CN102912419B - Zone-melting furnace upper shaft with water cooling function - Google Patents
Zone-melting furnace upper shaft with water cooling function Download PDFInfo
- Publication number
- CN102912419B CN102912419B CN201210349312.4A CN201210349312A CN102912419B CN 102912419 B CN102912419 B CN 102912419B CN 201210349312 A CN201210349312 A CN 201210349312A CN 102912419 B CN102912419 B CN 102912419B
- Authority
- CN
- China
- Prior art keywords
- main shaft
- inner core
- melting furnace
- spindle
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Furnace Details (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to non-metal crystal manufacturing equipment, and aims to provide a zone-melting furnace upper shaft with a water cooling function. The zone-melting furnace upper shaft comprises a cylindrical spindle and a hanging tray; the spindle is hollow, an upper end cover is arranged at the upper end of the spindle, and a spindle inner core is arranged at the lower end of the spindle; the bottom edge of the spindle inner core is connected with the bottom edge of the spindle, and a main body of the spindle inner core extends into the spindle and is in close fit with the inner wall of the spindle; the bottom of the spindle inner core is closed by a lower end cover, a sheath mandrel penetrates through the center of the lower end cover, one end of the sheath mandrel is connected to the center of the spindle inner core, and the other end of the sheath mandrel is connected to the center of the hanging tray; and a water inlet channel and a water outlet channel are arranged on the upper end cover, the water inlet channel or the water outlet channel is connected with a steel water pipe, and the other end of the steel water pipe extends to the upper end of the spindle inner core. The zone-melting furnace upper shaft is provided with an excellent water cooling system, stable movement of the upper shaft can be guaranteed, influence of fusion of polycrystalline materials to the temperature of the upper shaft during crystal pulling can be effectively reduced, and a sealing part is protected.
Description
Technical field
The invention relates to a kind of nonmetal crystal producing apparatus, particularly axle on a kind of zone melting furnace possessing water cooling function.
Background technology
Zone melting furnace is a kind of novel monocrystalline silicon growing furnace, and it utilizes coil heats polysilicon bar, makes it partial melting, and uses single crystal seed welding from below, thus draws and make monocrystalline.On zone melting furnace, axle is that polycrystal rotates, the transmission rig of lifting, and body of heater is an annular seal space, and high voltage protective gas is filled in inside, and the drive system of upper axle is positioned at body of heater outside, therefore go up axle rotation, the stopping property of up-and-down movement to axle and body of heater propose very high requirement.The sealing member of current employing all requires that temperature can not be too high, otherwise will impact sealing effectiveness, even damage sealing member, and during zone melting furnace work, fusing polysilicon can be a large amount of to ambient radiation heat, cause axle temperature degree to raise, may damage sealing member, therefore an effective water-cooling system is very necessary to upper axle.
Summary of the invention
Main purpose of the present invention is to overcome deficiency of the prior art, provides axle on a kind of zone melting furnace with excellent water-cooling system.For solving the problems of the technologies described above, solution of the present invention is:
Axle on a kind of zone melting furnace possessing water cooling function is provided, comprises cylindric main shaft, and bridging dish, described main shaft is hollow form, and upper end cover is established in its upper end, and main shaft inner core is established in its bottom; The base of main shaft inner core connects with the base of main shaft, its main part stretch to main shaft inner and and closely cooperate between the inwall of main shaft; The bottom of main shaft inner core is closed by lower end cover, and a sheath mandrel is through lower end cover center, and one is connected to the center of main shaft inner core, and the other end is then connected to the center of bridging dish; Described upper end cover is provided with water entry and water exit, and water entry or water exit connect with a water flowing steel pipe, and the other end of water flowing steel pipe extends to main shaft inner core upper end.
As further improvement, sheathed set nut on described sheath mandrel, the sheath mandrel between set nut and lower end cover arranges ceramic sheath.
