CN102903662A - 隔离层刻蚀方法 - Google Patents
隔离层刻蚀方法 Download PDFInfo
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- CN102903662A CN102903662A CN2011102148955A CN201110214895A CN102903662A CN 102903662 A CN102903662 A CN 102903662A CN 2011102148955 A CN2011102148955 A CN 2011102148955A CN 201110214895 A CN201110214895 A CN 201110214895A CN 102903662 A CN102903662 A CN 102903662A
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CN2011102148955A CN102903662A (zh) | 2011-07-29 | 2011-07-29 | 隔离层刻蚀方法 |
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CN2011102148955A CN102903662A (zh) | 2011-07-29 | 2011-07-29 | 隔离层刻蚀方法 |
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CN102903662A true CN102903662A (zh) | 2013-01-30 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105161434A (zh) * | 2015-06-29 | 2015-12-16 | 上海华虹宏力半导体制造有限公司 | Pad刻蚀工艺方法 |
CN105976841A (zh) * | 2016-05-11 | 2016-09-28 | 浙江工业大学 | 一种无机材料光盘的数据记录方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6107188A (en) * | 1999-08-16 | 2000-08-22 | Taiwan Semiconductor Manufacturing Company | Passivation method for copper process |
CN1725465A (zh) * | 2004-07-22 | 2006-01-25 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的制造方法 |
CN101752290A (zh) * | 2008-12-03 | 2010-06-23 | 中芯国际集成电路制造(上海)有限公司 | 浅沟槽隔离结构的形成方法 |
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2011
- 2011-07-29 CN CN2011102148955A patent/CN102903662A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6107188A (en) * | 1999-08-16 | 2000-08-22 | Taiwan Semiconductor Manufacturing Company | Passivation method for copper process |
CN1725465A (zh) * | 2004-07-22 | 2006-01-25 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的制造方法 |
CN101752290A (zh) * | 2008-12-03 | 2010-06-23 | 中芯国际集成电路制造(上海)有限公司 | 浅沟槽隔离结构的形成方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105161434A (zh) * | 2015-06-29 | 2015-12-16 | 上海华虹宏力半导体制造有限公司 | Pad刻蚀工艺方法 |
CN105976841A (zh) * | 2016-05-11 | 2016-09-28 | 浙江工业大学 | 一种无机材料光盘的数据记录方法 |
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C06 | Publication | ||
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C10 | Entry into substantive examination | ||
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140103 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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TA01 | Transfer of patent application right |
Effective date of registration: 20140103 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Applicant before: Shanghai Huahong NEC Electronics Co., Ltd. |
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C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130130 |