper end, and the main shaft inner core is established in its bottom; The base of main shaft inner core and the base of main shaft join, its main part stretch to main shaft inner and and the inwall of main shaft between closely cooperate; The bottom of main shaft inner core is sealed by lower end cover, and a sheath mandrel passes the lower end cover center, and one is connected to the center of main shaft inner core, and the other end then is connected to the center of bridging dish; Described upper end cover is provided with water entry and water exit, and water entry or water exit and a water flowing steel pipe join, and the other end of water flowing steel pipe extends to main shaft inner core upper end.
2. axle on the zone melting furnace according to claim 1 is characterized in that, sheathed set nut on the described sheath mandrel, and the sheath mandrel between set nut and lower end cover arranges ceramic sheath.
3. axle on the zone melting furnace according to claim 1 is characterized in that, described main shaft inner core upper end is provided with a boss, its upper end and the hole of all offering intercommunication all around, and wherein the hole of upper end and the end of described water flowing steel pipe join.
4. axle to the zone melting furnace described in 3 any one according to claim 1 is characterized in that, described bridging dish is fixedly connected with by screw thread with the sheath mandrel.
5. axle to the zone melting furnace described in 3 any one according to claim 1 is characterized in that, described sheath mandrel is fixedly connected with by key or holding screw with the main shaft inner core.
6. axle to the zone melting furnace described in 3 any one according to claim 1 is characterized in that, establishes sealing-ring between the inwall of described main shaft inner core main part and main shaft.
7. axle to the zone melting furnace described in 3 any one according to claim 1 is characterized in that, the described water entry upper end cover outside that is connected with water exit connects respectively water service hose.
8. axle to a kind of zone melting furnace described in 3 any one according to claim 1 is characterized in that, the external diameter of described main shaft is 80 ~ 160 millimeters, and its internal diameter is 50 ~ 80 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210349312.4A CN102912419B (en) | 2012-09-19 | 2012-09-19 | Zone-melting furnace upper shaft with water cooling function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210349312.4A CN102912419B (en) | 2012-09-19 | 2012-09-19 | Zone-melting furnace upper shaft with water cooling function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102912419A true CN102912419A (en) | 2013-02-06 |
| CN102912419B CN102912419B (en) | 2015-05-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210349312.4A Active CN102912419B (en) | 2012-09-19 | 2012-09-19 | Zone-melting furnace upper shaft with water cooling function |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1119695A (en) * | 1965-05-07 | 1968-07-10 | Siemens Ag | Arrangement for the crucible-free zone-by-zone melting of a crystalline rod |
| BG48522A1 (en) * | 1989-06-12 | 1991-03-15 | Stopansko Ob Metalkhim | Water- cooled shaft |
| CN102517627A (en) * | 2011-12-20 | 2012-06-27 | 北京京仪世纪电子股份有限公司 | Water-cooled shaft structure |
| CN202323101U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Water-cooling shaft capable of operating under high-temperature environment of vacuum equipment for long term |
| CN202849588U (en) * | 2012-09-19 | 2013-04-03 | 浙江晶盛机电股份有限公司 | Zone melting furnace upper shaft with water cooling function |
-
2012
- 2012-09-19 CN CN201210349312.4A patent/CN102912419B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1119695A (en) * | 1965-05-07 | 1968-07-10 | Siemens Ag | Arrangement for the crucible-free zone-by-zone melting of a crystalline rod |
| BG48522A1 (en) * | 1989-06-12 | 1991-03-15 | Stopansko Ob Metalkhim | Water- cooled shaft |
| CN202323101U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Water-cooling shaft capable of operating under high-temperature environment of vacuum equipment for long term |
| CN102517627A (en) * | 2011-12-20 | 2012-06-27 | 北京京仪世纪电子股份有限公司 | Water-cooled shaft structure |
| CN202849588U (en) * | 2012-09-19 | 2013-04-03 | 浙江晶盛机电股份有限公司 | Zone melting furnace upper shaft with water cooling function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102912419B (en) | 2015-05-20 |
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