As further improvement, described main shaft inner core upper end is provided with a boss, and its upper end and surrounding all offer the hole of intercommunication, wherein the hole of upper end and the joining distal ends of described water flowing steel pipe.
As further improvement, described bridging dish is fixedly connected with by screw thread with sheath mandrel.
As further improvement, described sheath mandrel is fixedly connected with by key or holding screw with main shaft inner core.
As further improvement, between described main shaft inner core main part and the inwall of main shaft, establish sealing-ring.
As further improvement, described water entry is connected water service hose with water exit respectively in upper end cover outside.
As further improvement, the external diameter of described main shaft is 80 ~ 160 millimeters, and its internal diameter is 50 ~ 80 millimeters.
Compared with prior art, the invention has the beneficial effects as follows:
On this kind of zone melting furnace, axle has excellent water-cooling system; can ensure that axle moves steady, when also effectively can reduce crystal pulling, melting polycrystal is on the impact of upper axle temperature degree, protection sealing member; the electric heating that ceramic sheath can completely cut off polycrystal and upper axle system contacts, and provides safe and reliable crystal pulling condition.
Accompanying drawing explanation
Fig. 1 is structure iron of the present invention.
Reference numeral in figure is: 1 upper end cover; 2 water service hoses; 3 sealing-rings; 4 main shafts; 5 water flowing steel pipes; 6 main shaft inner cores; 7 set nuts; 8 ceramic sheath; 9 sheath mandrels; 10 lower end covers; 11 bridging dishes.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is described in further detail:
On zone melting furnace in Fig. 1, axle takes all of the main shaft 4 of columnar hollow, main shaft inner core 6, upper end cover 1 and lower end cover 10, described upper end cover 1 is installed on main shaft 4 upper end, main shaft inner core 6 is installed on main shaft 4 bottom, water flowing steel pipe 5 arrives main shaft inner core 6 upper end through upper end cover 1, ceramic sheath 8 is fixed with sheath mandrel 9 set nut 7 and is packaged in by lower end cover 10 in the hole of main shaft inner core 6, and bridging dish 11 and sheath mandrel are drawn together end screw thread for 9 times and fixed.
Described upper end cover 1 has water entry and water exit, and water entry place is provided with water flowing steel pipe 5, and water entry is connected water service hose 5 with water exit respectively in upper end cover 1 outside.Described main shaft inner core 6 upper end has the prosopyle of a vertical direction and the posticum be interconnected of four horizontal directions, and prosopyle connects water flowing steel pipe 5.On zone melting furnace, the water cooling system of axle adopts Inlet and outlet water all to walk the mode of main shaft 4 inside, avoid the severe environment of main shaft 4 outside (i.e. furnace interior) High Temperature High Pressure, and water channel is without dead angle, uniform current can not affect main shaft 4 and move and cause vibration etc. from bottom to top.
The external diameter of described main shaft is 80 ~ 160 millimeters, and its internal diameter is 50 ~ 80 millimeters, and the undersized meeting of main shaft 4 causes linear deformation large, makes bumpy motion, oversize, can cause the waste of material, and weight increase is also not easy to install.
Described sheath mandrel 9 is connected with main shaft inner core 6 key or holding screw, steady rotation during to ensure crystal pulling required for polycrystal, to reach thermally equivalent, improves the stability in melting zone.Described sheath mandrel 9 and main shaft inner core 6 ceramic sheath 8 separate, and ceramic sheath 8, due to the excellent thermal insulation of pottery and insulation characterisitic, can prevent the calorifics of the polysilicon complexity of below fusing and electrical state from affecting axle when crystal pulling.Described main shaft inner core 6 and upper end cover 1 O shape circle seal with main shaft 4 endoporus.Main shaft 4 rotarily drives main shaft inner core 6, main shaft inner core 6 is connected with ceramic sheath 8 by key or holding screw, ensure main shaft inner core 6 and ceramic sheath 8 synchronous axial system, then drive the sheath mandrel 9 fixing with ceramic sheath 8 to rotate, and then drive bridging dish 11 and polycrystal rotation.
During work, water inputs from body water-cooling system through water service hose 2, first enter from upper end cover 1 top, main shaft inner core 6 upper end is arrived through water flowing steel pipe 5, and passing through the shunting of main shaft inner core 6 prosopyle and posticum, water steadying is full of top from main shaft 4 inner bottom along four direction equably, then by upper end cover 1 water exit to upper end cover 1 side water outlet, eventually pass through water service hose 2 to be connected with body water-cooling system, upper end cover 1 and main shaft inner core 6 O shape circle seal with main shaft 4 endoporus again.
The rotation of polycrystal relies on main shaft 4 to rotarily drive main shaft inner core 6, main shaft inner core 6 is connected with ceramic sheath 8 by key or holding screw, thus drive ceramic sheath 8, then drive the sheath inner core 9 fixed with ceramic sheath 8, finally make bridging dish 11, polycrystal rotate.
Certainly; on the zone melting furnace that this kind possesses water cooling function, axle is not limited in above-mentioned embodiment, under enlightenment of the present invention, no matter do any change in its shape or structure; every have the technical scheme identical or similar with the present invention, all within its protection domain.
Claims (8)
1. an axle on the zone melting furnace possessing water cooling function, comprises cylindric main shaft, and bridging dish, and it is characterized in that, described main shaft is hollow form, and upper end cover is established in its upper end, and main shaft inner core is established in its bottom; The base of main shaft inner core connects with the base of main shaft, its main part stretch to main shaft inner and and closely cooperate between the inwall of main shaft; The bottom of main shaft inner core is closed by lower end cover, and a sheath mandrel is through lower end cover center, and one is connected to the center of main shaft inner core, and the other end is then connected to the center of bridging dish; Described upper end cover is provided with water entry and water exit, and water entry or water exit connect with a water flowing steel pipe, and the other end of water flowing steel pipe extends to main shaft inner core upper end.
2. axle on zone melting furnace according to claim 1, is characterized in that, sheathed set nut on described sheath mandrel, and the sheath mandrel between set nut and lower end cover arranges ceramic sheath.
3. axle on zone melting furnace according to claim 1, is characterized in that, described main shaft inner core upper end is provided with a boss, and its upper end and surrounding all offer the hole of intercommunication, wherein the hole of upper end and the joining distal ends of described water flowing steel pipe.
4. according to axle on the zone melting furnace described in claims 1 to 3 any one, it is characterized in that, described bridging dish is fixedly connected with by screw thread with sheath mandrel.
5. according to axle on the zone melting furnace described in claims 1 to 3 any one, it is characterized in that, described sheath mandrel is fixedly connected with by key or holding screw with main shaft inner core.
6. according to axle on the zone melting furnace described in claims 1 to 3 any one, it is characterized in that, between described main shaft inner core main part and the inwall of main shaft, establish sealing-ring.
7., according to axle on the zone melting furnace described in claims 1 to 3 any one, it is characterized in that, described water entry is connected water service hose with water exit respectively in upper end cover outside.
8. according to axle on a kind of zone melting furnace described in claims 1 to 3 any one, it is characterized in that, the external diameter of described main shaft is 80 ~ 160 millimeters, and its internal diameter is 50 ~ 80 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210349312.4A CN102912419B (en) | 2012-09-19 | 2012-09-19 | Zone-melting furnace upper shaft with water cooling function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210349312.4A CN102912419B (en) | 2012-09-19 | 2012-09-19 | Zone-melting furnace upper shaft with water cooling function |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102912419A CN102912419A (en) | 2013-02-06 |
| CN102912419B true CN102912419B (en) | 2015-05-20 |
Family
ID=47610983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210349312.4A Active CN102912419B (en) | 2012-09-19 | 2012-09-19 | Zone-melting furnace upper shaft with water cooling function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102912419B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1119695A (en) * | 1965-05-07 | 1968-07-10 | Siemens Ag | Arrangement for the crucible-free zone-by-zone melting of a crystalline rod |
| BG48522A1 (en) * | 1989-06-12 | 1991-03-15 | Stopansko Ob Metalkhim | Water- cooled shaft |
| CN102517627A (en) * | 2011-12-20 | 2012-06-27 | 北京京仪世纪电子股份有限公司 | Water-cooled shaft structure |
| CN202323101U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Water-cooling shaft capable of operating under high-temperature environment of vacuum equipment for long term |
| CN202849588U (en) * | 2012-09-19 | 2013-04-03 | 浙江晶盛机电股份有限公司 | Zone melting furnace upper shaft with water cooling function |
-
2012
- 2012-09-19 CN CN201210349312.4A patent/CN102912419B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1119695A (en) * | 1965-05-07 | 1968-07-10 | Siemens Ag | Arrangement for the crucible-free zone-by-zone melting of a crystalline rod |
| BG48522A1 (en) * | 1989-06-12 | 1991-03-15 | Stopansko Ob Metalkhim | Water- cooled shaft |
| CN202323101U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Water-cooling shaft capable of operating under high-temperature environment of vacuum equipment for long term |
| CN102517627A (en) * | 2011-12-20 | 2012-06-27 | 北京京仪世纪电子股份有限公司 | Water-cooled shaft structure |
| CN202849588U (en) * | 2012-09-19 | 2013-04-03 | 浙江晶盛机电股份有限公司 | Zone melting furnace upper shaft with water cooling function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102912419A (en) | 2013-02-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102912419B (en) | Zone-melting furnace upper shaft with water cooling function | |
| CN202849588U (en) | Zone melting furnace upper shaft with water cooling function | |
| CN101328606B (en) | Polysilicon ingot furnace synchronous hoisting device | |
| KR101249808B1 (en) | Device and method for manufacturing high-purity polycrystalline silicon for solar cell | |
| CN107478059A (en) | A kind of automation equipment of swing sweetening process of being quenched for metal | |
| CN201678765U (en) | Combined electrode insulation ring | |
| CN206957649U (en) | Reducing thick oil viscosity heater and reducing thick oil viscosity heating system | |
| CN206341444U (en) | A kind of pre-heater | |
| CN202576639U (en) | Overall single crystal furnace | |
| CN205668997U (en) | A kind of bilayer sleeve bonding machine of band nanometer film | |
| KR101756684B1 (en) | Single crystal production apparatus and single crystal production method | |
| CN109987820A (en) | A kind of glass electric furnace molybdenum electrode device | |
| CN203923441U (en) | The single crystal growing furnace of built-in gas barrier | |
| JP6187486B2 (en) | Single crystal manufacturing equipment | |
| CN202968741U (en) | Lower-shaft moving mechanism for zone-melting single-crystal furnace | |
| CN211009902U (en) | High-temperature flue gas stop valve | |
| CN205099573U (en) | Energy -conserving wire drawing stove in glass fiber production | |
| CN207094022U (en) | A kind of interpolation type double-walled electric smelting bend pipe tools | |
| CN203382855U (en) | Sleeve-type graphite heater for GaAs crystal growth | |
| CN105884178B (en) | A kind of bilayer sleeve bonding machine with nanometer film | |
| CN206553654U (en) | The overflow safeguard structure of polycrystalline silicon ingot or purifying furnace after a kind of upgrading | |
| CN102864491B (en) | A kind of primary heater unit and device translation system | |
| CN203333518U (en) | Urea melting tank for producing high-tower long-acting compound fertilizer | |
| CN104710106A (en) | Induction furnace for collapsar of optical fiber preforming bars | |
| CN107100588A (en) | Reducing thick oil viscosity heater and reducing thick oil viscosity heating system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |